USB518226I5 - - Google Patents
Info
- Publication number
- USB518226I5 USB518226I5 US51822674A USB518226I5 US B518226 I5 USB518226 I5 US B518226I5 US 51822674 A US51822674 A US 51822674A US B518226 I5 USB518226 I5 US B518226I5
- Authority
- US
- United States
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/001—Electric or magnetic imagery, e.g., xerography, electrography, magnetography, etc. Process, composition, or product
- Y10S430/102—Electrically charging radiation-conductive surface
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5161973A GB1443215A (en) | 1973-11-07 | 1973-11-07 | Electrostatically clamping a semiconductor wafer during device manufacture |
UK51619/73 | 1973-11-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
USB518226I5 true USB518226I5 (xx) | 1976-02-10 |
US3993509A US3993509A (en) | 1976-11-23 |
Family
ID=10460739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US05/518,226 Expired - Lifetime US3993509A (en) | 1973-11-07 | 1974-10-29 | Semiconductor device manufacture |
Country Status (2)
Country | Link |
---|---|
US (1) | US3993509A (xx) |
GB (1) | GB1443215A (xx) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4282924A (en) * | 1979-03-16 | 1981-08-11 | Varian Associates, Inc. | Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface |
US4354111A (en) * | 1981-03-10 | 1982-10-12 | Veeco Instruments Incorporated | Screen lens array system |
GB2106325A (en) * | 1981-09-14 | 1983-04-07 | Philips Electronic Associated | Electrostatic chuck |
JPS5883145U (ja) * | 1981-12-01 | 1983-06-06 | 日本電子株式会社 | 試料加熱機構 |
US4412133A (en) * | 1982-01-05 | 1983-10-25 | The Perkin-Elmer Corp. | Electrostatic cassette |
JPS6059104B2 (ja) * | 1982-02-03 | 1985-12-23 | 株式会社東芝 | 静電チヤツク板 |
EP0095372B1 (en) * | 1982-05-25 | 1989-08-30 | Varian Associates, Inc. | Optimum surface contour for conductive heat transfer with a thin flexible workpiece |
EP0138254B1 (en) * | 1983-09-30 | 1988-06-01 | Philips Electronics Uk Limited | Electrostatic chuck and loading method |
GB2147459A (en) * | 1983-09-30 | 1985-05-09 | Philips Electronic Associated | Electrostatic chuck for semiconductor wafers |
JPS6099538A (ja) * | 1983-11-01 | 1985-06-03 | 横河・ヒュ−レット・パッカ−ド株式会社 | ピンチヤツク |
FR2565869B1 (fr) * | 1984-06-18 | 1986-08-29 | Sulzer Electro Tech | Procede et dispositif pour la manipulation de plaquettes circulaires notamment en vue de leur immatriculation par rayons laser |
JPS6131636U (ja) * | 1984-07-31 | 1986-02-26 | 株式会社 徳田製作所 | 静電チヤツク |
JPS61192435A (ja) * | 1985-02-21 | 1986-08-27 | Canon Inc | 静電吸着保持装置 |
US4963921A (en) * | 1985-06-24 | 1990-10-16 | Canon Kabushiki Kaisha | Device for holding a mask |
DE3879295T2 (de) * | 1987-04-14 | 1993-07-01 | Abisare Kakegawa Kk | Maschine-einheit mit einer statische elektrizitaet benutzenden haltevorrichtung. |
JP2521471B2 (ja) * | 1987-05-14 | 1996-08-07 | 富士通株式会社 | 静電吸着装置 |
US4997606A (en) * | 1988-01-07 | 1991-03-05 | Varian Associates, Inc. | Methods and apparatus for fabricating a high purity thermally-conductive polymer layer |
US4832781A (en) * | 1988-01-07 | 1989-05-23 | Varian Associates, Inc. | Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum |
US4938992A (en) * | 1988-01-07 | 1990-07-03 | Varian Associates, Inc. | Methods for thermal transfer with a semiconductor |
JP2779950B2 (ja) * | 1989-04-25 | 1998-07-23 | 東陶機器株式会社 | 静電チャックの電圧印加方法および電圧印加装置 |
JPH0670986B2 (ja) * | 1989-09-27 | 1994-09-07 | 株式会社日立製作所 | 真空処理装置の試料保持方法 |
DE69103915T2 (de) * | 1990-01-25 | 1995-05-11 | Applied Materials Inc | Elektrostatische Klemmvorrichtung und Verfahren. |
US5452177A (en) * | 1990-06-08 | 1995-09-19 | Varian Associates, Inc. | Electrostatic wafer clamp |
US5200232A (en) * | 1990-12-11 | 1993-04-06 | Lam Research Corporation | Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors |
US5155368A (en) * | 1991-04-16 | 1992-10-13 | Micrion Corporation | Ion beam blanking apparatus and method |
US5191506A (en) * | 1991-05-02 | 1993-03-02 | International Business Machines Corporation | Ceramic electrostatic chuck |
US5155652A (en) * | 1991-05-02 | 1992-10-13 | International Business Machines Corporation | Temperature cycling ceramic electrostatic chuck |
US5600530A (en) * | 1992-08-04 | 1997-02-04 | The Morgan Crucible Company Plc | Electrostatic chuck |
US5822171A (en) | 1994-02-22 | 1998-10-13 | Applied Materials, Inc. | Electrostatic chuck with improved erosion resistance |
