US3870916A - X-ray tube - Google Patents

X-ray tube Download PDF

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Publication number
US3870916A
US3870916A US444256A US44425674A US3870916A US 3870916 A US3870916 A US 3870916A US 444256 A US444256 A US 444256A US 44425674 A US44425674 A US 44425674A US 3870916 A US3870916 A US 3870916A
Authority
US
United States
Prior art keywords
anode
ray tube
rotatable
distributing member
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US444256A
Other languages
English (en)
Inventor
Eckart Kussel
Heinz-Gunther Haubold
Peter Wombacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Application granted granted Critical
Publication of US3870916A publication Critical patent/US3870916A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08Anodes; Anti cathodes
    • H01J35/10Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106Active cooling, e.g. fluid flow, heat pipes

Definitions

  • ABSTRACT An x-ray tube with an anode which is located in a high vacuum chamber connectable to a vacuum pump and is passed through by cooling fluid.
  • the anode which comprises a peripheral mantle surface and lateral surfaces which are approximately parallel to each other is disengageably connected to a rotatable hollow shaft for rotation therewith and has its peripheral mantle surface located within the region of the electron beams emitted by the cathode.
  • the x-ray tube furthermore comprises a distributing member for distributing the cooling fluid, which distributing member is arranged in the interior of and coaxially with the rotatable anode.
  • the peripheral mantle surface is formed by the central peripheral portion of a ring which has a U-shaped cross section and the legs of which are detachably connected to the lateral surfaces of the anode, O-rings being provided for sealing purposes between the legs of the ring and the lateral surfaces of the anode.
  • the present invention relates to an x-ray tube with an anode which is passed through by cooling water and while being detachably connected to a driven hollow shaft is rotatably journalled.
  • This anode is arranged in an evacuated chamber which is connected to a vacuum pump.
  • the anode is rotation symmetric and has two parallel or nearly parallel lateral surfaces and a mantel while extending through the housing of the x-ray tube.
  • the mantle surface of said anode is located within the region of the electron beams emitted by the cathode while for controlling the cooling means a distributor body is arranged within the rotatable anode coaxially therewith.
  • X-ray tubes are known in which for purposes of reducing the heating up thereof, the anode is designed as a driven body of rotation so that continuously other areas of the anode are exposed to the impacting electron beam.
  • a cooling means distributor was arranged within the rotatable anode. This cooling means distributor was so arranged within the anode that the driven anode rotated about the stationary cooling means distributor.
  • FIG. 1 represents a longitudinal section through an x-ray tube according to the invention while the radiation protective mantle has been removed.
  • FIG. 2 illustrates on a larger scale than that of FIG. 1 a top view and cross section vertical to the axis through the rotatable anode of the x-ray tube of FIG. 1.
  • FIG. 3 is a side view and a cross section taken parallel to the axis through the rotatable anode of the x-ray tube of FIG. 1.
  • the x-ray tube according to the invention is characterized primarily in that the rotatable anode 5 comprises a ring which has a U-shaped cross sectional profile and has an intermediate web which forms the mantle surface 3 of the rotatable anode 5 and comprises lateral surfaces which are detachably connected to the lateral webs of the U-shaped ring while for purposes of effecting a seal between the webs of the U-shaped ring and the lateral surfaces of the anode, O-rings are provided.
  • the ring-shaped part of the wall of the anode consists of highly pure vacuum cast electrolyte copper or of another suitable highly pure vacuum cast metal.
  • an advantageous design of the x-ray tube according to the invention consists in that the axial symmetrically designed distributor body is composed of a plurality of parts which are connected to a rotation symmetric body that is arranged coaxially with regard to the axis of the rotatable anode. These parts are at their radial surface and/or two surfaces guided parallel to each other and equally spaced from the axis of the distributor body while contacting each other.
  • the lateral surfaces of said parts have from the inside to the outer circumference such an inclination that the intermediate space formed by the lateral surfaces of the distributor body and the inner surfaces of the lateral walls of the rotatable anode decreases from the inside to the outside in such a way that when considering that the outer circumference increases in radial direction, a uniform speed profile forms of the cooling means which flows in and out in the vicinity of the axis.
  • the distributor body On the lateral surfaces of the distributor body there are arranged radially extending ribs while the outer circumference of the distributor body is formed by one or more inclined planes which are arranged between each two ribs and ascend in the direction of rotation of the rotatable anode in such a way that at those areas where the distributor body has its greatest dimensions, only a very slight distance from the inner surface of the cylindrical mantle of the rotatable anode exists.
  • the electron beam emitted by the cathode 2 through the passage provided in the housing 1 impacts in a focal spot upon the mantle surface 3 of a rotatable anode 5 arranged at one end of a hollow shaft 4.
  • the rotatable anode preferably comprises highly pure vacuum cast electrolyte copper. However, if the need should occur, the rotatable anode also may consist of a material of another suitable highly pure vacuum cast material.
  • the driven hollow shaft is driven by means of the drive 6.
  • the cooling water inflow 7 and the cooling water return flow 8 for cooling the rotatable anode are arranged within the hollow shaft 4.
