USD568914S1 - Substrate support lift pin - Google Patents

Substrate support lift pin Download PDF

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Publication number
USD568914S1
USD568914S1 US29/256,744 US25674406F USD568914S US D568914 S1 USD568914 S1 US D568914S1 US 25674406 F US25674406 F US 25674406F US D568914 S USD568914 S US D568914S
Authority
US
United States
Prior art keywords
lift pin
substrate support
support lift
shoulder section
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/256,744
Inventor
David T. Or
Keith K. Koai
Hiroyuki Takahama
Takahiro Ito
Koji Ota
Hiroshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/256,744 priority Critical patent/USD568914S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OR, DAVID T., SATO, HIROSHI, ITO, TAKAHIRO, KOAI, KEITH K., OTA, KOJI, TAKAHAMA, HIROYUKI
Application granted granted Critical
Publication of USD568914S1 publication Critical patent/USD568914S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

A lift pin for selectively spacing a substrate from a substrate support is provided. Embodiments of the lift pin include a lift pin shaft and at least one larger diameter shoulder section symmetrical the lift pin shaft that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section reduces pin scratching, particle generation, and component wear, thus increasing the life of the lift pin. The shoulder section also minimizes sticking of the lift pin, thus enhancing movement of the lift pin through the guide hole. The shoulder section may be made of a different material than the lift pin shaft and/or an outer surface of the shoulder section may be machined to a micro-smooth surface. An upper portion of the lift pin also includes a tapered portion configured to provide a stop for the lift pin to prevent the lift pin from falling through the guide hole in the substrate support.
FIG. 1 is a schematic side view of one embodiment of a lift pin.
FIG. 2 is a top view of FIG. 1; and,
FIG. 3 is a cross-sectional view taken along line 3—3 of FIG. 1.

Claims (1)

    CLAIM
  1. The ornamental design for a substrate support lift pin, as shown and described.
US29/256,744 2002-09-10 2006-03-24 Substrate support lift pin Expired - Lifetime USD568914S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/256,744 USD568914S1 (en) 2002-09-10 2006-03-24 Substrate support lift pin

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24100502 2002-09-10
US12045605 2005-05-03
US29/256,744 USD568914S1 (en) 2002-09-10 2006-03-24 Substrate support lift pin

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US11/120,456 Continuation US20050194100A1 (en) 2002-09-10 2005-05-03 Reduced friction lift pin

Publications (1)

Publication Number Publication Date
USD568914S1 true USD568914S1 (en) 2008-05-13

Family

ID=39362114

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/256,744 Expired - Lifetime USD568914S1 (en) 2002-09-10 2006-03-24 Substrate support lift pin

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US (1) USD568914S1 (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090317964A1 (en) * 2008-06-20 2009-12-24 Varian Semiconductor Equipment Associates, Inc. Platen for reducing particle contamination on a substrate and a method thereof
US20090314211A1 (en) * 2008-06-24 2009-12-24 Applied Materials, Inc. Big foot lift pin
USD635597S1 (en) 2008-11-17 2011-04-05 Applied Materials, Inc. Lift pin
USD640715S1 (en) 2008-11-17 2011-06-28 Applied Materials, Inc. Lift pin assembly
USD644618S1 (en) * 2008-10-01 2011-09-06 Aqua Science Corporation Nozzle for cleaning substrate
USD647073S1 (en) * 2008-10-01 2011-10-18 Aqua Science Corporation Nozzle for cleaning substrate
USD650818S1 (en) 2008-12-19 2011-12-20 Applied Materials, Inc. Inner lift pin
KR101403327B1 (en) * 2011-12-30 2014-06-09 엘아이지에이디피 주식회사 Apparatus and Method for Processing Substrate
USD774571S1 (en) * 2015-07-23 2016-12-20 Synergy Mouldworks Inc Ejector pin
US10658207B2 (en) 2008-06-20 2020-05-19 Varian Semiconductor Equipment Associates, Inc. Platen for reducing particle contamination on a substrate and a method thereof
USD980884S1 (en) * 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin
US11651990B2 (en) 2019-07-03 2023-05-16 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
USD990534S1 (en) * 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
USD1009817S1 (en) * 2021-09-28 2024-01-02 Applied Materials, Inc. Shadow ring lift pin
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
US12406873B2 (en) * 2021-12-14 2025-09-02 Asm Ip Holding B.V. Lift pin assembly

