US8148234B2 - Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure - Google Patents
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure Download PDFInfo
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- US8148234B2 US8148234B2 US12/282,842 US28284207A US8148234B2 US 8148234 B2 US8148234 B2 US 8148234B2 US 28284207 A US28284207 A US 28284207A US 8148234 B2 US8148234 B2 US 8148234B2
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- doping
- semiconductor substrate
- porous region
- silicon
- temperature
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000002019 doping agent Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 16
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 6
- 238000001953 recrystallisation Methods 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 230000009466 transformation Effects 0.000 claims 2
- 239000006184 cosolvent Substances 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 24
- 238000009792 diffusion process Methods 0.000 description 10
- 238000007743 anodising Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 239000002086 nanomaterial Substances 0.000 description 6
- 229910052698 phosphorus Inorganic materials 0.000 description 6
- 239000011574 phosphorus Substances 0.000 description 6
- 230000008707 rearrangement Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910021426 porous silicon Inorganic materials 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BUZJNABKBLCYHR-UHFFFAOYSA-N C(C)[Ge](CC)(CC)CC.[Ge] Chemical compound C(C)[Ge](CC)(CC)CC.[Ge] BUZJNABKBLCYHR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000003842 bromide salts Chemical class 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- SZRIDEXXOYUJIS-UHFFFAOYSA-N ethenylarsenic Chemical compound [As]C=C SZRIDEXXOYUJIS-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000004694 iodide salts Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 238000010327 methods by industry Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- CYTQBVOFDCPGCX-UHFFFAOYSA-N trimethyl phosphite Chemical compound COP(OC)OC CYTQBVOFDCPGCX-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
Definitions
- the present invention relates to a method for manufacturing a semiconductor structure, and a corresponding semiconductor structure.
- the present invention relates to a modification in the material properties of a semiconductor substrate made, for example, of silicon or silicon carbide, beginning from a surface of the semiconductor substrate. Modifications of this type may involve, for example, the setting of a certain conductivity or conductivity type (p or n doping).
- micromechanical pressure sensors Although it is applicable, in principle, to numerous other micromechanical or microelectronic semiconductor structures, the present invention and its underlying object are explained on the basis of micromechanical pressure sensors.
- FIG. 3 shows a schematic cross-sectional view of a known semiconductor structure.
- reference numeral 1 designates a semiconductor substrate made of silicon, for example of the p-type
- reference numeral 5 designates a doping region on surface OF of semiconductor substrate 1 , for example of the n-type, which has a depth t′ of 10 ⁇ m.
- Doping regions 5 of this type are usually achieved by diffusing foreign atoms into semiconductor substrate 1 from surface OF.
- a source of dopants is deposited for this purpose onto the wafer surface (e.g., phosphorus glass for n doping or boron glass for p doping) and subsequently thermally driven in at a high temperature, i.e., the dopants are excited for the purpose of diffusion into silicon substrate 1 from surface OF.
- the dopants are also implantable into the wafer surface in a layer having an original thickness of typically 1 ⁇ m to 2 ⁇ m, this layer being subsequently thermally diffused deeper into silicon semiconductor substrate 1 .
- Diffusion processes of this type are generally limited to a relatively thin layer thickness from surface OF of semiconductor substrate 1 , since foreign substances such as dopant atoms diffuse only slowly into silicon, even at very high temperatures, and therefore in practice are able to achieve depths of only typically 20 ⁇ m to 25 ⁇ m in silicon, at least within economically justifiable diffusion times.
- Foreign atoms such as antimony (Sb) or germanium (Ge), etc., exist which diffuse only extraordinarily slowly, due to their large atom diameter, so that not even the specified limit of typically 20 ⁇ m to 25 ⁇ m in silicon is achievable using these foreign atoms, but instead the diffusion depths within justifiable times remain substantially below this level.
- silicon carbide In the case of silicon carbide, a complicating factor is that diffusion itself takes place extremely slowly even at very high temperatures of 1,400° C.
- the silicon carbide lattice is a substantial diffusion barrier, which greatly blocks a penetration of foreign atoms and limits diffusion processes to a penetration depth of just a few micrometers.
- thicker layers of, for example, silicon or silicon carbide having modified layer properties, for example a modified conductivity type are frequently required, so that the aforementioned limits of thermal diffusion processes in the bulk material are problematic.
- Examples may include thick monocrystalline, n-type silicon layers having a thickness of, for example, 100 ⁇ m to 200 ⁇ m on a p-type semiconductor substrate, such as those advantageously used for high-pressure sensors in silicon in connection with an electrochemical etch stop from p-type to n-type silicon.
- An object of the exemplary embodiments and/or exemplary methods of the present invention is to provide a method for manufacturing a semiconductor structure and a corresponding semiconductor structure which, from the process-engineering point of view, enable simple manufacturing of deep doping regions in a semiconductor substrate.
- the method according to the present invention for manufacturing a semiconductor structure according to the disclosure herein and the corresponding semiconductor structure according to further disclosure herein have the advantage that they enable the manufacture of thick layers of crystalline semiconductor material having modified properties by introducing foreign atoms or foreign substances.
