US3904376A - Apparatus for cleaning the discharge of a smokestack or the like - Google Patents
Apparatus for cleaning the discharge of a smokestack or the like Download PDFInfo
- Publication number
- US3904376A US3904376A US444878A US44487874A US3904376A US 3904376 A US3904376 A US 3904376A US 444878 A US444878 A US 444878A US 44487874 A US44487874 A US 44487874A US 3904376 A US3904376 A US 3904376A
- Authority
- US
- United States
- Prior art keywords
- smokestack
- conduit means
- steam
- tank
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/48—Sulfur compounds
- B01D53/50—Sulfur oxides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S261/00—Gas and liquid contact apparatus
- Y10S261/09—Furnace gas scrubbers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/30—Exhaust treatment
Definitions
- ABSTRACT An apparatus to be used with a smokestack to receive the discharge thereof and to clean the discharge in such a way that only non-noxious components are released to the outer atmosphere.
- the discharge from a smokestack is directed into a mixing chamber where it is mixed with steam from a suitable steam-supply. This mixture is then directed from the mixing chamber through a conduit into a treating tank.
- the mixture of steam and discharge received from the mixing chamber is cooled and liquefied by a liquefying structure.
- particulate matter in the liquid is permitted to settle to the bottom of the tank while the liquid can be treated with suitable neutralizing agents to provide in this way a non-noxious liquid and gas to be released from the treating tank.
- the present invention relates to apparatus for cleaning a smokestack discharge before the latter is released to the outer atmosphere.
- the discharge from a smokestack is directed into a mixing chamber means which also communicates with a steam-supply means so that steam is mixed with the smokestack discharge in the mixing chamber means.
- a conduit means has an inlet communicating with the mixing chamber means to receive the mixture of steam and smokestack discharge therefrom, and this conduit means has distant from its inlet an outlet end communicating with a treating means. Between its inlet and outlet the conduit means is operatively connected with a liquefying means which cools and liquefies the mixture prior to the time that the latter reaches the outlet of the conduit means to flow therefrom into the treating means.
- the products flowing from the outlet of the conduit means are treated in such a way that only a non noxious liquid is released and any air which is also released is also in a non-noxious form.
- the discharge from the smokestack is initially mixed intimately with steam and the noxious components such as S0 are neutralized and separated by the liquefying action so that what reaches the outer atmosphere is a non-polluting waste liquid and clean air. Since S0 is strongly inclined to be water soluble, the mixture with steam and the subsequent cooling and liquefying removes the chemical noxious contents such as S0 from the smokestack discharge as a result of the mixture with steam and subsequent liquefying treatment.
- a Venturi means having just above the smokestack a throat for receiving the smokestack discharge as well as the steam from the steam chamber.
- the steam is fed under pressure into the mixing chamber so as to increase the rate of flow of steam into the chamber beyond what this rate would be without the Venturi means while subjecting the upper discharge end of the smokestack to a negative pressure or minus load, thus sucking the discharge forcibly from the smokestack into the mixing chamber to be mixed with steam therein.
- the conduit means is of a U-shaped configuration at its inlet end so that it curves first upwardly and then downwardly from the mixing chamber with the conduit means having an elongated downwardly extending portion which is substantially parallel to a com mon axis of the upper discharge end region of the smokestack, the steam chamber, the Venturi means, and the mixing chamber means.
- the conduit means is operatively connected with the liquefying means so that the mixture is cooled and liquefied just beyond the U-shaped part of the conduit means to flow downwardly along the interior thereof to the treating means.
- the conduit means is operatively connected with a blower means which blows air into the conduit means to flow downwardly therein into the treating means with the flow of the liquefied mixture received from the mixing chamber means into the treating means being enhanced by the introduction of the air from the blower means into the conduit means at the part thereof just above the treating means.
- the conduit means introduces the components into a treating means in the form of a suitable cleaning tank which receives the liquid and gas from the conduit means, and any noxious components are neutralized in the treating tank by a suitable neutralizing agent so that only a nonpolluting waste liquid and a non-noxious gas are released to the outer atmosphere.
- FIG. 4 is a fragmentary sectional elevation showing in detail a liquefying means which is illustrated at a smaller scale in FIG. 1.
- FIG. 1 schematically illustrates part of a smokestack 1 which has an upper discharge end region.
- This upper discharge end region of the smokestack 1 extends into the interior of a cylinder 2 which has a lower wall 3 surrounding and fluid-tightly connected with the exterior of the smokestack 1.