Citations (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4289522A (en) * 1980-07-03 1981-09-15 Corning Glass Works Support member for an optical waveguide preform
EP0284343B1 (en) 1987-03-23 1990-11-28 Westech Systems, Inc. Polishing apparatus
JPH07176472A (en) 1993-12-20 1995-07-14 Dainippon Screen Mfg Co Ltd Substrate heating device
US5762544A (en) 1995-10-27 1998-06-09 Applied Materials, Inc. Carrier head design for a chemical mechanical polishing apparatus
US5796066A (en) 1996-03-29 1998-08-18 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
US5848670A (en) 1996-12-04 1998-12-15 Applied Materials, Inc. Lift pin guidance apparatus
US5879128A (en) 1996-07-24 1999-03-09 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
US5900062A (en) 1995-12-28 1999-05-04 Applied Materials, Inc. Lift pin for dechucking substrates
US6120609A (en) 1996-10-25 2000-09-19 Applied Materials, Inc. Self-aligning lift mechanism
US6146504A (en) 1998-05-21 2000-11-14 Applied Materials, Inc. Substrate support and lift apparatus and method
EP0592017B1 (en) 1987-03-31 2001-09-12 ASM America, Inc. Use of rotatable substrate supporting mechanism with temperature sensing device in chemical vapor deposition equipment
US20020011204A1 (en) 2000-02-28 2002-01-31 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
EP1202330A2 (en) 2000-10-26 2002-05-02 Applied Materials, Inc. De-coupled wafer lift and five axis adjustable heater lift system for CVD process chamber
US20020121312A1 (en) 2001-03-01 2002-09-05 Dmitry Lubomirsky Lift pin alignment and operation methods and apparatus
USD469007S1 (en) 2002-06-07 2003-01-21 Shiu-Mei Chen Screw
US6511368B1 (en) 1999-10-27 2003-01-28 Strasbaugh Spherical drive assembly for chemical mechanical planarization
US20030075387A1 (en) 2001-10-22 2003-04-24 Chung-Chiang Wang Wafer loading device
US20030205329A1 (en) * 2000-02-28 2003-11-06 Rudolf Gujer Semiconductor wafer support lift-pin assembly
US20040045509A1 (en) * 2002-09-10 2004-03-11 Or David T. Reduced friction lift pin
US20040219006A1 (en) * 2003-05-01 2004-11-04 Applied Materials, Inc. Lift pin assembly for substrate processing
USD502644S1 (en) 1998-06-25 2005-03-08 Southco, Inc. Captive screw
USD504313S1 (en) * 2002-02-20 2005-04-26 Airbus Deutschland Gmbh Lockbolt
USD506922S1 (en) 2003-08-07 2005-07-05 Larry Simon Screw
US20070131173A1 (en) * 1995-09-01 2007-06-14 Asm America, Inc. Wafer support system
US20070157466A1 (en) * 2005-12-27 2007-07-12 Nhk Spring Co., Ltd. Substrate supporting apparatus and manufacturing method therefor

