US3836473A - Etching solution - Google Patents
Etching solution Download PDFInfo
- Publication number
- US3836473A US3836473A US00288309A US28830972A US3836473A US 3836473 A US3836473 A US 3836473A US 00288309 A US00288309 A US 00288309A US 28830972 A US28830972 A US 28830972A US 3836473 A US3836473 A US 3836473A
- Authority
- US
- United States
- Prior art keywords
- etching solution
- solution
- channelling
- etching
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 title abstract description 67
- 229910045601 alloy Inorganic materials 0.000 abstract description 37
- 239000000956 alloy Substances 0.000 abstract description 37
- 239000002245 particle Substances 0.000 abstract description 26
- 230000000694 effects Effects 0.000 abstract description 7
- 239000006185 dispersion Substances 0.000 abstract description 5
- 239000000243 solution Substances 0.000 description 81
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 46
- 229910052759 nickel Inorganic materials 0.000 description 21
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 15
- 239000003610 charcoal Substances 0.000 description 14
- 239000002023 wood Substances 0.000 description 14
- 239000000203 mixture Substances 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical class Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical class O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
- -1 borides Chemical class 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 235000011167 hydrochloric acid Nutrition 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 4
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000003929 acidic solution Substances 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 150000004760 silicates Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000005995 Aluminium silicate Substances 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 235000012211 aluminium silicate Nutrition 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002999 depolarising effect Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
Definitions
- the invention relates. to etching solutions and more particularly to etching solutions for etching surfaces which are partially masked so as to achieve localised etching.
- One of the problems encountered in the etching of partially-masked surfaces is;the formation of a fillet radius at the boundary between the masked and exposed areas 9f .thesurface.
- the fillet radius extends-under the maskant to a distance approximately equal to the depth of etch.
- Channelling is characterised by an area of increased attack in the immediate vicinity of the fillet radii, thus resulting in localised areas of stress concentration which in turn may affect the fatigue properties of the etched article.
- an etching solution comprises a dispersion of finely divided particles, said particles being'inert to'said etching solution and to the surface'to be'etched.
- etching solution contains from 2 to 40 grams per litre of said finely divided particles.
- aid finelyldivided particles may-be selected from the p ice group comprising silicon, silicates, metal oxides, metal carbides, borides, nitrides and carbon.
- Said etching solution may comprise an acidic solution of metal ions.
- Said etching solution may be based on a mixture of hydrochloric and nitric acids and metal ions present in the following concentrations:
- a method of etching a partially masked surface comprises exposing the surface to an etching solution comprising a dispersion of finely divided particles, said particles being inert to said etching solution and to the surface to be etched.
- Channelling appears to be related to the grain size of the articles to be etched, this being particularly true in the case of articles made of nickel and iron based alloys.
- the grain boundaries of alloys such as these are composed of minor alloy constituents which migrate to the grain boundaries during heat treatment. These minor constituents tend to be more electro-positive the remainder of the alloy. Consequently when these alloys are exposed to acidic solutions, their grain boundaries are preferentially attacked, resulting in the localised evolution of hydrogen.
- grain size varies from alloy to alloy and thus when considering a unit surface area, some alloys possess a larger surface area of grain bound aries than do others.
- the surface area of the grain boundaries is comparatively high and consequently the hydrogen ions from the etching solution are able to easily depolarise and evolve as hydrogen gas.
- the hydrogen ions however, have more difliculty in depolarising on alloys having larger grains due to the reduced area of the grain boundaries. As a result of the decreased rate of hydrogen evolution, large hydrogen bubbles form in the vicinity of the grain boundaries.
- the finely divided particles may be of any material which is inert to the etching solution and the surface to be etched. Suitable materials include silicon, silicates, metal oxides, metal carbides, borides, nitrides and carbon. These examples illustrate the type of materials suitable and do not constitute a complete list of materials capable of producing the desired effect.
- Iron and nickel based alloys are alloys of large grain size which exhibit channelling when partly masked and etched.
- a typical solution for etching partly masked articles made of nickel and iron based alloys without channelling is as follows:
- Example 1 An aqueous etching solution was prepared by dissolving an alloy of iron, chromium and nickel in a mixture of hydrochloric and nitric acids and water to give a solution of the following composition:
- Percent Mo 6 Ti 2 the remainder being nickel plus impurities was partially masked and etched in the aforementioned etching solution fora period of one hour Whilst maintaining the temperature of the solution at 45 C. After removal from the solution the sample was examined and was found to have severe channelling in the region of the maskant/exposed surface interface.
- a further etching solution was prepared as above and to it was added finely divided wood charcoal such that the concentration of the wood charcoal in the etching solution was five grams per litre.
- the wood charcoal comprised particles of the following sizes:
- Example 2 Concentration H+ 4.2 Normal. NO 3.1 Normal. Fe g./l.