FR2724269B1 (fr) | 1994-09-06 | 1996-10-18 | Commissariat Energie Atomique | Porte-substrat electrostatique |
US5671116A (en) * | 1995-03-10 | 1997-09-23 | Lam Research Corporation | Multilayered electrostatic chuck and method of manufacture thereof |
US5668018A (en) * | 1995-06-07 | 1997-09-16 | International Business Machines Corporation | Method for defining a region on a wall of a semiconductor structure |
US5835333A (en) * | 1995-10-30 | 1998-11-10 | Lam Research Corporation | Negative offset bipolar electrostatic chucks |
US5897711A (en) * | 1995-12-22 | 1999-04-27 | Lam Research Corporation | Method and apparatus for improving refractive index of dielectric films |
US6042901A (en) * | 1996-02-20 | 2000-03-28 | Lam Research Corporation | Method for depositing fluorine doped silicon dioxide films |
US5812361A (en) * | 1996-03-29 | 1998-09-22 | Lam Research Corporation | Dynamic feedback electrostatic wafer chuck |
US5764471A (en) * | 1996-05-08 | 1998-06-09 | Applied Materials, Inc. | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck |
US6354791B1 (en) * | 1997-04-11 | 2002-03-12 | Applied Materials, Inc. | Water lift mechanism with electrostatic pickup and method for transferring a workpiece |
US5869149A (en) * | 1997-06-30 | 1999-02-09 | Lam Research Corporation | Method for preparing nitrogen surface treated fluorine doped silicon dioxide films |
US5969934A (en) * | 1998-04-10 | 1999-10-19 | Varian Semiconductor Equipment Associats, Inc. | Electrostatic wafer clamp having low particulate contamination of wafers |
DE19853092B4 (de) * | 1998-11-18 | 2004-10-21 | Leica Microsystems Lithography Gmbh | Übernahme- und Haltesystem für ein Substrat |
US6215642B1 (en) | 1999-03-11 | 2001-04-10 | Nikon Corporation Of Japan | Vacuum compatible, deformable electrostatic chuck with high thermal conductivity |
US6538873B1 (en) | 1999-11-02 | 2003-03-25 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
US6362946B1 (en) | 1999-11-02 | 2002-03-26 | Varian Semiconductor Equipment Associates, Inc. | Electrostatic wafer clamp having electrostatic seal for retaining gas |
US6686598B1 (en) | 2000-09-01 | 2004-02-03 | Varian Semiconductor Equipment Associates, Inc. | Wafer clamping apparatus and method |
FR2818050B1 (fr) * | 2000-12-12 | 2006-08-11 | Semco Engineering Sa | Dispositif de prehension electrostatique d'une tranche de composant electronique |
DE10235814B3 (de) * | 2002-08-05 | 2004-03-11 | Infineon Technologies Ag | Verfahren zur lösbaren Montage eines zu prozessierenden Halbleitersubstrats auf einem Trägerwafer |
US20040066601A1 (en) * | 2002-10-04 | 2004-04-08 | Varian Semiconductor Equipment Associates, Inc. | Electrode configuration for retaining cooling gas on electrostatic wafer clamp |
JP3790215B2 (ja) * | 2002-12-26 | 2006-06-28 | 株式会社東芝 | 半導体装置の製造方法及び半導体製造装置 |
US7430104B2 (en) * | 2003-03-11 | 2008-09-30 | Appiled Materials, Inc. | Electrostatic chuck for wafer metrology and inspection equipment |
US7867403B2 (en) * | 2006-06-05 | 2011-01-11 | Jason Plumhoff | Temperature control method for photolithographic substrate |
US7807983B2 (en) * | 2007-01-12 | 2010-10-05 | Varian Semiconductor Equipment Associates, Inc. | Technique for reducing magnetic fields at an implant location |
WO2010090948A1 (en) | 2009-02-04 | 2010-08-12 | Mattson Technology, Inc. | Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate |
JP4801769B2 (ja) * | 2009-11-30 | 2011-10-26 | 三菱重工業株式会社 | 接合方法、接合装置制御装置、接合装置 |
JP6132907B2 (ja) * | 2013-05-14 | 2017-05-24 | 株式会社日立製作所 | 試料ホルダ及びそれを備えた集束イオンビーム加工装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3383567A (en) * | 1965-09-15 | 1968-05-14 | Ion Physics Corp | Solid state translating device comprising irradiation implanted conductivity ions |
US3413531A (en) * | 1966-09-06 | 1968-11-26 | Ion Physics Corp | High frequency field effect transistor |
US3547074A (en) * | 1967-04-13 | 1970-12-15 | Block Engineering | Apparatus for forming microelements |
US3750083A (en) * | 1968-11-14 | 1973-07-31 | Minnesota Mining & Mfg | Magnetic electric connector |
FR2076567A5 (xx) * | 1970-01-20 | 1971-10-15 | Commissariat Energie Atomique |
-
1973
- 1973-11-07 GB GB5161973A patent/GB1443215A/en not_active Expired
-
1974
- 1974-10-29 US US05/518,226 patent/US3993509A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3993509A (en) | 1976-11-23 |
GB1443215A (en) | 1976-07-21 |