US6100636A - Black matrix with conductive coating - Google Patents

Black matrix with conductive coating Download PDF

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US6100636A
US6100636A US08/974,419 US97441997A US6100636A US 6100636 A US6100636 A US 6100636A US 97441997 A US97441997 A US 97441997A US 6100636 A US6100636 A US 6100636A
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sub
conductive
matrix structure
pixel regions
faceplate
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Paul M. Drumm
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Canon Inc
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Candescent Technologies Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/08Electrodes intimately associated with a screen on or from which an image or pattern is formed, picked-up, converted or stored, e.g. backing-plates for storage tubes or collecting secondary electrons
    • H01J29/085Anode plates, e.g. for screens of flat panel displays
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22Applying luminescent coatings
    • H01J9/227Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • H01J9/2278Application of light absorbing material, e.g. between the luminescent areas
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

Definitions

  • the present claimed invention relates to the field of flat panel displays. More particularly, the present claimed invention relates to the black matrix of a flat panel display screen structure.
  • Sub-pixel regions on the faceplate of a flat panel display are typically separated by an opaque mesh-like structure commonly referred to as a black matrix.
  • the black matrix prevents electrons directed at one sub-pixel from being "back-scattered” and striking another sub-pixel. In so doing, a conventional black matrix prevents helps maintain a flat panel display with sharp resolution.
  • the black matrix is also used as a base on which to locate structures such as, for example, support walls.
  • a very thin layer e.g. approximately 2-3 microns
  • a conductive material is applied to the interior surface of the faceplate surrounding the sub-pixel regions.
  • the conductive black matrix is formed of a conductive graphite material.
  • the black matrix is also intended to prevent back-scattering of electrons from one sub-pixel to another sub-pixel.
  • the height of the black matrix is limited to the aforementioned 2-3 microns.
  • a non-conductive polyimide material is patterned across the interior surface of the black matrix.
  • the black matrix has a uniform height of approximately 20-40 microns.
  • the height of such a black matrix is well suited to isolating each sub-pixel from respective neighboring sub-pixels.
  • such a black matrix configuration effectively prevents unwanted back-scattering of electrons into neighboring sub-pixels.
  • prior art polyimide black matrices are not conductive. As a result, even though the top edge of the polyimide black matrix is much closer than the sub-pixel region is to the field emitter, unwanted arcing can still occur from the field emitter to the sub-pixel regions.
  • ITO coated non-conductive black matrices are not without problems, however.
  • the high atomic weight of ITO results in unwanted back-scattering of electrons.
  • ITO has a undesirably high secondary emission coefficient, ⁇ .
  • non-conductive black matrices with a layer of ITO commonly results in the deposition of ITO on the faceplate in the sub-pixel regions.
  • a layer of ITO layer underlies subsequently deposited phosphors. Due to the high index of refraction of the ITO material, light emitted from the phosphors can be reflected away from the faceplate, thereby reducing the emission intensity of the flat panel display.
  • the present invention provides a conductively coated black matrix structure which effectively separates neighboring sub-pixels.
  • the present invention further provides a conductively coated black matrix structure which does not have the increased back-scattering rate, and the undesirably high secondary emission coefficient associated with an ITO coated black matrix structure.
  • the present invention achieves the above accomplishments without the formation of a highly reflective layer in the sub-pixel regions of a flat panel display.
  • the present invention deposits a photoresistive material over the interior surface of a faceplate having a non-conductive matrix structure formed thereon.
  • the photoresistive material is deposited into sub-pixel regions separated by the matrix structure.
  • the photoresistive material is dried and exposed in the sub-pixel regions.
  • a layer of aluminum is evaporated over the interior surface of the faceplate such that the matrix structure and the exposed layer of photoresistive material in the sub-pixel regions is coated with a conductive layer of aluminum.
  • the present invention applies an etchant to the exposed photoresistive material disposed in the sub-pixel regions.
  • the etchant removes the exposed photoresistive material and the overlying conductive layer of aluminum from the sub-pixel regions such that the conductive layer of aluminum remains only on the matrix structure, and does not cover the sub-pixel regions.
  • the present invention is comprised of a conductively coated matrix structure for defining sub-pixel regions in a flat panel display device. That is, a non-conductive matrix disposed on the interior surface of a faceplate separates the sub-pixel regions.
  • the non-conductive matrix is coated with a layer of conductive material such that a conductively coated matrix structure is formed.
