US6777821B2 - Ball grid array x-ray orientation mark - Google Patents
Ball grid array x-ray orientation mark Download PDFInfo
- Publication number
- US6777821B2 US6777821B2 US10/313,401 US31340102A US6777821B2 US 6777821 B2 US6777821 B2 US 6777821B2 US 31340102 A US31340102 A US 31340102A US 6777821 B2 US6777821 B2 US 6777821B2
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- 230000010354 integration Effects 0.000 claims abstract description 30
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- 238000004519 manufacturing process Methods 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 9
- 238000012216 screening Methods 0.000 claims description 3
- 238000012795 verification Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 5
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- 230000008450 motivation Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
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- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
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- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/5448—Located on chip prior to dicing and remaining on chip after dicing
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0613—Square or rectangular array
- H01L2224/06131—Square or rectangular array being uniform, i.e. having a uniform pitch across the array
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2924/14—Integrated circuits
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
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- H01L2924/19043—Component type being a resistor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10734—Ball grid array [BGA]; Bump grid array
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/168—Wrong mounting prevention
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
Definitions
- the present invention relates to systems and methods for inspecting integrated electronic components, and particularly for inspecting ball grid array (BGA) connected components.
- BGA ball grid array
- Electronic circuit packaging technology presents an important aspect of circuit design. Improved methods of packaging offer improvements in circuit performance as well as cost and time savings. Since its development in the 1960's surface mount technologies, in which electronic components are soldered directly to metal pads on the surface of a printed circuit board, have supplanted conventional “through-hole” packaging methods. Such technologies afford better circuit performance and a higher connection density. Some of the currently available surface mount technologies are the plastic-leaded chip carrier, the small-outline integrated circuit, chip capacitor, chip resistor, ball grid array, and chip scale package.
- X-ray inspection is sometimes used to verify component connections, particularly those where some of the connections are obscured for an ordinary visual inspection.
- Ball grid array technology generally employs a dense grid of discrete solder balls to facilitate electrical connection of an electronic component (such as a application specific integrated circuit (ASIC)) and a printed circuit board (PCB). With precision alignment and heating, connection is made between an array of solder pads on the component and another corresponding array of solder pads on the printed circuit via the melted solder balls.
- ASIC application specific integrated circuit
- PCB printed circuit board
- the advantages of BGA packaging include reduced component size, cost, and weight, higher I/O count for a given substrate area, improved electrical performance and an easy extension to multi-chip modules. Because the grid presents obscured connections, X-ray inspection is commonly used to verify the integrity of BGA connections.
- connection patterns of solder pad arrays. These symmetrical connection patterns are preferred (in fact, standard) because they provide a dense arrangement of connections and convenient processing.
- a dense pattern of connection is a principle motivation for surface mount technologies, including BGA technology. Proper orientation of the component with symmetric connection patterns is conventionally determined by a visual indicator when the component is integrated with the printed circuit board. However, improper orientation of the component still occurs.
- Visual orientation indicators are typically silk screened onto the exterior of the component, invisible to an x-ray inspection.
- physical features built into the housing material of the electronic component are also used as markers to indicate proper orientation of the electronic component.
- the housing material is always invisible to x-rays; an x-ray visible housing material would prevent any x-ray inspection of the electronic component integration.
- connection integrity inspection and orientation verification are currently performed as two separate processes.
- the present invention discloses a method and apparatus providing inspection of the orientation of an electronic component integration where x-ray inspection is employed to verify the connection integrity of the electronic component after integration.
- the invention is particularly useful for surface mount technologies, such as a ball grid array (BGA) integration.
- BGA ball grid array
- the present invention can be incorporated into existing integration inspection processes requiring a minimum of additional time and equipment.
- An exemplary method of producing inspectable electronic components using the invention comprises providing an electronic component for integration and providing an x-ray visible orientation indicator for the electronic component such that proper orientation of the electronic component is verifiable by x-ray inspection after integration of the electronic component.
- the x-ray inspection also makes connection integrity of the electronic component verifiable after integration of the electronic component.
- An exemplary method of inspecting electronic components using the invention comprises producing an x-ray of an electronic component after the electronic component is integrated, wherein the electronic component includes an x-ray visible orientation indicator and performing x-ray inspection of the x-ray to verify connection integrity of the electronic component and to verify proper orientation of the electronic component.
- An exemplary apparatus using the invention comprises an electronic component for integration and an x-ray visible orientation indicator for the electronic component such that proper orientation of the electronic component is verifiable by x-ray inspection after integration of the electronic component.
- the x-ray inspection also makes connection integrity of the electronic component verifiable after integration of the electronic component.
- the invention can be used with any x-ray inspected integration technology, such as surface mount technologies like ball grid array integration.
