US8692460B2 - Highly doped electro-optically active organic diode with short protection layer - Google Patents
Highly doped electro-optically active organic diode with short protection layer Download PDFInfo
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- 239000010410 layer Substances 0.000 claims abstract description 163
- 239000012044 organic layer Substances 0.000 claims abstract description 72
- 239000000463 material Substances 0.000 claims abstract description 70
- 239000002800 charge carrier Substances 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims abstract description 37
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 3
- 229910000421 cerium(III) oxide Inorganic materials 0.000 claims 2
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 claims 2
- 230000007547 defect Effects 0.000 description 14
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 9
- 239000011368 organic material Substances 0.000 description 9
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 8
- 230000006870 function Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000002207 thermal evaporation Methods 0.000 description 8
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 229910052747 lanthanoid Inorganic materials 0.000 description 7
- 150000002602 lanthanoids Chemical class 0.000 description 7
- 230000001627 detrimental effect Effects 0.000 description 6
- 239000003292 glue Substances 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 4
- 150000004770 chalcogenides Chemical class 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 4
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- -1 alkali metals Chemical class 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 150000003384 small molecules Chemical class 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000004768 lowest unoccupied molecular orbital Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- ABXHLPWEGSOZHG-UHFFFAOYSA-N naphthalene-1,2,4,8-tetracarboxylic acid Chemical compound C1=CC=C(C(O)=O)C2=C(C(O)=O)C(C(=O)O)=CC(C(O)=O)=C21 ABXHLPWEGSOZHG-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000005022 packaging material Substances 0.000 description 2
- 229920002098 polyfluorene Polymers 0.000 description 2
- INCIMLINXXICKS-UHFFFAOYSA-M pyronin Y Chemical compound [Cl-].C1=CC(=[N+](C)C)C=C2OC3=CC(N(C)C)=CC=C3C=C21 INCIMLINXXICKS-UHFFFAOYSA-M 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- RICKKZXCGCSLIU-UHFFFAOYSA-N 2-[2-[carboxymethyl-[[3-hydroxy-5-(hydroxymethyl)-2-methylpyridin-4-yl]methyl]amino]ethyl-[[3-hydroxy-5-(hydroxymethyl)-2-methylpyridin-4-yl]methyl]amino]acetic acid Chemical compound CC1=NC=C(CO)C(CN(CCN(CC(O)=O)CC=2C(=C(C)N=CC=2CO)O)CC(O)=O)=C1O RICKKZXCGCSLIU-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 206010039921 Selenium deficiency Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- RJWLRCHYHHXJLX-UHFFFAOYSA-N barium(2+);selenium(2-) Chemical class [Se-2].[Ba+2] RJWLRCHYHHXJLX-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 150000002605 large molecules Chemical group 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- YWDGEUIDOIIHTK-UHFFFAOYSA-N selanylidenebarium Chemical compound [Ba]=[Se] YWDGEUIDOIIHTK-UHFFFAOYSA-N 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
- H01L27/1244—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits for preventing breakage, peeling or short circuiting
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
- H10K50/171—Electron injection layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
- H10K50/155—Hole transporting layers comprising dopants
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/16—Electron transporting layers
- H10K50/165—Electron transporting layers comprising dopants
Definitions
- the present invention relates generally to electro-optically active organic diodes, such as used in organic solar cells and as organic light emitting diodes (OLEDs). More specifically it relates to an electro-optically active organic diode comprising an anode electrode, a cathode electrode, an electro-optically active organic layer arranged between the electrodes, and a charge carrier organic layer formed of a highly doped organic semiconductor material.
- Electro-optically active organic diodes are for example used as organic light emitting diodes (OLEDs), in lightning devices, in display devices and in organic solar cell devices.
- An organic diode in an organic solar cell device is arranged to generate electricity from light, whilst in a lightning device, the organic diode is arranged to generate light from electricity.
- OLEDs organic light emitting diodes
- US 20050040390 presents doped organic semiconductor materials that can be used to improve OLEDs.
- the materials have enhanced charge carrier density and effective charge carrier mobility.
- the doping is achieved by doping an organic semiconductor material with organic molecules, which, for example, allow doping of polymer layers with large, non-mobile molecules.
