US6316837B1 - Area array type semiconductor package and fabrication method - Google Patents
Area array type semiconductor package and fabrication method Download PDFInfo
- Publication number
- US6316837B1 US6316837B1 US09/200,937 US20093798A US6316837B1 US 6316837 B1 US6316837 B1 US 6316837B1 US 20093798 A US20093798 A US 20093798A US 6316837 B1 US6316837 B1 US 6316837B1
- Authority
- US
- United States
- Prior art keywords
- chip
- lead frame
- package
- die paddle
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/411—Chip-supporting parts, e.g. die pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07231—Techniques
- H10W72/07236—Soldering or alloying
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
- H10W72/07352—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in structures or sizes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/877—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Definitions
- the present invention relates to a chip package, and more particularly, to a chip package having a lead frame serving as a heat sink.
- the invention also relates to a method of forming the chip package.
- a ball grid array (BGA) semiconductor package is widely used since the package is capable of having a large number of pins in a predetermined area. Also, the external terminals of the device are short, which helps to prevent them from being bent. Such a semiconductor package may be quickly mounted on a mother board through a reflow process, thereby reducing a manufacturing time.
- BGA ball grid array
- a background art BGA semiconductor package includes a printed circuit board (PCB) 1 having a plurality of metal patterns (not illustrated) formed therethrough.
- a semiconductor chip 2 having a plurality of bonding pads (not illustrated) is adhered on the PCB 1 by an adhesive 1 a .
- Metal wires 3 electrically connect each bonding pad with a corresponding metal pattern in the PCB, and a molding epoxy 4 molds a predetermined area on the PCB 1 including the semiconductor chip 2 and the metal wire 3 .
- a plurality of solder balls 5 which serve as external terminals, are adhered on the lower surface of the PCB 1 .
- the metal patterns provide an electric path through the PCB to electrically connect the wires 3 on the upper side to the solder balls 5 on the lower side of the PCB 1 .
- FIG. 2 is a flow chart illustrating steps of a fabrication method for a background art BGA semiconductor package. As shown therein, the process includes: a sawing process for dividing a plurality of semiconductor devices which are formed in a wafer into individual semiconductor chips. Next, a die bonding process is performed to attach individual semiconductor chips on a PCB. A wire bonding process is performed for connecting a plurality of bonding pads of each semiconductor chip to a plurality of metal patterns of the PCB with a plurality of wires. Next, a molding process is performed to mold a predetermined area formed on the PCB, including the semiconductor chip and the wires with a molding epoxy. Finally, a ball bonding process is performed to bond solder balls on a lower surface of the PCB to serve as external output terminals.
- a sawing process for dividing a plurality of semiconductor devices which are formed in a wafer into individual semiconductor chips.
- a die bonding process is performed to attach individual semiconductor chips on a PCB.
- a wire bonding process is performed for
- solder balls of the above-described BGA semiconductor package are located opposite to an active surface of the semiconductor chip (i.e., the upper surface of the semiconductor chip having bond pads), there is a limitation on the minimum size of the semiconductor package due to the height necessary to allow the wires to bend from the top of the chip down to the PCB.
- heat generated in the semiconductor chip is not effectively radiated outside the package. Accordingly, such a package is not suitable for a high-powered semiconductor device.
- a further object of the present invention is to provide a packaging for a high-powered semiconductor device which radiates high temperature heat.
- a fabrication method for an area array type semiconductor package embodying the invention includes the steps of forming solder bumps on bonding pads of a semiconductor chip, bonding said semiconductor chip to a lead frame; packaging a predetermined area of the lead frame and the semiconductor chip with a molding resin; and trimming and forming said lead frame.
- the lead frame may include a plurality of die paddles which are attached to a corresponding plurality of semiconductor chips by a thermal conductive adhesive.
- a plurality of leads are attached to each of the die paddles at a certain interval and serve to radiate heat to an exterior of the package.
- a chip is attached to a lead frame having a plurality of leads.
- a plurality of conductive media are formed on bond pads of the chip.
- a molding resin packages portions of the chip and the lead frame.
- FIG. 1 is a vertical cross-sectional view illustrating a background art ball grid array semiconductor package
- FIG. 2 is a flow chart illustrating a background art fabrication method for the ball grid array semiconductor package shown in FIG. 1;
- FIG. 3 is a plan view illustrating a lead frame of an area array type semiconductor package according to the present invention.
