US5250322A - Water-repellent metal oxide film coated on glass substrate and method of forming same - Google Patents
Water-repellent metal oxide film coated on glass substrate and method of forming same Download PDFInfo
- Publication number
- US5250322A US5250322A US07/990,995 US99099592A US5250322A US 5250322 A US5250322 A US 5250322A US 99099592 A US99099592 A US 99099592A US 5250322 A US5250322 A US 5250322A
- Authority
- US
- United States
- Prior art keywords
- alkoxysilane
- fluoroalkylsilane
- glass substrate
- oxide film
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 title claims abstract description 46
- 239000000758 substrate Substances 0.000 title claims abstract description 42
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 20
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000005871 repellent Substances 0.000 title claims description 13
- 239000000243 solution Substances 0.000 claims abstract description 23
- 239000011259 mixed solution Substances 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000002904 solvent Substances 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims description 6
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 claims description 6
- 108010025899 gelatin film Proteins 0.000 claims description 5
- 230000002940 repellent Effects 0.000 claims description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- 238000007865 diluting Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 150000001298 alcohols Chemical class 0.000 claims description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 2
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 claims description 2
- JLGNHOJUQFHYEZ-UHFFFAOYSA-N trimethoxy(3,3,3-trifluoropropyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)F JLGNHOJUQFHYEZ-UHFFFAOYSA-N 0.000 claims description 2
- 150000004703 alkoxides Chemical class 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000001680 brushing effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- -1 dimethylsiloxane Chemical class 0.000 description 6
- 229910000077 silane Inorganic materials 0.000 description 6
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000007859 condensation product Substances 0.000 description 3
- 239000003085 diluting agent Substances 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 230000007062 hydrolysis Effects 0.000 description 3
- 238000006460 hydrolysis reaction Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 125000005595 acetylacetonate group Chemical group 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
- C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
- C03C17/009—Mixtures of organic and inorganic materials, e.g. ormosils and ormocers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
- Y10T428/31609—Particulate metal or metal compound-containing
- Y10T428/31612—As silicone, silane or siloxane
Definitions
- the present invention relates to a water-repellent metal oxide film coated on a glass substrate and a method of forming the film.
- the film forming method belongs to the sol-gel process using a solution of a metal alkoxide.
- the water-repellent coating is suitable for application, for example, to vehicular, marine, aircraft and architectural window glasses which are to be exposed to rain water.
- the metal oxide film can be formed, for example, by the sol-gel process using a solution of an organic metal compound such as a metal alkoxide.
- JP-A-58-122979 and JP-A-58-172245 disclose a water and oil repellent which has a silane compound containing a polyfluoroalkyl group or a partially hydrolyzed condensation product of the silane compound, and an alkoxysilane compound or a halogenosilane compound.
- the silane compound and the condensation product have a group, --CON(R 2 )--Q-- or --SO 2 N(R 2 )--Q--, wherein "Q" represents a bivalent organic group and "R 2 " represents a hydrogen atom or a lower alkyl group.
- JP-A-58-167448 discloses a metal oxide film which is coated on a glass substrate and has a thickness not greater than 1 ⁇ m.
- the film is formed by applying to the glass substrate a silane compound containing a polyfluoroalkyl group or a partially hydrolyzed condensation product of the silane compound.
- JP-A-64-68477 discloses a water-repellent and durable metal oxide film coated on a steel plate.
- the film is formed by applying an alcohol solution to the steel plate and by heating the coated steel plate at a temperature not lower than 100° C.
- the alcohol solution contains not less than 0.05 wt % of at least one of an alkoxide, a monomethylalkoxide and an acetylacetonato of a metal selected from the group consisting of Al, Zr, Ti, Si, W, Ce, Sn and Y, and a fluoroalkylsilane of which concentration is from 0.005 to 0.30 mol % of the total amounts of the at least one of the alkoxide, the monomethylalkoxide and the acetylacetonato.
