US6356694B1 - Process for producing planar waveguide structures as well as waveguide structure - Google Patents
Process for producing planar waveguide structures as well as waveguide structure Download PDFInfo
- Publication number
- US6356694B1 US6356694B1 US09/353,285 US35328599A US6356694B1 US 6356694 B1 US6356694 B1 US 6356694B1 US 35328599 A US35328599 A US 35328599A US 6356694 B1 US6356694 B1 US 6356694B1
- Authority
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- United States
- Prior art keywords
- layer
- waveguide
- fluoride
- core structure
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
Definitions
- the invention is based on a process for producing planar waveguide structures as well as a waveguide structure according to the generic class of the independent claims.
- the refractive index of the waveguide must be greater than the refractive index of its environment.
- the planar waveguide comprises a dielectric circuit carrier, a substrate with a first refractive index n 1 , on which is located a waveguiding dielectric with a refractive index n 2 .
- the cover layer is either air or an additional dielectric with a refractive index n 3 .
- the field spurs extend only slightly out of the waveguiding structure.
- the process according to the invention with the characteristic features of the independent claim has the advantage that it describes a simple way to structure the optical core such that an optimal symmetrical sphere surrounds the core and prevents out-diffusion of doping materials. Furthermore, the symmetrical sphere consisting of a fluoride-containing layer has a stabilizing effect on the shape of the core and thus reduces stress in the waveguide structure.
- the process is particularly advantageous for different waveguide structures based on glass or silicon, whereby the layers are created, for example, by flame hydrolysis.
- the core structure can advantageously be structured by a reactive ion etching process.
- the fluoride-containing layer by applying a fluoride-containing liquid.
- This has moreover the advantage of creating a very thin fluoride layer, which has a markedly changed refractive index compared to the material of the waveguide.
- a layer thickness on the order of 150 nm is optimal. Applying a fluoride-containing liquid has the additional effect of cleaning the structure material.
- the inventive waveguide with the characteristics of the independent claim has the advantage that it permits very clean wave guidance, whereby the manufacturing process itself is not burdened by costs and complex work operations.
- FIGS. 1A-1D show phases 1 through 4 in the production of a waveguide according to the present invention.
- FIGS. 2A-2B show the index profile of a waveguide produced according to the present invention.
- a lower layer 2 which is thick compared to the core, is produced on a substrate surface 1 .
- This lower layer is made, for example, of silicon oxide, which is doped with boron oxide or germanium oxide.
- This layer is deposited on the substrate by means of flame hydrolysis.
- the basic substances for the process highly pure liquid chlorides, are vaporized.
- the chlorides are introduced into the reaction chamber together with a carrier gas and possibly drying gases.
- the energy required for depositing the glass is produced either externally by a burner or furnace or by interaction with a plasma and high temperature.
- Adding chlorides of other elements, for example, boron or germanium, to the silicon tetrachloride produces glasses whose refractive index differs from that of pure quartz glass.
- the softening temperature of layer 2 is highest relative to the layers subsequently to be deposited.
- the lower layer 2 is sintered onto the substrate, e.g. a silicon or quartz glass wafer.
- the surface of layer 2 is etched with a fluoride-containing solution, e.g. a BHF solution (buffered HF solution) or with diluted hydrofluoric acid.
- a fluoride-containing solution e.g. a BHF solution (buffered HF solution) or with diluted hydrofluoric acid.
- etching produces a thin layer with high fluoride content, on which the material of the next layer can subsequently be deposited.
- a silicon oxide core layer 3 is deposited on the fluoride-containing boundary layer 4 .
- This glass layer is doped, for example, with boron oxide, germanium oxide, and/or phosphorus oxide, to increase the refractive index of the glass material.
- this layer 3 remains complete or is structured.
- Structuring of the waveguide can be accomplished, for example, by reactive ion etching (RIE).
- RIE reactive ion etching
- a plasma is produced in the reaction chamber, in which reactive and ionized molecules are created, which are accelerated toward the specimen by the voltage drop formed on the cathode, the substrate itself.
- This etching process produces, for example, the structure of waveguide 3 depicted in FIG. 1 B.
- CHF 3 and oxygen for example, are used as etching gases.
- the entire surface structure comprising the lower layer 2 and the waveguiding structure 3 is treated with a BHF solution or diluted hydrofluoric acid analogously to the process in FIG. 1 A.
- the fluoride-containing material has the property of lowering the refractive index and, what is far more interesting, of suppressing the migration of the doping materials within the glass, e.g., the germanium, phosphorus, and boron ions. If an optically guiding core 3 is provided with a very thin fluoride layer 4 having an index that is markedly changed relative to the rest of the core material, this layer does not negatively affect light guidance.
- the preferred layer thickness is on the order of 150 nm. This layer thickness is simultaneously sufficient to prevent migration of the doping materials from or into the core material.