- the invention is useful where the electronic component includes a symmetrical arrangement of solder pads and/or solder balls.
- an x-ray visible orientation indicator has metal content.
- the x-ray visible orientation indicator can be produced as part of a manufacturing process of the electronic component.
- the x-ray visible orientation indicator can be produced as part of fabricating a die for the electronic component (e.g. the orientation indicator is fabricated in the die), silk screening markings on the electronic component (e.g. one mark being the orientation indicator), or producing solder pads for the electronic component (e.g. a unique solder pad being the orientation indicator).
- FIGS. 1A and 1B illustrate a typical BGA connection x-ray
- FIG. 2 illustrates a close-up view of an exemplary BGA connection
- FIG. 3 illustrates an exemplary BGA connection x-ray with an x-ray visible orientation indicator
- FIG. 4 illustrates an exemplary BGA connection x-ray with an x-ray visible orientation indicator in the die
- FIG. 5 illustrates an exemplary BGA connection x-ray with an x-ray visible orientation indicator solder pad
- FIG. 6 illustrates an exemplary BGA connection x-ray with a separate x-ray visible orientation indicator
- FIG. 7 is a flowchart of a method of producing inspectable electronic components using the invention.
- FIG. 8 is a flowchart of a method of inspecting electronic components using the invention.
- the present invention creates a synergy between connection integrity inspection and orientation verification for component integration.
- the invention is applicable to any electronic component (e.g. integrated circuit) which is integrated into a larger circuit and reveals a symmetric connection pattern under x-ray inspection.
- Automated or manual x-ray inspection is used to verify connection integrity for integrated electronic components.
- the connection pattern of the electronic component is symmetric, scrutiny of the captured x-ray will often reveal no indication whether the component is improperly oriented. This is because the x-ray visible connection pattern is typically symmetrical.
- FIGS. 1A and 1B illustrate a typical ball grid array x-ray of an electronic component 100 .
- the symmetric connection pattern 110 is composed of a grid of solder ball connections 102 .
- Each connection 102 is made between a first solder pad 106 on the electronic component 100 and a second solder pad 108 on the printed circuit board 104 .
- An X-ray inspection is used to verify the connection integrity of the solder balls 112 to the solder pads 106 , 108 .
- a particular connection 102 A is designated as “pin 1” for both the component 100 and the printed circuit board 104 .
- Proper orientation of the electronic component 100 is verified by matching the “pin 1” connection 102 A between the two elements.
- conventional indicators are invisible to x-ray inspection.
- the invention is not limited to providing an orientation indicator directed at “pin 1”; any connection 102 or location within the component 100 can serve as an orientation indicator as described in the example embodiments hereafter.
- FIG. 2 illustrates a close-up view of an exemplary BGA connection 102 .
- the solder ball 112 forms the connection between a first solder pad 106 on the electronic component 100 and a second solder pad 108 on the printed circuit board 104 .
- the connections can be formed beginning with the solder balls 112 adhered to the first solder pads 106 of the electrical component 100 and then precision melted to the second solder pads 108 of the board 104 .
- the symmetric connection pattern 110 is shown in the form of a grid having four possible orientations, other symmetric patterns are also used.
- a symmetric pattern 110 need only have at least two possible orientations which are indistinguishable when the integrated electronic component 100 is x-ray inspected.
- the symmetric connection pattern is formed from a grid with one or more omitted rows and/or columns or omitted portions of rows and/or columns (not shown).
- the present invention can also be efficiently incorporated into any existing automated x-ray inspection process, such as one that performs computerized image recognition to verify connection integrity. Identifying the position of an orientation indicator can easily be supplemented to the more complex image recognition required to verify connection integrity.
- the invention is principally described herein with respect to x-ray inspection of a BGA integrated electronic component 100 , the invention can be incorporated into any x-ray inspection process for a component 100 .
- the invention is not limited to BGA integration or even surface mount technologies.
- an x-ray visible indicator is provided on the electronic component.
- the indicator will have metal content, thereby providing a more distinct mark in an x-ray.
- a number of different techniques can be used to produce the indicator, however, it is preferable that the indicator is produced as part of the ordinary manufacturing processes of the electronic component, thus minimizing the cost of implementation. It is also preferable that the indicator does not obscure the elements which are to be x-ray inspected.
- FIG. 3 illustrates an exemplary BGA connection x-ray showing an x-ray visible orientation indicator 300 .
- Markings are printed on the exterior of electronic components 100 as part of ordinary manufacturing processing for the purposes identification.
- electronic components 100 can be marked using a silk screen process.
- the orientation indicator 300 is a silk screened x-ray visible “1” mark indicating the “pin 1” connection 102 A.
