US5225918A - Hologram scale, apparatus for making hologram scale, moving member having hologram scale assembled hologram scale and apparatus for making assembled hologram scale - Google Patents
Hologram scale, apparatus for making hologram scale, moving member having hologram scale assembled hologram scale and apparatus for making assembled hologram scale Download PDFInfo
- Publication number
- US5225918A US5225918A US07/731,323 US73132391A US5225918A US 5225918 A US5225918 A US 5225918A US 73132391 A US73132391 A US 73132391A US 5225918 A US5225918 A US 5225918A
- Authority
- US
- United States
- Prior art keywords
- hologram scale
- scale
- hologram
- diffraction grating
- diffracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 70
- 230000003287 optical effect Effects 0.000 description 18
- 238000006073 displacement reaction Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/20—Copying holograms by holographic, i.e. optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
Definitions
- the present invention generally relates to apparatus for making a hologram scale and, more particularly, is directed to an apparatus for making a hologram scale, an apparatus for making an assembled hologram scale, a hologram, an assembled hologram scale and a moving member having a hologram scale for use with a numerical control (NC) machine tool, a precision length measuring machine or a high accuracy displacement measuring apparatus.
- NC numerical control
- a laser scale formed by the combination of a semiconductor laser and a hologram scale has become popular as a displacement measuring apparatus of high precision because it provides high resolution and excellent stability.
- a conventional hologram scale is constructed as, for example, shown in FIG. 1.
- a laser light source 1 which emits a laser light.
- the laser light emitted from the laser light source 1 is reflected by a mirror 2 and then split by a beam splitter 3.
- the thus split laser beams are respectively reflected by mirrors 4, 5 and introduced to beam expanders 6, 7 provided as large aperture magnifying optical systems, in which they are expanded to provide an object wave L 0 and a reference wave L R as plane wave.
- the object wave L 0 and reference wave L R are superimposed to produce an interference fringe 8.
- This interference fringe 8 is exposed on a recording material 9 as a hologram scale, thereby forming the hologram scale.
- the hologram scale recording apparatus since the dimension of the optical system is relatively large, there is then the problem that linearity fluctuates even because of a very small vibration of the optical system. Accordingly, the hologram scale recording apparatus must be designed so as to have an expensive earthquake-resistant structure. However, even when the hologram scale recording apparatus is arranged as the earthquake-resistant type, it is very difficult to construct the hologram scale of high accuracy.
- the linearity of the hologram scale fluctuates even because of a very small vibration of the optical system. Accordingly, the conventional continuous hologram scale must be designed so as to have an expensive earthquake-resistant structure. Even when such expensive earthquake-resistant structure is employed, it is impossible to construct the long continuous hologram scale without difficulty.
- the continuous recording is carried out while the phase is being observed by an interferometer unitarily formed with the recording material 9 which constructs the continuous hologram scale forming apparatus.
- the vibration on the recording material 9 and the vibration of the wave surfaces caused by the flow of air at the portion where the object wave L 0 and the reference wave L R overlap each other are not the same in cycle and in phase, so that the continuous recording cannot be made properly.
- Another object of the present invention is to provide an apparatus for making a hologram scale in which an accurate hologram scale having excellent linearity and whose grating pitch can be prevented from fluctuating can be formed.
- Still another object of the present invention is to provide a hologram scale which can be exposed and recorded under the condition that a recording material is attached to a moving member.
- Still another object of the present invention is to provide an assembled hologram scale which can be exposed and recorded under the condition that a recording material is attached to a moving member.
- a further object of the present invention is to provide an apparatus for making an assembled hologram scale in which the aforementioned shortcomings and disadvantages of the prior art can be eliminated.
- Yet a further object of the present invention is to provide a moving member having a hologram scale in which the aforementioned shortcomings and disadvantages of the prior art can be eliminated.
- an apparatus for making a hologram scale comprises a reference diffraction grating on which a light becomes incident and from or by which the incident light is emitted or reflected as a diffracted light, and a recording material, wherein at least two diffracted beams of the diffracted light are caused to interfere with each other as an object wave and a reference wave so as to form a hologram scale on the recording material.
- a hologram scale is characterized in that at least two diffracted beams are caused to interfere with each other so as to form a hologram scale on a recording material.
- a hologram scale and an assembled hologram scale are formed by the above-mentioned apparatus.
- a moving member having a hologram scale is characterized in that a recording material is unitarily located on a moving member and under this condition, diffracted beams diffracted by a diffraction grating are caused to interfere with each other as an object wave and a reference wave so as to form a hologram scale on the recording material.