- US 20060033115 discloses a transparent light emitting organic diode component using highly doped organic layers as transport layers for holes and electrons.
- the transport layers are arranged adjacent to electrodes.
- Dopants are organic molecules with molecular masses above 200 g/mole. Doping concentrations are in the range between 1:10 and 1:10000.
- the invention is partly based on the discovery that one large contributor to unreliable conventional electro-optically active organic diodes, especially such of large areas, and in particularly such that employ charge carrier layers of highly doped organic semiconductor material, seems to be shorts that occur between cathode and anode electrodes, and the extent of damage such shorts have on the organic material arranged in between. It further seems like one factor contributing to these shorts is the occurrence of high field strengths in the cathode owing to unintentional physical defects in the cathode, especially defects having sharp edges, which can give rise to very high, local field strengths.
- the sharp edges may for example be located at pinholes or at a rough or damaged (e.g.
- a result from increased field strength may be locally raised temperatures and sometimes softening and melting cathode material. Since the organic materials used in electro-optically active organic diodes, and organic materials in general, only can withstand comparatively low temperatures and often have a comparatively low melting/pyrolysis temperature, the raised temperatures may cause the organic layer material to degrade and/or soften, which in combination with the often high electro-static pressure of many bars between cathode and anode, seem to increase the risk of damaged organic material and a short to occur between the cathode and anode through the organic material, typically at spots where the organic layer, for example due to the above reason, has become very thin, or damaged in any other way. As a result there can be relatively high currents, which lead to even higher temperatures and greater damage.
- an electro-optically active organic diode comprising an anode electrode layer, a cathode electrode layer, an electro-optically active organic layer arranged between the electrodes, and a charge carrier organic layer arranged between said electro-optically active organic layer and said cathode electrode layer, and adjacent to said electro-optically active organic layer, wherein said charge carrier organic layer is formed of a highly doped organic semiconductor material.
- a short protection layer is arranged between said cathode electrode layer and said charge carrier organic layer, and adjacent to said cathode electrode layer, wherein said short protection layer is formed of an inorganic semiconductor material.
- Electro-optically active here refers to the ability to transform light to electricity, and/or electricity to light.
- the layer comprises a material, for example in form of a sub-layer, that has this ability
- the layer comprises a material, for example in form of a layer, that has this ability, which for example is the case for an organic light emitting diode (OLED).
- OLED organic light emitting diode
- an “anode electrode” typically is an electrode for hole injection, e.g. in the form of a base layer deposited on a carrier or substrate.
- a “cathode electrode” typically is an electrode for electron injection, e.g. in the form of a deposited top layer.
- the short protection layer prevents direct contact between the cathode layer and the charge carrier organic layer, which reduces the risk that the cathode layer will have detrimental impact on the charge carrier organic layer, and this, in turn, reduces the risk of a short to occur between the cathode and the anode.
- An inorganic material is typically not as sensitive as an organic material and it is thus better suited for protective purposes.
- a semiconductor material typically has good transparency, which is a desirable property for a layer arranged between the cathode electrode and organic layers.
- the short protection layer may be conducting.
- the layer is typically conducting, although less conducting than the cathode, and in spite of that the material used per se is a semiconductor.
- Being conductive allows for thicker layers, which is beneficial for protection purposes. Better conductivity typically means that thicker layers are possible and thus better short protection.
- the thickness can be used to achieve a conduction that is beneficial for reducing currents that tend to increase and be detrimental in a situation of an imminent short.
- the inorganic semiconductor material preferably has a higher melting temperature than the material of the cathode layer. This allows the organic diode to better withstand a situation where heat is developed that risks to melt the electrode material. A short protection layer that remains intact and rigid in such a situation further protects the charge carrier organic layer from getting in direct contact with the electrode material and distributes the force and pressure exerted on the organic layers over a large surface, which reduces the risk of compressed and damaged organic layers.
- the inorganic semiconductor material may have a band gap greater than 2.7 eV, and preferably greater than 3 eV. This means that blue electro luminescence may not be absorbed and that thus generation of photoelectrons is not possible at an interface between the short protection layer and the charge carrier organic layer. Further, the short protection layer will be stable against hot electrons that may be generated at the interface between the short protection layer and the cathode layer. Photoelectrons are thermalised in the short protection layer and thus may not damage the organic layer.