- An added effect of fluorination of the etched structure material is the cleaning of the surface from interfering impurities.
- a thin layer with high fluoride content is created in the boundary phase onto which the material of the core and/or the upper cover layer is subsequently deposited.
- the fluoride-containing boundary layer has a form stabilizing effect since the softening point of this glass layer is higher than that of the neighboring materials.
- the core is less exposed to the pressure of the neighboring materials, the stresses are reduced, and the refractive index of the light guiding core remains constant due to constant concentration and reduced stresses.
- the upper cover layer 5 is deposited. This layer is again created by flame hydrolysis and subsequent sintering of the material. After completion of the production process, core 3 is uniformly surrounded by a thin fluoride layer 4 .
- the cover layer 5 preferably has a refractive index that is analogous to the lower layer 2 , whereby the softening temperature of the material must be lower so that substrate, lower layer, and core material are not excessively deformed by the sintering process. Applying a thin fluoride-containing layer 4 is particularly advantageous for suppressing bubble defects caused by sintering of cover layer 5 .
- FIG. 2 shows the course of the refractive index n over cross-section axes a and b.
- a strong jump in the index is evident in the region of the core material 3 .
- the thin fluoride-containing layer causes a slight drop in the refractive index at the points identified by 6 . This effect is exaggerated in the graph. It is sufficient to obtain a sharp juncture between refractive indices n 1 and n 2 to describe a high-quality waveguide. Applying the fluoride-containing layer improves the ideally depicted jump in the refractive index to a sharper edge. Overall, this increases the quality of the waveguide structure and reduces optical attenuation.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19831719A DE19831719A1 (en) | 1998-07-15 | 1998-07-15 | Process for the production of planar waveguide structures and waveguide structure |
DE19831719 | 1998-07-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
US6356694B1 true US6356694B1 (en) | 2002-03-12 |
Family
ID=7874113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/353,285 Expired - Fee Related US6356694B1 (en) | 1998-07-15 | 1999-07-14 | Process for producing planar waveguide structures as well as waveguide structure |
Country Status (5)
Country | Link |
---|---|
US (1) | US6356694B1 (en) |
EP (1) | EP0973050B1 (en) |
JP (1) | JP2000039532A (en) |
CA (1) | CA2276959A1 (en) |
DE (2) | DE19831719A1 (en) |
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WO2002050585A1 (en) * | 2000-12-21 | 2002-06-27 | Cquint Communications Corporation | Multi-layer dispersion-engineered waveguides and resonators |
US20030031432A1 (en) * | 2001-05-30 | 2003-02-13 | Sykora Craig R. | Optical fiber fusion splice having a controlled mode field diameter expansion match |
US20030063883A1 (en) * | 2001-07-10 | 2003-04-03 | Demaray Richard E. | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
US20030081902A1 (en) * | 2001-10-30 | 2003-05-01 | Blauvelt Henry A. | Optical junction apparatus and methods employing optical power transverse-transfer |
US20030134054A1 (en) * | 2001-11-09 | 2003-07-17 | Demaray Richard E. | Low temperature zirconia based thermal barrier layer by PVD |
US6615615B2 (en) * | 2001-06-29 | 2003-09-09 | Lightwave Microsystems Corporation | GePSG core for a planar lightwave circuit |
US20030175142A1 (en) * | 2002-03-16 | 2003-09-18 | Vassiliki Milonopoulou | Rare-earth pre-alloyed PVD targets for dielectric planar applications |
US20030173207A1 (en) * | 2002-03-16 | 2003-09-18 | Symmorphix, Inc. | Biased pulse DC reactive sputtering of oxide films |
US20030235369A1 (en) * | 2001-11-23 | 2003-12-25 | Grosjean Charles I. | Alignment apparatus and methods for transverse optical coupling |
US6690868B2 (en) | 2001-05-30 | 2004-02-10 | 3M Innovative Properties Company | Optical waveguide article including a fluorine-containing zone |
US20040105644A1 (en) * | 2002-08-27 | 2004-06-03 | David Dawes | Optically coupling into highly uniform waveguides |
US20040114900A1 (en) * | 2002-12-12 | 2004-06-17 | Applied Materials, Inc. | Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications |
US20040126051A1 (en) * | 2001-01-25 | 2004-07-01 | Michel Bruel | Low-birefringent integrated optics structures |
US20040259305A1 (en) * | 2003-05-23 | 2004-12-23 | Demaray Richard E. | Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides |
