US9047890B1 - Inductor with non-uniform lamination thicknesses - Google Patents
Inductor with non-uniform lamination thicknesses Download PDFInfo
- Publication number
- US9047890B1 US9047890B1 US14/143,662 US201314143662A US9047890B1 US 9047890 B1 US9047890 B1 US 9047890B1 US 201314143662 A US201314143662 A US 201314143662A US 9047890 B1 US9047890 B1 US 9047890B1
- Authority
- US
- United States
- Prior art keywords
- magnetic layer
- magnetic
- layer
- top surface
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003475 lamination Methods 0.000 title description 4
- 230000005291 magnetic effect Effects 0.000 claims abstract description 138
- 239000010409 thin film Substances 0.000 claims abstract description 30
- 238000000151 deposition Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 5
- 239000003302 ferromagnetic material Substances 0.000 claims description 5
- 238000005137 deposition process Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 abstract description 8
- 238000004804 winding Methods 0.000 abstract description 7
- 239000004020 conductor Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- -1 silicon nitrides Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0053—Printed inductances with means to reduce eddy currents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
Definitions
- the present invention relates generally to the field of thin film inductors (see definition of “thin film inductor,” below) and more particularly to thin film inductors with laminated pole pieces (or “yoke pieces”) that are in the form of a stack of relatively thin layers alternating between magnetic material layers and insulating material layers.
- inductive power converters onto silicon is one path to reducing the cost, weight, and size of electronic devices.
- One main challenge to developing a fully integrated power converter is the development of high quality thin film inductors.
- Thin film inductors for power conversion applications should store a large amount of energy per unit area to fit in the limited space on silicon.
- ferromagnetic materials are used to increase the energy stored for a given current.
- ferromagnetic materials also introduce some disadvantages. Magnetic materials operating at high frequency produce losses through eddy currents and hysteresis. The eddy currents are created when the time varying magnetic fields in the yokes create an electric field that drives a circular current flow.
- a thin film inductor includes: (i) a current carrier portion; (ii) a yoke portion; and (iii) a set of electrically insulating layer(s) including at least a first insulating layer.
- the yoke portion is one of the following types: a top yoke portion or a bottom yoke portion, with the yoke portion including a current-carrier-facing surface.
- the yoke portion includes: multiple of magnetic layers, including a first magnetic layer and a second magnetic layer, with each magnetic layer having a thickness.
- the current carrier portion and yoke portion are located so that at least a portion of the current-carrier-portion surface of the yoke faces at least a portion of the current carrier portion.
- the magnetic layers and the set of insulating layer(s) are mechanically connected to each other in the form of a laminated stack.
- the laminated stack is arranged so that magnetic layers alternate with insulating layer(s).
- the magnetic layers are made of ferromagnetic material.
- the thickness of the first magnetic layer is greater than the thickness of a second magnetic layer.
- the second magnetic layer is more proximate to the current-carrier facing surface than the first magnetic layer.
- a method of making a thin film inductor includes the following steps (not necessarily in the following order): (i) providing a base portion including a substrate portion and a base portion top surface; (ii) depositing a first magnetic layer on at least a portion of the base portion top surface, with the first magnetic layer including a first magnetic layer top surface; (iii) depositing a first electrically insulating layer on at least a portion of the first magnetic layer top surface, with the first electrically insulating layer including a first electrically insulating layer top surface; (iv) depositing a second magnetic layer on at least a portion of the first electrically insulating layer top surface, with the second magnetic layer including a second magnetic layer top surface; and (v) forming a current carrier portion over at least a portion of the second magnetic layer top surface.
- the first layer has a greater thickness than the second magnetic layer.
