US9869550B2 - Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate - Google Patents

Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate Download PDF

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US9869550B2
US9869550B2 US14/964,347 US201514964347A US9869550B2 US 9869550 B2 US9869550 B2 US 9869550B2 US 201514964347 A US201514964347 A US 201514964347A US 9869550 B2 US9869550 B2 US 9869550B2
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mass
substrate
respect
masses
coupled
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US20170108337A1 (en
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Daniele Prati
Carlo Valzasina
Luca Giuseppe FALORNI
Matteo Fabio BRUNETTO
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STMicroelectronics SRL
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Assigned to STMICROELECTRONICS S.R.L. reassignment STMICROELECTRONICS S.R.L. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BRUNETTO, Matteo Fabio, FALORNI, LUCA GIUSEPPE, PRATI, DANIELE, VALZASINA, CARLO
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Definitions

  • the present disclosure relates to a microelectromechanical gyroscope for sensing angular rate and to a method of sensing angular rate.
  • MEMS microelectromechanical systems
  • MEMS gyroscopes which are distinguished by their rather complex electromechanical structure and by the operating mode, but are in any case based upon detection of Coriolis accelerations.
  • a mass is elastically constrained to a substrate or stator to be able to translate in a driving direction and a sensing direction that are mutually perpendicular.
  • the mass is set in oscillation at a controlled frequency and amplitude in the driving direction.
  • the mass When the gyroscope turns about an axis perpendicular to the driving direction and to the sensing direction at an angular rate, on account of the motion in the driving direction, the mass is subject to a Coriolis force and moves in the sensing direction.
  • the displacements of the mass in the sensing direction are determined both by the angular rate and by the velocity in the driving direction and may be transduced into electrical signals.
  • the mass and the substrate may be capacitively coupled so that the capacitance depends upon the position of the mass with respect to the substrate.
  • the displacements of the mass in the sensing direction may thus be detected in the form of electrical signals modulated in amplitude in a way proportional to the angular rate, with carrier at the frequency of oscillation of the driving mass.
  • Use of a demodulator makes it possible to obtain the modulating signal thus to derive the instantaneous angular rate.
  • the acceleration signal that carries information regarding the instantaneous angular rate also contains spurious components that are not determined by the Coriolis acceleration and thus present in the form of disturbance.
  • the spurious components may depend upon constructional imperfections of the micromechanical part, due to the limits of precision and to the production process spread.
  • the effective oscillatory motion of the driving mass as a result of a defect in the elastic constraints provided between the mass and the substrate, may be misaligned with respect to the direction expected theoretically. This type of defect commonly causes a quadrature signal component, which adds to the useful signal due to rotation of the microstructure.
  • the misalignment causes the mass to displace also in the sensing direction, instead of just in the driving direction, and produces a variation of the capacitance between the mass and the substrate.
  • One or more embodiments of the present disclosure are directed to a microelectromechanical gyroscope and a method of sensing angular rates.
  • a microelectromechanical gyroscope includes a substrate and a stator sensing structure fixed to the substrate.
  • the gyroscope further includes a first mass elastically coupled to the substrate and movable with respect to the substrate in a first direction and a second mass elastically coupled to the first mass and movable with respect to the first mass in a second direction.
  • the gyroscope includes a third mass elastically coupled to the second mass to enable movement in the first direction and elastically coupled to the substrate to enable movement in the second direction, the third mass being capacitively coupled to the stator sensing structure.
  • FIG. 1 is a simplified block diagram of a microelectromechanical gyroscope according to an embodiment of the present disclosure
  • FIG. 2 is a simplified top plan view of a portion of the microelectromechanical gyroscope of FIG. 1 ;
  • FIG. 3 is a simplified top plan view of a portion of a microelectromechanical gyroscope according to a different embodiment of the present disclosure.
  • FIG. 4 is a simplified block diagram of an electronic system incorporating a microelectromechanical gyroscope according to the present disclosure.
