USD323332S - Handling arm for boats for thermal treatment of semiconductor wafers - Google Patents

Handling arm for boats for thermal treatment of semiconductor wafers Download PDF

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Publication number
USD323332S
USD323332S US07/301,992 US30199289F USD323332S US D323332 S USD323332 S US D323332S US 30199289 F US30199289 F US 30199289F US D323332 S USD323332 S US D323332S
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US
United States
Prior art keywords
boats
thermal treatment
semiconductor wafers
handling arm
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07/301,992
Inventor
Katsumi Ishii
Mitsuo Katoh
Shingo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Assigned to TEL SAGAMI LIMITED A CORP. OF JAPAN reassignment TEL SAGAMI LIMITED A CORP. OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ISHII, KATSUMI, KATOH, MITSUO, WATANABE, SHINGO
Application granted granted Critical
Publication of USD323332S publication Critical patent/USD323332S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a top, front and right side perspective view of a handling arm for boats for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is a front elevational view;
FIG. 3 is a left side elevational view;
FIG. 4 is a top plan view;
FIG. 5 is a bottom plan view; and
FIG. 6 is a rear elevational view thereof.

Claims (1)

  1. The ornamental design for a handling arm for boats for thermal treatment of semiconductor wafers, as shown and described.
US07/301,992 1988-07-25 1989-01-25 Handling arm for boats for thermal treatment of semiconductor wafers Expired - Lifetime USD323332S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2983488 1988-07-25
JP63-29834 1988-07-25

Publications (1)

Publication Number Publication Date
USD323332S true USD323332S (en) 1992-01-21

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ID=70474134

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/301,992 Expired - Lifetime USD323332S (en) 1988-07-25 1989-01-25 Handling arm for boats for thermal treatment of semiconductor wafers

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot
USD639323S1 (en) * 2010-05-06 2011-06-07 Ulvac, Inc. Vacuum transfer robot
USRE43781E1 (en) * 2009-11-17 2012-11-06 Ulvac, Inc. Vacuum transfer robot
USRE44567E1 (en) * 2009-11-17 2013-11-05 Ulvac, Inc. Vacuum transfer robot
USD741144S1 (en) * 2012-11-20 2015-10-20 Peter M. McCullough Swing arm

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344729A (en) 1980-02-08 1982-08-17 Bell And Howell Company Break-away device
USD272743S (en) 1981-06-08 1984-02-21 Knox David J Clamp for plating barrel
US4787805A (en) 1986-02-28 1988-11-29 Schering Aktiengesellschaft Device for the insertion into and removal from a suspended frame of parts being galvanized

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344729A (en) 1980-02-08 1982-08-17 Bell And Howell Company Break-away device
USD272743S (en) 1981-06-08 1984-02-21 Knox David J Clamp for plating barrel
US4787805A (en) 1986-02-28 1988-11-29 Schering Aktiengesellschaft Device for the insertion into and removal from a suspended frame of parts being galvanized

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE43781E1 (en) * 2009-11-17 2012-11-06 Ulvac, Inc. Vacuum transfer robot
USRE44567E1 (en) * 2009-11-17 2013-11-05 Ulvac, Inc. Vacuum transfer robot
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot
USD639323S1 (en) * 2010-05-06 2011-06-07 Ulvac, Inc. Vacuum transfer robot
USD741144S1 (en) * 2012-11-20 2015-10-20 Peter M. McCullough Swing arm

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