- a method of making a thin film inductor includes the following steps (not necessarily in the following order): (i) providing a base portion including a current carrier portion and a base portion top surface; (ii) depositing a first magnetic layer on at least a portion of the base portion top surface, with a portion of the first magnetic layer being located over the current carrier portion, and with the first magnetic layer including a first magnetic layer top surface; (iii) depositing a first electrically insulating layer on at least a portion of the first magnetic layer top surface, with the first electrically insulating layer including a first electrically insulating layer top surface; and (iv) depositing a second magnetic layer on at least a portion of the first electrically insulating layer top surface, with the second magnetic layer including a second magnetic layer top surface.
- the first layer has a smaller thickness than the second magnetic layer.
- FIG. 1 is a cross-sectional view of a portion of a first embodiment of a thin film inductor assembly according to the present invention
- FIG. 2 is a perspective view of the first embodiment inductor
- FIG. 3 is a graph illustrating certain aspects of performance achieved with an embodiment of the present invention.
- Some embodiments of the present invention recognize the following facts, potential problems and/or potential areas for improvement with respect to the current state of the art: (i) even though magnetic layers of the thin film inductor are separated by insulating layers, there are still energy losses due to eddy currents; (ii) the magnetic layers closer to the coil (that is, the “inner layers”) have larger losses than magnetic layers further from the coil; (iii) magnetic flux densities in the space occupied by inner layers are generally higher than those characterizing the outer layers due to the magnetic reluctance of the insulating layers (also called spacer layers) interposed between the winding and the outer layers; (iv) due to the relatively large magnetic flux densities, the inner layers tend to magnetically saturate at lower drive currents and have greater losses than the outer layers; and (v) in a via region, additional eddy currents are generated in the inner layers due to flux traversing perpendicular to the lamination stack.
- Some embodiments of the present invention may include one, or more, of the following features, characteristics and/or advantages: (i) a laminated thin film inductor in which the individual lamina are of different thickness; (ii) thickness variations designed to provide a method of evenly distributing the eddy current losses; (iii) a thin film inductor where the inner layers, which experience higher levels of flux, are thinner than the outer layers; (iv) reduced current in relatively thin inner layers causes a more uniform current distribution when the addition of the via currents is considered; and/or (v) more uniform current distribution, due to relatively thin inner layers, results in a lower overall ohmic loss (also sometimes herein referred to as “I ⁇ 2R loss”).
- thin film inductor 100 includes: optional insulating protection layer 102 ; first magnetic layer 104 ; first insulating layer 106 ; second magnetic layer 108 ; second insulating layer 110 ; third magnetic layer 112 ; third insulating layer 114 ; fourth magnetic layer 116 ; fourth insulating layers 118 a,b ; fifth magnetic layer 120 ; fifth insulating layer 122 ; sixth magnetic layer 124 ; sixth insulating layer 126 ; seventh magnetic layer 128 ; seventh insulating layer 130 ; eighth magnetic layer 132 ; substrate 133 ; insulator 134 ; and winding set 136 (as shown in FIG.
- winding set 136 has four windings in this embodiment); substrate layer 150 ; and magnetic via zones 152 . It is noted that embodiments of the present invention may have more, or fewer, than eight (8) magnetic layers. It is also noted that FIG. 1 is not drawn to scale. Some example dimensions for the magnetic layer thicknesses will be set forth below, but the layer thickness differences have been intentionally exaggerated in the rendering of FIG. 1 in order to help communicate certain aspects of the present invention.
- the thickness values given in the previous paragraph are only an example and have not necessarily been optimized for highest performance.
- the optimal value will depend on many factors including the operating frequency, magnetic permeability, resistivity of the magnetic film, the total desired yoke thickness, insulating material thickness and properties, and the overall inductor and via dimensions. Optimization of this type of structure is easily carried out using finite element method (FEM) calculations as would be apparent to one skilled in the art. Likewise, choosing an optimal number of layers depends on factors such as manufacturing complexity, efficiency requirements, operating frequency, and material properties. The optimization techniques would also be apparent to one skilled in the art.
