US7491473B2 - Photo mask and method for controlling the same - Google Patents
Photo mask and method for controlling the same Download PDFInfo
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- US7491473B2 US7491473B2 US10/994,636 US99463604A US7491473B2 US 7491473 B2 US7491473 B2 US 7491473B2 US 99463604 A US99463604 A US 99463604A US 7491473 B2 US7491473 B2 US 7491473B2
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- Prior art keywords
- photo mask
- pattern
- mask
- growable
- substance
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- Expired - Fee Related, expires
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/44—Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
Definitions
- the present invention relates to a photo mask for transferring a mask pattern to a substrate by exposure to ultraviolet rays and a method for controlling the photo mask.
- pellicle film is used to protect the photo mask in question to prevent foreign substances from attaching directly to the photo mask.
- the pellicle film prevents a foreign substance from attaching to a mask pattern formed on the photo mask and allows exposed light to penetrates without attenuation. The pellicle film will be briefly explained below.
- FIGS. 7A and 7B are schematic block diagrams showing a conventional photo mask, FIG. 7A shows its plan view and FIG. 7B shows its sectional view.
- a pellicle film 2 covering a mask-pattern-forming region 4 on which ultraviolet rays 10 irradiates at exposure is disposed in a photo mask 1 .
- a mask-pattern-forming surface the pattern imaging surface 8 (hereinafter referred to as a mask-pattern-forming surface) of the photo mask 1 by a height of a pellicle frame 3 made of metal or quartz, an image of the foreign substance is not built up on a wafer onto which the mask pattern is transferred, so that only required patterns 6 and 7 are focused into an image to be transferred.
- a photo mask using such a pellicle film is disclosed, for instance, in Patent Document 1.
- An object of the present invention is to provide a photo mask and a method for controlling the photo mask, which make it possible to easily evaluate usage limitation of the photo mask used in the photolithographic process when performing the photolithographic processing by ultraviolet exposure.
- a photo mask of the present invention has a mask-pattern-forming region on which a mask pattern is formed on one surface, and is for transferring the mask pattern onto a substrate by ultraviolet exposure.
- the photo mask is provided with an evaluation section for evaluating usage limitation of the photo mask caused by the ultraviolet exposure on at least either one surface out of the one surface or the back surface of the photo mask.
- the evaluation section is provided with a growable substance of the same kind as that of a foreign substance growing by ultraviolet rays in the mask-pattern-forming region.
- a method for controlling a photo mask of the present invention is a method for controlling a photo mask which has a mask-pattern-forming region on which a mask pattern is formed on one surface, and is for transferring the mask pattern onto a substrate by ultraviolet exposure.
- the method includes: providing an evaluation section including a growable substance of the same kind as that of a foreign substance growing in the mask pattern forming region by ultraviolet rays, in an area range of ultraviolet exposure at the time of exposure on at least any one surface out of the one surface and the back surface thereof; and serving the evaluation section for judgment of usage limitation of the photo mask according to a degree of growth of the growable substance.
- judgment of the usage limitation is according to a degree of cloudiness in color of the growable substance of the evaluation section.
- FIGS. 1A and 1B are schematic block diagrams of a photo mask in a first embodiment of the present invention
- FIGS. 2A and 2B are schematic block diagrams of a photo mask in a second embodiment of the present invention.
- FIGS. 3A and 3B are schematic block diagrams of a photo mask in a third embodiment of the present invention.
- FIGS. 4A , 4 B, and 4 C are schematic block diagrams of a projection stepper
- FIGS. 5A and 5B are schematic block diagrams of a photo mask in a fourth embodiment of the present invention.
- FIGS. 6A and 6B are views showing incident ultraviolet rays entering into the respective photo masks.
- FIGS. 7A and 7B are schematic diagrams showing a conventional photo mask.
