US6271658B1 - Universal Docking System - Google Patents
Universal Docking System Download PDFInfo
- Publication number
- US6271658B1 US6271658B1 US09/174,620 US17462098A US6271658B1 US 6271658 B1 US6271658 B1 US 6271658B1 US 17462098 A US17462098 A US 17462098A US 6271658 B1 US6271658 B1 US 6271658B1
- Authority
- US
- United States
- Prior art keywords
- plate
- alignment
- handler
- device handler
- tester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Definitions
- the invention relates to the field of semiconductor processing, and more specifically to docking and undocking of an electronic test head with a device handler.
- test head In the automatic testing of integrated circuits (IC) and other electronic devices, special device handlers have been used which place the device to be tested in position.
- the electronic testing itself is provided by a large and sophisticated automatic testing system that includes a test head.
- the test head is required to connect to and dock with the device handler.
- the test head In such testing systems, the test head is usually very heavy. The reason for this heaviness is that the test head uses high-speed electronic timing signals.
- the electronic test circuits must therefore be located as close as possible to the device under test. Accordingly, the test head has been densely packaged with electronic circuits in order to achieve the high speed testing of the state of the art devices.
- the state of the art left much to be desired in providing a manipulator or positioner to easily move the heavy test head accurately in position with respect to the device handler mechanism.
- the user has had to move the heavy device handler or the heavy positioner itself in order to provide alignment.
- the test head and the device handler are said to be aligned.
- the fragile test head and the device handler electrical connections can be brought together (that is docked) enabling the transfer of test signals between the test head and the device handler.
- the test head and the device handler electrical connections Prior to docking, the test head and the device handler electrical connections must be precisely aligned to avoid damaging the electrical connectors.
- test head In a typical electrical test environment, the test head is manually guided to connect delicate electrical pins to the contacting plate of the device handler without alignment guides after which the test head is locked or kept level by means of a device manipulator. This often presents problems during production testing. For instance, the test head can drop in position and loose the electrical connections with the device handler. Or the device handler vibrates causing intermittent electrical connections with the device test head or even causing damage to the electrical equipment.
- U.S. Pat. No. 5,440,943 shows a positioner that facilitates docking and undocking of an electronic test head with a device handler.
- U.S. Pat. No. 5,149,029 (Smith) discloses a system for positioning an electronic test head with respect to an electronic device handler.
- U.S. Pat. No. 5,450,766 shows a test head manipulator for positioning a test head with respect to a device handler.
- the present invention addresses the problems of quickly and reliably positioning and interlocking a device handler head with respect to a device tester head.
- the primary objective of the present invention is to provide an apparatus for establishing quick and reliable connections between the semiconductor device handler and the semiconductor device tester.
- Another objective of the present invention is to reduce the negative effect on device yield caused by unreliable device handler to device tester connection.
- Yet another objective of the present invention is to reduce the need for device re-testing due to unreliable testing results caused by unreliable device handler to device tester connections (re-screen downtimes).
- Yet another objective of the present invention is to reduce the downtime required for changing equipment set-up within the semiconductor testing and manufacturing environments.
- Yet another objective of the present invention is to facilitate the required equipment conversions between different device testing set-up configurations; such that the testhead can be docked securely to the device handler on either 0-degree, 90-degree, or 180-degree positions; such that the device testhead can be docked securely to the device handler on either single-site, double-site or three-site contacts; and such that the device testhead can be docked securely to the device handler on a multiplicity of, different thicknesses of the electronic contactors.
- the present invention teaches a system for positioning an electronic test head with respect to an electronic device handler.
- This system comprises two interface plates and an arrangement of mounting brackets to connect the interface plates to the device handler and the device tester respectively.
- the present invention addresses the problem of quickly and reliably positioning a device handler plate with respect to a device test head plate.
- the device handler plate is used in moving the semiconductor device between positions, the device test head plate is used when testing the semiconductor device.
- the present invention relieves problems of questionable yield fallout, excessive downtime for re-testing and equipment set-up.
- FIG. 1 shows device handler 1 , the UDS handler plate 2 , the Universal Docking System (UDS) test head plate 3 , the device test head 4 , and the device prober or tester 5 .