- FEM finite element method
- Inductor 100 has many advantages due to the above-noted differences between thicknesses of the magnetic layers: (i) the magnetic flux density is more uniform than it would be in a comparable inductor where all the magnetic layer had the same thickness; and (ii) the ohmic loss is smaller than it would be in a comparable inductor where all the magnetic layers had the same thickness.
- insulative layers 118 a and 118 b will now be discussed.
- One or both of insulative layers 118 a and 118 b may be omitted.
- the yoke in this embodiment is constructed of any soft magnetic material, such as iron alloys, nickel alloys, cobalt alloys, ferrites, etc.
- Typical inductors use plated materials such as permalloy or other compositions of nickel and iron, however other ferromagnetic materials and deposition techniques may be employed as would be known to someone skilled in the art.
- the layer thickness in thin film inductors is controlled by deposition time. Variations in layer thickness can therefore typically be made at no additional cost.
- the insulating layers may be made of any non-magnetic insulating material known in the art, such as aluminum oxides (for example, alumina), silicon oxides, silicon nitrides, polymers, etc. As will be appreciated by those of skill in the art, the insulating layers are usually much thinner than any of the magnetic layers.
- Winding 136 is a current carrier that is configured as a spiral shape with four windings. To maximize the inductance available with this current carrier shape, two sets of top and bottom yokes (as depicted in FIG. 1 ) are provided. Alternatively, any type of current carrier configurations (now known or to be developed in the future) could be used in various embodiments of the present invention. For example, a straight stripline current carrier configuration, not including any return path, could be used as the current carrier. For this configuration a single set of yokes would be used, and a connection to the current carrier of the inductor would be made at either end of the structure.
- Substrate layer 150 is shown in FIG. 2 as partially cut away for clarity of illustration purposes.
- substrate layer 150 is made of silicon, and provides structural integrity and support for the other laminated components of thin film inductor 100 .
- Alternative substrate layer 150 could be made of other materials (now known or to be developed in the future), and substrate layers of various embodiments may include multiple discrete layers, semiconductor and/or integrated circuit electrical structures or the like, as will be appreciated by those of skill in the art.
- magnetic via zones are formed where there is a low reluctance between the top and bottom pole pieces.
- via zones 152 are formed where the magnetic layers of the top and bottom pole pieces are in close physical proximity.
- magnetic vias can be formed through an intermediate magnetic piece that extends from the bottom of the top pole piece to the top of the bottom pole piece.
- the quality factor (or Q) of an inductor is the ratio of its inductive reactance to its resistance at a given frequency, and is a measure of its efficiency.
- Graph 200 of FIG. 3 shows the inductor Q against frequency. More specifically, each curve represents a different thickness distribution for the magnetic layers of the inductor. At the 100 megahertz (MHz) frequency, an inductor with conventional uniform thickness layers has a Q value of about 8.2, whereas the embodiment with the greatest thickness variation has a Q value of about 8.6, meaning that the increase in Q is about 5% for this “large thickness variation” embodiment. Additional gains are likely by optimizing the structure.
- the relative thinness of the inner layers causes a reduction in overall inductance of the thin film inductor because more magnetic flux is carried through the relatively thick outer layers, which have a higher reluctance due to the laminations in the magnetic via.
- the reduction of the resistance loss due to the lamination thickness change more than compensates for this loss of inductance. The net result is an inductor with an overall higher Q and better performance.
- inductor 100 could be modified to make such an embodiment by: (i) making layers 104 and 108 have the same thickness; (ii) making layers 112 and 116 have the same thickness, which is a thickness smaller than the thickness of layers 104 and 108 ; (iii) making layers 120 and 124 have the same thickness; (ii) making layers 128 and 132 have the same thickness, which is a thickness larger than the thickness of layers 120 and 124 .
- Present invention should not be taken as an absolute indication that the subject matter described by the term “present invention” is covered by either the claims as they are filed, or by the claims that may eventually issue after patent prosecution; while the term “present invention” is used to help the reader to get a general feel for which disclosures herein that are believed as maybe being new, this understanding, as indicated by use of the term “present invention,” is tentative and provisional and subject to change over the course of patent prosecution as relevant information is developed and as the claims are potentially amended.