- gases released from an adhesive or a tackiness agent to stick the pellicle film 2 on the pellicle frame 3 , or gas released from the pellicle film 2 itself formed of a thin film made of nitrocellulose, fluoropolymers, or the like are released into the interior space closed by the pellicle film 2 . That is, the interior space closed by the pellicle film 2 is considered to be filled more with activated gases such as sulfurous acid gas, ammonia, or the like, compared with atmosphere inside an optical stepper (such as a scanner, a stepper, or the like) or a clean room in which a photolithographic process is performed.
- an optical stepper such as a scanner, a stepper, or the like
- Patent Document 2 development in photolithographic processes to shorten the wavelength of a light source for exposure has been advancing due to micronization of semiconductor devices.
- Patent Document 2 a KrF excimer laser (248 nm), an ArF excimer laser (193 nm), or an F 2 (fluorine gas) laser (157 nm) which generates beams shorter in wavelength than conventional g-rays (436 nm) or i-rays (365 nm) and in ultraviolet region is used
- the activated gases in the interior space closed by the pellicle film 2 are allowed to react owing to their high light energy to generate foreign substances, so-called haze on the mask pattern 6 and 7 .
- the pellicle film 2 is removed from the photo mask 1 , and foreign substances are generated on the mask patterns 6 and 7 depending on such as concentration of residual ions of sulfuric acid or nitric acid used as the washing liquid.
- the foreign substances generated on the mask pattern grow or decompose depending on the accumulated amount of irradiated ultraviolet rays at the exposure. Sometimes, some of them show practically no changes. Furthermore, transmittance or reflectances of the foreign substances vary depending on an accumulated amount of irradiated ultraviolet rays.
- growable foreign substances growing depending on an accumulated amount of irradiated ultraviolet rays and being main cause of an erroneous pattern on a wafer are considered to be generated by highly energetic ultraviolet rays irradiating to activated gases such as sulfurous acid gas or ammonia in an interior space closed by the pellicle film 2 , or to be generated depending on a concentration of residual sulfuric acid ion or nitric acid ion in a washing liquid used in the washing process of the photo mask.
- the above-described foreign substances are formed on a surface 9 (hereinafter, referred to as a glass surface) corresponding to a back face of the mask-pattern-forming surface 8 .
- a surface 9 hereinafter, referred to as a glass surface
- This is thought to be caused by such a gas as released gas from a vessel called SMIF-POD which has been used in recent years to protect a photo mask or a wafer not to be exposed under the outside atmosphere (inside a clean room), or a released gas from a shipping case itself of the photo mask.
- a foreign substance generated on the photo mask 1 is a growable foreign substance to grow depending on an accumulated amount of irradiated ultraviolet rays, as the more ultraviolet exposure is repeated by a photolithographic process using this photo mask, the greater the growable foreign substance becomes, so that the growable foreign substance is transferred onto a wafer to be transferred as an erroneous pattern. As a result, this brings about short-circuiting between circuits of a semiconductor device or breaks within the circuits.
- a conventional countermeasure against attachment of foreign substances to a photo mask is to provide a pellicle film at a distance from the photo mask by a predetermined height, so that an image of the foreign substance will not build up on a wafer to which a pattern is even when the foreign substance is attached to the pellicle film.
- a problem due to foreign substances exceeding a range of the countermeasure with the pellicle film arises.
- the reason for this is that since the ultraviolet rays used for exposure have energy higher than that of a conventional light source, there is a growable foreign substance growing depending on an accumulated amount of irradiated ultraviolet rays among foreign substances generated on the photo mask, and the growable foreign substance grows larger every time the ultraviolet exposure is performed and is transferred to the wafer to which the pattern is transferred as an erroneous pattern. Therefore, in order to achieve high quality with ultraviolet exposure, it becomes necessary to evaluate usage limitation of the photo mask by grasping a degree of the growth of the growable foreign substance generated on the photo mask.
- the present inventor considered providing an evaluation section (evaluation pattern) shown below to evaluate the degree of growth of a growable foreign substance generated in a mask-pattern-forming region.
