US3887001A - Temperature control - Google Patents

Temperature control Download PDF

Info

Publication number
US3887001A
US3887001A US377658A US37765873A US3887001A US 3887001 A US3887001 A US 3887001A US 377658 A US377658 A US 377658A US 37765873 A US37765873 A US 37765873A US 3887001 A US3887001 A US 3887001A
Authority
US
United States
Prior art keywords
heat sink
face
sink members
members
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US377658A
Other languages
English (en)
Inventor
Robert Lewis Bickerdike
William Norman Mair
Evan Samuel Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Application granted granted Critical
Publication of US3887001A publication Critical patent/US3887001A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
    • F28D2021/0029—Heat sinks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2265/00—Safety or protection arrangements; Arrangements for preventing malfunction
    • F28F2265/26—Safety or protection arrangements; Arrangements for preventing malfunction for allowing differential expansion between elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S165/00—Heat exchange
    • Y10S165/051—Heat exchange having expansion and contraction relieving or absorbing means
    • Y10S165/052—Heat exchange having expansion and contraction relieving or absorbing means for cylindrical heat exchanger
    • Y10S165/07—Resilient fluid seal

Definitions

  • a collector for the deposition (if alloys from the vapour phase is described which includes a thick metal plate which has a first face and a second face opposite the first face; a plurality of heat sink members attached in efficient thermal contact with the said second face.
  • the heat sink members being provided with internal channels for the passage of coolant; and flexible connecting means connecting at least some of the channels to allow circulation of coolant through at least some of the heat sink members.
  • Embodiments of the present invention may permit a collector to have its temperature maintained at temperatures of the order of 300C by use of water as a coolant.
  • a temperature control device includes a body the temperature of which is to be controlled; a plurality of heat sink members attached in efficient thermal contact with the body, the heat sink members being provided with internal channels for the passage of a coolant; and flexible connecting means connecting at least some of the channels to allow circulation of coolant through at least some of the heat sink members and arranged to remain leak tight despite expansion or contraction of the apparatus due to heating.
  • Typical apparatus for the production of an alloy by deposition of its components from the vapour phase includes a heated sourcce means from which the constituents are evaporated, a temperature controllable collector, and a removable shutter interposed between the source and the collector so that the metal vapour only impinges upon the collector when desired, the whole being enclosed in a controllable vacuum or low pressure system.
  • All of the heat sink members may be on the same coolant circuit and preferably the coolant is water.
  • the collector assembly comprising the collector itself and the attached heat sink members and coolant circulating means are designed for a specific temperature or temperature range at the collector face by use of known information regarding thermal conductivity of the materials, coefficients of expansion and expected heat flux at the collecting surface.
  • the heat sink members are distributed to a predetermined pattern on the back of the collector so that the expected heat flux is transferred to the coolant, each heat sink member taking an appropriate quantity of heat.
  • a difficulty which arises is that under the influence of the temperature gradient across the collector the collector undergoes distortion and if removable heat sink members of a material different from the collector are used this distortion will tend to break the efficient thermal contact necessary for successful operation.