US6839491B2 (en) | 2000-12-21 | 2005-01-04 | Xponent Photonics Inc | Multi-layer dispersion-engineered waveguides and resonators |
US20050006768A1 (en) * | 2003-02-27 | 2005-01-13 | Mukundan Narasimhan | Dielectric barrier layer films |
US6907169B2 (en) | 2001-10-30 | 2005-06-14 | Xponent Photonics Inc | Polarization-engineered transverse-optical-coupling apparatus and methods |
US20050183946A1 (en) * | 2002-03-16 | 2005-08-25 | Tao Pan | Mode size converter for a planar waveguide |
US20060127022A1 (en) * | 2004-12-09 | 2006-06-15 | Tae Hong Kim | Planar optical waveguide and method of fabricating the same |
US20060134522A1 (en) * | 2004-12-08 | 2006-06-22 | Hongmei Zhang | Deposition of LiCoO2 |
US7106917B2 (en) | 1998-11-13 | 2006-09-12 | Xponent Photonics Inc | Resonant optical modulators |
US20070086711A1 (en) * | 2004-05-27 | 2007-04-19 | Omron Corporation | Optical branching unit, and method of manufacturing the same |
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US8518581B2 (en) | 2008-01-11 | 2013-08-27 | Inifinite Power Solutions, Inc. | Thin film encapsulation for thin film batteries and other devices |
US8599572B2 (en) | 2009-09-01 | 2013-12-03 | Infinite Power Solutions, Inc. | Printed circuit board with integrated thin film battery |
US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
US8906523B2 (en) | 2008-08-11 | 2014-12-09 | Infinite Power Solutions, Inc. | Energy device with integral collector surface for electromagnetic energy harvesting and method thereof |
US20150131939A1 (en) * | 2013-11-11 | 2015-05-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method of forming chip package with waveguide for light coupling |
US9334557B2 (en) | 2007-12-21 | 2016-05-10 | Sapurast Research Llc | Method for sputter targets for electrolyte films |
US9634296B2 (en) | 2002-08-09 | 2017-04-25 | Sapurast Research Llc | Thin film battery on an integrated circuit or circuit board and method thereof |
US10680277B2 (en) | 2010-06-07 | 2020-06-09 | Sapurast Research Llc | Rechargeable, high-density electrochemical device |
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ATE338736T1 (en) * | 2000-09-29 | 2006-09-15 | Schott Ag | OPTICAL SUBSTRATE AND A METHOD FOR PRODUCING OPTICAL SUBSTRATES |
US20100126621A1 (en) * | 2008-11-25 | 2010-05-27 | Mark Van Wees | High Velocity Low Impact Liquid Feed Distributor |
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-
1998
- 1998-07-15 DE DE19831719A patent/DE19831719A1/en not_active Withdrawn
-
1999
- 1999-06-24 EP EP99440163A patent/EP0973050B1/en not_active Expired - Lifetime
- 1999-06-24 DE DE59902629T patent/DE59902629D1/en not_active Expired - Fee Related
- 1999-07-01 JP JP11187543A patent/JP2000039532A/en active Pending
- 1999-07-07 CA CA002276959A patent/CA2276959A1/en not_active Abandoned
- 1999-07-14 US US09/353,285 patent/US6356694B1/en not_active Expired - Fee Related
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US20050207699A1 (en) * | 2000-12-21 | 2005-09-22 | Painter Oskar J | Optical switches incorporating multi-layer dispersion-engineered waveguides |
US20050135721A1 (en) * | 2000-12-21 | 2005-06-23 | Painter Oskar J. | Modulators incorporating multi-layer dispersion-engineered waveguides |
US20040126051A1 (en) * | 2001-01-25 | 2004-07-01 | Michel Bruel | Low-birefringent integrated optics structures |
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US6742939B2 (en) | 2001-05-30 | 2004-06-01 | 3M Innovative Properties Company | Optical fiber fusion splice having a controlled mode field diameter expansion match |
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US7469558B2 (en) * | 2001-07-10 | 2008-12-30 | Springworks, Llc | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
US20030063883A1 (en) * | 2001-07-10 | 2003-04-03 | Demaray Richard E. | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture |
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US20030134054A1 (en) * | 2001-11-09 | 2003-07-17 | Demaray Richard E. | Low temperature zirconia based thermal barrier layer by PVD |
US20030235369A1 (en) * | 2001-11-23 | 2003-12-25 | Grosjean Charles I. | Alignment apparatus and methods for transverse optical coupling |
US6870992B2 (en) | 2001-11-23 | 2005-03-22 | Xponent Photonics Inc | Alignment apparatus and methods for transverse optical coupling |
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Also Published As
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CA2276959A1 (en) | 2000-01-15 |
EP0973050A3 (en) | 2000-11-29 |
EP0973050A2 (en) | 2000-01-19 |
JP2000039532A (en) | 2000-02-08 |
DE59902629D1 (en) | 2002-10-17 |
DE19831719A1 (en) | 2000-01-20 |
EP0973050B1 (en) | 2002-09-11 |
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