- a growable substance of the same kind as that of the growable foreign substance growing by ultraviolet rays in the mask-pattern-forming region is formed on the evaluation pattern.
- the evaluation pattern is provided in the region of a photo mask served for ultraviolet exposure similarly to the mask pattern. This is to put the growable substance on the evaluation pattern under the same environment as the growable foreign substance generated in the mask-pattern-forming region.
- the present invention is designed to evaluate a degree of growth of the growable foreign substance in the mask-pattern-forming region using the degree of growth of the growable substance in the evaluation pattern substantially equivalent to the growable foreign substance as an indicator.
- FIG. 1A and FIG. 1B are schematic block diagrams of a photo mask in the first embodiment of the present invention.
- FIG. 1A shows a plan view of the photo mask
- FIG. 1B shows a sectional view of an evaluation pattern 12 in FIG. 1A taken along the line I-I.
- a photo mask 1 includes: a mask-pattern-forming region 4 on which a mask pattern is formed; a scribe-corresponding region 13 positioned around the mask-pattern-forming region 4 , and corresponding to a scribed region of a wafer to which the mask pattern is transferred; an evaluation pattern 12 provided on the scribe-corresponding region 13 ; and a pellicle film 2 covering the photo mask 1 via a pellicle frame (not shown). Further, a light shielding pattern 6 and a light transmitting pattern 7 are formed in the mask-pattern-forming region 4 as shown in FIG. 7B .
- Ultraviolet rays 10 irradiating at exposure enter from a glass surface 9 side where no mask pattern is formed, enter a mask-pattern-forming surface 8 side and pass through the light transmitting pattern 7 to the pellicle film 2 .
- an effective region to be actually exposed to the wafer is shown by a numeral 5 in FIG. 1A .
- the width of the scribe-corresponding region 13 is indicated by a numeral 14 .
- a mask pattern on which the light shielding pattern 6 and the light transmitting pattern 7 are formed as shown in FIG. 7B is formed on one surface of, for instance, a transparent quartz plate which will be the photo mask 1 .
- a forming region on which the mask pattern is formed is the mask-pattern-forming region 4 in FIG. 1A .
- the evaluation pattern 12 is formed in the scribe-corresponding region 13 on the side of the mask-pattern-forming surface 8 .
- the evaluation pattern 12 will be explained using FIG. 1B .
- the evaluation pattern 12 is formed in the scribe-corresponding region 13 on the side of the mask-pattern-forming surface 8 with plural depressions 15 to 17 .
- the depressions 15 to 17 are formed by a dry etching method, a wet etching method with hydrofluoric acid, or the like. Liquids of a growable substance for evaluation having different residual ion concentrations are dropped into the respective depressions 15 to 17 using a hollow needle of a manipulator, an eye dropper, a glass tube, or the like, and dried.
- FIG. 1B shows a case in which the ion concentration of the growable substance for evaluation in the depression 15 is the lowest and the ion concentration of the growable substance for evaluation in the depression 17 is the highest.
- the pellicle film 2 is stuck on the photo mask 1 .
- the sizes of the respective depressions 15 to 17 are suitably formed in a range of about several ⁇ m to several hundred ⁇ m so as to provide them in the scribe-corresponding region 13 .
- an example of forming the mask pattern and the evaluation pattern 12 separately is shown, but both may be simultaneously formed.
- a foreign substance generated on the photo mask 1 is a growable foreign substance growing depending on an accumulated amount of the irradiated ultraviolet rays 10
- the growable foreign substance grows larger with increased ultraviolet exposure according to the repeated performance of a photolithographic process using the photo mask.
- it is perceived as cloudiness since incident light is scattered according to the degree of growth.
- the degree of cloudiness is clearly recognized.
- the size of a foreign substance becomes as large as about 1 ⁇ m or so, it can be recognized as cloudiness under reflected or transmitted light even with the naked eye.