- An advantageous side effect with a band gap greater than about 2.7 eV is that the short protection layer also will serve as a exciton blocking layer.
- the inorganic semiconductor material may have an electron affinity between 0.5 eV and 3.5 eV. This can adapt and minimize the injection barrier for electrons into the lowest unoccupied molecular orbital (LUMO) of the charge carrier organic layer, and the short protection layer may additionally act as an electron injection layer.
- LUMO lowest unoccupied molecular orbital
- the inorganic semiconductor material may have a dielectric constant>1, preferably >10, and more preferably >30. Materials of a high dielectric constant reduces the field strength at for example sharp edges of a defect and thus help to decrease the risk of high field strengths that ultimately may lead to a short.
- the inorganic semiconductor material may comprise a chalcogenide or binary oxide of an alkali earth metal or lanthanide, preferably BaO, BaSe, La 2 O 3 or Ce 2 O 3 .
- the short protection layer may have a thickness of at least 50 ⁇ , preferably above 200 ⁇ .
- surface defects such as pin holes, other voids and sharp defects, become filled and covered, and the risk of high field strengths to occur at such defects is reduced. This reduces the risk of conditions that may lead to a short.
- the short protection layer reduces the risk of detrimental impact on the organic layer and the risk of a short to occur between the cathode and the anode.
- lightning device such as a lamp, a display device or an organic solar cell device which comprises the electro-optically active organic diode.
- FIG. 1 schematically shows a cross-sectional view of layers in an electro-optically active organic diode according to an embodiment.
- FIG. 2 a schematically shows, by way of example, a cross-sectional view of a bilayer electro-optically active organic layer in an electro-optically active organic diode as of FIG. 1 .
- FIG. 2 b schematically shows a cross-sectional view of a bilayer that is an alternative to the organic layer showed in FIG. 2 a.
- FIG. 3 schematically shows a cross-sectional view of layers in an electro-optically active organic diode according to another embodiment.
- FIG. 1 schematically shows a cross-sectional view of layers in an electro-optically active organic diode according to an embodiment.
- the organic diode comprises a substrate 100 , an anode layer 102 , an electro-optically active organic layer 110 , a charge carrier organic layer 116 , an inorganic short protection layer 120 and a cathode layer 122 .
- the substrate 100 is typically transparent and may for example be made of a ceramic, e.g. glass or silicon, a plastic or a metal.
- the substrate may be rigid or flexible.
- the anode layer 102 is a hole-injecting layer, typically of a relatively high work function and electrically conducting material, and is typically transparent in order to let light through, which is indicated by an arrow in FIG. 1 .
- a transparent material suitable for the anode layer is indium tin oxide (ITO).
- ITO indium tin oxide
- Other examples include metals, metal oxides, doped inorganic semiconductors, doped conducting polymers or small molecules etc.
- the thickness of the anode layer 102 is typically in the range of about 100 ⁇ to 3000 ⁇ .
- the anode layer 102 may be deposited on the substrate 100 by any of a variety of depositing techniques for thin films known in the art, for example, vacuum evaporation, sputtering, electron beam deposition or chemical vapor deposition.
- the electro-optically active organic layer 110 may comprise sub layers, but at least one active, emissive/absorbing layer for transformation of electricity to/from light.
- the total thickness of the organic layer 110 may be above about 500 ⁇ , but preferably above 1000 ⁇ .
- a smoother underlying surface for example the anode layer or the substrate, in general allows for a thinner organic layer.
- an arrow indicates that light is emitted from the organic layer 110 and that light passes out through the anode 102 and substrate 100 . It may be noted that in alternative embodiments, the emitted light instead is let out through a transparent cathode or through both cathode and anode, and in other alternative embodiments there may instead be absorption of light.
- the charge carrier organic layer 116 is of a highly doped organic semiconductor material, which typically has a doping concentration in the range of 1:10000 to 1:10. Dopants may be organic molecules or fragments thereof.