  • the layer of conductive material coats only the non-conductive matrix such that the sub-pixel regions do not have a layer of conductive material disposed therein.
  • the present invention includes the features of the above-described embodiment, and further recites that a colloidal conductive substance such as DAG material instead of aluminum is used to conductively coat the matrix structure.
  • FIGS. 1A-1G are side sectional views of process steps used to form a conductively coated matrix structure in accordance with the present claimed invention.
  • FIGS. 1A-1G side sectional views of process steps used to form a conductively coated matrix structure in accordance with the present claimed invention are shown.
  • a side-sectional view of a starting point in the formation of the present invention is shown.
  • a non-conductive black matrix 100 is disposed on the interior surface 102 of a faceplate 104.
  • Non-conductive black matrix 100 is configured to separate rows and columns of sub-pixel regions, typically shown as 106, on the interior surface 102 of faceplate 104.
  • black refers to the opaque characteristic of the matrix.
  • non-conductive black matrix structure 100 (hereinafter non-conductive matrix structure) is formed, for example, of polyimide using techniques well known in the art. Additionally, in the present embodiment, non-conductive matrix structure 100 has a height of approximately 20-40 microns. Although specific materials and dimensions are recited in the present embodiment, the present invention is also well suited to using various other materials to form a non-conductive matrix structure 100 having various other dimensions.
  • a photoresistive material 108 is deposited over interior surface 102 of faceplate 104 and non-conductive matrix structure 100. As shown in FIG. 1B, photoresistive material 108 is deposited onto the top of non-conductive matrix structure 100, forming portions 110 of photoresistive material 108 thereon. Furthermore, photoresistive material 108 also settles into sub-pixel regions 106.
  • photoresistive material 108 is comprised of a mixture of poly vinyl alcohol (PVA) and a metal dichromate such as, for example, ammonium dichromate.
  • photoresistive material 108 is then dried. In so doing, a dried layer of photoresistive material 108 is formed in sub-pixel regions 106 on interior surface 102 of faceplate 104, and on the top surface of non-conductive matrix 100.
  • the dried layer of photoresistive material 108 is then exposed to light, typically represented by rays 112, from the exterior surface of faceplate 104 such that an exposed layer of photoresistive material 108 cures and adheres to interior surface 102 of the faceplate 104.
  • light 112 is comprised of ultra-violet (UV) light emanating from a light source, not shown, which is disposed on the exterior surface of faceplate 104.
  • UV ultra-violet
  • non-conductive matrix structure 100 masks portions 110 of photoresistive material 108 from light 112. As a result, portions 110 of photoresistive material 108 are prevented from being exposed. Thus, only the photoresistive material 108 disposed in sub-pixel regions 106 is cured.
  • the present invention then removes the photoresistive material 108 which was not exposed by light 112 of FIG. 1C. That is, photoresistive material 108 residing other than in sub-pixel regions 106 is removed. Thus, portions 110 of FIGS. 1B and 1C are removed.
  • the unexposed photoresistive material 108 is removed by rinsing non-conductive matrix structure 100 and interior surface 102 of faceplate 104 with water.
  • water is used to remove the unexposed photoresistive material in the present embodiment, the present invention is also well suited to using various other methods to remove the unexposed photoresistive material.
  • a layer of conductive material 114 is evaporated over interior surface 102 of faceplate 104.
  • Conductive material 114 is evaporated such that non-conductive matrix structure 100 and the exposed layer of photoresistive material 108 present in sub-pixel regions 106 is coated with layer of conductive material 114.
  • conductive material is comprised of aluminum.
  • the present invention is also well suited to applying other conductive material such as, for example, colloidal conductive substance such as CB800A DAG made by Acheson Colloids of Port Huron, Mich., over interior surface 102 of faceplate 104.
  • non-conductive matrix structure 100 is now coated with a layer of conductive material 114.
  • the present invention then applies an etchant to interior surface 102 of faceplate 104.
  • the etchant selectively attacks the exposed photoresistive material 108.
  • the exposed photoresistive material 108 now remains disposed almost exclusively in sub-pixel regions 106.
  • the etchant removes the exposed photoresistive material 108 and, consequently, the conductive material 114 overlying the exposed photoresistive material 108. That is, as shown in FIG. 1E, the exposed photoresistive material 108 is removed from interior surface 102 of faceplate 104, and the overlying conductive material 114 deposited on the exposed photoresistive material 108 is also removed.