- a high-intensity light source irradiates to the evaluation pattern 12 to visually recognize appearances of the respective depressions 15 to 17 , and whether cloudiness is observed or not is judged.
- the method for controlling a photo mask in an actual production process it is possible to execute judgment in a manner that when cloudiness begins to be observed in the depression 17 having the highest ion concentration of a growable substance for evaluation (when generation of a growable substance for evaluation is recognized) it is judged that maintenance of the photo mask 1 is required, when cloudiness of the depression 16 begins to be observed, it is judged that rewashing with replacement of the pellicle film 2 on the photo mask 1 is required, and when cloudiness begins to be observed in the depression 15 having the lowest ion concentration of a growable substance for evaluation it is judged that a substance generated in the mask-pattern-forming region 4 might give a huge influence upon a mask pattern to be transferred onto a wafer.
- FIG. 2A and FIG. 2B are schematic block diagrams of a photo mask in the second embodiment of the present invention.
- FIG. 2A shows a plane view of the photo mask
- FIG. 2B shows a sectional view of evaluation patterns 18 and 19 in FIG. 2A taken along the lines II-II, and III-III.
- the evaluation patterns 18 and 19 are provided on a glass surface 9 side on which a mask pattern is not formed.
- the evaluation pattern 19 is formed in an outside region of the effective region 5 .
- a mask pattern on which the light shielding pattern 6 and the light transmitting pattern 7 as shown in FIG. 7B are formed is formed on one surface of, for instance, a transparent quartz plate which will be the photo mask 1 .
- a forming region on which the mask pattern is formed is the mask-pattern-forming region 4 in FIG. 2A .
- the evaluation patterns 18 and 19 are formed on the glass surface 9 side.
- the evaluation patterns 18 and 19 will be explained using FIG. 2B .
- the evaluation patterns 18 and 19 are formed with the plural depressions 15 to 17 on the glass surface 9 side.
- the evaluation patterns 18 and 19 are formed by a dry etching method, a wet etching method with hydrofluoric acid, or the like. Liquids of a growable substance for evaluation having different residual ion concentrations are dropped into the respective depressions 15 to 17 using a hollow needle of a manipulator, an eye dropper, a glass tube, or the like, and dried.
- FIG. 2B shows a case in which the ion concentration of the growable substance for evaluation in the depression 15 is the lowest and the ion concentration of the growable substance for evaluation in the depression 17 is the highest.
- the method for controlling the photo mask in the present embodiment is similar to the method for controlling the photo mask in the first embodiment, but will be explained below.
- a high-intensity light source irradiates to the evaluation pattern 18 to visually recognize appearances of the respective depressions 15 to 17 , and whether cloudiness is observed or not is judged.
- the method for controlling a photo mask in an actual production process it is possible to execute judgment in a manner that when cloudiness begins to be observed in the depression 17 having the highest ion concentration of a growable substance for evaluation (when generation of a growable substance for evaluation is recognized) it is judged that maintenance of the photo mask 1 is required, when cloudiness of the depression 16 begins to be observed, it is judged that rewashing with replacement of the pellicle film 2 on the photo mask 1 is required, and when cloudiness begins to be observed in the depression 15 having the lowest ion concentration of a growable substance for evaluation it is judged that a substance generated in the mask-pattern-forming region 4 might give a huge influence upon a mask pattern to be transferred to a wafer.
- FIG. 3A and FIG. 3B are schematic block diagrams of a photo mask in the third embodiment of the present invention.
- FIG. 3A shows a plane view of the photo mask
- FIG. 3B shows a sectional view of an evaluation pattern 20 in FIG. 3A taken along the lines IV-IV.
- the evaluation pattern 20 is provided in an outside region of the effective region 5 on a mask-pattern-forming surface 8 side. This is effective in such a case when an evaluation pattern cannot be formed in the effective region 5 , or when an accelerated irradiation test by ultraviolet rays is performed. It is also possible to form an evaluation pattern in an outside region of the effective region 5 of the glass surface 9 side from similar idea. However, in the case of the present embodiment, since ultraviolet rays are required to irradiate also in the outside region of the effective region 5 , the evaluation pattern 20 is feared to be transferred to a wafer.