- the layers may also be given a polycrystalline structure.
- modified layers may thus be manufactured in a thickness which would otherwise not be economical to manufacture in such a great layer thickness.
- foreign atoms are introducible which diffuse only very slowly and therefore may not be introduced in a practical manner into layers, for example antimony or germanium or other atoms having a large atom radius.
- Modified layers may also be manufactured, for example in silicon carbide, where the diffusion-inhibiting base material SiC would otherwise make layer modification impossible or nearly impossible. It is therefore possible to modify materials in this manner across great layer thicknesses which would otherwise not be modifiable or dopable using methods according to the related art, due to their material properties.
- the method described above may be used to achieve entirely new material properties by introducing large quantities of foreign atoms, which would otherwise not be introducible in such high doses.
- An aspect of the exemplary embodiments and/or exemplary methods of the present invention is to create a porous region adjacent to a surface of a semiconductor substrate, in which a dopant may be introduced, after which the porous region is thermally recrystallized.
- the method suitably uses electrochemical anodizing.
- porous silicon or porous silicon carbide is nanoporously or mesoporously producible by selecting corresponding anodizing conditions, essentially current density and hydrofluoric acid concentration.
- the dopants may be supplied in the form of a carrier gas (e.g., boroethane, arsine, phosphine, etc.), which penetrates the structure.
- a carrier gas e.g., boroethane, arsine, phosphine, etc.
- a glass such as boron glass or phosphorus glass may be deposited on the surface or a precursor dissolved in liquid may be used to saturate the porous structure.
- soluble salts e.g., chlorides, iodides, bromides, etc.
- the dopants are supplied in the form of a carrier gas, the gas homogeneously penetrating the porous region at a high temperature of, for example, 900° C., and the foreign atoms simultaneously diffusing from the gas phase into the nanostructure.
- the thermal treatment for deposition and the thermal treatment for driving in the dopant occur at the same time.
- the porous region may be saturated using a solution of foreign atoms in a liquid, in particular in supercritical CO 2 , at room temperature, whereupon a temperature step immediately takes place at 900° C. for driving in and a further temperature step at 950° C. for recrystallization and driving in.
- the step for thermally driving in the foreign atoms may be carried out separately at a temperature at which structural rearrangement is not yet able to take place.
- a temperature at which structural rearrangement is not yet able to take place At a temperature of, for example, 900° C., foreign atoms diffuse into the delicate nanostructures throughout the entire volume of the porous structure in silicon and penetrate these structures nearly homogeneously.
- the stability of the nanostructure is additionally supported by the fact that natural oxides on the structure surface additionally stabilize the latter and prevent thermal rearrangement. In the case of silicon, such oxides decay only at temperatures above 950° C. and, in the case of silicon carbide, only above 1,200° C.
- the porous region is thermally collapsed at high temperatures, for example above 950° C. in the case of silicon and above 1,200° C. in the case of silicon carbide, a solid monocrystalline layer in the sense of bulk material resulting by rearranging the silicon atoms or silicon carbide.
- this rearrangement was still undesirable for enabling the foreign atoms to reach all parts of the nanostructure and for avoiding damage to individual regions of the structure.
- the native oxide layers supporting the nanostructure are now evaporated, which may be additionally supported by adding hydrogen gas. Without the stabilization via the surface oxides, the thermal rearrangement of the structure may begin quickly and continue until the structure is completely compressed into a monocrystalline material. This makes it possible to have foreign atoms penetrate thick layers of silicon or silicon carbide in a controlled manner, in what is on the whole an economical overall process using electrochemical anodizing connection with one or more relatively short high-temperature steps.
- FIGS. 1 a , 1 b , 1 c and 1 d show schematic cross-sectional views of the essential manufacturing steps of a method for manufacturing a semiconductor structure according to a exemplary embodiment of the present invention.
- FIG. 2 shows a flow chart for explaining the sequence of the essential manufacturing steps of the method for manufacturing a semiconductor structure according to the exemplary embodiment of the present invention.
- FIG. 3 shows a schematic cross-sectional view of a semiconductor structure from essential manufacturing operations of a method for manufacturing a semiconductor structure according to a specific embodiment of the present invention.
- FIGS. 1 a through d show schematic cross-sectional views of the essential manufacturing steps of a method for manufacturing a semiconductor structure according to a specific embodiment of the present invention
- FIG. 2 shows a flow chart for explaining the sequence of the essential manufacturing steps of the method for manufacturing a semiconductor structure according to the specific embodiment of the present invention.
- reference numeral 1 designates a silicon semiconductor substrate of the p type having a surface OF.
- a mask 2 made of silicon nitride is applied to surface OF (Step S 1 ), and a nanoporous region 10 having a depth t of 100 ⁇ m is subsequently introduced by electrochemical anodizing (Step S 2 ), this region having a network of pores 10 a which form an interconnected skeleton.
- a glass 12 for example phosphorus glass, is first introduced into porous region 10 at a temperature of 900° C., a diffusion of the phosphorus into the skeleton made of nanoscale silicon simultaneously taking place directly at this temperature and the phosphorous thus homogeneously penetrating therein.
