USD527751S1 - Transfer-chamber - Google Patents
Transfer-chamber Download PDFInfo
- Publication number
- USD527751S1 USD527751S1 US29/217,729 US21772904F USD527751S US D527751 S1 USD527751 S1 US D527751S1 US 21772904 F US21772904 F US 21772904F US D527751 S USD527751 S US D527751S
- Authority
- US
- United States
- Prior art keywords
- chamber
- transfer
- view
- sectional
- process chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
The present article relates to a transfer-chamber of a multi-chamber type semiconductor substrate processing apparatus for a film forming process and other processes for semiconductor substrates and others to be processed. A plurality of process chambers are provided around the transfer-chamber so as to transfer the substrate received from a load-lock chamber to, through a loader-module shown in a reference drawing illustrating a state of usage of the transfer-chamber, the process chambers by means of a vacuum arm provided in the transfer-chamber.
FIG. 1 is a front elevational view of the transfer-chamber;
FIG. 2 is a back elevational view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is 7—7 sectional view shown in FIG. 3.
FIG. 8 is 8—8 sectional view shown in FIG. 3.
FIG. 9 is 9—9 sectional view shown in FIG. 5.
FIG. 10 is a perspective view thereof; and,
FIG. 11 is a reference figure showing a bottom perspective view thereof.
Claims (1)
- The ornamental design for a transfer-chamber, as shown and described.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004015725 | 2004-05-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD527751S1 true USD527751S1 (en) | 2006-09-05 |
Family
ID=36939896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/217,729 Expired - Lifetime USD527751S1 (en) | 2004-05-28 | 2004-11-22 | Transfer-chamber |
Country Status (1)
Country | Link |
---|---|
US (1) | USD527751S1 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD911402S1 (en) * | 2019-07-18 | 2021-02-23 | Illinois Tool Works Inc. | Chamber |
US10998209B2 (en) | 2019-05-31 | 2021-05-04 | Applied Materials, Inc. | Substrate processing platforms including multiple processing chambers |
USD973116S1 (en) * | 2020-11-17 | 2022-12-20 | Applied Materials, Inc. | Mainframe of substrate processing system |
USD973737S1 (en) * | 2020-11-17 | 2022-12-27 | Applied Materials, Inc. | Mainframe of substrate processing system |
US11600507B2 (en) | 2020-09-09 | 2023-03-07 | Applied Materials, Inc. | Pedestal assembly for a substrate processing chamber |
US11610799B2 (en) | 2020-09-18 | 2023-03-21 | Applied Materials, Inc. | Electrostatic chuck having a heating and chucking capabilities |
US11674227B2 (en) | 2021-02-03 | 2023-06-13 | Applied Materials, Inc. | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
US11749542B2 (en) | 2020-07-27 | 2023-09-05 | Applied Materials, Inc. | Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
US11817331B2 (en) | 2020-07-27 | 2023-11-14 | Applied Materials, Inc. | Substrate holder replacement with protective disk during pasting process |
-
2004
- 2004-11-22 US US29/217,729 patent/USD527751S1/en not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10998209B2 (en) | 2019-05-31 | 2021-05-04 | Applied Materials, Inc. | Substrate processing platforms including multiple processing chambers |
USD911402S1 (en) * | 2019-07-18 | 2021-02-23 | Illinois Tool Works Inc. | Chamber |
US11749542B2 (en) | 2020-07-27 | 2023-09-05 | Applied Materials, Inc. | Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
US11817331B2 (en) | 2020-07-27 | 2023-11-14 | Applied Materials, Inc. | Substrate holder replacement with protective disk during pasting process |
US11600507B2 (en) | 2020-09-09 | 2023-03-07 | Applied Materials, Inc. | Pedestal assembly for a substrate processing chamber |
US11610799B2 (en) | 2020-09-18 | 2023-03-21 | Applied Materials, Inc. | Electrostatic chuck having a heating and chucking capabilities |
USD973116S1 (en) * | 2020-11-17 | 2022-12-20 | Applied Materials, Inc. | Mainframe of substrate processing system |
USD973737S1 (en) * | 2020-11-17 | 2022-12-27 | Applied Materials, Inc. | Mainframe of substrate processing system |
USD991994S1 (en) | 2020-11-17 | 2023-07-11 | Applied Materials, Inc. | Mainframe of substrate processing system |
USD992611S1 (en) | 2020-11-17 | 2023-07-18 | Applied Materials, Inc. | Mainframe of substrate processing system |
US11674227B2 (en) | 2021-02-03 | 2023-06-13 | Applied Materials, Inc. | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
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