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4289522A (en) * 1980-07-03 1981-09-15 Corning Glass Works Support member for an optical waveguide preform
EP0284343B1 (en) 1987-03-23 1990-11-28 Westech Systems, Inc. Polishing apparatus
EP0592017B1 (en) 1987-03-31 2001-09-12 ASM America, Inc. Use of rotatable substrate supporting mechanism with temperature sensing device in chemical vapor deposition equipment
JPH07176472A (en) 1993-12-20 1995-07-14 Dainippon Screen Mfg Co Ltd Substrate heating device
US20070131173A1 (en) * 1995-09-01 2007-06-14 Asm America, Inc. Wafer support system
US5762544A (en) 1995-10-27 1998-06-09 Applied Materials, Inc. Carrier head design for a chemical mechanical polishing apparatus
US5900062A (en) 1995-12-28 1999-05-04 Applied Materials, Inc. Lift pin for dechucking substrates
US5796066A (en) 1996-03-29 1998-08-18 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
US5879128A (en) 1996-07-24 1999-03-09 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
US6120609A (en) 1996-10-25 2000-09-19 Applied Materials, Inc. Self-aligning lift mechanism
US5848670A (en) 1996-12-04 1998-12-15 Applied Materials, Inc. Lift pin guidance apparatus
US6146504A (en) 1998-05-21 2000-11-14 Applied Materials, Inc. Substrate support and lift apparatus and method
USD502644S1 (en) 1998-06-25 2005-03-08 Southco, Inc. Captive screw
US6511368B1 (en) 1999-10-27 2003-01-28 Strasbaugh Spherical drive assembly for chemical mechanical planarization
US20020011204A1 (en) 2000-02-28 2002-01-31 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
US20030205329A1 (en) * 2000-02-28 2003-11-06 Rudolf Gujer Semiconductor wafer support lift-pin assembly
US6958098B2 (en) * 2000-02-28 2005-10-25 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
EP1202330A2 (en) 2000-10-26 2002-05-02 Applied Materials, Inc. De-coupled wafer lift and five axis adjustable heater lift system for CVD process chamber
US20020121312A1 (en) 2001-03-01 2002-09-05 Dmitry Lubomirsky Lift pin alignment and operation methods and apparatus
US20030075387A1 (en) 2001-10-22 2003-04-24 Chung-Chiang Wang Wafer loading device
USD504313S1 (en) * 2002-02-20 2005-04-26 Airbus Deutschland Gmbh Lockbolt
USD469007S1 (en) 2002-06-07 2003-01-21 Shiu-Mei Chen Screw
US6887317B2 (en) * 2002-09-10 2005-05-03 Applied Materials, Inc. Reduced friction lift pin
US20050194100A1 (en) * 2002-09-10 2005-09-08 Applied Materials, Inc. Reduced friction lift pin
US20040045509A1 (en) * 2002-09-10 2004-03-11 Or David T. Reduced friction lift pin
US20040219006A1 (en) * 2003-05-01 2004-11-04 Applied Materials, Inc. Lift pin assembly for substrate processing
US7204888B2 (en) * 2003-05-01 2007-04-17 Applied Materials, Inc. Lift pin assembly for substrate processing
USD506922S1 (en) 2003-08-07 2005-07-05 Larry Simon Screw
US20070157466A1 (en) * 2005-12-27 2007-07-12 Nhk Spring Co., Ltd. Substrate supporting apparatus and manufacturing method therefor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PCT International Search Report for PCT/US04/007164, Dated Apr. 18, 2005.
PCT Written Opinion for PCT/US04/007164, Dated Apr. 18, 2005.

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10658207B2 (en) 2008-06-20 2020-05-19 Varian Semiconductor Equipment Associates, Inc. Platen for reducing particle contamination on a substrate and a method thereof
US8681472B2 (en) * 2008-06-20 2014-03-25 Varian Semiconductor Equipment Associates, Inc. Platen ground pin for connecting substrate to ground
US20090317964A1 (en) * 2008-06-20 2009-12-24 Varian Semiconductor Equipment Associates, Inc. Platen for reducing particle contamination on a substrate and a method thereof
US20090314211A1 (en) * 2008-06-24 2009-12-24 Applied Materials, Inc. Big foot lift pin
USD644618S1 (en) * 2008-10-01 2011-09-06 Aqua Science Corporation Nozzle for cleaning substrate
USD647073S1 (en) * 2008-10-01 2011-10-18 Aqua Science Corporation Nozzle for cleaning substrate
USD635597S1 (en) 2008-11-17 2011-04-05 Applied Materials, Inc. Lift pin
USD640715S1 (en) 2008-11-17 2011-06-28 Applied Materials, Inc. Lift pin assembly
USD650818S1 (en) 2008-12-19 2011-12-20 Applied Materials, Inc. Inner lift pin
KR101403327B1 (en) * 2011-12-30 2014-06-09 엘아이지에이디피 주식회사 Apparatus and Method for Processing Substrate
USD774571S1 (en) * 2015-07-23 2016-12-20 Synergy Mouldworks Inc Ejector pin
US11651990B2 (en) 2019-07-03 2023-05-16 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
US11984345B2 (en) 2019-07-03 2024-05-14 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
USD990534S1 (en) * 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system
USD980884S1 (en) * 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin
USD1009817S1 (en) * 2021-09-28 2024-01-02 Applied Materials, Inc. Shadow ring lift pin
US12406873B2 (en) * 2021-12-14 2025-09-02 Asm Ip Holding B.V. Lift pin assembly

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