  • the etchant is comprised of hydrogen peroxide.
  • PVA poly vinyl alcohol
  • metal dichromate selective etchants such as, for example, a hydrogen peroxide/ammonium hydroxide solution.
  • a conductively coated matrix structure 116 is achieved. Specifically, non-conductive matrix structure 100 is now coated with a layer of conductive material 114. Moreover, sub-pixel regions 106 are not deleteriously coated with any type of material. As a result, light emitted from the phosphors subsequently deposited into sub-pixel regions 106 will not be reflected away from the faceplate. Thus, the present invention achieves an increase in emission intensity over conventional flat panel displays.
  • the conductively coated matrix structure 116 of the present invention does not suffer from the increased back-scattering rate, and undesirably high secondary emission coefficient associated with conventional ITO coated black matrix structures.
  • the substantial height (20-40 microns) of the present conductively coated matrix structure 116 effectively isolates neighboring sub-pixels and prevents unwanted back-scattering.
  • the substantial height and conductivity of the present conductively coated matrix structure 116 prevent arcing from the field emitters to the faceplate. By preventing arcing from the field emitters to the faceplate, the present invention increases the high voltage robustness of the flat panel display in which conductively coated matrix structure 116 is employed.
  • the conductive nature of the present invention 116 allows excess charge to be readily removed from the faceplate of the flat panel display.
  • the present invention provides a conductively coated black matrix structure which effectively separates neighboring sub-pixels.
  • the present invention further provides a conductively coated black matrix structure which does not have the increased back-scattering rate, and the undesirably high secondary emission coefficient associated with an ITO coated black matrix structure.
  • the present invention achieves the above accomplishments without the formation of a highly reflective layer in the sub-pixel regions of a flat panel display.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

A method for forming a conductively coated matrix structure for separating rows and columns of sub-pixels on the faceplate of a flat panel display device. In one embodiment, the present invention deposits a photoresistive material over the interior surface of a faceplate having a non-conductive matrix structure formed thereon. The photoresistive material is deposited into sub-pixel regions separated by the matrix structure. The photoresistive material is dried and exposed in the sub-pixel regions. After unexposed photoresistive material is removed, a layer of aluminum is evaporated over the interior surface of the faceplate such that the matrix structure and the exposed layer of photoresistive material in the sub-pixel regions is coated with a conductive layer of aluminum. Next, the present invention applies an etchant to the exposed photoresistive material disposed in the sub-pixel regions. The etchant removes the exposed photoresistive material and the overlying conductive layer of aluminum from the sub-pixel regions such that the conductive layer of aluminum remains only on the matrix structure, and does not cover the sub-pixel regions.

Description

This is a divional of application Ser. No. 08/829,251 filed on Mar. 31, 1997 now U.S. Pat. No. 5,912,056.
FIELD OF THE INVENTION
The present claimed invention relates to the field of flat panel displays. More particularly, the present claimed invention relates to the black matrix of a flat panel display screen structure.
BACKGROUND ART
Sub-pixel regions on the faceplate of a flat panel display are typically separated by an opaque mesh-like structure commonly referred to as a black matrix. By separating sub-pixel regions, the black matrix prevents electrons directed at one sub-pixel from being "back-scattered" and striking another sub-pixel. In so doing, a conventional black matrix prevents helps maintain a flat panel display with sharp resolution. In addition, the black matrix is also used as a base on which to locate structures such as, for example, support walls.
In one prior art black matrix, a very thin layer (e.g. approximately 2-3 microns) of a conductive material is applied to the interior surface of the faceplate surrounding the sub-pixel regions. Typically, the conductive black matrix is formed of a conductive graphite material. By having a conductive black matrix, excess charges induced by electrons striking the top or sides of the black matrix can be easily drained from the interior surface of the faceplate. Additionally, by having a conductive black matrix, electrical arcs occurring between field emitters of the flat panel display and the faceplate will be more likely to strike the black matrix. Such arcing is of particular concern in high voltage environments. By having the electrical arcing occur between the black matrix and the field emitters instead of between the sub-pixels and the field emitters, the integrity of the phosphors and the overlying aluminum layer is maintained. Unfortunately, due to the relatively low height of such a prior art conductive black matrix, arcing can still occur from the field emitter to the sub-pixel regions. As a result of such arcing, phosphors and the overlying aluminum layer can be damaged. As mentioned above, however, the black matrix is also intended to prevent back-scattering of electrons from one sub-pixel to another sub-pixel. Thus, it is desirable to have a black matrix with a height which sufficiently isolates each sub-pixel from respective neighboring sub-pixels. However, due to the physical property of the conductive graphite material, the height of the black matrix is limited to the aforementioned 2-3 microns.
