US7115527B2 - Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor - Google Patents
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor Download PDFInfo
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- US7115527B2 US7115527B2 US10/894,782 US89478204A US7115527B2 US 7115527 B2 US7115527 B2 US 7115527B2 US 89478204 A US89478204 A US 89478204A US 7115527 B2 US7115527 B2 US 7115527B2
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- ozone
- aluminum oxide
- chamber
- nitride
- water
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- Expired - Fee Related, expires
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims abstract description 103
- 238000000034 method Methods 0.000 title claims abstract description 93
- 239000000758 substrate Substances 0.000 title claims abstract description 82
- 239000003990 capacitor Substances 0.000 title claims abstract description 47
- 238000005530 etching Methods 0.000 title claims abstract description 38
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 98
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 73
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 120
- 235000012239 silicon dioxide Nutrition 0.000 claims description 58
- 239000000377 silicon dioxide Substances 0.000 claims description 57
- -1 hafnium nitride Chemical class 0.000 claims description 38
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 37
- 229910052735 hafnium Inorganic materials 0.000 claims description 37
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 34
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 32
- 229920005591 polysilicon Polymers 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000011800 void material Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 19
- 229910052782 aluminium Inorganic materials 0.000 claims 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 239000012634 fragment Substances 0.000 description 10
- 239000008367 deionised water Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/92—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by patterning layers, e.g. by etching conductive layers
Definitions
- This invention relates to methods of etching an aluminum oxide comprising substrate, and to methods of forming capacitors.
- Aluminum oxides such as Al 2 O 3 are dielectrics finding increasing use in the fabrication of integrated circuits.
- One such use is in the fabrication of capacitors, for example as might be used in the fabrication of logic circuitry, or memory circuitry such as DRAM.
- a “doped” silicon dioxide comprises silicon dioxide having at least 2 total atomic percent of one or both of phosphorus and boron doping, with an “undoped” silicon dioxide comprising less than 2 total atomic percent of one or both of phosphorus and boron doping, including 0% of such doping.
- One example chemistry for etching aluminum oxide is a base-buffered HF solution (for example 100 volume parts water to 1 volume part HF to 15 volume parts of a base) to provide the primary H 2 F 2 etching species.
- This exemplary chemistry provides very good selectivity in etching aluminum oxides relative to titanium nitride, for example a selectivity of about 500:1.
- selectivity in an etch for etching one material selectively to another requires removal/etching of the one relative to the other at a ratio of at least 2:1. Of course, often much higher selectivities are obtainable and desirable.
- the above exemplary chemistry has not produced desired degree of selectivity in etching aluminum oxide selectively relative to hafnium nitride and aluminum nitride.
- using the above chemistry not only etches aluminum oxide but also etches aluminum nitride and hafnium nitride just as fast or faster.
- This invention includes methods of etching an aluminum oxide comprising substrate, and methods of forming capacitors.
- a method of etching an aluminum oxide comprising substrate includes flowing water and ozone to aluminum oxide on the substrate, with at least one of the water and the ozone being at a temperature of at least 65° C. at the aluminum oxide effective to etch aluminum oxide from the substrate.
- a method of forming a capacitor includes providing an aluminum oxide comprising layer laterally proximate a first capacitor electrode over a substrate.
- the first capacitor electrode comprises at least one of polysilicon, titanium nitride, hafnium nitride, and aluminum nitride.
- Water and ozone are flowed to the substrate, with the water and ozone being at a temperature of at least 65° C. at the substrate effective to etch aluminum oxide from the substrate selectively relative to the at least one of polysilicon, titanium nitride, hafnium nitride, and aluminum nitride and effective to expose an outer lateral sidewall of the first capacitor electrode.
- a capacitor dielectric layer is formed over the first capacitor electrode including its exposed outer lateral sidewall.
- a second capacitor electrode is formed over the capacitor dielectric layer.
- FIG. 1 is a diagrammatic sectional view of a substrate fragment in process in accordance with an aspect of the invention.
- FIG. 2 is a view of the FIG. 1 substrate fragment at a processing step subsequent to that depicted by FIG. 1 .
- FIG. 3 is a diagrammatic view of a chamber within which the substrate of FIG. 1 can be processed in accordance with an aspect of the invention.
- FIG. 4 is a diagrammatic sectional view of another substrate fragment in process in accordance with an aspect of the invention.
- FIG. 5 is a view of the FIG. 4 substrate fragment at a processing step subsequent to that depicted by FIG. 4 .
- FIG. 6 is a view of the FIG. 5 substrate fragment at a processing step subsequent to that depicted by FIG. 5 .
- FIG. 7 is a view of the FIG. 6 substrate fragment at a processing step subsequent to that depicted by FIG. 6 .