- a method of forming a water-repellent metal oxide film on a glass substrate comprising the steps of: mixing an alkoxysilane with a fluoroalkylsilane in the molar ratio of the alkoxysilane to the fluoroalkylsilane ranging from 1:10 to 10:1 so as to form a mixed solution; diluting the mixed solution with a solvent such that the total concentration of the alkoxysilane and the fluoroalkylsilane is from 1 to 10 wt % in a diluted solution; adding water in the amount of 100 mol % to 1000 mol % of the total amounts of the fluoroalkylsilane and the alkoxysilane to the diluted solution so as to partially hydrolyze the fluoroalkyl-silane and the alkoxysilane, thereby forming a sol; applying the sol to the glass substrate, thereby to form a gel film on the glass substrate; and
- the fluoroalkylsilane and the alkoxysilane are partially hydrolyzed by the addition of water in the amount of 100 mol % to 1000 mol % of the total amount of the fluoroalkylsilane and the alkoxysilane. Therefore, the mixed solution can be applied to a glass substrate through brushing by hand. Furthermore, the coating film can be uniformly thinly formed on a glass substrate, thereby not deteriorating optical characteristics of the glass substrate. Thus, according to the present invention, even when the film on the glass substrate is scratched, the film does not become hazy.
- the molar ratio of an alkoxysilane to a fluoroalkylsilane is from 1:10 to 10:1, and preferably from 2:1 to 8:1. If the ratio is lower than 1/10, adhesive strength of the film to the glass substrate becomes insufficient. That is, the film tends to peel off. If the ratio is higher than 10/1, the thickness of the film becomes too thick. Therefore, it is difficult to apply a mixed solution containing the fluoroalkylsilane and the alkoxysilane to a glass substrate through brushing by hand, due to uneven thickness of the film.
- the mixed solution is diluted by a diluent such that the total concentration of the alkoxysilane and the fluoroalkylsilane is from 1 to 10 wt % in the diluted solution. If the concentration is less than 1 wt %, the film becomes insufficient with respect to water-repellency. If the concentration is greater than 10 wt %, the thickness of the film tends to become uneven.
- fluoroalkylsilanes are CF 3 (CH 2 ) 2 Si(OCH 3 ) 3 , CF 3 (CH 2 ) 2 SiCl 3 , CF 3 (CF 2 ) 5 (CH 2 ) 2 Si(OCH 3 ) 3 , CF 3 (CF 3 (CF 2 ) 5 (CH 2 ) 2 SiCl 3 , CF 3 (CF 2 ) 7 (CH 2 ) 2 Si(OCH 3 ) 3 , CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 , CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 , CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCH 3 Cl 2 and CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCH 3 (OCH 3 ) 2 .
- alkoxysilanes are Si(OC 2 H 5 ) 4 , Si(OCH 3 ) 4 , CH 3 Si(OCH 3 ) 3 and Si(OC 3 H 7 ) 4 .
- the alkoxysilanes are not limited to these compounds as long as they are hydrolyzable.
- diluents according to the present invention are lower alcohols such as methanol, ethanol, butanol and isopropyl alcohol, and aromatic hydrocarbons such as xylene and toluene.
- the diluents are not limited to these compounds as long as the mixed solution containing the fluoroalkylsilane and the alkoxysilane is uniformly diluted thereby.
- water is added to the diluted solution in the amount of 100 mol % to 1000 mol % of the total amount of the fluoroalkylsilane and the alkoxysilane. If the amount is less than 100 mol %, the fluoroalkylsilane and the alkoxysilane are not sufficiently hydrolyzed. With this, adhesion of the film to the glass substrate is deteriorated. If the amount is about 1000 mol %, degree of hydrolysis reach maximum. Therefore, even if more than 1000 mol % of water is added, degree of hydrolysis does not increase any more.
- the diluted mixed solution is applied to the glass substrate by a suitable coating method such as brushing, dip coating, spraying, flow coating or spin coating.