  • a microelectromechanical gyroscope according to an embodiment of the present disclosure is designated as a whole by the number 1 and comprises a substrate 2 , a microstructure 3 , a control device 4 , and a read device 5 .
  • the microstructure 3 comprises movable parts and parts that are fixed with respect to the substrate 2 .
  • the control device 4 forms a control loop with the microstructure 3 and is configured to keep movable parts of the microstructure 3 in oscillation with respect to the substrate with controlled frequency and amplitude.
  • the control device 4 receives position signals S P from the microstructure 3 and supplies driving signals S D to the microstructure 3 .
  • the read device 5 supplies output signals S OUT as a function of the movement of the movable parts of the microstructure 3 .
  • the output signals S OUT indicate an angular rate of the substrate 2 with respect to a gyroscopic axis of rotation.
  • the substrate 2 Illustrated in FIG. 2 are the substrate 2 and, in greater detail, the microstructure 3 according to one embodiment.
  • the microstructure 3 comprises a driving mass 7 , a transduction mass 8 , and a movable sensing structure 10 .
  • the driving mass 7 is elastically constrained to the substrate 2 and is movable with respect to the substrate 2 in a driving direction D 1 .
  • the control device 4 keeps the driving mass 7 in oscillation in the driving direction D 1 about a resting position.
  • the control device 4 uses movable driving electrodes 12 a , fixed to the driving mass 7 , and stator driving electrodes 12 b , fixed to the substrate 2 .
  • the movable driving electrodes 12 a and the stator driving electrodes 12 b are capacitively coupled in comb-fingered configuration and are substantially parallel to the driving direction D 1 .
  • the stator driving electrodes 12 b receive the driving signals S D from the control device 4 through electrical-connection lines (not illustrated for reasons of simplicity).
  • the oscillations of the driving mass 7 define a signal carrier for the transduction chain of the gyroscope 1 .
  • the elastic connection of the driving mass 7 to the substrate 2 is obtained by elastic suspension elements 11 or “flexures”, which are configured to enable oscillations of the driving mass 7 with respect to the substrate 2 in the driving direction D 1 and to prevent other movements of the driving mass 7 , in particular in a transduction direction D 2 perpendicular to the driving direction D 1 .
  • the expression “prevent movements in a direction” and similar expressions, both in reference to the driving direction D 1 and in reference to the transduction direction D 2 or in any other direction, are to be understood in the sense of substantially limiting the movements in said direction, compatibly with what is allowed by the technological and geometrical limits in definition of the constraints.
  • the transduction mass 8 is elastically constrained to the driving mass 7 and is movable with respect to the driving mass in the transduction direction D 2 .
  • the elastic connection of the transduction mass 8 to the driving mass 7 is obtained by elastic suspension elements 13 , which are configured to enable oscillations of the transduction mass 8 with respect to the driving mass 7 in the transduction direction D 2 and prevent other relative movements of the transduction mass 8 with respect to the driving mass 7 , in particular in the driving direction D 1 .
  • the transduction mass 8 is movable both in the transduction direction D 2 and also in the driving direction D 1 as a result of the drawing action of the driving mass 7 and of the constraint imposed by the elastic suspension elements 13 .
  • the movable sensing structure 10 comprises a frame 15 and a set of movable sensing electrodes 16 a , which are supported by the frame 15 and extend parallel to the driving direction D 1 .
  • the frame 15 is elastically constrained to the transduction mass 8 and to the substrate 2 . With respect to the substrate 2 , the frame 15 is movable in the transduction direction D 2 . With respect to the transduction mass 8 , the frame 15 is movable in the driving direction D 1 .
  • Elastic connection of the frame 15 to the substrate 2 is obtained by elastic suspension elements 18 , which are configured to enable oscillations of the frame 15 with respect to the substrate 2 in the transduction direction D 2 and prevent other movements of the frame 15 with respect to the substrate 2 , in particular in the driving direction D 1 .