- the cylinder 2 is coaxial with the discharge end region of the smokestack l and has a diameter larger than the discharge end region of the smokestack 1 so as to define therewith a steam chamber 6 which surrounds the upper discharge end region of the smokestack 1.
- the cylinder 2 is closed except for a small opening which communicates with the interior of a steamsupply pipe which extends upwardly along the exterior of the smokestack 1.
- the lower end of the pipe 5 receives steam from a boiler 4 which is heated with excess heat which otherwise would be wasted and which results from the combustion which takes place during operation of the factory or other plant, with the products of this combustion forming the discharge which flows upwardly through and beyond the smokestack 1.
- the upper end of the pipe 5 communicates with the steam chamber 6 through an opening at the region of the bottom wall 3 of the cylinder 2 so that in this way the structure provides a steam-supply means allowing steam to flow from the boiler 4 through the pipe 5 into the chamber 6.
- the top end of the steam chamber 6 communicates with a Venturi means 7 which has a throat situated just above the discharge end of the smokestack 1, this throat having a diameter smaller than the inner diameter of the cylinder 2 which forms the steam chamber 6.
- the top end of the Venturi means 7 communicates with a mixing chamber means 9 which thus receives steam from the steam chamber 6 and the discharge from the smokestack 1.
- the mixing chamber means 9 is in the form of a tubular structure which converges upwardly and in which the steam and smokestack discharge are mixed intimately.
- a conduit means has an inlet region 8 of substantially U-shaped configuration communicating with the mixing chamber means 9 to receive therefrom the mixture of steam and smokestack discharge.
- the inlet end of the conduit means 10 communicates directly with the mixing chamber means 9 which forms an extension of the conduit means 10, and at its U-shaped region 8 the conduit means 10 curves first upwardly and then downwardly.
- the conduit means 10 extends vertically in parallel relation with respect to a common axis of the upper discharge end region of the smokestack 1, the cylinder 2, the Venturi means 7 and the mixing chamber means 9.
- the conduit means is operatively connected with a liquefying means in the form of a water jacket 13 which serves to cool and condense the steam flowing downwardly along the interior of the conduit means 10 subsequent to the inlet thereof.
- a liquefying action is enhanced by way of a spray means 14 which receives water from the interior 15 of the water jacket 13 and sprays the water downwardly and across the interior of the conduit means 10.
- the interior 15 of the water jacket 13 receives cooling Water from a supply pipe 17.
- the water jacket is in the form of a cylinder which surrounds the fluid-tightly engages the exterior of the conduit means 10 to define the water jacket space 15 in which the cooling water is located.
- the spray means 14 is in the form of a circular tube having at its outer region perforations communicating with openings formed in the wall of the conduit means 10 at the lower region of the space 15 so that in this way water flows directly from the space 15 through perforations in the conduit 10 coinciding perforations at the outer region of the circular tube 14 into the interior of the latter.
- This circular tube 14 which forms the spray means has an inner region formed with openings 16 directed downwardly and across the interior of the conduit means 10.
- the spray provided from the spray means 14 is directed downwardly and across the interior of the conduit means 10 in an oblique direction as shown by the arrows in FIG. 4.
- the conduit means 10 extends downwardly from the liquefying means 13,14 through a considerable distance before terminating in a bottom outlet end which is situated in the interior of a treating means 23 in the form of a cylindrical settling tank.
- the lower end region of the conduit means 10 extends fluid-tightly through the top wall of the treating tank 23.
- the liquid 25 received from the conduit means 10 rises in the tank 23 While accumulating therein.
- the lower end region 20 of the conduit means 10 extends directly into the body of liquid 25 which collects in the tank 23.
- a hopper 24 containing a neutralizing agent 26 which can be supplied in a predetermined regulated manner by way of suitable discharge valve or the like to the interior of the tank 23 to be received by the liquid 25 for neutralizing in a known way any noxious components of the liquid 25.
- the liquid 25 is thus stored for a given time in the tank 23 and particulate matter 29 will settle to the bottom of the tank as illustrated. Clean air which is situated above the body of liquid 25 is permitted to escape to the outer atmosphere through the gas outlet 28 of the tank 23 while clean liquid will flow out through the overflow opening 27.
- the steam from the boiler 4 is delivered by way of the pipe 5 to the interior of the steam chamber 6 under pressure prior to being combined with the smokestack discharge which contains S0
- the flow of the steam through the throat of the Venturi means 7 together with the discharge from the stack 1 creates a minus load or negative pressure which is to say a pressure less than atmospheric pressure directly above the top end of the smokestack 1, and thus the discharge is sucked out of the smokestack 1 into the mixing chamber 9 together with the steam introduced under pressure into the chamber 6 from the pipe 5.