- FIG. 1 is a schematic diagram showing an example of an apparatus for making a hologram scale according to the prior art
- FIG. 2 is a schematic diagram of a first embodiment of the present invention and showing an arrangement of an apparatus for making a hologram scale according to the present invention
- FIG. 3 is a schematic diagram of a second embodiment of the present invention and showing a moving member having a recording material
- FIGS. 4A and 4B are respectively a front view and a right side view illustrating the condition that a master scale is corrected
- FIG. 5 is a schematic diagram showing another condition that the master scale is corrected
- FIG. 6 is a schematic diagram of a third embodiment of the present invention and showing an arrangement of an apparatus for making a long hologram scale according to the present invention
- FIG. 7 is a schematic diagram of a fourth embodiment of the present invention and showing an arrangement of an apparatus for making an assembled hologram scale.
- FIG. 8 is a schematic diagram of a fifth embodiment of the present invention and showing an arrangement of an apparatus for making an assembled hologram scale.
- a laser light source such as a helium neon laser, argon laser, helium cadmium laser or the like and this laser light source 10 emits a laser beam L of wavelength ⁇ .
- the laser light L from the laser light source 10 is reflected by a mirror 12 and becomes incident on a beam expander 13.
- the beam expander 13 is a magnifying optical system and composed of a set of lenses 14, 15 and a pin-hole plate 16 having a pin-hole 16a formed at its center. This beam expander 13 expands the incident laser light L of light bundle into a laser light beam La of relatively thick light bundle and emits the same therefrom.
- the laser light beam La from the beam expander 13 becomes incident on a reference diffraction grating 18 (hereinafter referred to as a master scale) having a grating pitch ⁇ M at an incident angle of ⁇ 0 relative to a normal 19 to the master scale 18.
- a master scale a reference diffraction grating 18 having a grating pitch ⁇ M at an incident angle of ⁇ 0 relative to a normal 19 to the master scale 18.
- the master scale 18 might be a master scale which measures accuracy of the hologram scale made by the conventional hologram scale making apparatus shown in FIG. 1 and which has a desired average grating pitch ⁇ M.
- the master scale 18 is not limited to the thus selected hologram scale and might be a diffraction grating of high accuracy which is directly written in the recording material by an electron beam or a diffraction grating of high accuracy which is written in the recording material by utilizing lithography technique.
- the laser light La incident on the master scale 18 is diffracted by the master scale 18 and emitted as a 0-order diffracted light L 0 and a primary diffracted light L 1 , each having an angle ⁇ d relative to the normal 19, etc.
- the 0-order diffracted light L 0 and the primary diffracted light L 1 interfere with each other as an object wave and a reference wave and pass through a slit 20b of a slit plate 20 having a knife edge 20a, thereby an interference fringe having a grating pitch ⁇ R being formed on a recording material 21.
- the recording material 21 is secured to the slit plate 20 and the master scale 18 by jigs (not shown) and the recording material 21 in parallel to one another.
- the interference fringes recorded on the recording material 21, i.e., the grating pitch ⁇ R of the hologram scale and the grating pitch ⁇ M of the master scale 18 become equal to each other.
- the grating pitch ⁇ R of the interference fringe and the grating pitch ⁇ M of the master scale 18 become equal to each other without being affected by a small change of the wavelength ⁇ of the laser light La or a small change of the incident angle in the recording mode.
- the recording material 21 on which the interference fringe is exposed and recorded can be utilized as the hologram scale and the grating pitch of the hologram scale is equal to the grating pitch ⁇ M of the master scale 18, thereby the hologram scale of high accuracy being formed.
- the method for forming the hologram scale is not limited thereto and the following modifications thereof can be effected. That is, by utilizing both of the positive and negative primary diffracted beams, it is possible to form the hologram scale whose grating pitch is a half of the grating pitch ⁇ M of the master scale 18. Similarly, by utilizing higher-order diffracted beams, it is possible to form a hologram scale whose grating pitch is reduced in inverse proportion to the order of the diffracted light as compared with the grating pitch ⁇ M of the master scale 18.
- the diffracted beams by causing at least two of the diffracted beams to interfere with each other as the object wave and the reference wave to thereby form the hologram scale on the recording material, it is possible to obtain an accurate hologram scale whose average grating pitch does not fluctuate.
- the two diffracted beams it is preferable that at least one diffracted beam be the 0-order diffracted light.
- the optical path of the laser light split so as to effect the interference is considerably reduced, as compared with that in the example of the prior art shown in FIG. 1, it is possible to suppress the fluctuation of the wave surface due to the vibration of the interferometer or the flow of air in the recording mode. Therefore, it is possible to stably make the hologram scale having excellent linearity and whose grating pitch is equal to that of the master scale.
- the apparatus for making a hologram scale according to this embodiment is not substantially affected by extraneous vibration, it is possible to remove the earthquake-resistant structure of the apparatus for making a hologram scale.