- Embodiment see definition of “present invention” above—similar cautions apply to the term “embodiment.”
- Mechanically connected Includes both direct mechanical connections, and indirect mechanical connections made through intermediate components; includes rigid mechanical connections as well as mechanical connection that allows for relative motion between the mechanically connected components; includes, but is not limited to, welded connections, solder connections, connections by fasteners (for example, nails, bolts, screws, nuts, hook-and-loop fasteners, knots, rivets, quick-release connections, latches and/or magnetic connections), force fit connections, friction fit connections, connections secured by engagement caused by gravitational forces, pivoting or rotatable connections, and/or slidable mechanical connections.
- fasteners for example, nails, bolts, screws, nuts, hook-and-loop fasteners, knots, rivets, quick-release connections, latches and/or magnetic connections
- force fit connections for example, nails, bolts, screws, nuts, hook-and-loop fasteners, knots, rivets, quick-release connections, latches and/or magnetic connections
- force fit connections for example, nails, bolts, screws, nuts, hook-and-
- Thin film inductor any inductor made with integrated circuit fabrication techniques; integrated circuit fabrication techniques include, but are not limited to, various types of deposition (for example, sputter deposition), various types of material removal (for example, planarization, etch processes), various types of patterning (for example, photolithography), etc.
- various types of deposition for example, sputter deposition
- various types of material removal for example, planarization, etch processes
- various types of patterning for example, photolithography
- Over/under “Over” or “under” should not be taken to imply that a subject and object of the spatial relationship touch each other; for example, if a first layer is located over a second layer, then the first and second layers may, or may not, touch each other because there might be one or more intermediate layers between the first and second layers.
- vertical and horizontal references are used herein based on a convention that the substrate underlies the yokes and current carrier, which effectively defines the “vertical” and “horizontal;” while this convenient convention is used in this document, it will be understood by those of skill in the art that the thin film inductors of the present invention, like conventional thin film inductors, may be susceptible to fabrication and/or use such that the “vertical” direction is not aligned with the direction of Earth's gravitational field.
- Current-carrier-facing surface the surface of the laminated magnetic yoke that is closest to the current carrier portion, which is to say the top surface of the bottom yoke or the bottom surface of the top yoke; the current carrier surface may be a magnetic layer or an insulative layer, but it is noted that the material that encapsulates the current carrier (for example, see insulator 134 in FIG. 1 ) is not considered as part of the yoke).
- Base portion any base upon which thin film inductor layers are formed, patterned and/or deposited; for example, a base portion may simply be a silicon substrate when the first layer of the bottom yoke is deposited; as a further example, the base portion may include the layers of the bottom yoke, a current carrier portion and insulator portion (for example, see insulator 134 in FIG. 1 ) at the time that the first layer of the top yoke portion is deposited.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
Claims (12)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/143,662 US9047890B1 (en) | 2013-12-30 | 2013-12-30 | Inductor with non-uniform lamination thicknesses |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/143,662 US9047890B1 (en) | 2013-12-30 | 2013-12-30 | Inductor with non-uniform lamination thicknesses |