  • the frame 15 is coupled to the transduction mass 8 by elastic connection elements 20 , which are configured to prevent relative movements between the transduction mass 8 and the frame 15 in the transduction direction D 2 .
  • the elastic connection elements 20 enable, instead, other relative movements between the transduction mass 8 and the frame 15 .
  • translatory oscillations in the driving direction D 1 and rotary oscillations are allowed. Consequently, the movements of the transduction mass 8 in the transduction direction D 2 are transmitted substantially in a rigid way, whereas the translatory movements in the driving direction and the rotary movements of the transduction mass are at least in part compensated by the elastic connection elements 20 .
  • the frame 15 may be constrained to the substrate 2 as already described without cancelling out the useful displacement components due to the Coriolis force that acts on the transduction mass 8 . This would not be possible with a simple rigid connection between the transduction mass 8 and the movable sensing structure 10 .
  • the movable sensing structure 10 is capacitively coupled to a stator sensing structure 30 , which comprises stator sensing electrodes 16 b fixed to the substrate 2 and extending in the driving direction D 1 .
  • the movable sensing electrodes 16 a and the stator sensing electrodes 16 b are coupled according to a “parallel plate” scheme and define a capacitor with a capacitance variable as a function of the position of the movable sensing structure 10 with respect to the substrate 2 in the transduction direction D 2 .
  • the control device 4 keeps the driving mass 7 in oscillation in the driving direction D 1 with controlled frequency and amplitude.
  • the transduction mass 8 is drawn by the driving mass 7 in the motion in the driving direction D 1 as a result of the connection by the elastic suspension elements 13 , which enable relative motion between the driving mass 7 and the transduction mass 8 only in the transduction direction D 2 .
  • the substrate 2 turns about a gyroscopic axis G perpendicular to the driving direction D 1 and to the transduction direction D 2 , the transduction mass 8 is subjected to a Coriolis force in the transduction direction D 2 .
  • the transduction mass 8 thus oscillates in the transduction direction D 2 with an amplitude that depends upon the linear drawing velocity in the driving direction D 1 and by the angular rate of the substrate 2 about the gyroscopic axis G.
  • a spurious displacement caused by imperfections of the elastic suspension elements 11 , may be added to the displacement due to the Coriolis force.
  • the component due to the spurious displacement varies at the same frequency as that of the carrier, but is phase-shifted by 90° with respect to the Coriolis forcing term because it depends upon the position and not upon the velocity in the driving direction Dl.
  • the overall displacement of the transduction mass 8 in the transduction direction D 2 is transmitted to the movable sensing structure 10 as a result of the elastic connection elements 20 , which allow relative translatory motion only in the driving direction Dl.
  • the effect of the imperfections of the constraints, in particular of the elastic suspension elements 11 that connect the driving mass 7 to the substrate 2 is, however, transferred to the movable sensing structure 10 to an extent much smaller than the contribution due to the Coriolis force.
  • the contribution due to the defects of driving in the transduction direction D 2 is thus attenuated for the transduction mass 8 and the sensing mass 10 both by the elastic suspension elements 13 between the driving mass 7 and the transduction mass 8 and by the elastic suspension elements 18 between the movable sensing structure 10 and the substrate 2 , as well as by the elastic connection elements 20 between the transduction mass 8 and the frame 15 .
  • the elastic connection elements 20 are able to attenuate also spurious rotary movements, which are transmitted to the transduction mass 8 by the driving mass 7 and are not completely compensated for by the elastic suspension elements 13 .
  • the contribution due to the Coriolis force in the transduction direction D 2 arises directly from the transduction mass 8 and is transmitted without appreciable attenuation by the elastic connection elements 20 , which enable a substantially rigid coupling in the direction D 2 , and this contribution is affected the action of the elastic suspension elements 13 and of the elastic suspension elements 18 and is consequently transmitted in a non-attenuated way on the sensing mass 10 .