- the interference fringe is stable, the recording (exposing) time can be extended and therefore a recording material of lower recording sensitivity can be employed. Also, since a laser light source which emits a laser light of low intensity can be used due to similar reasons, the apparatus can be simplified in arrangement and improved in reliability.
- FIG. 3 shows an example of the apparatus which can be simplified in arrangement.
- a recording material 35 is unitarily located on a moving member 36 which is slid in the arrow B direction of a displacement measured apparatus
- the recording material 35 whose development process is simple
- the deterioration of accuracy of the hologram scale can be prevented beforehand.
- FIG. 3 like parts corresponding to those of FIG. 2 are marked with the same references and therefore need not be described in detail. While the hologram scale is recorded on the recording material 35, the master scale 18 and the slit plate 20 are secured to the moving member 36 by jigs (not shown). Further, in FIG. 3, reference numeral 37 designates a guide rail along which the moving member 36 is slid in the arrow B direction.
- FIG. 4A shows another embodiment of the present invention and FIG. 4B shows a right side view thereof.
- FIG. 4A a master scale 25 whose a grating pitch fluctuates is shown.
- the average grating pitch or linearity of the master scale 25 must be corrected.
- a hologram scale is formed on a recording material 21 by exposing the interference fringe on the recording material 21 under the condition such that the average grating pitch or linearity of the master scale 25 is corrected by using a supporting device 26 and spacers 27, 27, then it is possible to make a hologram scale of higher accuracy.
- FIGS. 4A and 4B the parts corresponding to those in FIG. 2 are marked with the same references and reference numeral 28 designates a base.
- FIG. 5 shows the condition such that the average grating pitch of the master scale 25 is corrected.
- the average grating pitch of the master scale 25 can be changed by moving supporting devices 30, 30 for the master scale 25 in the arrow C direction. Accordingly, if a hologram scale is formed under the above condition, then it is possible to obtain a hologram scale having a desired average grating pitch.
- the linearity and the average grating pitch of the thus made hologram scale can be substantially prevented from fluctuating even by the change of circumstance conditions, such as ambient temperature, flow of wind or the like. Accordingly, a long hologram scale shown in FIG. 6 can be formed.
- reference numeral 38 designates a base table and a long recording material 39 and a long master scale 40 are secured to this base table 38.
- a moving box 45 in which a lens 41, a mirror 42 and a lens 43 constituting a magnifying optical system are fixed at predetermined positions is slid along a guide rail 44 located in parallel to the base table 38 in the arrow D direction, so that it is possible to form a long hologram scale having excellent linearity on the recording material 39.
- this method in which the long hologram scale is formed on the long recording material 39 by moving the optical system by using the long master scale 40, fine positioning is not needed and a manufacturing efficiency can be increased considerably.
- the apparatus for making a hologram scale of the present invention since the hologram scale is formed on the recording material by causing the diffracted beams to interfere with each other as an object wave and the reference wave, it is possible to obtain the accurate hologram scale whose average grating pitch does not fluctuate substantially. There is then the advantage that the displacement measuring apparatus using the hologram scale made by the above apparatus needs no cumulative correction or the like.
- the apparatus for making a hologram scale of the present invention since the optical path of the laser light can be reduced considerably, the fluctuation of wave surface due to the vibration of the interferometer or the flow of air in the recording mode can be suppressed to the minimum, it is possible to stably construct a hologram scale having excellent linearity and whose grating pitch is equal to that of the reference diffraction grating.
- the apparatus for making a hologram scale of the present invention since the apparatus of the present invention can be substantially prevented from being affected by the extraneous vibration, the earthquake-resistant structure of the hologram scale recording apparatus can be removed.
- the apparatus for making a hologram scale of the present invention since the interference fringe is stably obtained, the recording (exposure) time can be extended and hence recording material of low recording sensitivity can be used. Also, since the laser light source which emits a laser light low in intensity can be utilized due to similar reasons, the arrangement of the apparatus can be simplified and reliability of the apparatus can be increased.
- the apparatus for making a hologram scale of the present invention is adapted to correct the reference diffraction grating in use, there is then the advantage that the resultant hologram scale becomes more accurate.
- the apparatus for making a hologram scale of the present invention it is possible to make a very accurate hologram scale by using the hologram scale as the reference diffraction grating.
- the hologram scale of the present invention since the hologram scale is formed on the recording material by causing the diffracted beams to interfere with each other as the object wave and the reference wave, the hologram scale of the present invention becomes accurate and has no fluctuation of average grating pitch.
- the moving member having a hologram scale of the present invention since the recording material is unitarily located on the moving member and under this condition the diffracted beams are caused to interfere with each other as the object wave and the reference wave to thereby form the hologram scale on the recording material, it is possible to obtain the moving member having a hologram scale with ease.
