US7700927B2 - Heating stage for a micro-sample - Google Patents
Heating stage for a micro-sample Download PDFInfo
- Publication number
- US7700927B2 US7700927B2 US12/123,168 US12316808A US7700927B2 US 7700927 B2 US7700927 B2 US 7700927B2 US 12316808 A US12316808 A US 12316808A US 7700927 B2 US7700927 B2 US 7700927B2
- Authority
- US
- United States
- Prior art keywords
- micro
- sample
- supporting member
- heating stage
- mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 90
- 239000000523 sample Substances 0.000 claims description 244
- 230000005540 biological transmission Effects 0.000 claims description 18
- 239000004020 conductor Substances 0.000 claims description 18
- 238000011156 evaluation Methods 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 150000002739 metals Chemical class 0.000 claims description 15
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 238000005070 sampling Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 20
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 11
- 229910052750 molybdenum Inorganic materials 0.000 description 11
- 239000011733 molybdenum Substances 0.000 description 11
- 229910052715 tantalum Inorganic materials 0.000 description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 8
- 238000009529 body temperature measurement Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
Definitions
- the present invention relates to a heating stage for a micro-sample, which is used for efficient heating and observation of a sample as subjected to a micro-sampling process by an instrument for observation based on a focused ion beam process.
- the heating and observation of a powder sample when performed for the heating and observation of a given micro-sample, involves fixing the powder sample directly on a coil heater for heating, thereby carrying out the heating and observation.
- the heating and observation of a solid sample has difficulty in fixing the solid sample directly to the coil heater because of the properties of the sample such as the shape thereof, and thus involves adopting a fixing method, such as molding the coil heater in any given shape to fix the sample on top of the molded heater or employing a double-heater construction to sandwich the sample in between the heaters, thereby carrying out the heating and observation (See Japanese Patent No. 3663056).
- the heating and observation of a micro-sample subjected to micro-sampling involves fixing the micro-sample on a sample stage for use in an instrument for observation based on a focused ion beam process, what is called a notch mesh, and applying indirect heating to the sample, with the mesh contacted with the same molded heater as that for the solid sample, thereby carrying out the observation.
- a rise in the heater temperature can lead to gases originating from other members, thus causing the drifting of an image obtained by the electron microscope, and hence rendering the observation difficult.
- An object of the present invention is to achieve a heating stage for a micro-sample, capable of efficient heating and accurate observation of the micro-sample.
- the present invention provides a heating stage for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, including: a micro-sample mounting means for supporting the micro-sample, the means being made of a conductive material; and a heating stage base made of a conductive material, the base having a first supporting member that supports the micro-sample mounting means while having an electrical connection to one end of the micro-sample mounting means, and a second supporting member that supports the micro-sample mounting means while having an electrical connection to the other end of the micro-sample mounting means.
- the present invention also provides a stage for a heating stage for a micro-sample, which fixes the heating stage for the micro-sample described above, for disposition in a sample fixing holder of any one of a transmission electron microscope and an ultra thin film evaluation instrument, including: two conducting metals on which the first and second supporting members of the heating stage base are disposed respectively while being separated from each other, the metals being made of a conductive material and having connections to conducting lead wires; and a fixing means for fixing the heating stage for the micro-sample, wherein an electron beam passage hole is formed between the conducting metals, the stage for the heating stage for the micro-sample is fixed to the sample fixing holder of any one of the transmission electron microscope and the ultra thin film evaluation instrument, and a current is fed through the conducting lead wires to the conducting metals, the first supporting member, the micro-sample mounting means, and the second supporting member to thereby heat the micro-sample mounting means and also heat the micro-sample.
- the present invention also provides a sample fixing holder for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, including: a micro-sample mounting means for supporting the micro-sample, the means being disposed in an opening for passage of an electron beam and being made of a conductive material; a first supporting member made of a conductive material, which supports the micro-sample mounting means while having an electrical connection to one end of the micro-sample mounting means; and a second supporting member made of the conductive material, which supports the micro-sample mounting means while having an electrical connection to the other end of the micro-sample mounting means, wherein a current is fed through the first supporting member to the micro-sample mounting means and the second supporting member to thereby heat the micro-sample mounting means and also heat the micro-sample.