- FIG. 8 is a view of the FIG. 7 substrate fragment at a processing step subsequent to that depicted by FIG. 7 .
- FIG. 9 is a view of the FIG. 8 substrate fragment at a processing step subsequent to that depicted by FIG. 8 .
- FIG. 1 depicts a substrate fragment 10 .
- Such comprises aluminum oxide thereon, for example an aluminum oxide comprising layer 12 received over some other material 14 .
- Layer 12 might comprise, consist essentially of, or consist of aluminum oxide.
- layer 12 is outwardly exposed, although such might be covered with one or more other materials or layers, either blanketedly or partially.
- material 14 comprises at least one of doped silicon dioxide, undoped silicon dioxide, titanium nitride, hafnium nitride, aluminum nitride, and polysilicon.
- the described method of etching aluminum oxide from substrate 10 will be conducted selectively relative to the at least one of doped silicon dioxide, undoped silicon dioxide, titanium nitride, hafnium nitride, aluminum nitride, and polysilicon.
- water and ozone have been flowed to the aluminum oxide (not shown in FIG. 2 ) on substrate 10 , with at least one of the water and the ozone being at a temperature of at least 65° C. at the aluminum oxide effective to etch aluminum oxide from the substrate.
- an arrow 16 diagrammatically indicates the flow of ozone to what was aluminum oxide layer 12
- arrow 18 depicts the flowing of water (preferably deionized water) to what was aluminum oxide layer 12 .
- Such streams might, of course, be flowed separately to the substrate, as indicated, or as a mixture wherein both the water and ozone will be at a temperature of at 65° C. at the aluminum oxide to effect the etch thereof.
- the water and the ozone are at temperatures no greater than 100° C. at the aluminum oxide.
- at least one of the water and the ozone is at a temperature of at least 85° C., and more preferably at a temperature of at least 90° C., at the aluminum oxide.
- Either of the water or the ozone might be at a temperature of at least 65° C. at the aluminum oxide during the etching, again with most preferably both such components being at a temperature of at least 65° C.
- both the water and the ozone are preferably at temperatures of from 80° C. to 100° C. at the aluminum oxide.
- the etching is preferably void of any fluorine at the aluminum oxide during the etching.
- An exemplary etching rate is from 200 Angstroms per minute to 500 Angstroms per minute.
- FIG. 3 diagrammatically depicts a chamber 20 within which substrate 10 has been provided.
- Arrow 22 diagrammatically depicts an ozone comprising feed stream to chamber 20
- arrow 24 diagrammatically depicting a water comprising feed stream to chamber 20 .
- ozone is present in stream 22 at greater than or equal to 190 mg/liter, more preferably at greater than or equal to 200 mg/liter, even more preferably at greater than or equal to 230 mg/liter.
- stream 22 comprises gases in addition to ozone, with ozone preferably being present in stream 22 at from 190 mg/liter to 280 mg/liter.
- stream 22 comprises O 2 , for example resulting from feeding O 2 to an ozonator whereby an O 2 /O 3 stream from the ozonator is fed to chamber 20 .
- Stream 22 might also comprise other gases, for example N 2 , although such is not necessarily preferred.
- any N 2 present in stream 22 is at less than 100 ppm, more preferably at less than 20 ppm.
- ozone comprising stream 22 is fed to the chamber at a temperature below 40° C., more preferably below 30° C., and for example at about ambient room temperature as, for example, exiting from an ozonator.
- water stream 24 is fed to chamber 20 at some temperature above 65° C., with the water heating the ozone within chamber 20 to be at a temperature of at least 65° C. at the aluminum oxide.
- Higher temperatures for water stream 24 are more preferred, for example temperatures of at least 80° C., more preferably at least 85° C., and even more preferably at temperatures of at least 90° C.
- Stream 22 might also, of course, be heated to desired higher temperatures, including at or above the temperature at which stream 24 is emitted into chamber 20 .
- Feed stream 24 consisted essentially of deionized water at 95° C. fed at 5 liters/minute.
- Such a tool contained a plurality of substrates 10 for etching.
- Ozone comprising feed stream 22 resulted from feeding 10 standard liters per minute of O 2 having about 10 ppm of N 2 (at 40 to 70 PSI partial pressure) to an ozonator.
- Such stream 22 was at about ambient room temperature as fed to chamber 20 , and had an ozone concentration of about 234 mg/liter.
- the O 2 /O 3 stream fed to the chamber is believed to essentially diffuse through the de-ionized water, with the de-ionized water both heating the primary etch-effective ozone and clearing away the etchant reaction product from the substrates.