- metal content can be included in the silk screened material.
- the silk screened ink can be loaded with metal powder.
- Other printing processes, such as stamping or manual writing can also be used provided an x-ray visible mark is produce.
- the mark itself may take any form or shape, although “1” obtains recognition in the industry.
- FIG. 4 illustrates an exemplary BGA connection x-ray with an x-ray visible orientation indicator in the die 400 of the electronic circuit of the component 100 .
- Electronic component manufacturing typically employs fabricating a die 400 of the electronic circuit of the component 100 and includes forming the electrical connections with the solder pads 106 .
- an x-ray visible orientation indicator 402 is fabricated within the die 400 in an innocuous region that will not obscure the x-ray inspection of the BGA connections.
- the orientation indicator 402 can be any shape, as long as it can be used to verify proper orientation of the electronic component 100 .
- one corner of the die 400 is distinctly marked with metal as the orientation indicator 402 .
- the orientation indicator 402 will be x-ray visible because the die 400 includes metal constituents.
- FIG. 5 illustrates an exemplary BGA connection x-ray with an x-ray visible orientation indicator 500 included in the solder pad 102 A.
- the orientation indicator 500 is a distinctly shaped contact pad 500 at the “pin 1” connection 102 A.
- the shape of the distinct contact pad 500 can be any form that will allow it to be distinguished from the other contact pads 102 . However, the shape should be such that there is negligible negative impact to the electrical performance of the component 100 and such that it does not obstruct x-ray inspection of the electrical connection.
- FIG. 6 illustrates an exemplary BGA connection x-ray with a separate x-ray visible orientation indicator.
- the x-ray visible orientation indicator 600 is a separate element within the component material.
- the indicator 600 can be added separately from the ordinary manufacturing processes.
- the separate indicator 600 can be an additional non-functional solder pad (without an electrical connector or solder ball), conveniently installed along with the functional solder pads. Using an extra solder pad as the orientation indicator 600 eliminates the need for a separately manufactured part.
- FIG. 7 is a flowchart of a method of producing inspectable electronic components using the invention.
- the process begins by providing an electronic component for integration at block 700 .
- an x-ray visible orientation indicator for the electronic component is provided such that proper orientation of the electronic component is verifiable by x-ray inspection after integration of the electronic component at block 702 .
- the orientation indicator can be provided as part of a number of ordinary electronic component manufacturing processes, such as printing identification marks, die fabrication, and manufacturing and positioning solder pads.
- the x-ray inspection also makes connection integrity of the electronic component verifiable after integration of the electronic component.
- FIG. 8 is a flowchart of a method of inspecting electronic components using the invention.
- the process begins by producing an x-ray of an electronic component after the electronic component is integrated at block 800 .
- the electronic component includes an x-ray visible orientation indicator.
- the orientation indicator can be provided as part of a number of ordinary electronic component manufacturing processes, such as printing identification marks, die fabrication, and manufacturing and positioning solder pads.
- the inspection of the x-ray to verify connection integrity of the electronic component and to verify proper orientation of the electronic component is performed at block 802 .
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Structure Of Printed Boards (AREA)
Abstract
Description
Claims (16)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US10/313,401 US6777821B2 (en) | 2001-10-30 | 2002-12-06 | Ball grid array x-ray orientation mark |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US10/016,288 US6563905B1 (en) | 2001-10-30 | 2001-10-30 | Ball grid array X-ray orientation mark |
US10/313,401 US6777821B2 (en) | 2001-10-30 | 2002-12-06 | Ball grid array x-ray orientation mark |
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US10/016,288 Division US6563905B1 (en) | 2001-10-30 | 2001-10-30 | Ball grid array X-ray orientation mark |
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US20040008812A1 US20040008812A1 (en) | 2004-01-15 |
US6777821B2 true US6777821B2 (en) | 2004-08-17 |
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US10/313,401 Expired - Fee Related US6777821B2 (en) | 2001-10-30 | 2002-12-06 | Ball grid array x-ray orientation mark |