- the organic molecules used for doping typically have a molecular mass of 200 g/mole or more. In practice, an upper limit is typically 1200 g/mole.
- the charge carrier organic layer 116 When the charge carrier organic layer 116 is arranged between the electro-optically active organic layer 110 and the cathode layer 122 , as in FIG. 1 , it is typically used as an electron injection and/or transport layer, and the highly doped organic semiconductor material is n-doped.
- another charge carrier organic layer is arranged between the electro-optically active organic layer 110 and the anode layer 122 , typically for use as an hole injection and/or transport layer, and the highly doped organic semiconductor material is p-doped.
- Examples of highly doped organic semiconductor materials include for example 1,4,2,8-naphthalene tetra carboxylic dianhydride (NDTCA) doped with tetraethyl pyronin chloride.
- NDTCA 1,4,2,8-naphthalene tetra carboxylic dianhydride
- thicknesses of highly doped charge carrier organic layers typically can be greater than what is practically achievable with undoped charge carrier layers.
- the thickness may be up to, for example, 1000 ⁇ or more.
- the charge carrier organic layer 116 can be deposited using any conventional techniques for depositing such a layer, which include, for example, thermal evaporation or organic vapor phase deposition.
- thermal evaporation or organic vapor phase deposition When the charge carrier layer 116 is deposited on the electro-optically active organic layer 110 , care should be taken not to damage the electro-optically active organic layer. However, since both layers are organic, this is typically not a problem.
- the short protection layer 120 is of an inorganic semiconductor material that may have an electron affinity between about 0.5 eV and about 3.5 eV, a bandgap greater than about 2.6 eV, and preferably greater than about 3 eV and a melting point that is higher than the melting point of the cathode layer 122 material.
- Materials that have been found to be suitable for the short protection layer 120 are, for example, included in the chalcogenides or binary oxides of alkali earth metals or lanthanides, for example barium oxide (BaO), barium selenide (BaSe), lanthanum oxide (La 2 O 3 ) and cerium oxide (Ce 2 O 3 ).
- barium oxide BaO
- barium selenide BaSe
- lanthanum oxide La 2 O 3
- Ce 2 O 3 cerium oxide
- Other examples may include mixtures involving chalcogenides and/or binary oxides of alkali earth metals, or lanthanides, or mixtures of chalcogenides and/or binary oxides of alkali earth metals with low electron affinity metals, such as alkali metals, alkali earth metals and/or lanthanides.
- the dielectric constant of the inorganic semiconductor material may be greater than 1, for example greater than 10 or even 30.
- BaO for example, has a dielectric constant of about 34.
- the thickness of the short protection layer 120 may be in the range of about 10 ⁇ to 50000 ⁇ , preferably in the range of about 50 ⁇ to 10000 ⁇ , and typically in the range of about 100 ⁇ to 1000 ⁇ . Often a thickness of at least 200 ⁇ is desired.
- the short protection layer 120 When the short protection layer 120 is deposited on the charge carrier organic layer 116 , this should be done in a way that is non-detrimental for the charge carrier organic layer.
- Such methods for depositing the short protection layer 120 include, for example, thermal evaporation.
- the short protection layer 120 may be created by first depositing the alkali earth metal or lanthanide, for example by thermal evaporation, and then perform an in situ oxidation, for example by dosing oxygen into a vessel that has been used for the evaporation, to transform the alkali earth metal or lanthanide into a corresponding binary oxide. This may be particularly useful when the temperature needed for direct thermal evaporation of the binary oxide is very high.
- the cathode layer 122 is typically a metallic material or a metal and may be a material having a comparatively low work function. However, in order to be environmentally stable and less reactive, typically a material is selected that has higher work function and is more stable, or a low work function material may be alloyed or combined with a more stable material. Examples of materials of a low work function are calcium (Ca), Magnesium (Mg) and Barium (Ba). Examples of materials of higher work function, but that are more stable, are aluminum (Al), copper (Cu) or silver (Ag). When light is to be passed via the anode and not via the cathode, the material of the cathode should typically be a good mirror, i.e. be reflective to the light in question.
- Al and Ag is considered as good mirror materials in this context.
- a not so low work function of the cathode may to some extent be compensated for by the short protection layer 120 , which additionally may act as an electron-injecting layer.