Publications (1)
Publication Number | Publication Date |
---|---|
US9047890B1 true US9047890B1 (en) | 2015-06-02 |
Family
ID=53190725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/143,662 Expired - Fee Related US9047890B1 (en) | 2013-12-30 | 2013-12-30 | Inductor with non-uniform lamination thicknesses |
Country Status (1)
Country | Link |
---|---|
US (1) | US9047890B1 (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180005740A1 (en) * | 2016-06-29 | 2018-01-04 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
CN109643598A (en) * | 2016-09-22 | 2019-04-16 | 苹果公司 | Utilize the coupled-inductor structure of thin magnetic film |
US10283249B2 (en) | 2016-09-30 | 2019-05-07 | International Business Machines Corporation | Method for fabricating a magnetic material stack |
US10593449B2 (en) | 2017-03-30 | 2020-03-17 | International Business Machines Corporation | Magnetic inductor with multiple magnetic layer thicknesses |
US10597769B2 (en) | 2017-04-05 | 2020-03-24 | International Business Machines Corporation | Method of fabricating a magnetic stack arrangement of a laminated magnetic inductor |
US10607759B2 (en) | 2017-03-31 | 2020-03-31 | International Business Machines Corporation | Method of fabricating a laminated stack of magnetic inductor |
US10811177B2 (en) * | 2016-06-30 | 2020-10-20 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
CN113016043A (en) * | 2018-12-17 | 2021-06-22 | 华为技术有限公司 | Thin film inductor and manufacturing method thereof, integrated circuit and terminal equipment |
US11058001B2 (en) * | 2012-09-11 | 2021-07-06 | Ferric Inc. | Integrated circuit with laminated magnetic core inductor and magnetic flux closure layer |
US11064610B2 (en) | 2012-09-11 | 2021-07-13 | Ferric Inc. | Laminated magnetic core inductor with insulating and interface layers |
US11116081B2 (en) | 2012-09-11 | 2021-09-07 | Ferric Inc. | Laminated magnetic core inductor with magnetic flux closure path parallel to easy axes of magnetization of magnetic layers |
US11170933B2 (en) | 2017-05-19 | 2021-11-09 | International Business Machines Corporation | Stress management scheme for fabricating thick magnetic films of an inductor yoke arrangement |
US11197374B2 (en) | 2012-09-11 | 2021-12-07 | Ferric Inc. | Integrated switched inductor power converter having first and second powertrain phases |
US11302469B2 (en) | 2014-06-23 | 2022-04-12 | Ferric Inc. | Method for fabricating inductors with deposition-induced magnetically-anisotropic cores |
US11404197B2 (en) * | 2017-06-09 | 2022-08-02 | Analog Devices Global Unlimited Company | Via for magnetic core of inductive component |
Citations (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08130117A (en) | 1994-10-31 | 1996-05-21 | Kyocera Corp | Laminated inductor |
JP2000114041A (en) | 1998-10-09 | 2000-04-21 | Alps Electric Co Ltd | Thin-film laminated body manufacture thereof and thin- film transformer using the same, thin-film inductor, and thin-film magnetic head |
US6346336B1 (en) | 1998-05-27 | 2002-02-12 | Matsushita Electrical Industrial Co., Ltd. | Soft magnetic film soft magnetic multilayer film method of manufacturing the same and magnetic device |
US6490128B1 (en) * | 1999-05-13 | 2002-12-03 | Alps Electric Co., Ltd. | Thin-film device with improved cohesion and electrical conductance between electrically conductive thin-film and electrical conductor in contact therewith, and manufacturing method therefor |
US6970323B2 (en) * | 2002-04-04 | 2005-11-29 | Tdk Corporation | Micro device including a thin film wiring structure and method for fabricating the same |
US7365943B2 (en) * | 2004-12-16 | 2008-04-29 | Japan Science And Technology Agency | Thin film magnetic head and method for manufacturing the same |