  • the rotatable anode is formed by a ring of U-shaped cross sectional profile and by two lateral surfaces arranged perpendicularly with regard to the axis of the hollow shaft, one of said lateral surfaces being connected to the hollow shaft 4.
  • the ring is detachably connected to the detachable surfaces of the rotatable anode 5 for instance by screw connections.
  • the intermediate web of the ring simultaneously forms the mantle surface of the rotatable anode 5.
  • O-rings 9 are provided between the lateral webs of the ring and the lateral surfaces of the anode 5.
  • the distributor body is axially symmetrically designed and is composed of a plurality of parts 11 which engage each other at their radial surfaces.
  • one of the parts 12 which form the distributor body as well as the parts 11 adjacent to the part 12 comprise two surfaces which are parallely guided toward eachother and are equally spaced from the axis. of the distributing body.
  • the parts 11 of the distributor body and the parts 12 are, as will be evident from the drawing, detachably connected to a rotation symmetric body for instance by means of screw connections, said rotation symmetric body being coaxial with regard to the axis of the rotatable anode 5.
  • the lateral surfaces of the parts 11 and of the part 12 of the distributor body are so inclined that the intermediate space defined by the outer surfaces of the distributor body and the inner surface of the lateral walls of the rotatable anode 5 decreases from the inside toward the outside in such a way that the cooling liquid which in the vicinity of the axis flows in and out and is intended for the rotatable anode 5 has a uniform speed profile when considering the outer circumference of the distributor body which outer circumference increases in radial direction.
  • the lateral surfaces of the distributor body are furthermore provided 'with radially extending fins 13.
  • the outer circumference of the distributor body is, as evident from the drawing, formed by inclined planes 14 provided between each two fins 13.
  • the inclined planes l4 ascend in the direction of rotation of the rotatable anode.
  • the spacing of the inner surface of the cylindrical mantle 3 of the rotatable anode 5 from the outer curcumference of the distributor body is rather small. Due to the fact that the intermediate space between the inner surface of the mantle 3 of the rotatable anode 5 and that surface of the distributor body which faces said inner surface of the mantle 3 is particularly small at those areas where the distributor body in radial direction has the greatest dimensions, it will be appreciated in view of the thus obtained turbulent flow, that a very effective cooling of that part of the rotatable anode 5 will be obtained which is most strongly exposed to thermal stresses. This brings about a considerable increase in the degree of efficiency of the x-ray tube according to the invention.
  • An X-ray tube which includes: a high vacuum chamber connectable to a vacuum pump, a rotationsymmetric rotatable anode having a hollow space therein and being rotatably arranged in said high vacuum chamber, a rotatable hollow shaft disengageably connected to said anote for rotating the same, conduit means associatedwith said hollow shaft and communicating with the hollow space of said anode for respectively conveying cooling fluid to and from said anode, a rotatable distributing member arranged within said hollow space of said anode and coaxially therewith and being rotatably connected to said anode including lateral wall means and ring means of a U-shaped cross section the central portion of which forms the peripheral mantle surface of said anode and the legs of which have said lateral wall means detachably connected thereto, sealing means interposed between said legs and said lateral wall means, and a cathode arranged relative to said anode so that said mantle surface of said anode is within the region of the electron beams emitted by said
  • said distributing member includes a rotation-symmetric body and a plurality of elements connected to said rotation symmetric body and having lateral surfaces inclined from their inner circumference to their outer circumference in such a manner that the distance between the lateral surfaces of said distributing member and the inner surfaces of the lateral walls of said rotatable anode decreases in radial outward direction of said distributing member in such a way that when considering the radially increasing outer circumference a substantially uniform speed profile of the cooling fluid flowing in and out of said anode in the vicinity of its axis of rotation is obtained, and fin means arranged on the outer lateral surfaces of said distributing member, the outer circumference of said distributing member being formed by at least one inclined edge each between each two adjacent fin means with each of said edges ascending in the direction or rotation of said anode in such a way that at the areas of greatest dimensions of said distributing member the latter is only slightly spaced from the inner mantle surface of said anode.
  • An X-ray tube according to claim 3 in which said elements are flat surface parts with radially extending surfaces engaging each other.
  • each of said elements has two surfaces which are parallel to each other at the same distance from the axis of rotation of the distributing member, and in which said two surfaces of each of said elements engage corresponding outer peripheral wall of said rotatable anode.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Mounting Of Bearings Or Others (AREA)
US444256A 1973-02-21 1974-02-20 X-ray tube Expired - Lifetime US3870916A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732308509 DE2308509B2 (de) 1973-02-21 1973-02-21 Rotationssymmetrische roentgenroehrendrehanode

Publications (1)

Publication Number Publication Date
US3870916A true US3870916A (en) 1975-03-11

Family

ID=5872620

Family Applications (1)

Application Number Title Priority Date Filing Date
US444256A Expired - Lifetime US3870916A (en) 1973-02-21 1974-02-20 X-ray tube

Country Status (5)