- FIGS. 4A , 4 B, and 4 C The countermeasure for the above will be shown in FIGS. 4A , 4 B, and 4 C.
- FIGS. 4A , 4 B, and 4 C are schematic block diagrams of a projection stepper, and FIG. 4A is a block diagram of the entire projection stepper.
- FIGS. 4B , and 4 C are plan views of the photo mask 1 .
- the projection stepper comprises a light source 25 for generating ultra violet rays, an aperture 26 to allow ultraviolet rays to pass through, a blind 27 adjusting an amount of transmission of ultraviolet rays, a mirror 28 to let the ultraviolet rays from the light source 25 enter into the photo mask 1 , the photo mask 1 receiving ultraviolet rays from the mirror 28 to transfer a mask pattern to a wafer 29 , and independently movable blinds 21 to 24 for shielding a predetermined region of the ultraviolet rays from the photo mask 1 .
- independently movable blinds 21 to 24 are provided between the photo mask 1 and the wafer 29 to play a role in preventing the evaluation pattern 20 of the photo mask 1 from being transferred to the wafer 29 . Since the independently movable blinds 21 to 24 may have an effect-on a normal transfer pattern when ultraviolet rays reflect on the blinds, it is advisable to apply ultraviolet absorber coating on the independently movable blinds 21 to 24 . Besides, it is advisable to use an ultraviolet absorbing agent containing zinc oxide (ZnO) particles for the ultraviolet absorber coating. This is because it can make thickness of the coating thin and can perform the ultraviolet absorption effectively.
- ZnO zinc oxide
- the evaluation pattern 20 shown in FIG. 4B is assumed to exist in the photo mask 1 shown in FIG. 4A .
- the top-and-bottom relation in both drawings is shown by a position 30 in the drawings.
- the independently movable blinds 22 in FIG. 4A is driven to shift to a position shown by FIG. 4C .
- the evaluation pattern 20 exists at another positions on the photo mask 1 , it can be handled similarly by driving the independently movable blinds 21 , 23 , and 24 .
- a mask pattern on which the light shielding pattern 6 and the light transmitting pattern 7 are formed as shown in FIG. 7B is formed on one surface of, for instance, a transparent quartz plate which will be the photo mask 1 .
- a forming region on which the mask pattern is formed is the mask-pattern-forming region 4 in FIG. 3A .
- the evaluation pattern 20 is formed outside the effective region 5 on the mask-pattern-forming surface 8 side.
- the evaluation patterns 20 will be explained using FIG. 3B .
- the evaluation patterns 20 is formed outside the effective region 5 on the mask-pattern-forming surface 8 side with the plural depressions 15 to 17 .
- the depressions 15 to 17 are formed by a dry etching method, a wet etching method with hydrofluoric acid, or the like. Liquids of a growable substance for evaluation having different residual ion concentrations are dropped into the respective depressions 15 to 17 using a hollow needle of a manipulator, an eye dropper, a glass tube, or the like, and dried.
- FIG. 3B shows a case in which the ion concentration of the growable substance for evaluation in the depression 15 is the lowest and the ion concentration of the growable substance for evaluation in the depression 17 is the highest.
- the pellicle film 2 is stuck on the photo mask 1 .
- the mask pattern and the evaluation pattern 20 are separately formed is shown, but both may be simultaneously formed.
- the method for controlling the photo mask in the present embodiment is similar to the method for controlling the photo mask in the first embodiment, but will be explained below.
- a high-intensity light source irradiates to the evaluation pattern 20 to visually recognize appearances of the respective depressions 15 to 17 , and whether cloudiness is observed or not is judged.