- the present invention can achieve the heating stage for the micro-sample and the heating holder for the micro-sample, capable of efficient heating and accurate observation of the micro-sample.
- FIG. 1 is an explanatory view of a principal part of a heating stage for a micro-sample according to a first embodiment of the present invention.
- FIGS. 2A to 2C are explanatory views of the mounting of the micro-sample on the heating stage for the micro-sample according to the first embodiment of the present invention.
- FIG. 3 is an enlarged view of a micro-sample mount according to the first embodiment of the present invention.
- FIGS. 4A and 4B are explanatory views of the heating stage for the micro-sample according to the first embodiment of the present invention.
- FIG. 5 is an explanatory view of a stage for the heating stage for the micro-sample according to the first embodiment of the present invention.
- FIG. 6 is an explanatory view of mounting the stage for the heating stage for the micro-sample according to the first embodiment of the present invention on a heating holder for a transmission electron microscope or an ultra thin film evaluation instrument.
- FIG. 7 is a view of the general configuration of a second embodiment of the present invention.
- FIG. 8 is an explanatory view showing an image of the micro-sample in its mounted position, observed by an instrument for observation based on a focused ion beam process.
- FIG. 9 is a view showing an instance where the micro-sample made of molybdenum and tantalum was observed as being in process of being heated by use of the present invention (at room temperature).
- FIG. 10 is a view showing an instance where the micro-sample made of the molybdenum and the tantalum was observed as being in process of being heated by use of the present invention (at 500° C.).
- FIG. 11 is a view showing an instance where the micro-sample made of the molybdenum and the tantalum was observed as being in process of being heated by use of the present invention (at 640° C.).
- FIG. 12 is a view showing an instance where the micro-sample made of the molybdenum and the tantalum was observed as being in process of being heated by use of the present invention (at 700° C.).
- FIG. 13 is a view showing an instance where the micro-sample made of the molybdenum and the tantalum was observed as being in process of being heated by use of the present invention (at 800° C.).
- FIG. 1 is a top view of a principal part of a heating stage for a micro-sample according to a first embodiment of the present invention.
- a micro-sample mount 1 is a heating portion in spiral form (or coil form), made of a very hard and high-melting point material such as tungsten or molybdenum.
- the micro-sample mount 1 is fixed at both ends to a base 2 for the heating stage for the micro-sample, made of a material such as molybdenum stainless steel.
- the base 2 can be divided into two semicircular supporting members 2 a and 2 b along a base cut line 3 , and the micro-sample mount 1 is fixed at one end to the first supporting member 2 a and is fixed at the other end to the second supporting member 2 b .
- the supporting members 2 a and 2 b of the base 2 although integral with each other in their original positions, are configured so that they can be separated from each other along the base cut line (e.g., perforations) 3 .
- the base 2 for the heating stage for the micro-sample, in its FIG. 1 position, is attached as shown in FIG. 2B to the tip of a standard holder 4 for use in an instrument for observation based on a focused ion beam process, shown in FIG. 2A .
- the tip of the standard holder 4 is in plan configuration (incidentally, the direction of thickness corresponds to the direction from the front to the back of the sheet as seen in FIG. 2B ), and the base 2 for the heating stage for the micro-sample is fastened in a notch 17 by a screw 5 .
- a sample 6 subjected to micro-sampling by the instrument for observation based on the focused ion beam process is mounted from the tip of a probe 7 onto the micro-sample mount 1 .
- FIG. 3 is a view showing the mount 1 having the micro-sample 6 mounted thereon.
- the sample 6 as bonded to the probe 7 , is fixed on the mount 1 by an adhesive (with a high melting point). After that, the probe 7 is cut off by the FIB, and the micro-sample 6 is fixed on the mount 1 as shown in FIG. 3 .
- the screw 5 is loosened to remove the base 2 for the heating stage for the micro-sample from the tip of the holder 4 , and the base 2 is mounted on a stage for the sample stage to be described later.