- FIG. 2 depicts, in one preferred embodiment, the water and ozone flowing being effective to etch aluminum oxide from the substrate whereby material 14 is exposed during at least some of the etch, and with the etch removing aluminum oxide of layer 12 selectively relative to the at least one of doped silicon dioxide, updoped silicon dioxide, titanium nitride, hafnium nitride, aluminum nitride, and polysilicon of material 14 .
- the selectivity is at least 10:1, and more preferably at least 100:1.
- Material 14 might, of course, comprise any one or combination of the stated silicon dioxide, titanium nitride, hafnium nitride, aluminum nitride, and polysilicon in layers, homogenously, or otherwise.
- material 14 comprises at least two of doped silicon dioxide, updoped silicon dioxide, titanium nitride, hafnium nitride, aluminum nitride, and polysilicon. Further in one preferred embodiment, material 14 comprises silicon dioxide and at least one of hafnium nitride and aluminum nitride.
- FIG. 4 depicts a substrate fragment 30 comprising a bulk semiconductive material 32 .
- semiconductor-on-insulator substrates are also contemplated, including any other substrate whether existing or yet-to-be developed.
- an exemplary material for substrate 32 is doped bulk monocrystalline silicon.
- a conductively doped diffusion region 34 is received within bulk substrate 32 .
- a dielectric layer 36 has been formed over bulk substrate 32 , and an opening 38 formed therein to diffusion region 34 .
- An exemplary material for layer 36 is silicon nitride and/or silicon dioxide. Opening 38 is filled with conductive material, for example one or a combination of metals, metal compounds and/or conductively doped semiconductive materials.
- a silicon dioxide comprising layer 44 has been formed over substrate 32 / 36 / 40 .
- An exemplary preferred material is doped silicon dioxide, such as borophosphosilicate glass (BPSG).
- An opening 46 has been formed within silicon dioxide comprising layer 44 .
- exemplary techniques include photolithographic patterning and etch.
- an aluminum oxide comprising layer 50 has been formed over the substrate within opening 46 .
- An exemplary technique for doing so includes chemical vapor deposition.
- layer 50 has been anisotropically etched, and preferably to expose conductive plugging material 40 at this point in the process. Such processing might also include chemical mechanical polishing prior to an anisotropic etch.
- first capacitor electrode 52 has been formed within opening 46 , with aluminum oxide comprising layer 50 being received laterally intermediate first capacitor electrode 52 and silicon dioxide comprising layer 44 within which opening 46 is formed.
- First capacitor electrode 52 comprises at least one of polysilicon, titanium nitride, hafnium nitride, and aluminum nitride. By way of example only, such might be deposited by chemical vapor deposition followed by planarize polishing, for example chemical mechanical polishing, relative to material 44 for example to form the depicted isolated first capacitor electrode 52 .
- aluminum oxide comprising layer 50 contacts first capacitor electrode 52
- first capacitor electrode 52 can be considered as comprising an outer lateral sidewall 55 .
- FIGS. 4–7 describes and depicts but one exemplary manner of providing an aluminum oxide comprising layer laterally proximate a first capacitor electrode over a substrate where the first capacitor electrode comprises at least one of polysilicon, titanium nitride, hafnium nitride, and aluminum nitride. Any other methods and structures are of course contemplated.
- water and ozone have been flowed to substrate 30 .
- the water and ozone are preferably at a temperature of at least 65° C. at the substrate effective to etch aluminum oxide 50 from substrate 30 selectively relative to silicon dioxide 44 and the at least one of polysilicon, titanium nitride, hafnium nitride, and aluminum nitride of first capacitor electrode 52 effective to expose an outer lateral sidewall 55 of first capacitor electrode 52 .
- all of the above preferred attributes of an aluminum oxide etch apply in accordance with the first described embodiments with reference to etching material 50 in the FIGS. 4–8 embodiment. Such etching can be a timed etch to expose any desired quantity of outer lateral sidewall 55 .
- a capacitor dielectric layer 60 is formed over first capacitor electrode 52 including its exposed outer lateral sidewall 55 .
- Exemplary preferred materials include silicon nitride and high k layers such as tantalum pentoxide, aluminum oxide, barium strontium titanate, etc.
- a second capacitor electrode 64 is formed over capacitor dielectric layer 60 , with any suitable conductive material being contemplated.