  • the heat sink members are preferably of a high thermally conductive material, for example copper, and in accordance with an aspect of the present invention the member, spacing and contact area of the heat sink members are selected so that the radii of curvature (r) of the collector and of the heat sink members caused by heat distortion at operating temperature are substantially the same as determined by the formula:
  • K thermal conductivity
  • a the coefficient of linear expansion
  • Q the heat flux per unit of contact area
  • the heat sink members are removably attached and in accordance with a further aspect of the present invention the heat sink members are attached to the collector by a bolt or like means of material having a lower coefficient of linear expansion than the material of the heat sink means so that as the temperature is raised the heat sink means is more firmly attached to the collector.
  • the material of the bolt must have a coefficient of linear expansion and a strength such that it does not break under the strain imposed upon it by such differential thermal expansion.
  • FIG. 1 is a general perspective view of a collector
  • the assembly includes a thick collector plate 10 of aluminium having a surface 1 l for the deposit of the alloy and on the opposite surface 12, are heat sink members 13.
  • the collector plate 10 is supported by a shaft 14 (the means of attachment of the shaft 14 to the collector 10 are not shown but are conventional).
  • Each heat sink member 13 comprises a lower copper block 15, a copper tube 16, an upper copper block 17 and a stainless steel water compartment 18. All of these parts are held on to the collector plate 10 by means of a mild steel bolt 19.
  • the shaft 14 is provided with a water distribution housing 20 and pipes 21, 22 and 26 are provided to circulate Water through the water compartments 18, each run of pipes being provided with a flexible vacuum seal
  • the collector 10 is also provided with a thermocouple 24 by which the temperature can be monitored and heaters 25 by which the collector can be heated.
  • thermocouple 24 by which the temperature can be monitored
  • heaters 25 by which the collector can be heated.
  • a similar circulation serves the other two heat sink members.
  • the electrical leads to the thermocouple 24 and heaters 25 and the water supply to and from the water distribution housing 20 are not shown but these are accommodated in conventional fashion on the shaft 14.
  • the heat sink member 13 is shown in section with the lower copper block 15, the copper tube 16, the upper copper block 17 and the stainless steel water compartment 18.
  • a mild steel bolt 19 fitted with a washer 30, is screwed into a mild steel bolt 31.
  • the bolt 31 is held in position in the collector plate 10 by means of an aluminium plug 32, consequently the mild steel bolt 19 maintaining the heat sink member 13 in contact with the collector plate 10.
  • the water compartment 18 is hollow and has an inlet tube 33 by which the cooling water is introduced into the compartment. the exit tube is not visible in this section.
  • the temperature of the collector face 11 is a function of the rate of heat removal and may be adjusted by changing the copper tube 16.
  • a material of different thermal conductivity than copper may also be substituted rather than altering the dimensions of tube 16.
  • a temperature controllable collector having a thick metal plate which has a first face adapted to receive deposited alloy and a second face opposite the first face;
  • heat sink members attached in efficient thermal contact with said second face, the heat sink members being provided with internal channels for the passage of coolant:
  • each heat sink member includes a replaceable member through which a major part of the heat flux flows in operation so that the rate of heat flow and hence the operating temperature may be altered by replacing said replaceable members with similar members of differing dimensions and/or differing thermally conductive properties.
  • connectmg means are arcuate pipes.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
US377658A 1972-07-14 1973-07-09 Temperature control Expired - Lifetime US3887001A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3307272A GB1433753A (en) 1972-07-14 1972-07-14 Temperature control

