USD479399S1 - Container for transporting substrates - Google Patents

Container for transporting substrates Download PDF

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Publication number
USD479399S1
USD479399S1 US29/152,233 US15223301F USD479399S US D479399 S1 USD479399 S1 US D479399S1 US 15223301 F US15223301 F US 15223301F US D479399 S USD479399 S US D479399S
Authority
US
United States
Prior art keywords
container
transporting substrates
transporting
substrates
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/152,233
Inventor
Akira Tanaka
Yoko Suzuki
Takashi Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KISHI, TAKASHI, SUZUKI, YOKO, TANAKA, AKIRA
Application granted granted Critical
Publication of USD479399S1 publication Critical patent/USD479399S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevation view of the container for transporting substrates;
FIG. 2 is a rear view of the container for transporting substrates;
FIG. 3 is a plan view of the container for transporting substrates;
FIG. 4 is a bottom plan view of the container for transporting substrates;
FIG. 5 is a right side view of the container for transporting substrates;
FIG. 6 is a left side view of the container for transporting substrates; and,
FIG. 7 is a perspective view of the container for transporting substrates as seen from the front, top and left.
The broken lines are for illustrative purposes only and form no part of the claimed design.

Claims (1)

  1. The ornamental design for a container for transporting substrates, as shown and described.
US29/152,233 2001-12-03 2001-12-19 Container for transporting substrates Expired - Lifetime USD479399S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001035532 2001-12-03
JP2001-035532 2001-12-03

Publications (1)

Publication Number Publication Date
USD479399S1 true USD479399S1 (en) 2003-09-09

Family

ID=27773268

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/152,233 Expired - Lifetime USD479399S1 (en) 2001-12-03 2001-12-19 Container for transporting substrates

Country Status (1)

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US (1) USD479399S1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD491725S1 (en) 2001-12-19 2004-06-22 Ebara Corporation Container for transporting substrates
US20040267501A1 (en) * 2001-04-19 2004-12-30 Freed Mason L. Sensor apparatus management methods and apparatus

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD376688S (en) 1994-12-20 1996-12-24 Empak, Inc. Semiconductor wafer cassette transport box
USD378873S (en) 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD387903S (en) 1995-10-13 1997-12-23 Empak, Inc. Shipping container
US5711427A (en) 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
US5755332A (en) 1994-03-11 1998-05-26 Empak, Inc. Enclosed sealable purgible semiconductor wafer holder
US5944194A (en) 1995-10-13 1999-08-31 Empak, Inc. 300 mm microenvironment pod with door on side
US6006919A (en) 1997-09-30 1999-12-28 Shin-Etsu Polymer Co., Ltd. Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
EP1047112A2 (en) 1999-04-20 2000-10-25 Shin-Etsu Polymer Co., Ltd. Wafer container box
EP1049137A2 (en) 1999-04-30 2000-11-02 Shin-Etsu Polymer Co., Ltd. Identification structure of a substrate storage container and method of identifying a substrate storage container
US6206196B1 (en) 1999-01-06 2001-03-27 Fluoroware, Inc. Door guide for a wafer container

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5755332A (en) 1994-03-11 1998-05-26 Empak, Inc. Enclosed sealable purgible semiconductor wafer holder
USD376688S (en) 1994-12-20 1996-12-24 Empak, Inc. Semiconductor wafer cassette transport box
USD378873S (en) 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD387903S (en) 1995-10-13 1997-12-23 Empak, Inc. Shipping container
US5944194A (en) 1995-10-13 1999-08-31 Empak, Inc. 300 mm microenvironment pod with door on side
US5711427A (en) 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
US6006919A (en) 1997-09-30 1999-12-28 Shin-Etsu Polymer Co., Ltd. Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
US6206196B1 (en) 1999-01-06 2001-03-27 Fluoroware, Inc. Door guide for a wafer container
EP1047112A2 (en) 1999-04-20 2000-10-25 Shin-Etsu Polymer Co., Ltd. Wafer container box
US6382419B1 (en) 1999-04-20 2002-05-07 Shin-Etsu Polymer Co. Ltd. Wafer container box
EP1049137A2 (en) 1999-04-30 2000-11-02 Shin-Etsu Polymer Co., Ltd. Identification structure of a substrate storage container and method of identifying a substrate storage container

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"F300 AutoPod™ Wafer Carrier 300mm", whole pages, Fluoroware, Inc.
"Shin-Etsu 300mm FOUP (Front Opening Unified Pod)", whole pages, Shin-Etsu Polymer Co., Ltd.
ASYST SMIF-POD 300, whole pages, Asyst Technologies Inc.
U.S. Provisional application Ser. No. 60/340,503, filed Dec. 19, 2001 (Akira Tanaka et al.).

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040267501A1 (en) * 2001-04-19 2004-12-30 Freed Mason L. Sensor apparatus management methods and apparatus
US7282889B2 (en) 2001-04-19 2007-10-16 Onwafer Technologies, Inc. Maintenance unit for a sensor apparatus
USD491725S1 (en) 2001-12-19 2004-06-22 Ebara Corporation Container for transporting substrates

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