USD1037186S1 - Susceptor ring - Google Patents

Susceptor ring Download PDF

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Publication number
USD1037186S1
USD1037186S1 US29/834,637 US202229834637F USD1037186S US D1037186 S1 USD1037186 S1 US D1037186S1 US 202229834637 F US202229834637 F US 202229834637F US D1037186 S USD1037186 S US D1037186S
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US
United States
Prior art keywords
susceptor ring
susceptor
ring
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/834,637
Inventor
Yoshiaki Daigo
Yoshikazu Moriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuflare Technology Inc
Original Assignee
Nuflare Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nuflare Technology Inc filed Critical Nuflare Technology Inc
Assigned to NUFLARE TECHNOLOGY, INC. reassignment NUFLARE TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DAIGO, YOSHIAKI, MORIYAMA, YOSHIKAZU
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Publication of USD1037186S1 publication Critical patent/USD1037186S1/en
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Description

FIG. 1 is a perspective view of a susceptor ring, showing our new design,
FIG. 2 is a front elevational view thereof,
FIG. 3 is a rear elevational view thereof,
FIG. 4 is a right side elevational view thereof,
FIG. 5 is a left side elevational view thereof,
FIG. 6 is a top plan view thereof, a bottom plan view being a mirror image thereof,
FIG. 7 is a cross sectional view taken along lines 7-7 in FIG. 2 ; and,
FIG. 8 is a cross sectional view taken along lines 8-8 in FIG. 2 .

Claims (1)

    CLAIM
  1. The ornamental design for a susceptor ring, as shown and described.
US29/834,637 2021-10-22 2022-04-13 Susceptor ring Active USD1037186S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021022981F JP1711119S (en) 2021-10-22 2021-10-22 Susceptoring
JP2021-022981D 2021-10-22

Publications (1)

Publication Number Publication Date
USD1037186S1 true USD1037186S1 (en) 2024-07-30

Family

ID=80912671

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/834,637 Active USD1037186S1 (en) 2021-10-22 2022-04-13 Susceptor ring

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US (1) USD1037186S1 (en)
JP (1) JP1711119S (en)

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US5074017A (en) * 1989-01-13 1991-12-24 Toshiba Ceramics Co., Ltd. Susceptor
US5844205A (en) * 1996-04-19 1998-12-01 Applied Komatsu Technology, Inc. Heated substrate support structure
US6160244A (en) * 1998-05-29 2000-12-12 Ngk Insulators, Ltd. Susceptors
US20030017268A1 (en) * 2001-07-18 2003-01-23 Applied Materials, Inc. .method of cvd titanium nitride film deposition for increased titanium nitride film uniformity
US7393418B2 (en) * 2004-09-29 2008-07-01 Covalent Materials Corporation Susceptor
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
US7678197B2 (en) * 2002-08-09 2010-03-16 Sumitomo Osaka Cement Co., Ltd. Susceptor device
US8323413B2 (en) * 2006-03-14 2012-12-04 Lg Innotek Co., Ltd Susceptor and semiconductor manufacturing apparatus including the same
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
USD935425S1 (en) * 2018-10-04 2021-11-09 Toyo Tanso Co., Ltd. Susceptor for use in production of a semiconductor
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US11764101B2 (en) * 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US5074017A (en) * 1989-01-13 1991-12-24 Toshiba Ceramics Co., Ltd. Susceptor
US5844205A (en) * 1996-04-19 1998-12-01 Applied Komatsu Technology, Inc. Heated substrate support structure
US6160244A (en) * 1998-05-29 2000-12-12 Ngk Insulators, Ltd. Susceptors
US20030017268A1 (en) * 2001-07-18 2003-01-23 Applied Materials, Inc. .method of cvd titanium nitride film deposition for increased titanium nitride film uniformity
US7678197B2 (en) * 2002-08-09 2010-03-16 Sumitomo Osaka Cement Co., Ltd. Susceptor device
US7393418B2 (en) * 2004-09-29 2008-07-01 Covalent Materials Corporation Susceptor
US8323413B2 (en) * 2006-03-14 2012-12-04 Lg Innotek Co., Ltd Susceptor and semiconductor manufacturing apparatus including the same
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD935425S1 (en) * 2018-10-04 2021-11-09 Toyo Tanso Co., Ltd. Susceptor for use in production of a semiconductor
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US11764101B2 (en) * 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Components,https://www.ngk-insulators.com/en/product/sc-parts.html—2024 NGK Insulators, Ltd. (Year: 2024). *
Cover Ring, Susceptor, 13.39ID, SIC Coated, 350MM, Neon,https://www.parts-initiative.com/item/COVER-RING-SUSCEPTOR-1339ID-SIC-COATED-350MM-NEON.html,Copyright © 2021 Parts Initiative Ltd. (Year: 2021). *

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