  • the Coriolis force on the driving mass 7 is, instead, completely balanced by the elastic suspension elements 11 .
  • the weight of the spurious contributions is thus attenuated with respect to that of the contributions useful for detection of the angular rate, and the signal-to-noise ratio is accordingly improved.
  • FIG. 3 illustrates a different embodiment of the disclosure.
  • a microelectromechanical gyroscope 100 comprises a substrate 102 and a microstructure 103 , in addition to a control device and to a read device (not illustrated).
  • the microstructure 103 comprises two actuation masses 106 , two driving masses 107 , two transduction masses, and four movable sensing structures 110 , all arranged symmetrically about a central anchorage 109 .
  • the actuation masses 106 are arranged symmetrically with respect to the central anchorage 109 and are aligned in an actuation direction.
  • the actuation masses 106 are elastically coupled to the substrate 102 for oscillating in a fixed actuation direction. Connection to the substrate 102 is obtained by elastic elements 111 for connection to respective outer ends.
  • the actuation masses 106 are further coupled together through elastic connection elements 112 and a bridge 113 , which is in turn connected to the central anchorage 109 .
  • the bridge 113 is defined by a frame surrounding the central anchorage 109 and connected thereto to be able to oscillate out of plane with respect to two perpendicular axes.
  • the actuation masses 106 are provided with respective sets of movable actuation electrodes 115 a , which are capacitively coupled in comb-fingered configuration to stator actuation electrodes 115 b fixed to the substrate 2 .
  • the control device uses the movable actuation electrodes 115 a and the stator actuation electrodes 115 b for keeping the actuation masses 106 in oscillation with respect to the actuation direction with controlled frequency and amplitude and, for example, with a mutual phase shift.
  • the driving masses 107 are arranged symmetrically with respect to the central anchorage 109 and are aligned in a driving direction D 1 ′ perpendicular to the actuation direction.
  • the driving masses 107 are elastically coupled to the substrate 102 and to the actuation masses 106 for oscillating in the driving direction D 1 ′.
  • each driving mass 107 is coupled to both of the actuation masses 106 by respective elastic suspension elements 117 , which are configured to convert the motion of the actuation masses 106 in the actuation direction into motion of the driving masses 107 in the driving direction D 1 ′.
  • the mutually phase-shifted oscillatory motion of the actuation masses 106 in the actuation direction causes a corresponding mutually phase-shifted oscillatory motion of the driving masses 107 in the driving direction D 1 ′.
  • the driving masses 107 are further coupled to the substrate 102 by elastic suspension elements 118 and to the bridge 113 by elastic connection elements 120 .
  • the elastic suspension elements 118 and the elastic connection elements 120 are configured to prevent movements of the driving masses 107 transverse to the driving direction D 1 ′.
  • Each transduction mass 108 is elastically coupled to a respective one of the driving masses 107 by elastic connection elements 121 .
  • the transduction masses 108 are arranged symmetrically with respect to the central anchorage 109 .
  • the elastic connection elements 121 are configured to enable relative movements of the transduction masses 108 with respect to the driving masses 107 in a transduction direction D 2 ′ perpendicular to the driving direction D 1 ′ and for preventing relative movements of the transduction masses 108 with respect to the driving masses 107 in the driving direction D 1 ′ (in one embodiment, the transduction direction D 2 ′ is parallel to the actuation direction).
  • each transduction mass 108 Coupled to each transduction mass 108 are two respective movable sensing structures 110 on opposite sides with respect to the transduction direction D 2 ′.
  • Each movable sensing structure 110 comprises a frame 115 and a set of movable sensing electrodes 126 a , which are supported by the respective frame 115 .
  • the frames 115 are elastically constrained to the respective transduction masses 108 and to the substrate 102 and are movable with respect to the substrate 102 in the transduction direction D 2 ′ and with respect to the respective transduction masses 108 in the driving direction D 1 ′.