- the charge carrier layer 116 may be strongly electron injecting, which thus allow for materials of the cathode layer 122 that may have an even higher work function.
- the thickness of the cathode layer 122 may be in the range of about 300 to 10000 ⁇ .
- the cathode layer 122 may be deposited on the short protection layer 120 by any one of a number of conventional techniques including for example thermal evaporation.
- FIG. 2 a schematically shows, by way of example, a cross sectional view of the electro-optically active organic layer 110 .
- the electro-optically active organic layer 110 here has a bilayer structure and comprises a hole-transporting layer 113 (HTL), for example of N,N′-diphenyl-N,N′-bis(1-naphthyl)-1,1′biphenyl-4,4′′diamine (aNPD) and a combined electron-transporting and emissive layer 115 (ETL/EML), for example of Alq 3 .
- HTL hole-transporting layer 113
- ETL/EML combined electron-transporting and emissive layer 115
- An OLED employing such a structure may be termed a small molecule light emitting diode (smoLED or SM-LED).
- the organic layers 113 , 115 are in a smoLED typically deposited by thermal evaporation or organic vapor phase deposition.
- a smoLED electro-optically active organic layer 110 may comprise more or less layers, and layers of other organic materials, for example such as are used in conventional smoLEDs.
- FIG. 2 b schematically shows a cross sectional view of an electro-optically active organic layer 210 that has another bilayer composition than the electro-optically active organic layer 110 of FIG. 2 a .
- the organic layer 210 here comprises an organic HIL 211 , for example of poly(3,4-ethylenedioxythiophene) (PEDOT) and a combined ETL/EML 215 , for example of polyfluorene (PF).
- PEDOT poly(3,4-ethylenedioxythiophene)
- ETL/EML 215 for example of polyfluorene (PF).
- the exemplified structure is per se known and is used in conventional OLEDs. It is an example of a so called large molecule, or polymer structure. An OLED employing such a structure may be termed a polymer light emitting diode (polyLED or PLED).
- the organic layers 211 , 215 are in a polyLED are typically deposited by spin-coating or printing techniques.
- a polyLED organic layer may comprise more or less layers, and layers of other organic materials, for example such as are used in conventional polyLEDs.
- the present invention is not dependent on any particular electro-optically active organic layer, electro-optically active organic layer structure, composition or material of the electro-optically active organic layer, but that the principles of the invention are applicable and compatible to the vast majority of electro-optically active organic layers such as used in conventional OLEDs and other electro-optically active organic diodes.
- FIG. 3 schematically shows a cross-sectional view of layers in an electro-optically active organic diode according to an embodiment where there are two charge carrier organic layers 316 a and 316 b and a cover layer 324 deposited on and covering a cathode layer 322 .
- Layers 300 , 302 , 310 , 316 a , 320 and 322 may correspond to the respective layers 100 , 102 , 110 , 116 , 120 and 122 of the embodiment presented in connection with FIG. 1 .
- the additional charge carrier organic layer 316 b is of a highly doped organic semiconductor material, i.e. corresponding to the charge carrier organic layer 316 a but of another material. Since the as charge carrier organic layer 316 b is arranged between the electro-optically active organic layer 310 and the anode layer 302 , it is typically used as an hole injection and/or transport layer and the highly doped organic semiconductor material is p-doped.
- the cover layer 324 is preferably of a different but substantially chemically inert material with respect to the material of the cathode layer 322 .
- the cover layer 324 is typically deposited on and completely covers one layer surface of the cathode layer 322 . Sharp edge defects, such as pin holes, voids and other defects and damages in the cathode layer 322 surface can be covered and filled by the cover layer 324 .
- One common cathode material that often is impaired by surface defects is Al.
- the material of the cover layer 324 may have a high dielectric constant that is greater than 1, for example greater than 10 or even 30. It may further be conductive.
- the materials are preferably thin film packaging materials or glues.
- thin film packaging materials are silicon nitride (SiN), silicon carbide (SiC), silicon dioxide (SiO 2 ) and aluminium oxide (Al 2 O 3 ), typically deposited by plasma enhanced vapor deposition (PECVD), such as inductively coupled PECVD (IC-PECVD).