In another prior art black matrix, a non-conductive polyimide material is patterned across the interior surface of the black matrix. In such a conventional black matrix, the black matrix has a uniform height of approximately 20-40 microns. Thus, the height of such a black matrix is well suited to isolating each sub-pixel from respective neighboring sub-pixels. As a result, such a black matrix configuration effectively prevents unwanted back-scattering of electrons into neighboring sub-pixels. Unfortunately, prior art polyimide black matrices are not conductive. As a result, even though the top edge of the polyimide black matrix is much closer than the sub-pixel region is to the field emitter, unwanted arcing can still occur from the field emitter to the sub-pixel regions. In a prior art attempt to prevent such arcing, a conductive coating (i.e. indium tin oxide (ITO)) is applied to the non-conductive polyimide black matrix. ITO coated non-conductive black matrices are not without problems, however. For example, the high atomic weight of ITO results in unwanted back-scattering of electrons. Furthermore, ITO has a undesirably high secondary emission coefficient, δ.
Additionally, coating non-conductive black matrices with a layer of ITO commonly results in the deposition of ITO on the faceplate in the sub-pixel regions. As a result, a layer of ITO layer underlies subsequently deposited phosphors. Due to the high index of refraction of the ITO material, light emitted from the phosphors can be reflected away from the faceplate, thereby reducing the emission intensity of the flat panel display.
Thus, a need exists for conductively coated black matrix structure which effectively separates neighboring sub-pixels. A further need exists for a conductively coated black matrix structure which does not have the increased back-scattering rate, and the undesirably high secondary emission coefficient associated with an ITO coated black matrix structure. Still another need exists for a conductively coated black matrix structure which does not result in the formation of a highly reflective layer in the sub-pixel regions of a flat panel display.
SUMMARY OF INVENTION
The present invention provides a conductively coated black matrix structure which effectively separates neighboring sub-pixels. The present invention further provides a conductively coated black matrix structure which does not have the increased back-scattering rate, and the undesirably high secondary emission coefficient associated with an ITO coated black matrix structure. The present invention achieves the above accomplishments without the formation of a highly reflective layer in the sub-pixel regions of a flat panel display.
Specifically, in one embodiment, the present invention deposits a photoresistive material over the interior surface of a faceplate having a non-conductive matrix structure formed thereon. The photoresistive material is deposited into sub-pixel regions separated by the matrix structure. The photoresistive material is dried and exposed in the sub-pixel regions. After unexposed photoresistive material is removed, a layer of aluminum is evaporated over the interior surface of the faceplate such that the matrix structure and the exposed layer of photoresistive material in the sub-pixel regions is coated with a conductive layer of aluminum. Next, the present invention applies an etchant to the exposed photoresistive material disposed in the sub-pixel regions. The etchant removes the exposed photoresistive material and the overlying conductive layer of aluminum from the sub-pixel regions such that the conductive layer of aluminum remains only on the matrix structure, and does not cover the sub-pixel regions.
As a result, the present invention is comprised of a conductively coated matrix structure for defining sub-pixel regions in a flat panel display device. That is, a non-conductive matrix disposed on the interior surface of a faceplate separates the sub-pixel regions. The non-conductive matrix is coated with a layer of conductive material such that a conductively coated matrix structure is formed. Furthermore, in the present invention, the layer of conductive material coats only the non-conductive matrix such that the sub-pixel regions do not have a layer of conductive material disposed therein.
In another embodiment, the present invention includes the features of the above-described embodiment, and further recites that a colloidal conductive substance such as DAG material instead of aluminum is used to conductively coat the matrix structure.
These and other objects and advantages of the present invention will no doubt become obvious to those of ordinary skill in the art after having read the following detailed description of the preferred embodiments which are illustrated in the various drawing figures.