Country Link
US (1) US3870916A (en, 2012)
JP (1) JPS5041488A (en, 2012)
DE (1) DE2308509B2 (en, 2012)
FR (1) FR2218650B1 (en, 2012)
GB (1) GB1457906A (en, 2012)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4130773A (en) * 1977-03-18 1978-12-19 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung X-ray tube with liquid-cooled rotary anode
US4130772A (en) * 1977-03-18 1978-12-19 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Liquid-cooled rotary anode for an X-ray tube
FR2441993A1 (fr) * 1978-11-18 1980-06-13 Kernforschungsanlage Juelich Cible pour sources de neutrons de spallation
EP0020873A1 (en) * 1979-06-29 1981-01-07 International Business Machines Corporation Target disc for ion implantation into semiconductors and method for cooling such a disc
WO1983002850A1 (en) * 1982-02-16 1983-08-18 Stephen Whitaker Liquid cooled anode x-ray tubes
US4405876A (en) * 1981-04-02 1983-09-20 Iversen Arthur H Liquid cooled anode x-ray tubes
US4622687A (en) * 1981-04-02 1986-11-11 Arthur H. Iversen Liquid cooled anode x-ray tubes
US4625324A (en) * 1983-09-19 1986-11-25 Technicare Corporation High vacuum rotating anode x-ray tube
US4734927A (en) * 1984-12-21 1988-03-29 Thomson-Cgr Equipped force-convection housing unit for a rotating-anode X-ray tube
US5018181A (en) * 1987-06-02 1991-05-21 Coriolis Corporation Liquid cooled rotating anodes
US6778635B1 (en) 2002-01-10 2004-08-17 Varian Medical Systems, Inc. X-ray tube cooling system
US20170290135A1 (en) * 2016-04-01 2017-10-05 Toshiba Electron Tubes & Devices Co., Ltd. X-ray tube assembly
US20180019093A1 (en) * 2013-03-15 2018-01-18 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2913336C2 (de) * 1979-04-03 1983-09-01 Siemens AG, 1000 Berlin und 8000 München Röntgenröhren-Drehanode

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3546511A (en) * 1967-07-31 1970-12-08 Rigaku Denki Co Ltd Cooling system for a rotating anode of an x-ray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3546511A (en) * 1967-07-31 1970-12-08 Rigaku Denki Co Ltd Cooling system for a rotating anode of an x-ray tube

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4130773A (en) * 1977-03-18 1978-12-19 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung X-ray tube with liquid-cooled rotary anode
US4130772A (en) * 1977-03-18 1978-12-19 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Liquid-cooled rotary anode for an X-ray tube
FR2441993A1 (fr) * 1978-11-18 1980-06-13 Kernforschungsanlage Juelich Cible pour sources de neutrons de spallation
US4582667A (en) * 1978-11-18 1986-04-15 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Target arrangement for spallation-neutron-sources
EP0020873A1 (en) * 1979-06-29 1981-01-07 International Business Machines Corporation Target disc for ion implantation into semiconductors and method for cooling such a disc
US4405876A (en) * 1981-04-02 1983-09-20 Iversen Arthur H Liquid cooled anode x-ray tubes
US4622687A (en) * 1981-04-02 1986-11-11 Arthur H. Iversen Liquid cooled anode x-ray tubes
WO1983002850A1 (en) * 1982-02-16 1983-08-18 Stephen Whitaker Liquid cooled anode x-ray tubes
US4625324A (en) * 1983-09-19 1986-11-25 Technicare Corporation High vacuum rotating anode x-ray tube
US4734927A (en) * 1984-12-21 1988-03-29 Thomson-Cgr Equipped force-convection housing unit for a rotating-anode X-ray tube
US5018181A (en) * 1987-06-02 1991-05-21 Coriolis Corporation Liquid cooled rotating anodes
US6778635B1 (en) 2002-01-10 2004-08-17 Varian Medical Systems, Inc. X-ray tube cooling system
US20180019093A1 (en) * 2013-03-15 2018-01-18 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US9966217B2 (en) 2013-03-15 2018-05-08 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10008357B2 (en) * 2013-03-15 2018-06-26 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10020157B2 (en) 2013-03-15 2018-07-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10096446B2 (en) 2013-03-15 2018-10-09 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10102997B2 (en) 2013-03-15 2018-10-16 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US20170290135A1 (en) * 2016-04-01 2017-10-05 Toshiba Electron Tubes & Devices Co., Ltd. X-ray tube assembly
US10529528B2 (en) * 2016-04-01 2020-01-07 Canon Electron Tubes & Devices Co., Ltd. X-ray tube assembly including a first cylindrical pipe, a second cylindrical pipe, and an elastic member

Also Published As

Publication number Publication date
JPS5041488A (en, 2012) 1975-04-15
FR2218650A1 (en, 2012) 1974-09-13
DE2308509B2 (de) 1976-09-09
GB1457906A (en) 1976-12-08
FR2218650B1 (en, 2012) 1978-02-24
DE2308509A1 (de) 1974-09-05

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