US7428776B2 (en) * | 2001-05-21 | 2008-09-30 | Sony Corporation | Method of manufacturing a magnetic head |
US7457080B2 (en) * | 2004-11-05 | 2008-11-25 | Tdk Corporation | Perpendicular magnetic recording head, method of manufacturing the same, and magnetic recording apparatus |
US20090051474A1 (en) | 2007-08-20 | 2009-02-26 | Samsung Electro-Mechanics Co., Ltd. | Laminated inductor |
US7560931B2 (en) | 2005-04-22 | 2009-07-14 | Ge Medical Systems Global Technology Company, Llc | Switching device compatible with RF coil and magnetic resonance imaging system |
US20100060397A1 (en) | 2008-09-09 | 2010-03-11 | Gm Global Technology Operations, Inc. | Inductor array with shared flux return path for a fuel cell boost converter |
US7791836B2 (en) * | 2006-03-31 | 2010-09-07 | Tdk Corporation | Thin film magnetic device having strip-shaped magnetic films with their magnetization easy axes arranged orthogonal to a thin film coil and method of manufacturing the same |
US7791837B2 (en) * | 2006-03-31 | 2010-09-07 | Tdk Corporation | Thin film device having thin film coil wound on magnetic film |
JP2012009795A (en) | 2010-06-28 | 2012-01-12 | Taiyo Yuden Co Ltd | Magnetic thin film and magnetic device |
US8159044B1 (en) | 2009-11-20 | 2012-04-17 | Altera Corporation | Density transition zones for integrated circuits |
US8164853B2 (en) * | 2010-03-08 | 2012-04-24 | Tdk Corporation | Perpendicular magnetic write head with side shield saturation magnetic flux density increasing away from magnetic pole |
US8233237B2 (en) * | 2010-06-21 | 2012-07-31 | Tdk Corporation | Perpendicular magnetic write head and magnetic recording device |
JP2012169407A (en) | 2011-02-14 | 2012-09-06 | Murata Mfg Co Ltd | Laminated inductor component |
US20120280781A1 (en) | 2011-05-02 | 2012-11-08 | Peter Smeys | Method of making a controlled seam laminated magnetic core for high frequency on-chip power inductors |
-
2013
- 2013-12-30 US US14/143,662 patent/US9047890B1/en not_active Expired - Fee Related
Patent Citations (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08130117A (en) | 1994-10-31 | 1996-05-21 | Kyocera Corp | Laminated inductor |
US6346336B1 (en) | 1998-05-27 | 2002-02-12 | Matsushita Electrical Industrial Co., Ltd. | Soft magnetic film soft magnetic multilayer film method of manufacturing the same and magnetic device |
JP2000114041A (en) | 1998-10-09 | 2000-04-21 | Alps Electric Co Ltd | Thin-film laminated body manufacture thereof and thin- film transformer using the same, thin-film inductor, and thin-film magnetic head |
US6490128B1 (en) * | 1999-05-13 | 2002-12-03 | Alps Electric Co., Ltd. | Thin-film device with improved cohesion and electrical conductance between electrically conductive thin-film and electrical conductor in contact therewith, and manufacturing method therefor |
US7428776B2 (en) * | 2001-05-21 | 2008-09-30 | Sony Corporation | Method of manufacturing a magnetic head |
US6970323B2 (en) * | 2002-04-04 | 2005-11-29 | Tdk Corporation | Micro device including a thin film wiring structure and method for fabricating the same |
US7457080B2 (en) * | 2004-11-05 | 2008-11-25 | Tdk Corporation | Perpendicular magnetic recording head, method of manufacturing the same, and magnetic recording apparatus |
US7365943B2 (en) * | 2004-12-16 | 2008-04-29 | Japan Science And Technology Agency | Thin film magnetic head and method for manufacturing the same |
US7560931B2 (en) | 2005-04-22 | 2009-07-14 | Ge Medical Systems Global Technology Company, Llc | Switching device compatible with RF coil and magnetic resonance imaging system |
US7791837B2 (en) * | 2006-03-31 | 2010-09-07 | Tdk Corporation | Thin film device having thin film coil wound on magnetic film |
US7791836B2 (en) * | 2006-03-31 | 2010-09-07 | Tdk Corporation | Thin film magnetic device having strip-shaped magnetic films with their magnetization easy axes arranged orthogonal to a thin film coil and method of manufacturing the same |