- the method for controlling a photo mask in an actual production process it is possible to execute judgment in a manner that when cloudiness begins to be observed in the depression 17 having the highest ion concentration of a growable substance for evaluation (when generation of a growable substance for evaluation is recognized) it is judged that maintenance of the photo mask 1 is required, when cloudiness of the depression 16 begins to be observed, it is judged that rewashing with replacement of the pellicle film 2 on the photo mask 1 is required, and when cloudiness begins to be observed in the depression 15 having the lowest ion concentration of a growable substance for evaluation it is judged that a substance generated in the mask-pattern-forming region 4 might give a huge influence upon a mask pattern to be transferred onto a wafer.
- FIG. 5A and FIG. 5B are schematic block diagrams of a photo mask in the fourth embodiment of the present invention.
- FIG. 5A shows a plane view of the photo mask
- FIG. 5B shows a sectional view of an evaluation pattern 12 in FIG. 5A taken along the lines V-V.
- the fourth embodiment is different from the first to third embodiments in a point in which a reflection type photo mask 31 is used in the fourth embodiment while the transmission type photo mask 1 is used in the first to third embodiments.
- FIGS. 5A and 5B show a reflection type photo mask 31 provided with the evaluation pattern 12 used in the first embodiment. It is also applicable to take a structure that the photo mask 31 is provided with the evaluation pattern of the photo mask 1 in the second or the third embodiment.
- the reflection type photo mask 31 is largely different from the transmission type photo mask 1 in such that ultraviolet rays 10 are allowed to enter from a mask-pattern-forming surface 8 side of the photo mask by exposure.
- FIGS. 6A and 6B are views showing manners of the ultraviolet rays 10 entering into the respective photo masks.
- FIG. 6A shows a view of a manner of the ultraviolet rays 10 entering into the transmission type photo mask 1
- FIG. 6B shows a view of a manner of the ultraviolet rays 10 entering into the reflection type photo mask 31 .
- the light source 25 for ultraviolet rays in the embodiments of the present invention a KrF excimer laser (248 nm), an ArF excimer laser 193 nm), or an F 2 (fluorine gas) laser (157 nm) which is shorter in wavelength than g-rays (436 nm) or i-rays (365 nm) conventionally used is assumed, but the present invention is not limited to these, and any short-wavelength light source is applicable if it has a light source is shorter than a light energy to allow activated gas in a space closed by the pellicle film 2 to react to generate a foreign substance (for instance, 300 nm or less).
- an evaluation pattern including a growable substance of the same kind as that of the foreign substance growing by ultraviolet rays in the mask-pattern-forming region 4 is provided on at least any one surface out of the mask-pattern-forming surface 8 and the glass surface 9 of the photo mask 1 ( 31 ), it becomes possible to evaluate a degree of growth of the foreign substance according to a degree of cloudiness in color of the respective depressions 15 to 17 by irradiating, for instance, a high intensity light source to the evaluation pattern 12 . Thereby, it becomes possible to easily evaluate usage limitation of a photo mask used in the photolithographic process when performing a photolithographic processing by ultraviolet exposure.
- the present invention makes it possible to easily evaluate usage limitation of the photo mask used in the photolithographic process when performing the photolithographic processing by ultraviolet exposure.
- enabling to easily control usage limitation of a photo mask exhibits a remarkable effect in a photolithographic process of, especially in a range of 200 nm or less in wavelength which will be a future leading stream in microprocessing.