- FIGS. 7 and 8 Further embodiments of the present invention, i.e., an assembled hologram scale and an apparatus for making an assembled hologram scale according to the present invention will be described with reference to FIGS. 7 and 8.
- like parts corresponding to those of FIG. 2 are marked with the same references and therefore need not be described in detail.
- the embodiment shown in FIG. 7 is different from the earlier-noted embodiment of FIG. 2 as follows.
- the laser light La incident on the master scale 18 is diffracted by the master scale 18 and emitted as a 0-order diffracted beam L 0 and a primary diffracted beam L 1 , each having an angle ⁇ d relative to the normal 19 to the master scale 18, etc.
- the 0-order diffracted beam L 0 and the primary diffracted beam L 1 interfere with each other as the object wave and the reference wave and pass through the slit 20b of the slit plate 20 having the knife edge 20a, thereby the interference fringe having the grating pitch ⁇ R is formed on a recording material a1 formed of a long recording material ax.
- the recording material a1, the slit plate 20 and the master scale 18 are secured to a slide table 50 by jigs (not shown) and they are located in parallel to one another. Further, although the long recording material ax is represented as an assembly of recording materials a1 to an in FIG. 7, they are made as a unitary body in actual practice.
- the interference fringe recorded on the recording material a1 that is, the grating pitch ⁇ R of the hologram scale and the grating pitch ⁇ M of the master scale 18 become equal to each other.
- the do grating pitch ⁇ R of the interference fringe and the grating pitch ⁇ M of the master scale 18 become equal to each other without being affected by the small change of the wavelength ⁇ of the laser light La or the small change of incident angle in the recording mode. Since the recording material a1 on which the interference fringe is exposed and recorded can be utilized as the hologram scale and the grating pitch of this hologram scale is equal to the grating pitch ⁇ M of the master scale 18, it is possible to make a hologram scale of high accuracy.
- the recording material a2 is located at the position in which the recording material a1 was located before.
- the assembled hologram scale can be made by exposing and recording the interference fringe on the recording material a2 similarly as described above. Further, by exposing and recording the interference fringe on the recording material while the recording materials a3 to an are sequentially moved in the arrow E direction by the length x1 which is the integral multiple of the grating pitch ⁇ M, it is possible to make a long assembled hologram scale corresponding to the long recording material ax formed of the recording materials a1 to an.
- the moving distance of the length x1 is set as follows.
- a scale of a positioning scale 52 unitarily located on the slide table 50 is read by a photo sensor 53 and a pulse signal derived from the photo sensor 53 is counted by a counter (not shown), thereby the moving distance of the length x1 is set.
- the method for setting the above moving distance of the length x1 is not limited to the above and a positioning scale formed in parallel to the master scale 18 when the master scale 18 is formed may be used. Alternatively, it is possible that the movement of the slide table 50 can be measured by an optical wave interferometer.
- the optical system (laser light source 10 and beam expander 13) is fixed and the long assembled hologram scale is made as described above
- the apparatus for making the long assembled hologram scale is not limited to the above and the following embodiment can be employed. That is, as shown in FIG.
- a long recording material 60 is located on a fixed base table 61 and a moving box 62, in which a lens 63, a mirror 64 and a lens 65 constituting the magnifying optical system are fixed at predetermined positions and which has the master scale 18 secured thereto at the position opposing to the recording material 60, is sequentially moved along a guide rail 66 which is located in parallel to the base table 61 by an integral multiple of the grating pitch ⁇ M in the arrow F direction so as to expose an interference fringe on the recording material 60. Then, it is possible to form the long assembled hologram scale of excellent linearity on the recording material 60.
- the apparatus for forming the long assembled hologram scale is not limited thereto and the following modifications thereof can be effected. That is, by utilizing both of the positive and negative primary diffracted beams, it is possible to form the long assembled hologram scale whose grating pitch is a half of the grating pitch ⁇ M of the master scale 18. Similarly, by utilizing higher-order diffracted beams, it is possible to form a long assembled hologram scale whose grating pitch is reduced in inverse proportion to the order of the diffracted beams as compared with the grating pitch ⁇ M of the master scale 18.
- the master scale is relatively moved to the recording material sequentially by an integral multiple of the grating pitch ⁇ M each to expose and record, it is possible to obtain an accurate long assembled hologram scale whose average grating pitch does not fluctuate.
- at least one diffracted beam of the two diffracted beams be the 0-order diffracted beam.
- the optical path of the split laser beams so as to effect the interference is considerably reduced as compared with that in the example of the prior art shown in FIG. 1, it is possible to suppress the fluctuation of the wave surface due to the vibration of the interferometer or the flow of air in the recording mode to the minimum. Therefore, it is possible to make a long assembled hologram scale having excellent linearity and whose grating pitch is equal to that of the master scale.
