USB569293I5 - - Google Patents

Info

Publication number
USB569293I5
USB569293I5 US56929375A USB569293I5 US B569293 I5 USB569293 I5 US B569293I5 US 56929375 A US56929375 A US 56929375A US B569293 I5 USB569293 I5 US B569293I5
Authority
US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of USB569293I5 publication Critical patent/USB569293I5/en
Application granted granted Critical
Publication of US4004149A publication Critical patent/US4004149A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Details Of Television Scanning (AREA)
US05/569,293 1974-04-22 1975-04-18 Apparatus for displaying image produced by electrically charged particle beam Expired - Lifetime US4004149A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JA49-44524 1974-04-22
JP49044524A JPS5243058B2 (enrdf_load_stackoverflow) 1974-04-22 1974-04-22

Publications (2)

Publication Number Publication Date
USB569293I5 true USB569293I5 (enrdf_load_stackoverflow) 1976-03-30
US4004149A US4004149A (en) 1977-01-18

Family

ID=12693897

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/569,293 Expired - Lifetime US4004149A (en) 1974-04-22 1975-04-18 Apparatus for displaying image produced by electrically charged particle beam

Country Status (2)

Country Link
US (1) US4004149A (enrdf_load_stackoverflow)
JP (1) JPS5243058B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618422A (en) * 1979-07-23 1981-02-21 Hitachi Ltd Measuring method for diameter of electron beam
US5546319A (en) * 1994-01-28 1996-08-13 Fujitsu Limited Method of and system for charged particle beam exposure
US10176965B1 (en) * 2017-07-05 2019-01-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036397B1 (enrdf_load_stackoverflow) * 1969-07-11 1975-11-25
NL7100609A (enrdf_load_stackoverflow) * 1970-02-07 1971-08-10
US3711711A (en) * 1970-11-09 1973-01-16 Etec Corp Scanning electron microscope scanning system
JPS5126227B2 (enrdf_load_stackoverflow) * 1971-09-21 1976-08-05
JPS5221909B2 (enrdf_load_stackoverflow) * 1972-03-17 1977-06-14
US3842272A (en) * 1973-07-24 1974-10-15 American Optical Corp Scanning charged particle microprobe with external spurious electric field effect correction

Also Published As

Publication number Publication date
JPS50137672A (enrdf_load_stackoverflow) 1975-10-31
JPS5243058B2 (enrdf_load_stackoverflow) 1977-10-28
US4004149A (en) 1977-01-18

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