- PECVD plasma enhanced vapor deposition
- Glues are preferably of epoxy-type, typically room temperature curable using two solutions, or UV-curable adhesives, typically one solution of epoxy or acrylic type.
- the filling and covering properties can be enhanced by reducing vicosity of the glue when it is applied, e.g. by heating to above room temperature, for example 70° C.
- the cover layer 324 may have environmental protection properties, for example by being inert to oxygen and humidity and thus protect the inner layers, e.g. the cathode layer 322 and the short protection layer 320 , from these or other substances that can be detrimental but likewise hard to avoid in environments of manufacturing or use.
- environmental protection properties may instead, or also, be provided by a second cover layer (not shown) which may be deposited on the cover layer 324 .
- the glue may additionally be used for attaching the environmental protection layer, for example a glued glass coverlid as protection against, for example, in-diffusion of water.
- the thickness of the cover layer 324 is not critical as long as there is enough material deposited to fill defects and cover the cathode layer 322 surface. However, the thickness may be about 1000 ⁇ or more.
- An electro-optically active organic diode according to the present invention may be used in a lightning device, an organic solar cell device, it can be an organic light emitting diode (OLED) and can be used in a lamp, in a display device, for example in a flat TV, a computer monitor, a digital camera, a mobile phone, and a vast number of other electronic gizmos.
- OLED organic light emitting diode
- An electro-optically active organic diode for use as an OLED comprises a 150 nm ITO layer deposited on a glass substrate, followed by a 100 nm aNPD layer and a 80 nm Alq3 layer.
- a 20 nm BaO layer is deposited on the Alq 3 layer and is followed by a 100 nm Al layer.
- a PECVD deposited 100 nm SiN layer covers the Al layer and eliminates defects in its surface.
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Abstract
Description
Claims (10)
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EP06117443.9 | 2006-07-19 | ||
EP06117443 | 2006-07-19 | ||
EP06117443 | 2006-07-19 | ||
PCT/IB2007/052802 WO2008010171A2 (en) | 2006-07-19 | 2007-07-13 | Highly doped electro-optically active organic diode with short protection layer |
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US8692460B2 true US8692460B2 (en) | 2014-04-08 |
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US (1) | US8692460B2 (en) |
EP (1) | EP2047535A2 (en) |
JP (1) | JP5361719B2 (en) |
KR (1) | KR20090034987A (en) |
CN (1) | CN101490865B (en) |
BR (1) | BRPI0715585A2 (en) |
TW (1) | TWI447979B (en) |
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TWI579903B (en) * | 2013-01-15 | 2017-04-21 | 財團法人國家實驗研究院 | Method of doping semiconductor |
KR101946999B1 (en) | 2014-05-12 | 2019-02-12 | 엘지디스플레이 주식회사 | Organic light emitting device and method for manufacturing the same |
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- 2007-07-13 CN CN2007800274245A patent/CN101490865B/en active Active
- 2007-07-13 US US12/373,536 patent/US8692460B2/en active Active
- 2007-07-13 WO PCT/IB2007/052802 patent/WO2008010171A2/en active Application Filing
- 2007-07-13 KR KR1020097003336A patent/KR20090034987A/en not_active Application Discontinuation
- 2007-07-13 BR BRPI0715585-9A patent/BRPI0715585A2/en not_active IP Right Cessation
- 2007-07-13 JP JP2009520107A patent/JP5361719B2/en active Active
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Also Published As
Publication number | Publication date |
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KR20090034987A (en) | 2009-04-08 |
TW200814384A (en) | 2008-03-16 |
WO2008010171A3 (en) | 2008-04-03 |
CN101490865A (en) | 2009-07-22 |
JP2009544164A (en) | 2009-12-10 |
TWI447979B (en) | 2014-08-01 |
EP2047535A2 (en) | 2009-04-15 |
CN101490865B (en) | 2011-09-07 |
BRPI0715585A2 (en) | 2013-03-26 |
US20090174323A1 (en) | 2009-07-09 |
JP5361719B2 (en) | 2013-12-04 |
WO2008010171A2 (en) | 2008-01-24 |
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