- the long assembled hologram scale recording apparatus since the long assembled hologram scale recording apparatus according to this embodiment is not substantially affected by extraneous vibration, it is possible to remove the earthquake-resistant structure of the long assembled hologram scale recording apparatus.
- the interference fringe is stable, the recording (exposing) time can be extended and therefore a recording material of low recording sensitivity can be employed. Also, since a laser light source which emits a laser light of low intensity can be used due to similar reason, the apparatus can be simplified in arrangement and improved in reliability.
- the apparatus for making an assembled hologram scale of the present invention when at least two of the beams diffracted by the reference diffraction grating are caused to interfere with each other as the object wave and the reference wave to thereby form the long assembled hologram scale on the recording material, by moving the recording material by the length of an integral multiple of the grating pitch of the reference diffraction grating so as to form the assembled hologram scale on this recording material, it is possible to form an accurate long assembled hologram scale whose average grating pitch does not fluctuate.
- the present invention when at least two of the beams diffracted by the reference diffraction grating are caused to interfere with each other as the object wave and the reference wave to thereby form the long assembled hologram scale on the recording material, by moving the above reference diffraction grating by the length of an integral multiple of the grating pitch of the reference diffraction grating so as to form the assembled hologram scale on the recording material, it is possible to form an accurate long assembled hologram scale whose average grating pitch does not fluctuate.
- the optical path of the laser beams can be considerably reduced, it is possible to suppress the fluctuation of wave surface due to the vibration of the interferometer or the flow of air in the recording mode to the minimum. Therefore, it is possible to make a long assembled hologram scale having excellent linearity and whose grating pitch is equal to that of the master scale.
- the long assembled hologram scale recording apparatus since the long assembled hologram scale recording apparatus according to this embodiment is not substantially affected by the extraneous vibration, it is possible to remove the earthquake-resistant structure of the long assembled hologram scale recording apparatus.
- the interference fringe is stable, the recording (exposing) time can be extended and therefore a recording material of low recording sensitivity can be employed. Also, since a laser light source which emits a laser beam of low intensity can be used for a similar reason, the apparatus can be simplified in arrangement and improved in reliability.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Holo Graphy (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
2π/ΛR=(2π/λ) sin θ.sub.0 +(2π/λ) sin θd (1)
2π/ΛM=(2π/λ) sin θ.sub.0 +(2π/λ) sin θd (2)
ΛM=ΛR (3)
Claims (6)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02190146A JP3096775B2 (en) | 1990-07-18 | 1990-07-18 | Joint hologram scale and its manufacturing apparatus |
JP2-190146 | 1990-07-18 | ||
JP2-191145 | 1990-07-19 | ||
JP19114590A JP3146282B2 (en) | 1990-07-19 | 1990-07-19 | Hologram scale, manufacturing apparatus thereof, and moving body with hologram scale |
Publications (1)
Publication Number | Publication Date |
---|---|
US5225918A true US5225918A (en) | 1993-07-06 |
Family
ID=26505903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US07/731,323 Expired - Lifetime US5225918A (en) | 1990-07-18 | 1991-07-17 | Hologram scale, apparatus for making hologram scale, moving member having hologram scale assembled hologram scale and apparatus for making assembled hologram scale |
Country Status (4)
Country | Link |
---|---|
US (1) | US5225918A (en) |
DE (1) | DE4123903B4 (en) |
GB (1) | GB2249192B (en) |
IT (1) | IT1250930B (en) |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5550654A (en) * | 1993-07-19 | 1996-08-27 | Lucent Technologies Inc. | Method for forming, in optical media, refractive index perturbations having reduced birefringence |
US5892597A (en) * | 1991-08-29 | 1999-04-06 | Fujitsu Limited | Holographic recording apparatus and holographic optical element |
WO2001096962A2 (en) * | 2000-06-15 | 2001-12-20 | 3M Innovative Properties Company | Multiphoton absorption method using patterned light |