US20090051474A1 (en) | 2007-08-20 | 2009-02-26 | Samsung Electro-Mechanics Co., Ltd. | Laminated inductor |
US20100060397A1 (en) | 2008-09-09 | 2010-03-11 | Gm Global Technology Operations, Inc. | Inductor array with shared flux return path for a fuel cell boost converter |
US8159044B1 (en) | 2009-11-20 | 2012-04-17 | Altera Corporation | Density transition zones for integrated circuits |
US8164853B2 (en) * | 2010-03-08 | 2012-04-24 | Tdk Corporation | Perpendicular magnetic write head with side shield saturation magnetic flux density increasing away from magnetic pole |
US8233237B2 (en) * | 2010-06-21 | 2012-07-31 | Tdk Corporation | Perpendicular magnetic write head and magnetic recording device |
JP2012009795A (en) | 2010-06-28 | 2012-01-12 | Taiyo Yuden Co Ltd | Magnetic thin film and magnetic device |
JP2012169407A (en) | 2011-02-14 | 2012-09-06 | Murata Mfg Co Ltd | Laminated inductor component |
US20120280781A1 (en) | 2011-05-02 | 2012-11-08 | Peter Smeys | Method of making a controlled seam laminated magnetic core for high frequency on-chip power inductors |
Non-Patent Citations (2)
Title |
---|
Grandi et al., "Model of Laminated Iron-Core Inductors for High Frequencies", IEEE Transactions on Magnetics, vol. 40, No. 4, Jul. 2004, pp. 1839-1845, Digital Object Identifier 10.1109/TMAG.2004.830508, Copyright 2004 IEEE. |
Shah, "Development of Mems Power Inductors with Submicron Laminations Using an Automated Electroplating System", A Thesis Presented to the Academic Faculty, Georgia Institute of Technology, Dec. 2007. |
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11058001B2 (en) * | 2012-09-11 | 2021-07-06 | Ferric Inc. | Integrated circuit with laminated magnetic core inductor and magnetic flux closure layer |
US12048097B2 (en) * | 2012-09-11 | 2024-07-23 | Ferric Inc. | Integrated circuit with laminated magnetic core inductor and magnetic flux closure layer |
US11197374B2 (en) | 2012-09-11 | 2021-12-07 | Ferric Inc. | Integrated switched inductor power converter having first and second powertrain phases |
US20210321518A1 (en) * | 2012-09-11 | 2021-10-14 | Ferric Inc. | Integrated Circuit with Laminated Magnetic Core Inductor and Magnetic Flux Closure Layer |
US11116081B2 (en) | 2012-09-11 | 2021-09-07 | Ferric Inc. | Laminated magnetic core inductor with magnetic flux closure path parallel to easy axes of magnetization of magnetic layers |
US11064610B2 (en) | 2012-09-11 | 2021-07-13 | Ferric Inc. | Laminated magnetic core inductor with insulating and interface layers |
US11302469B2 (en) | 2014-06-23 | 2022-04-12 | Ferric Inc. | Method for fabricating inductors with deposition-induced magnetically-anisotropic cores |
US20180005740A1 (en) * | 2016-06-29 | 2018-01-04 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
US10573444B2 (en) * | 2016-06-29 | 2020-02-25 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
US10304603B2 (en) * | 2016-06-29 | 2019-05-28 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
US10811177B2 (en) * | 2016-06-30 | 2020-10-20 | International Business Machines Corporation | Stress control in magnetic inductor stacks |
CN109643598A (en) * | 2016-09-22 | 2019-04-16 | 苹果公司 | Utilize the coupled-inductor structure of thin magnetic film |
US11430606B2 (en) | 2016-09-22 | 2022-08-30 | Apple Inc. | Coupled inductor structures utilizing magnetic films |
US10283249B2 (en) | 2016-09-30 | 2019-05-07 | International Business Machines Corporation | Method for fabricating a magnetic material stack |
US10943732B2 (en) | 2016-09-30 | 2021-03-09 | International Business Machines Corporation | Magnetic material stack and magnetic inductor structure fabricated with surface roughness control |
US11205541B2 (en) | 2016-09-30 | 2021-12-21 | International Business Machines Corporation | Method for fabricating a magnetic material stack |
