USD324057S - Instrument for holding boats for thermal treatment of semiconductor wafers - Google Patents

Instrument for holding boats for thermal treatment of semiconductor wafers Download PDF

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Publication number
USD324057S
USD324057S US07/301,993 US30199389F USD324057S US D324057 S USD324057 S US D324057S US 30199389 F US30199389 F US 30199389F US D324057 S USD324057 S US D324057S
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US
United States
Prior art keywords
instrument
thermal treatment
semiconductor wafers
boats
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07/301,993
Inventor
Katsumi Ishii
Atsushi Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Assigned to TEL SAGAMI LIMITED, A CORP. OF JAPAN reassignment TEL SAGAMI LIMITED, A CORP. OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ISHII, KATSUMI, WADA, ATSUSHI
Application granted granted Critical
Publication of USD324057S publication Critical patent/USD324057S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevational view of an instrument for holding boats for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is a left side elevational view;
FIG. 3 is a right elevational view;
FIG. 4 is a top plan view;
FIG. 5 is a bottom plan view; and
FIG. 6 is a rear elevational view thereof.

Claims (1)

  1. The ornamental design for an instrument for holding boats for thermal treatment of semiconductor wafers, as shown.
US07/301,993 1988-07-25 1989-01-25 Instrument for holding boats for thermal treatment of semiconductor wafers Expired - Lifetime USD324057S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-29833 1988-07-25
JP2983388 1988-07-25

Publications (1)

Publication Number Publication Date
USD324057S true USD324057S (en) 1992-02-18

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ID=70481855

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/301,993 Expired - Lifetime USD324057S (en) 1988-07-25 1989-01-25 Instrument for holding boats for thermal treatment of semiconductor wafers

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU727731A1 (en) 1978-04-10 1980-04-15 Государственный Дорожный Научно-Исследовательский Институт "Госдорнии" Method of working cracks in asphalt and concrete coatings
US4344729A (en) 1980-02-08 1982-08-17 Bell And Howell Company Break-away device
USD272743S (en) 1981-06-08 1984-02-21 Knox David J Clamp for plating barrel
US4787805A (en) 1986-02-28 1988-11-29 Schering Aktiengesellschaft Device for the insertion into and removal from a suspended frame of parts being galvanized

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU727731A1 (en) 1978-04-10 1980-04-15 Государственный Дорожный Научно-Исследовательский Институт "Госдорнии" Method of working cracks in asphalt and concrete coatings
US4344729A (en) 1980-02-08 1982-08-17 Bell And Howell Company Break-away device
USD272743S (en) 1981-06-08 1984-02-21 Knox David J Clamp for plating barrel
US4787805A (en) 1986-02-28 1988-11-29 Schering Aktiengesellschaft Device for the insertion into and removal from a suspended frame of parts being galvanized

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