- FIG. 4 is a vertical cross-sectional view of an area array type semiconductor package according to the present invention.
- FIGS. 5A to 5 E are plan and cross-sectional views illustrating the results of steps of a fabrication method for the area array type semiconductor package according to the present invention.
- FIG. 6 is a cross-sectional view illustrating an area array type semiconductor package according to the present invention mounted on a printed circuit board;
- FIG. 7 is a cross-sectional view illustrating an alternate embodiment of an area array type semiconductor package according to the present invention mounted on the printed circuit board.
- FIG. 3 is a plan view illustrating a lead frame of an area array type semiconductor package according to the present invention.
- the lead frame 10 includes a plurality of square shaped die paddles 11 , to which semiconductor chips are adhered.
- a plurality of leads 12 are attached to and extend away from each die paddle 11 at a certain interval.
- a lead supporting member 13 supports the plurality of leads 12 .
- the lead frame 10 may be made of copper, a copper alloy, a tungsten alloy or any other suitable material.
- Each of the die paddles 11 may also have a hole, depression or dimple for receiving a chip.
- FIG. 4 is a cross-sectional view of an area array type semiconductor package according to the present invention which utilizes the lead frame shown in FIG. 3 .
- the package includes a semiconductor chip 20 , having a plurality of bonding pads (not illustrated) thereon.
- the chip 20 is attached to the paddle 11 via a thermal conductive adhesive 30 .
- a plurality of conductive media such as solder bumps or solder balls 40 , which serve as external output terminals, are formed on respective bonding pads of the semiconductor chip 20 .
- a molding resin 50 covers portions of the semiconductor chip 20 and lead frame 11 .
- the lead frame 10 operates as a heat sink which radiates heat generated by the semiconductor chip 20 .
- a thermal conductive epoxy is used as the adhesive 30 .
- FIGS. 5A to 5 E show the results of steps of a fabrication method for an area array type semiconductor package according to the present invention.
- a semiconductor chip 20 is first adhered to a die paddle 11 of the lead frame 10 using an adhesive 30 .
- a plurality of conductive media 40 are then formed on bond pads of the semiconductor chip 20 .
- the conductive media 40 could be formed on the chip 20 before the chip 20 is bonded to the die paddle 11 .
- a predetermined area formed on the lead frame 10 including the semiconductor chip 20 , is packaged with a molding epoxy 50 .
- the conductive media 40 formed on the bonding pads of the above semiconductor chip 20 are externally exposed.
- Each lead 12 of the lead frame is divided into two parts, an outer lead 12 a which is externally exposed and an inner lead 12 b which is at least partially packaged by the molding epoxy 50 .
- the exposed outer lead 12 a is then trimmed and formed, thus completing an area array type semiconductor package according to the present invention.
- FIG. 6 illustrates how an area array type semiconductor package according to the present invention is mounted on a printed circuit board (PCB) 60 using the conductive media 40 , preferably, solder balls.
- a reflow process can be used to attach the conductive media 40 to conductive pads on the PCB 60 .
- the space S between the chip 20 and the PCB 60 may be filled with a molding compound 70 , or any other suitable material, as is well known to those skilled in the art. Also, in the embodiment shown in FIG. 7, a plurality of cooling fins 10 extend away from the top surface of the lead frame 10 .
- an area array type semiconductor package uses a lead frame, to which the semiconductor chip is bonded, as a heat sink. This allows the package to be used for a high-powered semiconductor device which radiates heat at a high temperature.
- the area array type semiconductor package according to the present invention includes conductive media such as solder bumps or solder balls directly attached to the bond pads of a chip.
- the conductive media act as external output terminals. This configuration allows the dimensions of the semiconductor package to be minimized.
- the bonding pad arrangement can easily be planned, and electrical characteristics of the semiconductor package can be improved.
- the space between the semiconductor chip and the PCB can be underfilled with a molding compound or resin, a reliability of the solder joint can be improved.