US20030194651A1 (en) * | 2000-06-15 | 2003-10-16 | De Voe Robert J. | Multicolor imaging using multiphoton photochemical processes |
US20040012872A1 (en) * | 2001-06-14 | 2004-01-22 | Fleming Patrick R | Multiphoton absorption method using patterned light |
US20040042937A1 (en) * | 2000-06-15 | 2004-03-04 | Bentsen James G | Process for producing microfluidic articles |
US6709790B1 (en) * | 1992-08-26 | 2004-03-23 | Goodrich Corporation | Method and apparatus for generating periodic structures in substrates by synthetic wavelength holograph exposure |
US20040124563A1 (en) * | 2000-06-15 | 2004-07-01 | Fleming Patrick R. | Multipass multiphoton absorption method and apparatus |
US20040126694A1 (en) * | 2000-06-15 | 2004-07-01 | Devoe Robert J. | Microfabrication of organic optical elements |
US20040223385A1 (en) * | 2000-06-15 | 2004-11-11 | Fleming Patrick R. | Multidirectional photoreactive absorption method |
US6852766B1 (en) | 2000-06-15 | 2005-02-08 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US20050147921A1 (en) * | 2002-12-04 | 2005-07-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | High resolution lithography system and method |
US20050208431A1 (en) * | 2000-06-15 | 2005-09-22 | Devoe Robert J | Multiphoton curing to provide encapsulated optical elements |
US20060002274A1 (en) * | 2004-06-30 | 2006-01-05 | Sony Corporation | Hologram duplication method |
US20080038677A1 (en) * | 2006-08-11 | 2008-02-14 | Battelle Memorial Institute | Patterning non-planar surfaces |
US11402801B2 (en) | 2018-07-25 | 2022-08-02 | Digilens Inc. | Systems and methods for fabricating a multilayer optical structure |
US11448937B2 (en) | 2012-11-16 | 2022-09-20 | Digilens Inc. | Transparent waveguide display for tiling a display having plural optical powers using overlapping and offset FOV tiles |
US11703645B2 (en) | 2015-02-12 | 2023-07-18 | Digilens Inc. | Waveguide grating device |
US11703799B2 (en) | 2018-01-08 | 2023-07-18 | Digilens Inc. | Systems and methods for high-throughput recording of holographic gratings in waveguide cells |
US11726332B2 (en) | 2009-04-27 | 2023-08-15 | Digilens Inc. | Diffractive projection apparatus |
US11754842B2 (en) | 2015-10-05 | 2023-09-12 | Digilens Inc. | Apparatus for providing waveguide displays with two-dimensional pupil expansion |
US11899238B2 (en) | 2019-08-29 | 2024-02-13 | Digilens Inc. | Evacuated gratings and methods of manufacturing |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3647289A (en) * | 1969-03-28 | 1972-03-07 | Holotron Corp | Apparatus and method for hologram copying with reference beam intensity control |
US3758186A (en) * | 1966-11-30 | 1973-09-11 | Battelle Development Corp | Method of copying holograms |
US3838903A (en) * | 1965-10-29 | 1974-10-01 | Battelle Development Corp | Wavefront reconstruction |
US4206965A (en) * | 1976-08-23 | 1980-06-10 | Mcgrew Stephen P | System for synthesizing strip-multiplexed holograms |
US4676645A (en) * | 1983-11-04 | 1987-06-30 | Sony Magnescale Incorporation | Optical instrument for measuring displacement |
US4715670A (en) * | 1986-07-14 | 1987-12-29 | Turukhano Boris G | Apparatus for copying holographic diffraction gratings |
US4790612A (en) * | 1986-09-15 | 1988-12-13 | International Business Machines Corporation | Method and apparatus for copying holographic disks |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4130337A (en) * | 1970-04-21 | 1978-12-19 | Takanori Okoshi | Holographic viewer system |
NL170894C (en) * | 1970-12-09 | 1983-01-03 | Hitachi Ltd | METHOD FOR MANUFACTURING A HOLOGRAM |
JPS5144660B2 (en) * | 1971-10-18 | 1976-11-30 | ||
US3698789A (en) * | 1971-10-20 | 1972-10-17 | Bendix Corp | Apparatus employing a grating to provide and move the source of a wave energy distribution |
FR2238942B1 (en) * | 1973-07-27 | 1976-06-18 | Thomson Csf | |
DE2355702A1 (en) * | 1973-11-07 | 1975-05-15 | Siemens Ag | METHOD OF RECORDING LOW-FREQUENCY, BROADBAND SIGNALS ON A THERMOPLASTIC |
GB1546513A (en) * | 1976-03-05 | 1979-05-23 | Le I Tochnoj Mekhaniki Optiki | Device for coherent lighting of objects |
US4834475A (en) * | 1985-03-07 | 1989-05-30 | Robinson Anthony J | Holographic analogue indicating means |
DE69016058T2 (en) * | 1989-02-28 | 1995-09-07 | Sony Magnescale Inc | Moisture-resistant holographic measuring scale. |
-
1991
- 1991-07-17 GB GB9115419A patent/GB2249192B/en not_active Expired - Fee Related
- 1991-07-17 US US07/731,323 patent/US5225918A/en not_active Expired - Lifetime
- 1991-07-18 IT ITRM910540A patent/IT1250930B/en active IP Right Grant