Publications (1)

Publication Number Publication Date
US3887001A true US3887001A (en) 1975-06-03

Family

ID=10348177

Family Applications (1)

Application Number Title Priority Date Filing Date
US377658A Expired - Lifetime US3887001A (en) 1972-07-14 1973-07-09 Temperature control

Country Status (6)

Country Link
US (1) US3887001A (ja)
JP (1) JPS578871B2 (ja)
CA (1) CA1019566A (ja)
DE (1) DE2335300C2 (ja)
FR (1) FR2193090B1 (ja)
GB (1) GB1433753A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261182A (en) * 1978-10-05 1981-04-14 General Electric Company Automatic icemaker including means for minimizing the supercooling effect
US5590539A (en) * 1993-11-26 1997-01-07 Omega Enterprises Inc. Refrigeration apparatus and methods
US20130091693A1 (en) * 2011-10-12 2013-04-18 International Business Machines Corporation Thermal expansion-enhanced heat sink for an electronic assembly

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011052707A1 (de) * 2011-08-15 2013-02-21 Pierburg Gmbh Kühlvorrichtung für ein thermisch belastetes Bauteil

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955184A (en) * 1957-02-27 1960-10-04 George E Grindrod Apparatus for precision control of the surface temperature of metallic heaters
US3361195A (en) * 1966-09-23 1968-01-02 Westinghouse Electric Corp Heat sink member for a semiconductor device
US3514771A (en) * 1967-09-26 1970-05-26 Sperry Rand Corp Magnetic drum enclosure with heat transfer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1265965A (ja) * 1968-07-26 1972-03-08

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955184A (en) * 1957-02-27 1960-10-04 George E Grindrod Apparatus for precision control of the surface temperature of metallic heaters
US3361195A (en) * 1966-09-23 1968-01-02 Westinghouse Electric Corp Heat sink member for a semiconductor device
US3514771A (en) * 1967-09-26 1970-05-26 Sperry Rand Corp Magnetic drum enclosure with heat transfer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261182A (en) * 1978-10-05 1981-04-14 General Electric Company Automatic icemaker including means for minimizing the supercooling effect
US5590539A (en) * 1993-11-26 1997-01-07 Omega Enterprises Inc. Refrigeration apparatus and methods
US20130091693A1 (en) * 2011-10-12 2013-04-18 International Business Machines Corporation Thermal expansion-enhanced heat sink for an electronic assembly
US8720063B2 (en) * 2011-10-12 2014-05-13 International Business Machines Corporation Thermal expansion-enhanced heat sink for an electronic assembly
US8743545B2 (en) 2011-10-12 2014-06-03 International Business Machines Corporation Thermal expansion-enhanced heat sink for an electronic assembly
US9282675B2 (en) 2011-10-12 2016-03-08 International Business Machines Corporation Thermal expansion-enhanced heat sink for an electronic assembly

Also Published As

Publication number Publication date
CA1019566A (en) 1977-10-25
JPS5046579A (ja) 1975-04-25
FR2193090A1 (ja) 1974-02-15
DE2335300A1 (de) 1974-01-31
GB1433753A (en) 1976-04-28
JPS578871B2 (ja) 1982-02-18
DE2335300C2 (de) 1983-03-17
FR2193090B1 (ja) 1977-12-23

Similar Documents

Publication Publication Date Title
Class et al. Boiling heat transfer to liquid hydrogen from flat surfaces
US5348703A (en) Vapor deposition apparatus and method
CA2051378A1 (en) Method for producing a heatable and refrigerable element for a system handling small quantities of liquid, and an element manufactured by the method
US3887001A (en) Temperature control
Stylianou et al. Dropwise condensation on surfaces having different thermal conductivities
KR950018640A (ko) 열방식 스프레더를 포함하는 다이아몬드의 화학 증착 장치
US3029777A (en) Vapor deposition coating apparatus
Bartholomew et al. Changes of growth conditions in the vertical Bridgman-Stockbarger method for the solidification of aluminum
Betts et al. Free convection film boiling from a flat, horizontal surface in saturated He II
US3289754A (en) Use of silver surfaces to promote dropwise condensation
Thibault Boiling heat transfer around a horizontal cylinder and in tube bundles
Gangler Resistance of Refractories to Molten Lead‐Bismuth Alloy
Parker An apparatus for the vacuum deposition of radio active materials
Fromhold Jr Parabolic oxidation of metals
Stohr et al. The effect of temperature gradient on the morphology of DS cotac-type composites
SU953426A2 (ru) Теплообменна поверхность
US3640762A (en) Method for vaporizing molten metal
An et al. Study on heating model and heat transfer law of anti-oxidation coating materials in high vacuum environment
SU1313730A1 (ru) Формный цилиндр
Shimada et al. Enhancement of boiling heat transfer in a narrow space restricted by an interference plate with holes
Balakhonova et al. Investigation of the process of liquid evaporation from a porous metal under vacuum conditions
Weigel Heat transfer performance of a rotating heat pipe using different condensers and working fluids
Sundheim et al. A Rotating-Disk Thermocell. I. Theory
Ginde Interfacial phenomena in liquid metals and semiconductor processes.
MacKenzie Vaporization of thin liquid films