- UDS Universal Docking System
- FIG. 2 shows the UDS handler plate 2 .
- FIG. 3 shows the prober plate 51 ; this plate is not shown in FIG. 1 .
- FIG. 4 shows the head plate 61 with mounting taps 62 and alignment holes 63 ; this plate is not shown in FIG. 1 .
- FIG. 5 shows the test device head plate 70 with UDS alignment cam 71 and UDS alignment pin 72 .
- UDS alignment cams 71 and four UDS alignment pins are mounted on the test device head plate 70 , only one set has been highlighted with numbers in FIG. 5 .
- FIG. 6 shows one corner of the testhead plate with one UDS cam 71 and one alignment pin 72 .
- FIG. 7 shows a docking square
- FIG. 8 shows a docking triangle
- FIG. 1 the following two units of the tester 5 are not shown in FIG. 1 : the prober plate 51 (see FIG. 3) that is attached to top of the device prober 5 and the complete head plate 61 (see FIG. 4) that interfaces (for alignment purposes) between the device prober 5 and the device prober plate 51 . These two units will be highlighted in subsequent figures.
- FIG. 1 shown in FIG. 1 is the relative positioning of the device handler 1 , the device tester 5 , the device test head 4 , and the two UDS device plates, that is the UDS device handler plate 2 and the UDS device test head plate 3 .
- the UDS device handler plate 2 together with the UDS device test head plate 3 form a mechanical system which aligns, connects and disconnects with respect to each other by means of four pairs of interlocking mechanical sub-assemblies.
- the UDS handler plate 2 is attached to the device handler 1
- the UDS test head plate 3 is attached to the device test head 4 .
- the UDS handler plate 2 together with the UDS test head plate 3 form the Universal Docking System (UDS) of the invention.
- the UDS serves as the mechanism for aligning, connecting and disconnecting the two systems with which they interface. In FIG. 1 these two systems are the device handler and the device tester.
- FIG. 2 shows the UDS device handler plate 20 in more detail.
- the UDS device handler plate 20 is an 8 mm. thick aluminum plate that is 876 ⁇ 876 mm. in size. The dimensions for this plate are however not limited to the typical dimensions indicated, the present invention is not limited to these dimensions.
- the center 21 of the UDS device handler plate 20 is cut out so as not to interfere with any electrical or mechanical components of the test head.
- On each of the four corners 22 of the UDS device handler plate 20 are mounted an alignment socket 31 and a cam bearing 32 .
- the UDS device handler plate 20 (FIG. 2) is mounted against the device handler 7 (FIG. 7) using extension brackets (not shown in FIG. 2) which are attached to the sides and the bottom base plate of the device handler. Threads are tapped into the handler plate 22 for screws to fasten the brackets.
- FIG. 2 also shows details of the alignment socket 31 and the cam bearing 32 .
- the alignment socket 31 is, during the alignment of the UDS device handler plate 2 (FIG. 1) with the device test head plate 3 (FIG. 1 ), brought into contact with and guides an alignment pin. This action positions the UDS handler plate 2 (FIG. 1) in the correct position with respect to the UDS device test head plate 3 (FIG. 1 ).
- FIG. 2 also shows the UDS handler plate 20 with adjustment slot guides 41 and side adjustment locations 42 .
- the slot guides 41 are used in conjunction with a suspend screw (not shown) attached to the device handler 1 to shift the UDS device handler plate 2 into the second or third test position.
- the site adjustments 42 have the same function in adjusting the UDS handler plate 2 (FIG. 1) to positions other than the central test position with respect to the test head 4 (FIG. 1 ).
- FIG. 2 shows on the device handler plate 20 a total of four corners 22 with, on each corner 22 , mounted one alignment socket 31 with, for each alignment socket 31 , a set of two cam bearings 32 .
- FIG. 3 shows the prober plate 51 that has the same function as the UDS handler plate 2 .
- the thickness of the prober plate 51 is typically 12 mm., this to compensate for the amount of materials which has to be removed so as not to interfere with mechanical or electrical components of the test head 4 (FIG. 1 ).
- the prober plate 51 is mounted on the head plate of the overhead device prober or tester 5 .