- the discharge from the smokestack is forcibly drawn up into the mix ing chamber means 9 at the negative pressure which acts on the top end of the smokestack, with intimate mixing between the steam and discharge taking place in the mixing chamber means 9.
- This mixture of steam and smokestack discharge is directed through the U- shaped portion 8 of the conduit means 10 downwardly along the interior of the latter.
- This downward flow of the mixture along the conduit means 10 is enhanced by a blower means 21 which feeds air into the conduit means 10 at a lower region thereof just above the treating means 23.
- the mixture With the downward flow enhanced as a result of the action of the blower means 21, the mixture is smoothly drawn into the vertical part of the conduit means It from the U-shaped portion 8 thereof, and inasmuch as cooling takes place next to the U-shaped portion 8 by way of the water jacket 13, the result is a rapid cooling and liquefying of the mixture with the particulate matter of the smokestack discharge therein, the liquefying action being accelerated by the spray means 14 which operates to spray water constantly toward the interior of the conduit 10.
- the blower means 21 includes a pipe 19 communicating through an opening 18 with the interior of the conduit means 10.
- This opening 18 is covered by a baffle 22 which directs the air from the pipe 19 downwardly along the interior of the conduit means 10 while preventing liquid from flowing across the opening 18.
- the liquid 25 is received in the cleaning or treating tank 23 to be stored therein until a certain amount accumulates while the neutralizing agent required for cleaning purposes is received in the tank 23 from the hopper 24. In this way the particulate matter 29 will settle to the bottom of the tank 23 and a clean,
- the bottom wall of the tank 23 may be provided with a removable plug which can be removed from time to time so that the deposits 29 can be removed.
- the neutralizing agent 26 may be, for example, Na CO CaOH or NaHCO What is claimed is:
- mixing chamber means fluid-tightly communicating with the discharge end region of the smokestack for receiving the discharge therefrom
- steam-supply means communicating with said mixing chamber means for supplying thereto steam to be mixed with the discharge from the smokestack
- conduit means having an inlet end communicating with said mixing chamber means to receive the mixture of steam and smokestack discharge therefrom and an outlet end distant from said mixing chamber means, said conduit means directing the mixture from said mixing chamber means to said outlet end of said conduit means, liquefying means operatively connected with said conduit means between said ends thereof for cooling the mixture flowing through said conduit means and for liquefying at least a substantial portion of the mixture before the mixture reaches said outlet end of said conduit means, and treating means communicating fluid-tightly with the outlet end of said conduit means for treating the products received from said outlet end of said conduit means in a manner providing for release of only non-noxious components from said treating means
- baffle means is carried by said conduit means in the interior thereof at the location where air enters said conduit means from said blower means to deflect the air downwardly along the interior of said conduit means while preventing contact between liquid in said conduit means and air at the location where said blower means communicates with said conduit means.
- said liquefying means includes a spray means situated in said conduit means and communicating with said water jacket for receiving water therefrom for spraying the water across the interior of said conduit means.
- said spray means is in the form of a circular tube having an outer region communicating through said conduit means with the interior of the water jacket and an inner region formed with apertures for directing a liquid spray downwardly and across the interior of said conduit means.
- said treating means includes a settling tank for receiving liquid from said conduit means while permitting particulate matter to settle to the bottom of said tank.
- said tank carries at an upper region thereof a means for supply ing to the tank a neutralizing agent for reacting with liquid in the tank to neutralize any noxious components therein for rendering them non-noxious and for enhancing the settlement of particulate matter to the bottom of the tank.
- said liquefying means includes a tubular ring situated in said conduit means and having an outer region communicating with said water jacket for receiving water therefrom and an inner region formed with spray apertures from which liquid is sprayed across the interior of said conduit means.
- said treating means includes a settlement tank for receiving liquid from said outlet of said conduit means while permitting particulate matter in the liquid to settle to the bottom of the tank.