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US10/016,288 Expired - Lifetime US6563905B1 (en) | 2001-10-30 | 2001-10-30 | Ball grid array X-ray orientation mark |
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US (2) | US6563905B1 (en) |
EP (1) | EP1440471A2 (en) |
JP (2) | JP2006502557A (en) |
CN (1) | CN100375281C (en) |
AU (1) | AU2002342218A1 (en) |
BR (1) | BR0206243A (en) |
CA (1) | CA2433488A1 (en) |
HK (1) | HK1064509A1 (en) |
IL (2) | IL156724A0 (en) |
WO (1) | WO2003038896A2 (en) |
Cited By (1)
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---|---|---|---|---|
US20090068770A1 (en) * | 2007-09-10 | 2009-03-12 | International Business Machines Corporation | Tactile surface inspection during device fabrication or assembly |
Families Citing this family (7)
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US7027070B2 (en) * | 2001-11-29 | 2006-04-11 | Agilent Technologies, Inc. | Systems and methods for manipulating a graphical display of a printed circuit board model for an automated x-ray inspection system |
US7386376B2 (en) | 2002-01-25 | 2008-06-10 | Intelligent Mechatronic Systems, Inc. | Vehicle visual and non-visual data recording system |
US7529336B2 (en) | 2007-05-31 | 2009-05-05 | Test Research, Inc. | System and method for laminography inspection |
JP5493360B2 (en) * | 2009-01-08 | 2014-05-14 | オムロン株式会社 | X-ray inspection method, X-ray inspection apparatus and X-ray inspection program |
JP2014192176A (en) * | 2013-03-26 | 2014-10-06 | Ngk Spark Plug Co Ltd | Wiring board |
US10607049B2 (en) | 2016-04-04 | 2020-03-31 | Soreq Nuclear Research Center | Method and a system for XRF marking and reading XRF marks of electronic systems |
US11029267B2 (en) * | 2016-04-04 | 2021-06-08 | Security Matters Ltd. | Method and a system for XRF marking and reading XRF marks of electronic systems |
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US6617702B2 (en) * | 2001-01-25 | 2003-09-09 | Ibm Corporation | Semiconductor device utilizing alignment marks for globally aligning the front and back sides of a semiconductor substrate |
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JPH1074802A (en) * | 1996-08-30 | 1998-03-17 | Shimu:Kk | Structure of bonding ball grid array package and method of inspecting bonding |
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2001
- 2001-10-30 US US10/016,288 patent/US6563905B1/en not_active Expired - Lifetime
-
2002
- 2002-10-29 IL IL15672402A patent/IL156724A0/en active IP Right Grant
- 2002-10-29 BR BR0206243-7A patent/BR0206243A/en not_active IP Right Cessation
- 2002-10-29 AU AU2002342218A patent/AU2002342218A1/en not_active Abandoned
- 2002-10-29 EP EP02776377A patent/EP1440471A2/en not_active Withdrawn
- 2002-10-29 CA CA002433488A patent/CA2433488A1/en not_active Abandoned
- 2002-10-29 JP JP2003541052A patent/JP2006502557A/en active Pending
- 2002-10-29 CN CNB028045300A patent/CN100375281C/en not_active Expired - Fee Related
- 2002-10-29 WO PCT/US2002/034809 patent/WO2003038896A2/en not_active Application Discontinuation
- 2002-12-06 US US10/313,401 patent/US6777821B2/en not_active Expired - Fee Related
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2003
- 2003-06-30 IL IL156724A patent/IL156724A/en not_active IP Right Cessation
-
2004
- 2004-09-21 HK HK04107249A patent/HK1064509A1/en not_active IP Right Cessation
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2009
- 2009-11-09 JP JP2009256294A patent/JP2010103543A/en active Pending
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US6577019B1 (en) * | 2000-01-21 | 2003-06-10 | Micron Technology, Inc. | Alignment and orientation features for a semiconductor package |
US6617702B2 (en) * | 2001-01-25 | 2003-09-09 | Ibm Corporation | Semiconductor device utilizing alignment marks for globally aligning the front and back sides of a semiconductor substrate |
Cited By (2)
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US20090068770A1 (en) * | 2007-09-10 | 2009-03-12 | International Business Machines Corporation | Tactile surface inspection during device fabrication or assembly |
US7989229B2 (en) | 2007-09-10 | 2011-08-02 | International Business Machines Corporation | Tactile surface inspection during device fabrication or assembly |
Also Published As
Publication number | Publication date |
---|---|
US6563905B1 (en) | 2003-05-13 |
US20030082898A1 (en) | 2003-05-01 |
JP2006502557A (en) | 2006-01-19 |
JP2010103543A (en) | 2010-05-06 |
CA2433488A1 (en) | 2003-05-08 |
WO2003038896A2 (en) | 2003-05-08 |
IL156724A0 (en) | 2004-01-04 |
IL156724A (en) | 2007-07-04 |
US20040008812A1 (en) | 2004-01-15 |
CN100375281C (en) | 2008-03-12 |
BR0206243A (en) | 2004-12-28 |
AU2002342218A1 (en) | 2003-05-12 |
WO2003038896A3 (en) | 2003-07-31 |
HK1064509A1 (en) | 2005-01-28 |
CN1515032A (en) | 2004-07-21 |
EP1440471A2 (en) | 2004-07-28 |
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