- FIG. 4 shows the complete test head plate 61 with mounting taps 62 and alignment holes 63 . These positioners are used for positioning the prober plate 61 with respect to the prober equipment 5 when attaching the prober plate 61 to this equipment.
- the combination of the head plate (FIG. 4) and the prober plate (FIG. 3) provide the mechanical means for mounting the test head plate 3 , FIG. 1, to the tester 5 , FIG. 1, and the device handler 1 , FIG. 1, that is plate 51 , FIG. 3, and plate 61 , FIG. 4, form the mechanical interfaces for mounting the UDS of the invention between the device handler 1 , FIG. 1, and the device tester 5 , FIG. 1 .
- FIG. 5 shows the test head plate 70 , this assembly has three main bar members which are mounted in a U-Shape structure.
- the U-bar mounts around the test head using brackets.
- FIG. 5 shows, on the head test plate 70 , a total of four alignment cams 71 and four alignment pins 72 . These four units 71 / 72 each align with one of the four units 31 / 32 on the corners of the device handler plate 20 , FIG. 2, as previously highlighted under FIG. 2 .
- the number of matching units 31 / 32 with 71 / 72 is not restricted to four but can be any number of units, such as three, that can establish stability and firm connectivity between the device handler plate 2 (FIG. 1) and the device test head plate 3 (FIG. 1 ).
- FIG. 6 shows a perspective view of one of the corners of the test plate 70 . Shown in detail is the UDS alignment cam 71 with the UDS alignment pin 72 .
- the UDS handler plate 2 (FIG. 1) is visually brought into close physical contact with the UDS test head plate 3 .
- the alignment pin 72 FIG. 5, is positioned in line with the matching alignment socket 31 , FIG. 2 .
- the UDS device alignment cam 71 ( FIG. 5, is then manually rotated while final alignment of the UDS device alignment pin 72 with the alignment socket 31 is observed and assured.
- the UDS alignment cam 71 starts to touch or engage the UDS alignment cam bearing 32 .
- the cam 71 can be further manually rotated. This final rotation forces the alignment pin 72 into the alignment socket 31 ; the rotation of the cam 71 is supported by the rotation of the cam bearings 32 . After the alignment pin 72 is firmly seated in the alignment socket 31 , the alignment cam 71 is locked in place.
- the UDS handler plate 2 (FIG. 1) is now securely locked into place with respect to the UDS test head plate 3 .
- the contact between the handler and the tester is furthermore assured and firm due to the firmness of the UDS constructs.
- the three points 2 , 3 , and 4 form the basic or typically used docking points. These three points provide docking possibility of 0-degrees, 90-degrees and 180-degrees docking rotation.
- Point 1 within FIG. 7 allows for an alternate docking point and can be used in combination with a selection or two points from the three point set 2 , 3 , and 4 . This selection is completely equipment design and configuration dependent while it provides an additional degree of freedom in the use of the UDS docking system of the present invention.
- the three point docking configuration shown herein by points 1 , 2 , and 3 provides less freedom in the possible docking configurations since this configuration limits the docking to one configuration.