- the base 2 is divided into the members 2 a and 2 b , and a current is fed to the micro-sample mount 1 through the members 2 a and 2 b to thereby apply heat to the micro-sample 6 .
- FIG. 5 is a view showing an example of the stage for the sample stage (made of a material having low thermal conductivity, such as ceramics), on which the base 2 for the heating stage for the micro-sample is mounted and the current is fed to the micro-sample mount 1 .
- two conducting metals 11 to form electrodes are fixed to a portion, of a stage 8 for the sample stage, for mounting the base 2 for the heating stage for the micro-sample, and an electron beam passage hole 9 is formed between the two conducting metals 11 .
- Conducting lead wires 12 are connected to the conducting metals 11 .
- the base 2 with the members 2 a and 2 b separated from each other, is fixed through the insertion of a fixing screw 14 into a screw hole 10 with a washer 13 (made of a nonconductive material) in between.
- the base 2 is fixed in such a manner that the micro-sample fixed on the micro-sample mount 1 mounting the micro-sample is in the center of the electron beam passage hole 9 .
- the fixing stage 8 for the sample stage, having the base 2 fixed thereon in this manner, is attached to a heating holder 15 for a transmission electron microscope (TEM) or an ultra thin film evaluation instrument (e.g., a scanning transmission electron microscope (STEM)) as shown in FIG. 6 , the current is fed through the conducting lead wires 12 to the micro-sample mount 1 to thereby apply heat to the micro-sample 6 , and the micro-sample 6 is observed as being heated.
- TEM transmission electron microscope
- STEM scanning transmission electron microscope
- the temperature measurement may be effected by not only fixing the micro-sample 6 on the micro-sample mount 1 but also fixing the above-mentioned micro-sample with a known melting point in the vicinity of the micro-sample 6 ; and actually observing the state of the micro-sample with the known melting point. This enables accurate detection of the temperature of the micro-sample.
- a configuration is such that the micro-sample is fixed directly on the micro-sample mount 1 that functions as a heater, and the micro-sample mount 1 with the micro-sample is heated, thereby making it possible to achieve the heating stage for the micro-sample, capable of direct transfer of heat generated by a heating means to the micro-sample, thus efficient heating of the micro-sample, and thus accurate observation of the micro-sample.
- a heater unit that applies direct heating to the micro-sample subjected to a micro-sampling process besides a powder sample forms the sample mount.
- FIG. 7 is a view of the general configuration of a second embodiment of the present invention.
- the above-mentioned first embodiment has a configuration in which the stage 8 having the base 2 for the heating stage, mounting the micro-sample 6 , is supported by the holder 15 ; however, the second embodiment has a configuration in which a micro-sample mount 1 is formed in an electron beam passage opening 17 formed at the tip of a holder 16 for common use in the instrument for observation based on the focused ion beam process and the transmission electron microscope or the ultra thin film evaluation instrument.
- the micro-sample mount 1 for mounting a micro-sample 6 is a heating unit in spiral form made of a high-melting point material such as tungsten or molybdenum.
- the heating unit is fixed at both ends to the tip portion of the holder 16 made of a material such as stainless steel by first and second supporting members 18 a and 18 b.
- the sample subjected to the micro-sampling by the instrument for observation based on the focused ion beam process is first mounted on the mount 1 .
- the holder 16 is provided with the opening formed in advance, which admits a micro-sample probe 7 of the instrument for observation based on the focused ion beam process.
- the sample After the mounting of the sample, the sample is observed as being heated, by the transmission electron microscope or the ultra thin film evaluation instrument, while being heated through the supply of the current to the mount 1 .
- the second embodiment can adopt a simple configuration to achieve the heating stage for the micro-sample, besides being able to achieve the same effect as the first embodiment.
- FIG. 8 is a view showing the mount 1 as mounting the micro-sample 6 .
- the micro-sample 6 is fixed on the mount 1 , as shown in FIG. 8 .
- FIGS. 9 to 13 are explanatory views of an instance where the micro-sample made of molybdenum (Mo) and tantalum (Ta) was observed as being in process of being heated, by the ultra thin film evaluation instrument, using one embodiment of the present invention.