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- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
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Abstract
Description
Claims (70)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/894,782 US7115527B2 (en) | 2004-07-19 | 2004-07-19 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
US11/476,391 US7276455B2 (en) | 2004-07-19 | 2006-06-27 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/894,782 US7115527B2 (en) | 2004-07-19 | 2004-07-19 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Related Child Applications (1)
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US11/476,391 Continuation US7276455B2 (en) | 2004-07-19 | 2006-06-27 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Publications (2)
Publication Number | Publication Date |
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US20060011587A1 US20060011587A1 (en) | 2006-01-19 |
US7115527B2 true US7115527B2 (en) | 2006-10-03 |
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US10/894,782 Expired - Fee Related US7115527B2 (en) | 2004-07-19 | 2004-07-19 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
US11/476,391 Expired - Fee Related US7276455B2 (en) | 2004-07-19 | 2006-06-27 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
Family Applications After (1)
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US11/476,391 Expired - Fee Related US7276455B2 (en) | 2004-07-19 | 2006-06-27 | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060283837A1 (en) * | 2004-07-19 | 2006-12-21 | Shea Kevin R | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
US20080283502A1 (en) * | 2006-05-26 | 2008-11-20 | Kevin Moeggenborg | Compositions, methods and systems for polishing aluminum oxide and aluminum oxynitride substrates |
US20150031212A1 (en) * | 2004-09-01 | 2015-01-29 | Micron Technology, Inc. | Method for obtaining extreme selectivity of metal nitrides and metal oxides |
US20200006655A1 (en) * | 2018-06-27 | 2020-01-02 | International Business Machines Corporation | Alignment through topography on intermediate component for memory device patterning |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004059668B3 (en) * | 2004-12-10 | 2006-07-13 | Infineon Technologies Ag | Semiconductor technology process for producing a conductive layer |
US8283259B2 (en) * | 2010-08-31 | 2012-10-09 | Micron Technology, Inc. | Methods of removing a metal nitride material |
WO2013161959A1 (en) * | 2012-04-27 | 2013-10-31 | 独立行政法人科学技術振興機構 | Method for etching metal or metal oxide by ozone water, method for smoothing surface of metal or metal oxide by ozone water, and patterning method using ozone water |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5858255A (en) * | 1991-10-09 | 1999-01-12 | Sharp Kabushiki Kaisha | Printed circuit plates |
US5885888A (en) * | 1994-05-11 | 1999-03-23 | Semiconductor Energy Laboratory Co., Ltd. | Etching material and etching process |
US20030109106A1 (en) * | 2001-12-06 | 2003-06-12 | Pacheco Rotondaro Antonio Luis | Noval chemistry and method for the selective removal of high-k dielectrics |
US20030169629A1 (en) * | 2000-07-31 | 2003-09-11 | Bernd Goebel | Semiconductor memory cell configuration and a method for producing the configuration |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7115527B2 (en) * | 2004-07-19 | 2006-10-03 | Micron Technology, Inc. | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
-
2004
- 2004-07-19 US US10/894,782 patent/US7115527B2/en not_active Expired - Fee Related
-
2006
- 2006-06-27 US US11/476,391 patent/US7276455B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5858255A (en) * | 1991-10-09 | 1999-01-12 | Sharp Kabushiki Kaisha | Printed circuit plates |
US5885888A (en) * | 1994-05-11 | 1999-03-23 | Semiconductor Energy Laboratory Co., Ltd. | Etching material and etching process |
US20030169629A1 (en) * | 2000-07-31 | 2003-09-11 | Bernd Goebel | Semiconductor memory cell configuration and a method for producing the configuration |
US20030109106A1 (en) * | 2001-12-06 | 2003-06-12 | Pacheco Rotondaro Antonio Luis | Noval chemistry and method for the selective removal of high-k dielectrics |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060283837A1 (en) * | 2004-07-19 | 2006-12-21 | Shea Kevin R | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
US7276455B2 (en) * | 2004-07-19 | 2007-10-02 | Micron Technology, Inc. | Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor |
US20150031212A1 (en) * | 2004-09-01 | 2015-01-29 | Micron Technology, Inc. | Method for obtaining extreme selectivity of metal nitrides and metal oxides |
US20080283502A1 (en) * | 2006-05-26 | 2008-11-20 | Kevin Moeggenborg | Compositions, methods and systems for polishing aluminum oxide and aluminum oxynitride substrates |
US20200006655A1 (en) * | 2018-06-27 | 2020-01-02 | International Business Machines Corporation | Alignment through topography on intermediate component for memory device patterning |
US10658589B2 (en) * | 2018-06-27 | 2020-05-19 | International Business Machines Corporation | Alignment through topography on intermediate component for memory device patterning |
US11177437B2 (en) | 2018-06-27 | 2021-11-16 | International Business Machines Corporation | Alignment through topography on intermediate component for memory device patterning |
Also Published As
Publication number | Publication date |
---|---|
US20060283837A1 (en) | 2006-12-21 |
US7276455B2 (en) | 2007-10-02 |
US20060011587A1 (en) | 2006-01-19 |
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