- This limitation is however not to be considered a drawback or limitation of the present invention since there are conditions of device testing where this configuration, by means of its very simplicity, can be a configuration of choice most notably where considerations of high device throughput, speed of test set up, etc. are of importance.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/174,620 US6271658B1 (en) | 1998-10-19 | 1998-10-19 | Universal Docking System |
SG9903185A SG95598A1 (en) | 1998-10-19 | 1999-06-30 | Universal docking system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/174,620 US6271658B1 (en) | 1998-10-19 | 1998-10-19 | Universal Docking System |
Publications (1)
Publication Number | Publication Date |
---|---|
US6271658B1 true US6271658B1 (en) | 2001-08-07 |
Family
ID=22636848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/174,620 Expired - Lifetime US6271658B1 (en) | 1998-10-19 | 1998-10-19 | Universal Docking System |
Country Status (2)
Country | Link |
---|---|
US (1) | US6271658B1 (en) |
SG (1) | SG95598A1 (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002029428A2 (en) * | 2000-10-02 | 2002-04-11 | Orsillo James E | Docking system for connecting a tester to a probe station using an a-type docking configuration |
US6586925B2 (en) * | 2001-04-09 | 2003-07-01 | St Assembly Test Services Ltd. | Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate |
US20030122536A1 (en) * | 2001-12-29 | 2003-07-03 | Bin Mohamed Hassan Lokman | Docking system and method for docking in automated testing systems |
DE10216003A1 (en) * | 2002-04-11 | 2003-11-06 | Multitest Elektronische Syst | Docking device for coupling a handling device to a second device that incorporates a test head for electronic components, whereby the second device has a simple locking device with which a locking pin is clamped |
US20040051517A1 (en) * | 2000-03-01 | 2004-03-18 | Holt Alyn R. | Counter balanced vertical docking motion in a driven vertical axis test head manipulator |
US6756800B2 (en) * | 2002-04-16 | 2004-06-29 | Teradyne, Inc. | Semiconductor test system with easily changed interface unit |
US6813817B2 (en) | 2000-09-15 | 2004-11-09 | James Orsillo | Method of using a replacement headplate to adapt a probe station |
US20040227532A1 (en) * | 2000-09-15 | 2004-11-18 | Orsillo James F. | Apparatus and method for use in testing a semiconductor wafer |
US6839948B2 (en) | 2000-09-15 | 2005-01-11 | James Orsillo | Tooling plate adapted to facilitate rapid and precise attachment into a probing station |
US20090102457A1 (en) * | 2007-10-19 | 2009-04-23 | Teradyne, Inc. | Automated Test Equipment Interface |
US7847570B2 (en) | 2007-10-19 | 2010-12-07 | Teradyne, Inc. | Laser targeting mechanism |
US7883639B2 (en) | 2005-09-12 | 2011-02-08 | Fujifilm Electronic Materials, U.S.A., Inc. | Additives to prevent degradation of cyclic alkene derivatives |
US7931823B2 (en) | 2005-09-12 | 2011-04-26 | Fujifilm Electronic Materials U.S.A., Inc. | Additives to prevent degradation of cyclic alkene derivatives |
CN103196924A (en) * | 2012-01-09 | 2013-07-10 | 京元电子股份有限公司 | Docking test system |
WO2015025024A3 (en) * | 2013-08-21 | 2015-04-16 | Turbodynamics Gmbh | Aligning device and handling device |
US11163000B2 (en) * | 2017-03-03 | 2021-11-02 | Turbodynamics Gmbh | Plate-shaped connection system for the connection of two test units, also connection unit and test system each with such a plate-shaped connection system |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4527942A (en) | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4588346A (en) | 1982-08-25 | 1986-05-13 | Intest Corporation | Positioner for maintaining an object in a substantially weightless condition |
US5149029A (en) | 1982-08-25 | 1992-09-22 | Intest Corporation | Electronic test head positioner for test systems |
US5440943A (en) | 1993-09-15 | 1995-08-15 | Intest Corporation | Electronic test head manipulator |
US5450766A (en) | 1991-07-22 | 1995-09-19 | Intest Corporation | Test head manipulator |
US5552701A (en) * | 1995-05-15 | 1996-09-03 | Hewlett-Packard Company | Docking system for an electronic circuit tester |
US5608334A (en) | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
-
1998
- 1998-10-19 US US09/174,620 patent/US6271658B1/en not_active Expired - Lifetime