BRIEF DESCRIPTION OF THE DRAWINGS
The accompanying drawings, which are incorporated in and form a part of this specification, illustrates embodiments of the invention and, together with the description, serve to explain the principles of the invention:
FIGS. 1A-1G are side sectional views of process steps used to form a conductively coated matrix structure in accordance with the present claimed invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Reference will now be made in detail to the preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. While the invention will be described in conjunction with the preferred embodiments, it will be understood that they are not intended to limit the invention to these embodiments. On the contrary, the invention is intended to cover alternatives, modifications and equivalents, which may be included within the spirit and scope of the invention as defined by the appended claims. Furthermore, in the following detailed description of the present invention, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be obvious to one of ordinary skill in the art that the present invention may be practiced without these specific details. In other instances, well known methods, procedures, components, and circuits have not been described in detail as not to unnecessarily obscure aspects of the present invention.
With reference to now to FIGS. 1A-1G side sectional views of process steps used to form a conductively coated matrix structure in accordance with the present claimed invention are shown. Referring specifically to FIG. 1A, a side-sectional view of a starting point in the formation of the present invention is shown. As shown in FIG. 1A, a non-conductive black matrix 100 is disposed on the interior surface 102 of a faceplate 104. Non-conductive black matrix 100 is configured to separate rows and columns of sub-pixel regions, typically shown as 106, on the interior surface 102 of faceplate 104. Although a the present invention referred to a non-conductive black matrix 100, it will be understood that the term "black" refers to the opaque characteristic of the matrix. Thus, the present invention is also well suited to having a color other than black. In the present embodiment, non-conductive black matrix structure 100 (hereinafter non-conductive matrix structure) is formed, for example, of polyimide using techniques well known in the art. Additionally, in the present embodiment, non-conductive matrix structure 100 has a height of approximately 20-40 microns. Although specific materials and dimensions are recited in the present embodiment, the present invention is also well suited to using various other materials to form a non-conductive matrix structure 100 having various other dimensions.
With reference next to FIG. 1B, in the present invention, a photoresistive material 108 is deposited over interior surface 102 of faceplate 104 and non-conductive matrix structure 100. As shown in FIG. 1B, photoresistive material 108 is deposited onto the top of non-conductive matrix structure 100, forming portions 110 of photoresistive material 108 thereon. Furthermore, photoresistive material 108 also settles into sub-pixel regions 106. In the present embodiment, photoresistive material 108 is comprised of a mixture of poly vinyl alcohol (PVA) and a metal dichromate such as, for example, ammonium dichromate.
Referring now to FIG. 1C, photoresistive material 108 is then dried. In so doing, a dried layer of photoresistive material 108 is formed in sub-pixel regions 106 on interior surface 102 of faceplate 104, and on the top surface of non-conductive matrix 100. The dried layer of photoresistive material 108 is then exposed to light, typically represented by rays 112, from the exterior surface of faceplate 104 such that an exposed layer of photoresistive material 108 cures and adheres to interior surface 102 of the faceplate 104. In the present embodiment, light 112 is comprised of ultra-violet (UV) light emanating from a light source, not shown, which is disposed on the exterior surface of faceplate 104. In the present invention, by exposing photoresistive material 108 to light 112 from the exterior surface of faceplate 104, non-conductive matrix structure 100 masks portions 110 of photoresistive material 108 from light 112. As a result, portions 110 of photoresistive material 108 are prevented from being exposed. Thus, only the photoresistive material 108 disposed in sub-pixel regions 106 is cured.
With reference now to FIG. 1D, the present invention then removes the photoresistive material 108 which was not exposed by light 112 of FIG. 1C. That is, photoresistive material 108 residing other than in sub-pixel regions 106 is removed. Thus, portions 110 of FIGS. 1B and 1C are removed. In the present embodiment, the unexposed photoresistive material 108 is removed by rinsing non-conductive matrix structure 100 and interior surface 102 of faceplate 104 with water. Although water is used to remove the unexposed photoresistive material in the present embodiment, the present invention is also well suited to using various other methods to remove the unexposed photoresistive material.
Referring now to FIG. 1E, after the removal of the unexposed photoresistive material, a layer of conductive material 114 is evaporated over interior surface 102 of faceplate 104. Conductive material 114 is evaporated such that non-conductive matrix structure 100 and the exposed layer of photoresistive material 108 present in sub-pixel regions 106 is coated with layer of conductive material 114. In the present embodiment, conductive material is comprised of aluminum. However, the present invention is also well suited to applying other conductive material such as, for example, colloidal conductive substance such as CB800A DAG made by Acheson Colloids of Port Huron, Mich., over interior surface 102 of faceplate 104. As shown in FIG. 1E, non-conductive matrix structure 100 is now coated with a layer of conductive material 114.