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004123318A JP2005308896A (en) | 2004-04-19 | 2004-04-19 | Photomask and its management method |
JP2004-123318 | 2004-04-19 |
Publications (2)
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US20050233225A1 US20050233225A1 (en) | 2005-10-20 |
US7491473B2 true US7491473B2 (en) | 2009-02-17 |
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US10/994,636 Expired - Fee Related US7491473B2 (en) | 2004-04-19 | 2004-11-23 | Photo mask and method for controlling the same |
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US (1) | US7491473B2 (en) |
JP (1) | JP2005308896A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100297392A1 (en) * | 2009-05-22 | 2010-11-25 | Jonathan Chen | Slip agent for protecting glass |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4760404B2 (en) * | 2006-01-31 | 2011-08-31 | 大日本印刷株式会社 | Photo mask |
JP4863064B2 (en) | 2006-08-22 | 2012-01-25 | 大日本印刷株式会社 | Exposure mask management method |
US7866224B2 (en) * | 2006-11-30 | 2011-01-11 | Chartered Semiconductor Manufacturing Ltd. | Monitoring structure |
JP5007568B2 (en) * | 2007-01-04 | 2012-08-22 | 富士通セミコンダクター株式会社 | Reticle inspection method and reticle management method |
US20080264441A1 (en) * | 2007-04-30 | 2008-10-30 | Yoji Takagi | Method for removing residuals from photomask |
JP4714180B2 (en) * | 2007-05-01 | 2011-06-29 | 株式会社東芝 | Photomask management method, photomask cleaning possible number generation method, and photomask management system |
JP2011248384A (en) * | 2011-09-13 | 2011-12-08 | Dainippon Printing Co Ltd | Exposure mask |
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US5472811A (en) * | 1993-01-21 | 1995-12-05 | Sematech, Inc. | Phase shifting mask structure with multilayer optical coating for improved transmission |
US5723236A (en) * | 1995-05-31 | 1998-03-03 | Sharp Kabushiki Kaisha | Photomasks and a manufacturing method thereof |
US5798193A (en) * | 1997-05-16 | 1998-08-25 | Micron Technology, Inc. | Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems |
US5866283A (en) * | 1996-09-19 | 1999-02-02 | U.S. Philips Corporation | Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern |
JPH11195585A (en) | 1997-12-26 | 1999-07-21 | Nikon Corp | Aligner and method of exposure |
US5952133A (en) * | 1996-10-31 | 1999-09-14 | Nikon Corporation | Methods for evaluating image-forming characteristics of a projection-optical system used in a charged-particle-beam microlithography apparatus |
JP2000267261A (en) | 1999-03-17 | 2000-09-29 | Asahi Chem Ind Co Ltd | Uv-resistant pellicle |
US6492075B1 (en) * | 2000-06-16 | 2002-12-10 | Advanced Micro Devices, Inc. | Chemical trim process |
-
2004
- 2004-04-19 JP JP2004123318A patent/JP2005308896A/en active Pending
- 2004-11-23 US US10/994,636 patent/US7491473B2/en not_active Expired - Fee Related
Patent Citations (8)
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US5472811A (en) * | 1993-01-21 | 1995-12-05 | Sematech, Inc. | Phase shifting mask structure with multilayer optical coating for improved transmission |
US5723236A (en) * | 1995-05-31 | 1998-03-03 | Sharp Kabushiki Kaisha | Photomasks and a manufacturing method thereof |
US5866283A (en) * | 1996-09-19 | 1999-02-02 | U.S. Philips Corporation | Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern |
US5952133A (en) * | 1996-10-31 | 1999-09-14 | Nikon Corporation | Methods for evaluating image-forming characteristics of a projection-optical system used in a charged-particle-beam microlithography apparatus |
US5798193A (en) * | 1997-05-16 | 1998-08-25 | Micron Technology, Inc. | Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems |
JPH11195585A (en) | 1997-12-26 | 1999-07-21 | Nikon Corp | Aligner and method of exposure |
JP2000267261A (en) | 1999-03-17 | 2000-09-29 | Asahi Chem Ind Co Ltd | Uv-resistant pellicle |
US6492075B1 (en) * | 2000-06-16 | 2002-12-10 | Advanced Micro Devices, Inc. | Chemical trim process |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20100297392A1 (en) * | 2009-05-22 | 2010-11-25 | Jonathan Chen | Slip agent for protecting glass |
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JP2005308896A (en) | 2005-11-04 |
US20050233225A1 (en) | 2005-10-20 |
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