- a temperature step S 4 then takes place at a temperature of more than 950° C., rearrangement of the silicon atoms thus resulting in a thermal recrystallization of porous region 10 into a crystalline doping region 10 ′ of semiconductor substrate 1 , whose doping type, doping concentration and doping distribution are different from those of semiconductor substrate 1 .
- the dopants may be introduced either in the form of a carrier gas or in the form of a liquid solution which penetrates the porous structure.
- the semiconductor structure in the above example was formed using the mask made of silicon nitride, it is also possible to provide an edge doping in the semiconductor substrate which surrounds the region to be made porous on the sides and serves as an etch mask. A doping onto the back of the substrate may also be provided for the anodic process.
- micromechanical pressure sensor is provided purely by way of example and may be modified in any manner.
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Abstract
Description
Claims (12)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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DE102006012857.5 | 2006-03-21 | ||
DE102006012857 | 2006-03-21 | ||
DE102006012857A DE102006012857A1 (en) | 2006-03-21 | 2006-03-21 | Method for producing a semiconductor structure and corresponding semiconductor structure |
PCT/EP2007/052227 WO2007107461A1 (en) | 2006-03-21 | 2007-03-09 | Method for fabricating a semiconductor structure, and corresponding semiconductor structure |
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US20090236610A1 US20090236610A1 (en) | 2009-09-24 |
US8148234B2 true US8148234B2 (en) | 2012-04-03 |
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US12/282,842 Expired - Fee Related US8148234B2 (en) | 2006-03-21 | 2007-03-09 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure |
US13/366,067 Abandoned US20120132925A1 (en) | 2006-03-21 | 2012-02-03 | Method for manufacturing a semiconductor structure, and a corresponding semiconductor structure |
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US13/366,067 Abandoned US20120132925A1 (en) | 2006-03-21 | 2012-02-03 | Method for manufacturing a semiconductor structure, and a corresponding semiconductor structure |
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EP (1) | EP1999783B1 (en) |
JP (1) | JP5080555B2 (en) |
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WO (1) | WO2007107461A1 (en) |
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CN104118842B (en) * | 2014-07-02 | 2017-01-18 | 上海师范大学 | Silicon carbide mesoporous array material and manufacturing method of silicon carbide mesoporous array material |
US9805931B2 (en) * | 2015-08-28 | 2017-10-31 | Varian Semiconductor Equipment Associates, Inc. | Liquid immersion doping |
CH711498B1 (en) * | 2015-09-08 | 2020-03-13 | Nivarox Sa | Method for manufacturing a micromechanical timepiece and said micromechanical timepiece. |
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JPS51132974A (en) | 1975-05-14 | 1976-11-18 | Nec Corp | Semiconductor device |
US4262295A (en) * | 1978-01-30 | 1981-04-14 | Hitachi, Ltd. | Semiconductor device |
FR2655193A1 (en) | 1989-11-30 | 1991-05-31 | Telemecanique | Symmetric power semi-conductor device and its method of fabrication |
DE4440390A1 (en) * | 1994-11-11 | 1996-05-15 | Stuttgart Mikroelektronik | Selective epitaxial deposition of differently doped layers |
WO1997040527A1 (en) | 1996-04-22 | 1997-10-30 | Siemens Aktiengesellschaft | Process for producing a doped area in a semiconductor substrate |
DE10032579A1 (en) | 2000-07-05 | 2002-01-24 | Bosch Gmbh Robert | Method for producing a semiconductor component and a semiconductor component produced by the method |
EP1265293A2 (en) | 2001-06-08 | 2002-12-11 | Infineon Technologies AG | Semiconductor component having pores and method of making the same |
DE102004036032A1 (en) | 2003-12-16 | 2005-07-21 | Robert Bosch Gmbh | Fabrication of semiconductor component, e.g. micro-mechanical diaphragm sensor, by forming second region of second doping above first region of first doping, dissolving semiconductor material in first region, and depositing sealing layer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS56130914A (en) * | 1980-03-17 | 1981-10-14 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
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2006
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2007
- 2007-03-09 DE DE502007006500T patent/DE502007006500D1/en active Active
- 2007-03-09 EP EP07726749A patent/EP1999783B1/en not_active Expired - Fee Related
- 2007-03-09 JP JP2009500813A patent/JP5080555B2/en not_active Expired - Fee Related
- 2007-03-09 WO PCT/EP2007/052227 patent/WO2007107461A1/en active Application Filing
- 2007-03-09 US US12/282,842 patent/US8148234B2/en not_active Expired - Fee Related
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2012
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Also Published As
Publication number | Publication date |
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EP1999783B1 (en) | 2011-02-16 |
DE102006012857A1 (en) | 2007-09-27 |
EP1999783A1 (en) | 2008-12-10 |
US20120132925A1 (en) | 2012-05-31 |
WO2007107461A1 (en) | 2007-09-27 |
US20090236610A1 (en) | 2009-09-24 |
JP5080555B2 (en) | 2012-11-21 |
DE502007006500D1 (en) | 2011-03-31 |
JP2009537967A (en) | 2009-10-29 |
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