With reference next to FIG. 1F, the present invention then applies an etchant to interior surface 102 of faceplate 104. The etchant selectively attacks the exposed photoresistive material 108. As mentioned above, the exposed photoresistive material 108 now remains disposed almost exclusively in sub-pixel regions 106. The etchant removes the exposed photoresistive material 108 and, consequently, the conductive material 114 overlying the exposed photoresistive material 108. That is, as shown in FIG. 1E, the exposed photoresistive material 108 is removed from interior surface 102 of faceplate 104, and the overlying conductive material 114 deposited on the exposed photoresistive material 108 is also removed. As a result, photoresistive material 108 and overlying conductive material 114 is also removed from interior surface 102 of faceplate 104. Thus, sub-pixel regions 106 have no material disposed therein, and conductive material 114 remains only coating non-conductive matrix structure 100. In the present embodiment, the etchant is comprised of hydrogen peroxide. However, the present invention is also well suited to the use of various other poly vinyl alcohol (PVA) and metal dichromate selective etchants such as, for example, a hydrogen peroxide/ammonium hydroxide solution.
With reference now to FIG. 1G, after the etching step of FIG. 1F, a conductively coated matrix structure 116 is achieved. Specifically, non-conductive matrix structure 100 is now coated with a layer of conductive material 114. Moreover, sub-pixel regions 106 are not deleteriously coated with any type of material. As a result, light emitted from the phosphors subsequently deposited into sub-pixel regions 106 will not be reflected away from the faceplate. Thus, the present invention achieves an increase in emission intensity over conventional flat panel displays. Furthermore, by coating non-conductive matrix structure 100 with a material other than ITO, the conductively coated matrix structure 116 of the present invention does not suffer from the increased back-scattering rate, and undesirably high secondary emission coefficient associated with conventional ITO coated black matrix structures. As yet another advantage, the substantial height (20-40 microns) of the present conductively coated matrix structure 116 effectively isolates neighboring sub-pixels and prevents unwanted back-scattering. The substantial height and conductivity of the present conductively coated matrix structure 116 prevent arcing from the field emitters to the faceplate. By preventing arcing from the field emitters to the faceplate, the present invention increases the high voltage robustness of the flat panel display in which conductively coated matrix structure 116 is employed. Furthermore, the conductive nature of the present invention 116 allows excess charge to be readily removed from the faceplate of the flat panel display.
Thus, the present invention provides a conductively coated black matrix structure which effectively separates neighboring sub-pixels. The present invention further provides a conductively coated black matrix structure which does not have the increased back-scattering rate, and the undesirably high secondary emission coefficient associated with an ITO coated black matrix structure. The present invention achieves the above accomplishments without the formation of a highly reflective layer in the sub-pixel regions of a flat panel display.
The foregoing descriptions of specific embodiments of the present invention have been presented for purposes of illustration and description. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed, and obviously many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the Claims appended hereto and their equivalents.

Claims (4)

I claim:
1. A conductively coated matrix structure for defining sub-pixel regions in a flat panel display device, said conductively coated matrix structure comprising:
a non-conductive matrix, said non-conductive matrix disposed on the interior surface of a faceplate of said flat panel display, said non-conductive matrix separating said sub-pixel regions on said faceplate, said non-conductive matrix structure having a top surface and side surfaces; and
a layer of conductive material disposed coating said top surface and at least a portion of said side surfaces of said non-conductive matrix to form a conductively coated matrix structure, said layer of conductive material coating only said non-conductive matrix such that said sub-pixel regions do not have said layer of conductive material disposed therein.
2. The conductively coated matrix structure of claim 1 wherein said non-conductive matrix has a height of approximately 20-40 microns.
3. The conductively coated matrix structure of claim 1 wherein said layer of conductive material is comprised of aluminum.
4. The conductively coated matrix structure of claim 1 wherein said layer of conductive material is comprised of DAG.
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KR100555076B1 (en) 2006-02-24
DE69832056T2 (en) 2006-07-13
EP0975437A4 (en) 2001-05-09
JP2001519964A (en) 2001-10-23
EP0975437A1 (en) 2000-02-02
WO1998043747A1 (en) 1998-10-08
DE69832056D1 (en) 2005-12-01
EP0975437B1 (en) 2005-10-26
US5912056A (en) 1999-06-15
HK1024199A1 (en) 2000-10-05

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