USB476967I5 - - Google Patents

Info

Publication number
USB476967I5
USB476967I5 US47696774A USB476967I5 US B476967 I5 USB476967 I5 US B476967I5 US 47696774 A US47696774 A US 47696774A US B476967 I5 USB476967 I5 US B476967I5
Authority
US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00319563A external-priority patent/US3850105A/en
Application filed filed Critical
Priority to US05/476,967 priority Critical patent/US3995206A/en
Publication of USB476967I5 publication Critical patent/USB476967I5/en
Application granted granted Critical
Publication of US3995206A publication Critical patent/US3995206A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q41/00—Combinations or associations of metal-working machines not directed to a particular result according to classes B21, B23, or B24
    • B23Q41/02—Features relating to transfer of work between machines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
US05/476,967 1972-12-29 1974-06-06 Apparatus for transferring articles through various processing sectors of a manufacturing system Expired - Lifetime US3995206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/476,967 US3995206A (en) 1972-12-29 1974-06-06 Apparatus for transferring articles through various processing sectors of a manufacturing system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US00319563A US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system
US05/476,967 US3995206A (en) 1972-12-29 1974-06-06 Apparatus for transferring articles through various processing sectors of a manufacturing system

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US00319563A Division US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system

Publications (2)

Publication Number Publication Date
USB476967I5 true USB476967I5 (en:Method) 1976-03-09
US3995206A US3995206A (en) 1976-11-30

Family

ID=26982062

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/476,967 Expired - Lifetime US3995206A (en) 1972-12-29 1974-06-06 Apparatus for transferring articles through various processing sectors of a manufacturing system

Country Status (1)

Country Link
US (1) US3995206A (en:Method)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4193022A (en) * 1978-03-22 1980-03-11 Kelsey-Hayes Company Analog/digital numerical control system
SE419709B (sv) * 1979-02-21 1981-08-24 Roland Kaufeldt Sett och anordning for att astadkomma snabb gang och mjuk inbromsning samt ett noggrant bestemt slutlege hos en rorlig robotram
JPS57211452A (en) * 1981-06-16 1982-12-25 Fanuc Ltd Movable portion returning system
US4481585A (en) * 1981-08-03 1984-11-06 General Motors Corporation System for selectively controlling motor vehicle electrical loads
US4399335A (en) * 1981-08-03 1983-08-16 General Motors Corporation Switch actuator assembly
US4403121A (en) * 1981-08-03 1983-09-06 General Motors Corporation Remote control unit
JPH0616242B2 (ja) * 1983-06-06 1994-03-02 ファナック株式会社 数値制御方式
JPS60213456A (ja) * 1984-04-04 1985-10-25 Citizen Watch Co Ltd 位置決め装置
JPS6123211A (ja) * 1984-07-12 1986-01-31 Fanuc Ltd 原点復帰方式
DE3814810A1 (de) * 1988-05-02 1989-11-16 Bodenseewerk Geraetetech Stellantrieb zum einstellen eines drehbeweglichen elements
US5136226A (en) * 1989-08-21 1992-08-04 Carco Electronics Correlated coarse position error processor
US5055753A (en) * 1990-04-09 1991-10-08 Honeywell Inc. Programmable servomotor coil winder
EP0611273B1 (de) * 1993-02-08 1998-09-16 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG Träger für scheibenförmige Gegenstände
US6203582B1 (en) * 1996-07-15 2001-03-20 Semitool, Inc. Modular semiconductor workpiece processing tool
US6281652B1 (en) * 2000-03-24 2001-08-28 Western Digital Corporation Method of using two low-resolution DACS for converting high-resolution digital demands into analog output signals that monotonically drive an actuator motor in a disk drive
DE102006053580A1 (de) * 2006-03-10 2007-09-13 Carl Zeiss Meditec Ag System zur Behandlung oder Diagnose am Auge
JP7109863B2 (ja) * 2018-11-30 2022-08-01 株式会社ディスコ 搬送システム
US11107713B2 (en) * 2019-05-29 2021-08-31 Taiwan Semiconductor Manufacturing Company Ltd. Conveying system and method for operating the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2798992A (en) * 1955-02-04 1957-07-09 Adler Samuel Fine and coarse control servo system
GB945787A (en) * 1959-04-14 1964-01-08 Gen Electric Co Ltd Improvements in or relating to position control arrangements
JPS4120599B1 (en) * 1962-09-12 1966-12-01 Rca Corp Detection apparatus
US3339122A (en) * 1964-03-23 1967-08-29 Carlton Machine Tool Co Digital positional control device
US3504245A (en) * 1965-10-20 1970-03-31 Cutler Hammer Inc Automatic storage and retrieval system
JPS511865B1 (en:Method) * 1968-09-30 1976-01-21
JPS492230B1 (en:Method) * 1970-01-31 1974-01-19
FR2098524A5 (en:Method) * 1970-07-17 1972-03-10 Thomson Csf
US3760249A (en) * 1971-03-30 1973-09-18 Westinghouse Electric Corp Coarse-fine analog positioning system

Also Published As

Publication number Publication date
US3995206A (en) 1976-11-30

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