-
1999
- 1999-06-30 SG SG9903185A patent/SG95598A1/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4527942A (en) | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4588346A (en) | 1982-08-25 | 1986-05-13 | Intest Corporation | Positioner for maintaining an object in a substantially weightless condition |
US5149029A (en) | 1982-08-25 | 1992-09-22 | Intest Corporation | Electronic test head positioner for test systems |
US5450766A (en) | 1991-07-22 | 1995-09-19 | Intest Corporation | Test head manipulator |
US5440943A (en) | 1993-09-15 | 1995-08-15 | Intest Corporation | Electronic test head manipulator |
US5608334A (en) | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
US5552701A (en) * | 1995-05-15 | 1996-09-03 | Hewlett-Packard Company | Docking system for an electronic circuit tester |
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7554321B2 (en) * | 2000-03-01 | 2009-06-30 | Intest Corporation | Counter balanced vertical docking motion in a driven vertical axis test head manipulator |
US20040051517A1 (en) * | 2000-03-01 | 2004-03-18 | Holt Alyn R. | Counter balanced vertical docking motion in a driven vertical axis test head manipulator |
US7053646B2 (en) | 2000-09-15 | 2006-05-30 | Orsillo James F | Apparatus and method for use in testing a semiconductor wafer |
US7389572B2 (en) | 2000-09-15 | 2008-06-24 | Orsillo James E | Method of retrofitting a probe station |
US20020050042A1 (en) * | 2000-09-15 | 2002-05-02 | Systematic, Inc. | Docking system for connecting a tester to a probe station using an A-type docking configuration |
US6741072B2 (en) | 2000-09-15 | 2004-05-25 | James E. Orsillo | Docking system for connecting a tester to a probe station using an A-type docking configuration |
US6813817B2 (en) | 2000-09-15 | 2004-11-09 | James Orsillo | Method of using a replacement headplate to adapt a probe station |
US20040227532A1 (en) * | 2000-09-15 | 2004-11-18 | Orsillo James F. | Apparatus and method for use in testing a semiconductor wafer |
US6839948B2 (en) | 2000-09-15 | 2005-01-11 | James Orsillo | Tooling plate adapted to facilitate rapid and precise attachment into a probing station |
US6925699B1 (en) | 2000-09-15 | 2005-08-09 | James Orsillo | Method of producing a quantity of integrated circuits |
WO2002029428A3 (en) * | 2000-10-02 | 2002-07-04 | James E Orsillo | Docking system for connecting a tester to a probe station using an a-type docking configuration |
WO2002029428A2 (en) * | 2000-10-02 | 2002-04-11 | Orsillo James E | Docking system for connecting a tester to a probe station using an a-type docking configuration |
US6586925B2 (en) * | 2001-04-09 | 2003-07-01 | St Assembly Test Services Ltd. | Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate |
US20030122536A1 (en) * | 2001-12-29 | 2003-07-03 | Bin Mohamed Hassan Lokman | Docking system and method for docking in automated testing systems |
US6897645B2 (en) * | 2001-12-29 | 2005-05-24 | Vincent Hing Chung So | Docking system and method for docking in automated testing systems |
US6870362B2 (en) | 2002-04-11 | 2005-03-22 | Multitest Elektronische Systeme Gmbh | Docking apparatus |
DE10216003B4 (en) * | 2002-04-11 | 2005-03-10 | Multitest Elektronische Syst | Docking device |
US20030218869A1 (en) * | 2002-04-11 | 2003-11-27 | Stefan Thurmaier | Docking apparatus |
DE10216003A1 (en) * | 2002-04-11 | 2003-11-06 | Multitest Elektronische Syst | Docking device for coupling a handling device to a second device that incorporates a test head for electronic components, whereby the second device has a simple locking device with which a locking pin is clamped |
US6756800B2 (en) * | 2002-04-16 | 2004-06-29 | Teradyne, Inc. | Semiconductor test system with easily changed interface unit |
US7931823B2 (en) | 2005-09-12 | 2011-04-26 | Fujifilm Electronic Materials U.S.A., Inc. | Additives to prevent degradation of cyclic alkene derivatives |
US7883639B2 (en) | 2005-09-12 | 2011-02-08 | Fujifilm Electronic Materials, U.S.A., Inc. | Additives to prevent degradation of cyclic alkene derivatives |
US7847570B2 (en) | 2007-10-19 | 2010-12-07 | Teradyne, Inc. | Laser targeting mechanism |
US7733081B2 (en) * | 2007-10-19 | 2010-06-08 | Teradyne, Inc. | Automated test equipment interface |