- 1991-07-18 DE DE4123903A patent/DE4123903B4/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3838903A (en) * | 1965-10-29 | 1974-10-01 | Battelle Development Corp | Wavefront reconstruction |
US3758186A (en) * | 1966-11-30 | 1973-09-11 | Battelle Development Corp | Method of copying holograms |
US3647289A (en) * | 1969-03-28 | 1972-03-07 | Holotron Corp | Apparatus and method for hologram copying with reference beam intensity control |
US4206965A (en) * | 1976-08-23 | 1980-06-10 | Mcgrew Stephen P | System for synthesizing strip-multiplexed holograms |
US4676645A (en) * | 1983-11-04 | 1987-06-30 | Sony Magnescale Incorporation | Optical instrument for measuring displacement |
US4715670A (en) * | 1986-07-14 | 1987-12-29 | Turukhano Boris G | Apparatus for copying holographic diffraction gratings |
US4790612A (en) * | 1986-09-15 | 1988-12-13 | International Business Machines Corporation | Method and apparatus for copying holographic disks |
Cited By (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5892597A (en) * | 1991-08-29 | 1999-04-06 | Fujitsu Limited | Holographic recording apparatus and holographic optical element |
US6709790B1 (en) * | 1992-08-26 | 2004-03-23 | Goodrich Corporation | Method and apparatus for generating periodic structures in substrates by synthetic wavelength holograph exposure |
US5550654A (en) * | 1993-07-19 | 1996-08-27 | Lucent Technologies Inc. | Method for forming, in optical media, refractive index perturbations having reduced birefringence |
US7060419B2 (en) | 2000-06-15 | 2006-06-13 | 3M Innovative Properties Company | Process for producing microfluidic articles |
US7166409B2 (en) | 2000-06-15 | 2007-01-23 | 3M Innovative Properties Company | Multipass multiphoton absorption method and apparatus |
KR100795762B1 (en) | 2000-06-15 | 2008-01-21 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | Multiphoton abosrpton method using patterned light |
US20040042937A1 (en) * | 2000-06-15 | 2004-03-04 | Bentsen James G | Process for producing microfluidic articles |
WO2001096962A3 (en) * | 2000-06-15 | 2002-04-18 | 3M Innovative Properties Co | Multiphoton absorption method using patterned light |
US20040124563A1 (en) * | 2000-06-15 | 2004-07-01 | Fleming Patrick R. | Multipass multiphoton absorption method and apparatus |
US20040126694A1 (en) * | 2000-06-15 | 2004-07-01 | Devoe Robert J. | Microfabrication of organic optical elements |
US20040223385A1 (en) * | 2000-06-15 | 2004-11-11 | Fleming Patrick R. | Multidirectional photoreactive absorption method |
US7091255B2 (en) | 2000-06-15 | 2006-08-15 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US6855478B2 (en) | 2000-06-15 | 2005-02-15 | 3M Innovative Properties Company | Microfabrication of organic optical elements |
US20050054744A1 (en) * | 2000-06-15 | 2005-03-10 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US7790353B2 (en) | 2000-06-15 | 2010-09-07 | 3M Innovative Properties Company | Multidirectional photoreactive absorption method |
US20050208431A1 (en) * | 2000-06-15 | 2005-09-22 | Devoe Robert J | Multiphoton curing to provide encapsulated optical elements |
US20100027956A1 (en) * | 2000-06-15 | 2010-02-04 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US7014988B2 (en) | 2000-06-15 | 2006-03-21 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US7026103B2 (en) | 2000-06-15 | 2006-04-11 | 3M Innovative Properties Company | Multicolor imaging using multiphoton photochemical processes |
US20060078831A1 (en) * | 2000-06-15 | 2006-04-13 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
WO2001096962A2 (en) * | 2000-06-15 | 2001-12-20 | 3M Innovative Properties Company | Multiphoton absorption method using patterned light |
US6852766B1 (en) | 2000-06-15 | 2005-02-08 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US7601484B2 (en) | 2000-06-15 | 2009-10-13 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US20030194651A1 (en) * | 2000-06-15 | 2003-10-16 | De Voe Robert J. | Multicolor imaging using multiphoton photochemical processes |
US8530118B2 (en) | 2000-06-15 | 2013-09-10 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
US20040012872A1 (en) * | 2001-06-14 | 2004-01-22 | Fleming Patrick R | Multiphoton absorption method using patterned light |
US8110345B2 (en) * | 2002-12-04 | 2012-02-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | High resolution lithography system and method |
US20050147921A1 (en) * | 2002-12-04 | 2005-07-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | High resolution lithography system and method |
US20060002274A1 (en) * | 2004-06-30 | 2006-01-05 | Sony Corporation | Hologram duplication method |
US8891065B2 (en) | 2006-08-11 | 2014-11-18 | Battelle Memorial Institute | Patterning non-planar surfaces |