  • Elastic connection of the frames 115 to the substrate 102 is obtained by elastic suspension elements 128 , which are configured to enable oscillations of the frames 115 with respect to the substrate 102 in the transduction direction D 2 ′ and prevent movements of the frames 115 with respect to the substrate 102 in the driving direction D 1 ′.
  • Elastic connection of the frames 115 to the respective transduction masses 108 is obtained by elastic suspension elements 129 , which are configured to enable oscillations of the transduction masses 108 with respect to the respective frames 115 in the driving direction D 1 ′ and prevent relative movements between the frames 115 and the respective transduction masses 108 in the transduction direction D 2 ′.
  • the movable sensing structures 110 are capacitively coupled to respective stator sensing structures 130 , which comprise respective sets of stator sensing electrodes 126 b fixed to the substrate 102 .
  • the movable sensing electrodes 126 a and the stator sensing electrodes 126 b are coupled according to a parallel-plate scheme and define a capacitor with capacitance variable as a function of the position of the movable sensing structures 110 with respect to the substrate 102 in the transduction direction D 2 ′.
  • the actuation masses 106 and the driving masses 107 may be constrained to the substrate 102 so that respective out-of-plane rotary movements are allowed.
  • the elastic connection elements of the actuation masses 106 and of the driving masses 107 may be configured to enable rotations about respective axes parallel to the driving direction D 1 ′ (for the actuation masses 106 ) or to the transduction direction D 2 ′ (for the driving masses 107 ).
  • the actuation masses 106 and driving masses 107 may be capacitively coupled to electrodes (not illustrated) arranged on respective portions of the substrate 102 .
  • the transduction masses 108 and the movable sensing structures 110 are separated from the driving masses 107 and coupled for penalizing transfer of the spurious movements (due to defects of the constraints) to the sensing structures.
  • the result is favored by the elastic suspension elements 128 between the frames 115 and the substrate 102 and by the elastic suspension elements 129 between the transduction masses 108 and the respective frames 115 .
  • FIG. 4 Illustrated in FIG. 4 is a portion of an electronic system 200 according to an embodiment of the present disclosure.
  • the system 200 incorporates the electromechanical transducer 1 and may be used in devices such as, for example, a laptop computer or tablet, possibly with wireless-connection capacity, a cellphone, a smartphone, a messaging device, a digital music player, a digital camera, or other devices designed to process, store, transmit, or receive information.
  • the electroacoustic transducer 1 may be used for performing functions of voice control, for example, in a motion-activated user interface for computers or consoles for video games or in a satellite-navigation device.
  • the electronic system 200 may comprise a control unit 210 , an input/output (I/O) device 220 (for example, a keyboard or a screen), the gyroscope 100 , a wireless interface 240 , and a memory 260 , of a volatile or nonvolatile type, coupled together through a bus 250 .
  • a battery 280 may be used for supplying the system 200 . It should be noted that the scope of the present disclosure is not limited to embodiments necessarily having one or all of the devices listed.
  • the control unit 210 may comprise, for example, one or more microprocessors, microcontrollers and the like.
  • the I/O device 220 may be used for generating a message.
  • the system 200 may use the wireless interface 240 for transmitting and receiving messages to and from a wireless-communication network with a radiofrequency (RF) signal.
  • wireless interface may comprise an antenna, a wireless transceiver, such as a dipole antenna, even though the scope of the present disclosure is not limited from this point of view.
  • the I/O device 220 may supply a voltage representing what is stored either in the form of digital output (if digital information has been stored) or in the form of analog information (if analog information has been stored).
US14/964,347 2015-04-24 2015-12-09 Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate Active 2036-11-13 US9869550B2 (en)

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US20170108337A1 (en) 2017-04-20
US10539420B2 (en) 2020-01-21
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US11280611B2 (en) 2022-03-22
US20200109946A1 (en) 2020-04-09

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