- said settling tank carries a supply means for supplying to the interior of the tank a neutralizing agent to be received by the liquid in the tank for neutralizing any noxious components and rendering the latter non-noxious before liquid flows out through said overflow outlet and gas flows out through said gas outlet.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Chimneys And Flues (AREA)
- Separation Of Particles Using Liquids (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1973022725U JPS49125977U (enrdf_load_stackoverflow) | 1973-02-23 | 1973-02-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3904376A true US3904376A (en) | 1975-09-09 |
Family
ID=12090731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US444878A Expired - Lifetime US3904376A (en) | 1973-02-23 | 1974-02-22 | Apparatus for cleaning the discharge of a smokestack or the like |
Country Status (4)
Country | Link |
---|---|
US (1) | US3904376A (enrdf_load_stackoverflow) |
JP (1) | JPS49125977U (enrdf_load_stackoverflow) |
DE (1) | DE2405669A1 (enrdf_load_stackoverflow) |
FR (1) | FR2218927A1 (enrdf_load_stackoverflow) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4012208A (en) * | 1975-08-20 | 1977-03-15 | Arnim Lawrence E | Anti-pollution unit for attachment on smoke stacks, and the method of reducing smoke stack pollution |
US4071322A (en) * | 1974-05-16 | 1978-01-31 | Smit Nijmegen B.V. | Apparatus for producing an inert gas |
US4155977A (en) * | 1977-08-11 | 1979-05-22 | Baker Bob G | Pollution control system |
US4300913A (en) * | 1979-12-18 | 1981-11-17 | Brennstoffinstitut Freiberg | Apparatus and method for the manufacture of product gas |
US4388090A (en) * | 1981-06-29 | 1983-06-14 | Arnet Streeter | Air scrubber |
US4624190A (en) * | 1984-02-15 | 1986-11-25 | Silvano Cappi | Apparatus for the disposal of flue gas from gas or liquid-fuel boiler-burner groups |
US4818256A (en) * | 1988-04-20 | 1989-04-04 | Ross Jody D | Steam scrubbing method and system for exhaust gases |
US5156819A (en) * | 1988-04-20 | 1992-10-20 | Ross Jody D | Steam scrubbing system for exhaust gases |
US5156659A (en) * | 1991-04-08 | 1992-10-20 | Wright George T | Cooler and particulate separator for an off-gas stack |
FR2820053A1 (fr) * | 2001-01-30 | 2002-08-02 | Dragoslaw Lukac | Dispositif permettant la diminution de l'emission dans l'atmosphere de particules polluantes |
CN100462626C (zh) * | 2007-02-01 | 2009-02-18 | 吴春平 | 垃圾焚烧炉 |
ITCS20090010A1 (it) * | 2009-06-22 | 2010-12-23 | Maurizio Rosario Costa | Depuratore per fiumi da combustione di stufe o caminetti e similari |
US8382887B1 (en) * | 2011-09-14 | 2013-02-26 | Abdulreidha A. T. A. Alsaffar | System for decontaminating industrial output gases |
US20160348238A1 (en) * | 2015-05-28 | 2016-12-01 | Kabushiki Kaisha Toshiba | Film forming apparatus |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5388659A (en) * | 1977-01-17 | 1978-08-04 | Jgc Corp | Gas/liquid contact apparatus |
CA1127067A (en) * | 1978-12-20 | 1982-07-06 | Philip C. Rader | Method and apparatus for treating flue gases |
DE3046281A1 (de) * | 1980-12-09 | 1982-07-08 | Linde Ag, 6200 Wiesbaden | Vorrichtung und verfahren zum reinigen eines gasstroms |
AT397214B (de) * | 1992-03-30 | 1994-02-25 | Chemie Linz Gmbh | Vorrichtung zur abscheidung von melamin |
DE102015014339A1 (de) * | 2015-11-05 | 2017-05-11 | Alexander Wolf | Vorrichtung zur Abgasreinigung |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US495359A (en) * | 1893-04-11 | Conveyer for ashes or other light substances | ||
US704199A (en) * | 1901-08-28 | 1902-07-08 | William Ralls Lee | Apparatus for recovering minerals carried off in the fumes from smelting-furnaces. |
US2016549A (en) * | 1932-11-14 | 1935-10-08 | Kenna Richard | Gas disposal apparatus |
US3706538A (en) * | 1970-12-23 | 1972-12-19 | Frank D Chew | Smoke abatement apparatus |
-
1973
- 1973-02-23 JP JP1973022725U patent/JPS49125977U/ja active Pending
-
1974
- 1974-02-06 DE DE19742405669 patent/DE2405669A1/de active Pending
- 1974-02-21 FR FR7405913A patent/FR2218927A1/fr not_active Withdrawn