- the coated glass substrate After applying the diluted mixed solution to the glass substrate, the coated glass substrate is heated for about 30 min at a temperature not lower than 100° C., and preferably at a temperature ranging from 100° to 400° C., so as to form a metal oxide film thereon. If the temperature is higher than 400° C., water repellency of the film tends to become insufficient. After the heating, it is desirable to gently wipe the metal oxide film surface with a dry cloth such as flannel.
- a very thin metal oxide film can be obtained, of which thickness ranges from that of a monomolecular film to 5 nm. If the thickness is less than a monomolecular film, the metal oxide film becomes uneven with respect to water-repellency. If the thickness is greater than 5 nm, abrasion resistance and mechanical durability of the metal oxide film are lowered and the thickness of the film tends to become uneven.
- the thickness can be determine, for example, by Auger electron spectroscopy or secondary ion mass spectroscopy.
- a glass substrate according to the present invention is not limited to a specific type. That is, the glass substrate may be of an organic glass, colored or colorless, curved or flat, tempered, or a single plate glass or a laminated plate glass.
- a glass substrate having 100 mm ⁇ 100 mm widths and a thickness of 2 mm was washed with a brush and dried. After drying, the glass substrate was washed with acetone and wiped with a flannel.
- the contact angle of water drop on the film was measured by a contact angle meter to evaluate water-repellency of the film. The result is shown in Table 1.
- Examples 2-5 are slight modifications of Example 1 with respect to the amounts of alkoxysilane and 60% nitric acid solution, as shown in Table 1.
- Comparative Examples 2-4 are modifications of Example 1 with respect to the amounts of the alkoxysilane and 60% nitric acid solution, a shown in Table 1.
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- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Surface Treatment Of Glass (AREA)
- Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemically Coating (AREA)
Abstract
Description
TABLE 1
__________________________________________________________________________
Molar Isopropyl
60% Total Conc.
FAS
TEOS
ratio alcohol
HNO.sub.3
of FAS and
Coating
Contact
(g)
(g) (FAS/TEOS)
(g) (g) TEOS (wt %)
Condition
Angle (°)
__________________________________________________________________________
Ex. 1 1 0.18
1/0.5
50 1.5 2.3 A 110
Ex. 2 1 0.36
1/1 50 2 2.6 A 110
Ex. 3 1 1.08
1/3 50 4 4.0 A 110
Ex. 4 1 1.80
1/5 50 6 5.3 A 110
Ex. 5 1 3.66
1/10 50 11 8.5 A 110
Comp. Ex. 1
1 0 1/0 50 1 2.0 A 110
Comp. Ex. 2
1 5.50
1/15 50 16 11.5 B 90
Comp. Ex. 3
1 7.23
1/20 50 21 14.1 C 81
Comp. Ex. 4
1 7.23
1/20 500 21 1.6 A 68
__________________________________________________________________________
TABLE 2
______________________________________
Contact Angle (°)
0 hr.
200 hr. 350 hr. 550 hr.
______________________________________
Ex. 3 110 103 102 87
Ex. 4 110 104 100 95
Comp. Ex. 1 110 80 62 23
______________________________________
Claims (11)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3343656A JPH05170486A (en) | 1991-12-25 | 1991-12-25 | Water repellent for glass surface and water-repellent glass |
| JP3-343656 | 1991-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US5250322A true US5250322A (en) | 1993-10-05 |
Family
ID=18363224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US07/990,995 Expired - Fee Related US5250322A (en) | 1991-12-25 | 1992-12-16 | Water-repellent metal oxide film coated on glass substrate and method of forming same |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5250322A (en) |
| EP (1) | EP0548775B1 (en) |
| JP (1) | JPH05170486A (en) |
| DE (1) | DE69210784T2 (en) |
Cited By (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5338350A (en) * | 1992-07-06 | 1994-08-16 | Central Glass Company, Limited | Ink composition for forming thin film |
| US5394269A (en) * | 1992-11-13 | 1995-02-28 | Central Glass Company, Ltd. | Reflectance reducing film and method of forming same on glass substrate |