US20090102457A1 (en) * | 2007-10-19 | 2009-04-23 | Teradyne, Inc. | Automated Test Equipment Interface |
US8471587B2 (en) | 2007-10-19 | 2013-06-25 | Teradyne, Inc. | Laser targeting mechanism |
CN103196924A (en) * | 2012-01-09 | 2013-07-10 | 京元电子股份有限公司 | Docking test system |
WO2015025024A3 (en) * | 2013-08-21 | 2015-04-16 | Turbodynamics Gmbh | Aligning device and handling device |
US20160202311A1 (en) * | 2013-08-21 | 2016-07-14 | Turbodynamics Gmbh | Aligning device and handling device |
US10416230B2 (en) * | 2013-08-21 | 2019-09-17 | Turbodynamics Gmbh | Aligning device and handling device |
US11163000B2 (en) * | 2017-03-03 | 2021-11-02 | Turbodynamics Gmbh | Plate-shaped connection system for the connection of two test units, also connection unit and test system each with such a plate-shaped connection system |
Also Published As
Publication number | Publication date |
---|---|
SG95598A1 (en) | 2003-04-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6271658B1 (en) | Universal Docking System | |
US7323893B2 (en) | Probe device capable of being used for plural kinds of testers | |
US7511521B2 (en) | Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component | |
TW201810483A (en) | Offline vision assist method and apparatus for integrated circuit device vision alignment | |
US20090146675A1 (en) | Planarizing probe card | |
KR20100084607A (en) | Wafer probe test and inspection system | |
US6586925B2 (en) | Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate | |
US7301358B2 (en) | Contactor assembly for testing electrical circuits | |
US10578648B2 (en) | Probe card assembly | |
US6262582B1 (en) | Mechanical fixture for holding electronic devices under test showing adjustments in multiple degrees of freedom | |
WO2004008163A2 (en) | Assembly for connecting a test device to an object to be tested | |
JP4420679B2 (en) | Semiconductor test system with easily replaceable interface unit | |
US6822464B2 (en) | Probe card transporting apparatus and to-be-connected body moving mechanism | |
TWI351524B (en) | Apparatus for planarizing a probe card and method | |
US20020197892A1 (en) | Low cost, high performance flexible tester handler docking interface | |
JP4548817B2 (en) | Probe device | |
US6741072B2 (en) | Docking system for connecting a tester to a probe station using an A-type docking configuration | |
TWI292198B (en) | Single axis manipulator with controlled compliance | |
JP3169900B2 (en) | Prober | |
JP4114125B2 (en) | Semiconductor tester equipment | |
JPS63318745A (en) | Probing device | |
US8749261B2 (en) | Interfaces having a plurality of connector assemblies | |
KR102446953B1 (en) | Alignment jig and method of aligning test head with probe station using the same | |
US6333637B1 (en) | Electronic card assembly fixture | |
JPH03290943A (en) | Semiconductor testing system apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ST ASSEMBLY TEST SERVICES PTE. LTD., SINGAPORE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:VALLINAN, JOHN ZENON G.;TAN, CHEE-KEONG;REEL/FRAME:009523/0599 Effective date: 19981005 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
FPAY | Fee payment |
Year of fee payment: 12 |
|
AS | Assignment |
Owner name: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT, HONG KONG Free format text: SECURITY INTEREST;ASSIGNORS:STATS CHIPPAC, INC.;STATS CHIPPAC LTD.;REEL/FRAME:036288/0748 Effective date: 20150806 Owner name: STATS CHIPPAC LTD., SINGAPORE Free format text: CHANGE OF NAME;ASSIGNOR:ST ASSEMBLY TEST SERVICES LTD.;REEL/FRAME:036286/0590 Effective date: 20040608 Owner name: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY Free format text: SECURITY INTEREST;ASSIGNORS:STATS CHIPPAC, INC.;STATS CHIPPAC LTD.;REEL/FRAME:036288/0748 Effective date: 20150806 |
|
AS | Assignment |
Owner name: STATS CHIPPAC PTE. LTE., SINGAPORE Free format text: CHANGE OF NAME;ASSIGNOR:STATS CHIPPAC LTD.;REEL/FRAME:038378/0360 Effective date: 20160329 |
|
AS | Assignment |
Owner name: STATS CHIPPAC, INC., CALIFORNIA Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT;REEL/FRAME:052938/0305 Effective date: 20190503 Owner name: STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD., SINGAPORE Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT;REEL/FRAME:052938/0305 Effective date: 20190503 |