- 1974-02-22 US US444878A patent/US3904376A/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US495359A (en) * | 1893-04-11 | Conveyer for ashes or other light substances | ||
US704199A (en) * | 1901-08-28 | 1902-07-08 | William Ralls Lee | Apparatus for recovering minerals carried off in the fumes from smelting-furnaces. |
US2016549A (en) * | 1932-11-14 | 1935-10-08 | Kenna Richard | Gas disposal apparatus |
US3706538A (en) * | 1970-12-23 | 1972-12-19 | Frank D Chew | Smoke abatement apparatus |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4071322A (en) * | 1974-05-16 | 1978-01-31 | Smit Nijmegen B.V. | Apparatus for producing an inert gas |
US4012208A (en) * | 1975-08-20 | 1977-03-15 | Arnim Lawrence E | Anti-pollution unit for attachment on smoke stacks, and the method of reducing smoke stack pollution |
US4155977A (en) * | 1977-08-11 | 1979-05-22 | Baker Bob G | Pollution control system |
US4300913A (en) * | 1979-12-18 | 1981-11-17 | Brennstoffinstitut Freiberg | Apparatus and method for the manufacture of product gas |
US4388090A (en) * | 1981-06-29 | 1983-06-14 | Arnet Streeter | Air scrubber |
US4624190A (en) * | 1984-02-15 | 1986-11-25 | Silvano Cappi | Apparatus for the disposal of flue gas from gas or liquid-fuel boiler-burner groups |
US4818256A (en) * | 1988-04-20 | 1989-04-04 | Ross Jody D | Steam scrubbing method and system for exhaust gases |
US5156819A (en) * | 1988-04-20 | 1992-10-20 | Ross Jody D | Steam scrubbing system for exhaust gases |
US5156659A (en) * | 1991-04-08 | 1992-10-20 | Wright George T | Cooler and particulate separator for an off-gas stack |
FR2820053A1 (fr) * | 2001-01-30 | 2002-08-02 | Dragoslaw Lukac | Dispositif permettant la diminution de l'emission dans l'atmosphere de particules polluantes |
CN100462626C (zh) * | 2007-02-01 | 2009-02-18 | 吴春平 | 垃圾焚烧炉 |
ITCS20090010A1 (it) * | 2009-06-22 | 2010-12-23 | Maurizio Rosario Costa | Depuratore per fiumi da combustione di stufe o caminetti e similari |
US8382887B1 (en) * | 2011-09-14 | 2013-02-26 | Abdulreidha A. T. A. Alsaffar | System for decontaminating industrial output gases |
US20130061758A1 (en) * | 2011-09-14 | 2013-03-14 | Abdulreidha A. T. A. Alsaffar | System for decontaminating industrial output gases |
US20160348238A1 (en) * | 2015-05-28 | 2016-12-01 | Kabushiki Kaisha Toshiba | Film forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS49125977U (enrdf_load_stackoverflow) | 1974-10-29 |
DE2405669A1 (de) | 1974-09-05 |
FR2218927A1 (enrdf_load_stackoverflow) | 1974-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3904376A (en) | Apparatus for cleaning the discharge of a smokestack or the like | |
US3933450A (en) | Purifier for the physical-chemical treatment of combustion gases and other gases containing polluting or noxious constituents | |
US3390869A (en) | Spray-type soot eliminator | |
US3890103A (en) | Anti-pollution exhaust apparatus | |
US9061230B2 (en) | System to remove contaminants from air stream | |
US3713277A (en) | Fog impingement scrubbing system | |
US2658735A (en) | Gas-liquid contact apparatus for removing contaminants from gases | |
US3841061A (en) | Gas cleaning apparatus | |
US4579569A (en) | Apparatus for neutralizing and removing fumes | |
US4818256A (en) | Steam scrubbing method and system for exhaust gases | |
JP2000107540A (ja) | 排気ガス処理システム | |
US3706538A (en) | Smoke abatement apparatus | |
HUT65105A (en) | Direct current dry scrubber | |
US3884653A (en) | System for purification of gases | |
JPH07303814A (ja) | 集塵装置 | |
CA1240259A (en) | Process and apparatus for cleaning solids-laden gas | |
US3702756A (en) | Smokeless antitoxic burner apparatus | |
JPH05192534A (ja) | 半導体排ガス除害方法とその装置 | |
US3494107A (en) | Dust-fume control system | |
GB2114464A (en) | Air pollution control apparatus | |
US3387432A (en) | Scrubbers | |
US3620510A (en) | Gas scrubber with tangential water introduction | |
US4219342A (en) | Pollution control system | |
US3751882A (en) | Gas scrubber with moisture eliminator | |
US7101425B2 (en) | Washer and method for purifying gases |