USD491206S1 - Electrostatic chuck - Google Patents

Electrostatic chuck Download PDF

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Publication number
USD491206S1
USD491206S1 US29/183,944 US18394403F USD491206S US D491206 S1 USD491206 S1 US D491206S1 US 18394403 F US18394403 F US 18394403F US D491206 S USD491206 S US D491206S
Authority
US
United States
Prior art keywords
electrostatic chuck
view
elevational view
electrostatic
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/183,944
Inventor
Keisuke Okugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Assigned to NGK SPARK PLUG CO., LTD. reassignment NGK SPARK PLUG CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKUGAWA, KEISUKE
Application granted granted Critical
Publication of USD491206S1 publication Critical patent/USD491206S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.

Claims (1)

  1. The ornamental design for a electrostatic chuck, as shown and described.
US29/183,944 2002-12-20 2003-06-20 Electrostatic chuck Expired - Lifetime USD491206S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002035563 2002-12-20
JP2002-035563 2002-12-20

Publications (1)

Publication Number Publication Date
USD491206S1 true USD491206S1 (en) 2004-06-08

Family

ID=32321577

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/183,944 Expired - Lifetime USD491206S1 (en) 2002-12-20 2003-06-20 Electrostatic chuck

Country Status (1)

Country Link
US (1) USD491206S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10679884B2 (en) 2015-02-23 2020-06-09 M Cubed Technologies, Inc. Film electrode for electrostatic chuck

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10679884B2 (en) 2015-02-23 2020-06-09 M Cubed Technologies, Inc. Film electrode for electrostatic chuck

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