- the molybdenum and the tantalum are clearly separate from each other at room temperature. It has been observed that as a heating temperature rises in turn from 500° C. to 640° C., 700° C., and 800° C., crystallization takes place to form a crystals, which then become larger, and, when the temperature reaches 800 degrees ° C., a complete reaction occurs to yield a compound of the molybdenum and the tantalum.
- the present invention is the first to enable obtaining the relationship between the temperature of the micro-sample and the molten state of the micro-sample in process of being heated as mentioned above.
- the conventional art has difficulty in applying direct heating to the micro-sample, thus employs indirect heating, and thus has difficulty in performing an accurate measurement of the temperature of the micro-sample.
- the conventional art cannot clearly grasp the relationship between the temperature and the molten state of the micro-sample of the micro-sample in process of being heated.
- the present invention enables the direct heating of the micro-sample, thereby enabling accurate detection of a rise in the temperature of the micro-sample, for example based on the relationship between the current fed to the mount 1 and the temperature, or the like.
- heating holder for transmission electron microscope or ultra thin film evaluation instrument 16 . . . heating holder for micro-sample, 17 . . . notch, 18 a . . . first supporting member, 18 b . . . second supporting member
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007134507A JP4991390B2 (en) | 2007-05-21 | 2007-05-21 | Microsample heating sample stage |
JP2007-134507 | 2007-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
US20080290290A1 US20080290290A1 (en) | 2008-11-27 |
US7700927B2 true US7700927B2 (en) | 2010-04-20 |
Family
ID=40071543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/123,168 Expired - Fee Related US7700927B2 (en) | 2007-05-21 | 2008-05-19 | Heating stage for a micro-sample |
Country Status (2)
Country | Link |
---|---|
US (1) | US7700927B2 (en) |
JP (1) | JP4991390B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100320396A1 (en) * | 2009-06-18 | 2010-12-23 | Hitachi, Ltd. | Sample holder for electron microscope |
US20120292505A1 (en) * | 2009-09-24 | 2012-11-22 | Protochips, Inc. | Methods of using temperature control devices in electron microscopy |
Families Citing this family (13)
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EP2040282B1 (en) * | 2007-09-19 | 2015-01-21 | Hitachi Ltd. | Micro sample heating probe and method of producing the same, and analyzer using the micro sample heating probe |
US8058627B2 (en) * | 2008-08-13 | 2011-11-15 | Wisys Technology Foundation | Addressable transmission electron microscope grid |
JP5124507B2 (en) | 2009-02-16 | 2013-01-23 | 株式会社日立ハイテクノロジーズ | Electron beam apparatus and sample holder for electron beam apparatus |
JP5517559B2 (en) * | 2009-10-26 | 2014-06-11 | 株式会社日立ハイテクノロジーズ | Charged particle beam apparatus and display method of three-dimensional information in charged particle beam apparatus |
JP5826760B2 (en) * | 2009-11-27 | 2015-12-02 | ハイジトロン, インク.Hysitron, Inc. | Micro electromechanical heater |
TW201222617A (en) * | 2010-10-07 | 2012-06-01 | Hitachi High Tech Corp | Sample device for charged particle beam |
US9476816B2 (en) | 2011-11-14 | 2016-10-25 | Hysitron, Inc. | Probe tip heating assembly |
WO2013082145A1 (en) | 2011-11-28 | 2013-06-06 | Yunje Oh | High temperature heating system |
JP5963955B2 (en) | 2012-06-13 | 2016-08-03 | ハイジトロン, インク.Hysitron, Inc. | Environmental conditioning assembly for mechanical testing at micron or nanoscale |
WO2014175074A1 (en) * | 2013-04-23 | 2014-10-30 | 株式会社日立ハイテクノロジーズ | Charged particle radiation device and specimen preparation method using said device |