| US5403368A (en) * | 1991-11-29 | 1995-04-04 | Central Glass Company, Limited | Metal oxide film having minutely roughed surface and method of forming same on glass substrate |
| US5424130A (en) * | 1991-05-13 | 1995-06-13 | Toyota Jidosha Kabushiki Kaisha | Water repellent glass and process for producing the same |
| US5628820A (en) * | 1993-12-20 | 1997-05-13 | Central Glass Company, Ltd. | Ink composition for forming thin film |
| US5674625A (en) * | 1993-11-10 | 1997-10-07 | Central Glass Company, Limited | Multilayered water-repellent film and method of forming same on glass substrate |
| US5843516A (en) * | 1996-09-16 | 1998-12-01 | Symetrix Corporation | Liquid source formation of thin films using hexamethyl-disilazane |
| US5846279A (en) * | 1996-04-04 | 1998-12-08 | Matsushita Electric Industrial Co., Ltd. | Process for producting a contamination-resistant float glass |
| US5883185A (en) * | 1996-03-18 | 1999-03-16 | Shin-Etsu Chemical Co., Ltd. | Water soluble fiber-treating agent and method of making |
| US5888290A (en) * | 1996-05-24 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Composition and process for imparting durable repellency to substrates |
| US6025025A (en) * | 1990-04-03 | 2000-02-15 | Ppg Industries Ohio, Inc. | Water-repellent surface treatment |
| KR100244802B1 (en) * | 1997-12-26 | 2000-02-15 | 정몽규 | Water repellent coating glass with excellent wear resistance |
| US6277480B1 (en) | 1999-05-03 | 2001-08-21 | Guardian Industries Corporation | Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method |
| US6280834B1 (en) | 1999-05-03 | 2001-08-28 | Guardian Industries Corporation | Hydrophobic coating including DLC and/or FAS on substrate |
| US6312808B1 (en) | 1999-05-03 | 2001-11-06 | Guardian Industries Corporation | Hydrophobic coating with DLC & FAS on substrate |
| US6337133B1 (en) * | 1996-08-19 | 2002-01-08 | Central Glass Company, Limited | Water-repellent glass pane and method for producing same |
| US6338905B1 (en) * | 1997-07-15 | 2002-01-15 | Central Glass Company, Limited | Glass plate with water-repellent film and method for producing same |
| US6340502B1 (en) * | 1997-10-06 | 2002-01-22 | Saint-Gobain Vitrage | Hydrophobic coating for glazing sheet |
| US6368664B1 (en) | 1999-05-03 | 2002-04-09 | Guardian Industries Corp. | Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon |
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| JP5343271B2 (en) * | 2003-09-17 | 2013-11-13 | 小川 一文 | Water repellent and oil repellent antifouling glass plate, production method thereof, automobile and electromagnetic cooker using the same |
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| JP2012213689A (en) * | 2011-03-31 | 2012-11-08 | Panasonic Corp | Water treating material and water treating apparatus |
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| US5424130A (en) * | 1991-05-13 | 1995-06-13 | Toyota Jidosha Kabushiki Kaisha | Water repellent glass and process for producing the same |
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| US5338350A (en) * | 1992-07-06 | 1994-08-16 | Central Glass Company, Limited | Ink composition for forming thin film |
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| US5628820A (en) * | 1993-12-20 | 1997-05-13 | Central Glass Company, Ltd. | Ink composition for forming thin film |
| US5883185A (en) * | 1996-03-18 | 1999-03-16 | Shin-Etsu Chemical Co., Ltd. | Water soluble fiber-treating agent and method of making |
| US5846279A (en) * | 1996-04-04 | 1998-12-08 | Matsushita Electric Industrial Co., Ltd. | Process for producting a contamination-resistant float glass |
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| US5843516A (en) * | 1996-09-16 | 1998-12-01 | Symetrix Corporation | Liquid source formation of thin films using hexamethyl-disilazane |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE69210784T2 (en) | 1996-09-26 |
| EP0548775A1 (en) | 1993-06-30 |
| JPH05170486A (en) | 1993-07-09 |
| EP0548775B1 (en) | 1996-05-15 |
| DE69210784D1 (en) | 1996-06-20 |
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