USD616391S1 - Pedestal of heat insulating cylinder for manufacturing semiconductor wafers - Google Patents

Pedestal of heat insulating cylinder for manufacturing semiconductor wafers Download PDF

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Publication number
USD616391S1
USD616391S1 US29/342,850 US34285009F USD616391S US D616391 S1 USD616391 S1 US D616391S1 US 34285009 F US34285009 F US 34285009F US D616391 S USD616391 S US D616391S
Authority
US
United States
Prior art keywords
pedestal
heat insulating
semiconductor wafers
manufacturing semiconductor
insulating cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/342,850
Inventor
Izumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SATO, IZUMI
Application granted granted Critical
Publication of USD616391S1 publication Critical patent/USD616391S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2; and,
FIG. 9 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.
The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Claims (1)

  1. The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
US29/342,850 2009-03-06 2009-09-02 Pedestal of heat insulating cylinder for manufacturing semiconductor wafers Expired - Lifetime USD616391S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009004985 2009-03-06
JP2009-004985 2009-03-06

Publications (1)

Publication Number Publication Date
USD616391S1 true USD616391S1 (en) 2010-05-25

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ID=42184696

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/342,850 Expired - Lifetime USD616391S1 (en) 2009-03-06 2009-09-02 Pedestal of heat insulating cylinder for manufacturing semiconductor wafers

Country Status (2)

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US (1) USD616391S1 (en)
TW (1) TWD137193S1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090321372A1 (en) * 2008-06-30 2009-12-31 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer support
US20100098519A1 (en) * 2008-10-17 2010-04-22 Memc Electronic Materials, Inc. Support for a semiconductor wafer in a high temperature environment
US20130092595A1 (en) * 2011-10-14 2013-04-18 Epistar Corporation Wafer carrier
USD763807S1 (en) * 2014-05-22 2016-08-16 Hzo, Inc. Boat for a deposition apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090321372A1 (en) * 2008-06-30 2009-12-31 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer support
US8042697B2 (en) * 2008-06-30 2011-10-25 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer support
US20120077138A1 (en) * 2008-06-30 2012-03-29 Memc Electronic Materials, Inc. Low Thermal Mass Semiconductor Wafer Boat
US8220646B2 (en) 2008-06-30 2012-07-17 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer plate
US8220647B2 (en) * 2008-06-30 2012-07-17 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer boat
US20100098519A1 (en) * 2008-10-17 2010-04-22 Memc Electronic Materials, Inc. Support for a semiconductor wafer in a high temperature environment
US20130092595A1 (en) * 2011-10-14 2013-04-18 Epistar Corporation Wafer carrier
US9691668B2 (en) * 2011-10-14 2017-06-27 Epistar Corporation Wafer carrier
USD763807S1 (en) * 2014-05-22 2016-08-16 Hzo, Inc. Boat for a deposition apparatus

Also Published As

Publication number Publication date
TWD137193S1 (en) 2010-10-01

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