Landscapes
- Lead Frames For Integrated Circuits (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (21)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/970,876 US7122401B2 (en) | 1997-12-04 | 2001-10-05 | Area array type semiconductor package fabrication method |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970065912A KR100246366B1 (en) | 1997-12-04 | 1997-12-04 | Area array type semiconductor package and fabrication method of the same |
| KR97-65912 | 1997-12-04 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/970,876 Division US7122401B2 (en) | 1997-12-04 | 2001-10-05 | Area array type semiconductor package fabrication method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US6316837B1 true US6316837B1 (en) | 2001-11-13 |
Family
ID=19526461
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/200,937 Expired - Fee Related US6316837B1 (en) | 1997-12-04 | 1998-11-30 | Area array type semiconductor package and fabrication method |
| US09/970,876 Expired - Fee Related US7122401B2 (en) | 1997-12-04 | 2001-10-05 | Area array type semiconductor package fabrication method |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/970,876 Expired - Fee Related US7122401B2 (en) | 1997-12-04 | 2001-10-05 | Area array type semiconductor package fabrication method |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US6316837B1 (en) |
| JP (1) | JPH11312764A (en) |
| KR (1) | KR100246366B1 (en) |
Cited By (29)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20030026556A1 (en) * | 2001-08-03 | 2003-02-06 | National Semiconductor Corporation | Optical sub-assembly for optoelectronic modules |
| US20030057535A1 (en) * | 2001-09-24 | 2003-03-27 | National Semiconductor Corporation | Techniques for attaching rotated photonic devices to an optical sub-assembly in an optoelectronic package |
| US6551859B1 (en) | 2001-02-22 | 2003-04-22 | National Semiconductor Corporation | Chip scale and land grid array semiconductor packages |
| US20030165303A1 (en) * | 2000-05-09 | 2003-09-04 | National Semiconductor Corporation, A Delaware Corporation | Ceramic optical sub-assembly for opto-electronic module utilizing LTCC ( low-temperature co-fired ceramic ) technology |
| US6624507B1 (en) | 2000-05-09 | 2003-09-23 | National Semiconductor Corporation | Miniature semiconductor package for opto-electronic devices |
| US6642613B1 (en) | 2000-05-09 | 2003-11-04 | National Semiconductor Corporation | Techniques for joining an opto-electronic module to a semiconductor package |
| US6683368B1 (en) * | 2000-06-09 | 2004-01-27 | National Semiconductor Corporation | Lead frame design for chip scale package |
| US6689640B1 (en) | 2000-10-26 | 2004-02-10 | National Semiconductor Corporation | Chip scale pin array |
| US6707140B1 (en) * | 2000-05-09 | 2004-03-16 | National Semiconductor Corporation | Arrayable, scaleable, and stackable molded package configuration |
| US6765275B1 (en) | 2000-05-09 | 2004-07-20 | National Semiconductor Corporation | Two-layer electrical substrate for optical devices |
| US20050013560A1 (en) * | 2003-07-15 | 2005-01-20 | National Semiconductor Corporation | Opto-electronic module form factor having adjustable optical plane height |
| US20050013581A1 (en) * | 2003-07-15 | 2005-01-20 | National Semiconductor Corporation | Multi-purpose optical light pipe |
| US7023705B2 (en) | 2001-08-03 | 2006-04-04 | National Semiconductor Corporation | Ceramic optical sub-assembly for optoelectronic modules |
| US20060140534A1 (en) * | 2001-08-03 | 2006-06-29 | National Semiconductor Corporation | Ceramic optical sub-assembly for optoelectronic modules |
| US7095096B1 (en) | 2004-08-16 | 2006-08-22 | National Semiconductor Corporation | Microarray lead frame |
| US20070035021A1 (en) * | 2005-08-10 | 2007-02-15 | Daigo Suzuki | Printed circuit board and electronic apparatus including printed circuit board |
| US7846775B1 (en) | 2005-05-23 | 2010-12-07 | National Semiconductor Corporation | Universal lead frame for micro-array packages |
| US20140225222A1 (en) * | 2013-02-11 | 2014-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package with metal-insulator-metal capacitor and method of manufacturing the same |
| US10702099B2 (en) | 2018-06-27 | 2020-07-07 | Ohc Ip Holdings, Llc | Grill and side cart attachment systems and methods |
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| US10966569B2 (en) | 2018-06-27 | 2021-04-06 | Ohc Ip Holdings, Llc | Grill system with decorative panels |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100246366B1 (en) | 2000-03-15 |
| KR19990047477A (en) | 1999-07-05 |
| US20020038904A1 (en) | 2002-04-04 |
| US7122401B2 (en) | 2006-10-17 |
| JPH11312764A (en) | 1999-11-09 |
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Owner name: LG SEMICON CO., LTD., KOREA, REPUBLIC OF Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SONG, CHI-JUNG;REEL/FRAME:009617/0559 Effective date: 19981103 |
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