EP3021349A1 (en) * | 2014-11-12 | 2016-05-18 | Fei Company | Contactless temperature measurement in a charged particle microscope |
CN113802187A (en) * | 2021-08-26 | 2021-12-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Compact ultra-high temperature heating table and high-temperature heating equipment |
CN115692145B (en) * | 2022-12-30 | 2023-04-11 | 北京中科科仪股份有限公司 | SEM sample placer |
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JPH0552721A (en) | 1991-08-22 | 1993-03-02 | Hitachi Ltd | Sample separating method and method for analyzing separated sample obtained by the separating method |
JPH0644936A (en) | 1992-05-29 | 1994-02-18 | Hitachi Ltd | Electron beam device and sample holder therfor |
US5367171A (en) * | 1991-10-24 | 1994-11-22 | Hitachi, Ltd. | Electron microscope specimen holder |
JP2000040483A (en) | 1998-07-23 | 2000-02-08 | Hitachi Ltd | Sample heating holder for electron microscope and sample observing method |
US7566884B2 (en) * | 2005-05-30 | 2009-07-28 | Jeol Ltd. | Specimen holder for electron microscope |
Family Cites Families (6)
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JPH01164023A (en) * | 1987-12-21 | 1989-06-28 | Fujitsu Ltd | Measurement of temperature distribution on upper surface of susceptor |
NL8902727A (en) * | 1989-11-06 | 1991-06-03 | Philips Nv | OBJECT HOLDER FOR SUPPORTING AN OBJECT IN A LOADED PARTICLE BUNDLE SYSTEM. |
JPH0554790A (en) * | 1991-08-23 | 1993-03-05 | Hitachi Ltd | Heater body structure for cathode-ray tube |
US5265957A (en) * | 1992-08-11 | 1993-11-30 | Texas Instruments Incorporated | Wireless temperature calibration device and method |
JP2001176413A (en) * | 1999-12-17 | 2001-06-29 | Mitsubishi Electric Corp | Manufacturing method for heater body structure and electron gun |
JP5020483B2 (en) * | 2005-07-08 | 2012-09-05 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
-
2007
- 2007-05-21 JP JP2007134507A patent/JP4991390B2/en not_active Expired - Fee Related
-
2008
- 2008-05-19 US US12/123,168 patent/US7700927B2/en not_active Expired - Fee Related
Patent Citations (7)
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JPH0552721A (en) | 1991-08-22 | 1993-03-02 | Hitachi Ltd | Sample separating method and method for analyzing separated sample obtained by the separating method |
JP2774884B2 (en) | 1991-08-22 | 1998-07-09 | 株式会社日立製作所 | Method for separating sample and method for analyzing separated sample obtained by this separation method |
US5367171A (en) * | 1991-10-24 | 1994-11-22 | Hitachi, Ltd. | Electron microscope specimen holder |
JPH0644936A (en) | 1992-05-29 | 1994-02-18 | Hitachi Ltd | Electron beam device and sample holder therfor |
JP2000040483A (en) | 1998-07-23 | 2000-02-08 | Hitachi Ltd | Sample heating holder for electron microscope and sample observing method |
JP3663056B2 (en) | 1998-07-23 | 2005-06-22 | 株式会社日立製作所 | Sample heating holder for electron microscope and sample observation method |
US7566884B2 (en) * | 2005-05-30 | 2009-07-28 | Jeol Ltd. | Specimen holder for electron microscope |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100320396A1 (en) * | 2009-06-18 | 2010-12-23 | Hitachi, Ltd. | Sample holder for electron microscope |
US8338798B2 (en) * | 2009-06-18 | 2012-12-25 | Hitachi, Ltd. | Sample holder for electron microscope |
US20120292505A1 (en) * | 2009-09-24 | 2012-11-22 | Protochips, Inc. | Methods of using temperature control devices in electron microscopy |
US9048065B2 (en) * | 2009-09-24 | 2015-06-02 | Protochips, Inc. | Methods of using temperature control devices in electron microscopy |
Also Published As
Publication number | Publication date |
---|---|
US20080290290A1 (en) | 2008-11-27 |
JP2008288161A (en) | 2008-11-27 |
JP4991390B2 (en) | 2012-08-01 |
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