US10593450B2 (en) | 2017-03-30 | 2020-03-17 | International Business Machines Corporation | Magnetic inductor with multiple magnetic layer thicknesses |
US10593449B2 (en) | 2017-03-30 | 2020-03-17 | International Business Machines Corporation | Magnetic inductor with multiple magnetic layer thicknesses |
US11361889B2 (en) | 2017-03-30 | 2022-06-14 | International Business Machines Corporation | Magnetic inductor with multiple magnetic layer thicknesses |
US11222742B2 (en) | 2017-03-31 | 2022-01-11 | International Business Machines Corporation | Magnetic inductor with shape anisotrophy |
US10607759B2 (en) | 2017-03-31 | 2020-03-31 | International Business Machines Corporation | Method of fabricating a laminated stack of magnetic inductor |
US10597769B2 (en) | 2017-04-05 | 2020-03-24 | International Business Machines Corporation | Method of fabricating a magnetic stack arrangement of a laminated magnetic inductor |
US11479845B2 (en) | 2017-04-05 | 2022-10-25 | International Business Machines Corporation | Laminated magnetic inductor stack with high frequency peak quality factor |
US11170933B2 (en) | 2017-05-19 | 2021-11-09 | International Business Machines Corporation | Stress management scheme for fabricating thick magnetic films of an inductor yoke arrangement |
US11367569B2 (en) | 2017-05-19 | 2022-06-21 | International Business Machines Corporation | Stress management for thick magnetic film inductors |
US11404197B2 (en) * | 2017-06-09 | 2022-08-02 | Analog Devices Global Unlimited Company | Via for magnetic core of inductive component |
EP3886126A4 (en) * | 2018-12-17 | 2021-12-22 | Huawei Technologies Co., Ltd. | Thin-film inductor and manufacturing method therefor, integrated circuit and terminal device |
CN113016043A (en) * | 2018-12-17 | 2021-06-22 | 华为技术有限公司 | Thin film inductor and manufacturing method thereof, integrated circuit and terminal equipment |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9047890B1 (en) | Inductor with non-uniform lamination thicknesses | |
US20200243240A1 (en) | Isolated power converter with magnetics on chip | |
KR101903804B1 (en) | Thin film inductor with integrated gaps | |
Gardner et al. | Review of on-chip inductor structures with magnetic films | |
EP2704163B1 (en) | A magnetic core for use in an integrated circuit, an integrated circuit including such a magnetic core, a transformer and an inductor fabricated as part of an integrated circuit | |
US7864013B2 (en) | Devices and methods for redistributing magnetic flux density | |
US8717136B2 (en) | Inductor with laminated yoke | |
US7875955B1 (en) | On-chip power inductor | |
CN105244344B (en) | Used in the Inductive component of integrated circuit, segment set is formed into the transformer and inductor of circuit | |
US20210383958A1 (en) | Patterned magnetic cores | |
US7140092B2 (en) | Methods for manufacturing inductor cores | |
US9064628B2 (en) | Inductor with stacked conductors | |
RU2320045C1 (en) | Transformer | |
TWI611435B (en) | Inductor core | |
EP2787515B1 (en) | Inductor gap spacer | |
US20190156989A1 (en) | Electromagnetic induction device and manufacturing method therefor | |
US20160203904A1 (en) | Thin film inductor with extended yokes | |
JP2011243715A (en) | Reactor | |
US20100194510A1 (en) | Inductive Electrical Device | |
CN114730654A (en) | Electromagnetic induction device | |
JP2000182850A (en) | Thin-film transformer | |
WO2014168969A1 (en) | Planar core-type uniform external field equalizer and fabrication | |
JP7288651B2 (en) | planar transformer | |
CN102568778B (en) | Laminated power coil type device | |
JPH0536536A (en) | Planar inductance part |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW Y Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HERGET, PHILIPP;REEL/FRAME:031859/0128 Effective date: 20131229 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20190602 |