US20080038677A1 (en) * | 2006-08-11 | 2008-02-14 | Battelle Memorial Institute | Patterning non-planar surfaces |
US8017308B2 (en) * | 2006-08-11 | 2011-09-13 | Battelle Memorial Institute | Patterning non-planar surfaces |
US11726332B2 (en) | 2009-04-27 | 2023-08-15 | Digilens Inc. | Diffractive projection apparatus |
US11448937B2 (en) | 2012-11-16 | 2022-09-20 | Digilens Inc. | Transparent waveguide display for tiling a display having plural optical powers using overlapping and offset FOV tiles |
US20230114549A1 (en) * | 2012-11-16 | 2023-04-13 | Rockwell Collins, Inc. | Transparent waveguide display |
US11815781B2 (en) * | 2012-11-16 | 2023-11-14 | Rockwell Collins, Inc. | Transparent waveguide display |
US11703645B2 (en) | 2015-02-12 | 2023-07-18 | Digilens Inc. | Waveguide grating device |
US11754842B2 (en) | 2015-10-05 | 2023-09-12 | Digilens Inc. | Apparatus for providing waveguide displays with two-dimensional pupil expansion |
US11703799B2 (en) | 2018-01-08 | 2023-07-18 | Digilens Inc. | Systems and methods for high-throughput recording of holographic gratings in waveguide cells |
US11402801B2 (en) | 2018-07-25 | 2022-08-02 | Digilens Inc. | Systems and methods for fabricating a multilayer optical structure |
US11899238B2 (en) | 2019-08-29 | 2024-02-13 | Digilens Inc. | Evacuated gratings and methods of manufacturing |
Also Published As
Publication number | Publication date |
---|---|
GB2249192A (en) | 1992-04-29 |
GB9115419D0 (en) | 1991-09-04 |
DE4123903A1 (en) | 1992-01-23 |
IT1250930B (en) | 1995-04-22 |
GB2249192B (en) | 1994-10-12 |
ITRM910540A0 (en) | 1991-07-18 |
ITRM910540A1 (en) | 1993-01-18 |
DE4123903B4 (en) | 2006-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5225918A (en) | Hologram scale, apparatus for making hologram scale, moving member having hologram scale assembled hologram scale and apparatus for making assembled hologram scale | |
US4311389A (en) | Method for the optical alignment of designs in two near planes and alignment apparatus for performing this method | |
US3829219A (en) | Shearing interferometer | |
US4970388A (en) | Encoder with diffraction grating and multiply diffracted light | |
US4464030A (en) | Dynamic accuracy X-Y positioning table for use in a high precision light-spot writing system | |
US3861801A (en) | Device for sampling laser beams | |
US7349102B2 (en) | Methods and apparatus for reducing error in interferometric imaging measurements | |
US4715670A (en) | Apparatus for copying holographic diffraction gratings | |
US4955694A (en) | Process for producing HOE's for use in combination to produce a telecentric beam | |
JPH02206745A (en) | Highly stable interferometer for measuring refractive index | |
US20030072003A1 (en) | System and method for recording interference fringes in a photosensitive medium | |
JP3146282B2 (en) | Hologram scale, manufacturing apparatus thereof, and moving body with hologram scale | |
JP3096775B2 (en) | Joint hologram scale and its manufacturing apparatus | |
US3619023A (en) | Optical element for generating contour stripes | |
CN111964587B (en) | Detection system, detection method and grating scale | |
US4466693A (en) | Holographic straightness meter | |
EP2955490A2 (en) | Displacement detecting device | |
JPH0575246B2 (en) | ||
JP2001241916A (en) | Optical system for grazing incidence interferometer and device using the same | |
JP2899688B2 (en) | Hologram interferometer for cylindrical surface inspection | |
SU823852A1 (en) | Device for measuring element sizes on planar objests | |
JPS62124637A (en) | Optical pickup | |
JP3119476B2 (en) | Hologram making device | |
JP2000097650A (en) | Device for measuring shape of aspheric surface | |
JPH03115809A (en) | Encoder |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SONY MAGNESCALE INC. Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:TANIGUCHI, KAYOKO;TSUCHIYA, HIDEKI;REEL/FRAME:005842/0171 Effective date: 19910820 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
FPAY | Fee payment |
Year of fee payment: 12 |
|
AS | Assignment |
Owner name: SONY PRECISION TECHNOLOGY INC.,JAPAN Free format text: CHANGE OF NAME;ASSIGNOR:SONY MAGNESCALE INC.;REEL/FRAME:024225/0477 Effective date: 19961001 Owner name: SONY MANUFACTURING SYSTEMS CORPORATION,JAPAN Free format text: MERGER;ASSIGNOR:SONY PRECISION TECHNOLOGY INC.;REEL/FRAME:024225/0488 Effective date: 20040401 |
|
AS | Assignment |
Owner name: MORI SEIKI CO., LTD.,JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SONY MANUFACTURING SYSTEMS CORPORATION;REEL/FRAME:024397/0884 Effective date: 20100513 |