- Example 2 A sample of the same nickel based alloy as is mentioned in Example 1 was partly masked and exposed to the afore: mentioned etching solution for a period of one hour whilst maintaining the temperature of the solution at 45 C. After removal from the solution, the sample was examined and found to have severe channelling in the region of the maskant/ exposed surface interface.
- a further etching solution was prepared as above and to it was added finely divided Kaolin such that the concentration of Kaolin in the etching solution was 40 grams per litre.
- Example 3 A partly masked sample of the nickel based alloy described in Example 1 was etched in this solution under the same condition of temperature and time as in Example! with no visible channelling.
- Example 4 An aqueous etching solution was prepared as described in Example 2 and to it was added finely divided aluminium oxide such that the concentrationof aluminiu oxide in the solution was 15 grams per litre.
- Example 1 A partly masked sample of the nickel based alloyzdee scribed in Example 1 was etched in this solution under the same conditions of time and temperature as described in Example 1 with no visible channelling.
- Example 5 An aqueous etching solution was prepared as described in Example 2 and to it was added finely divided wood charcoal such that the concentration of wood charcoal in the solution was 10 grams per litre. The woodcharc'oal was of a similar particle size range asthat'deScribed in Example 1. V j r A partly masked sample of the nickel based alloyldescribed in Example 1 was etched in this solution under the same conditions of time and temperature as in Example l with no visible channelling.
- Example 6 An aqueousetching solution was prepared by dissolving an al,ly 0f;iron, nickel and chrominum in a mixture of nitric acid and hydrochloric acids. The free acid .and nitrate concentrations in the solution were then adjusted to the following levels by further additions of nitric and hydrochloric acids:
- Example 1 A partly masked sample of the nickel based alloy described in Example 1 was etched in the aforementioned solution under the same conditions of time and temperature as in Example 1. After removal from the solution, the sample was examined and found to have severe channelling.
- a further etching solution was prepared as above and to it was added finely divided wood charcoal such that the concentration of the wood charcoal in the etching solution was 10 grams per litre.
- the wood charcoal was of a similar particle size range as that described in Example 1.
- Example 7 An aqueous etching solution was prepared by dissolving ferric chloride and ferric nitrate in a mixture of nitric and hydrochloric acids and water to give a solution of the following composition:
- Example 1 A partly masked sample of the nickel based alloy described in Example 1 was etched in this solution under the same conditions of time and temperature as described in Example 1. Upon removal from the etching solution the sample was examined and found to have severe channelling.”
- a further etching solution was prepared as above and to it was added finely divided particles of aluminium oxide and graphite such that the concentration of the aluminium oxide was grams per litre and the concentration of the graphite was 5 grams per litre in the etching solution.
- Example 1 A partly masked sample of the nickel based alloy described in Example 1 was etched in this solution under the same conditions of temperature and time as in Example 1 with no visible channelling.
- Example 8 An aqueous etching solution was prepared by dissolving a mixture of ferric chloride and ferric nitrate in a mixture of nitric and hydrochloric acids and water to give A partly masked nickel based alloy of the following composition:
- the remainder being nickel plus impurities was etched in this solution under the same conditions of temperature and time as described in Example 1. Upon removal from the etching solution, the sample was examined and found to have severe channelling.
- a further etching solution was prepared as above and to it was added finely divided wood charcoal such that the concentration of the wood charcoal in the etching solution was 15 grams per litre.
- the wood charcoal was of a similar particle size range as that described in Example 1.
- a further partly masked sample of the aforementioned nickel alloy was etched in this solution under the same conditions of time and temperature as in Example 1 with no visible channelling.
- Example 9 Concentration H+ 4 Normal. NO 2 Normal. Fe 150 g./l.
- a further etching solution was prepared as above and to it was added finely divided wood charcoal such that the concentration of wood charcoal in the etching solution was 15 grams per litre.
- the wood charcoal was of a similar particle size range as that described in Example 1.
- a further partly masked nickel based alloy sample was etched in this solution under the same conditions of temperature and time as Example 1 with no visible channelling.
- An etching solution comprising a dispersion of finely divided particles less than p. in diameter and selected from the group consisting of silicon, silicates, metal oxides,
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB4386571 | 1971-09-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3836473A true US3836473A (en) | 1974-09-17 |
Family
ID=10430670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00288309A Expired - Lifetime US3836473A (en) | 1971-09-21 | 1972-09-12 | Etching solution |
Country Status (6)
Country | Link |
---|---|
US (1) | US3836473A (enrdf_load_stackoverflow) |
JP (1) | JPS4838845A (enrdf_load_stackoverflow) |
DE (1) | DE2244958A1 (enrdf_load_stackoverflow) |
FR (1) | FR2153379B1 (enrdf_load_stackoverflow) |
GB (1) | GB1353960A (enrdf_load_stackoverflow) |
IT (1) | IT967463B (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4244833A (en) * | 1979-11-15 | 1981-01-13 | Oxy Metal Industries Corporation | Composition and process for chemically stripping metallic deposits |
EP0223920A3 (en) * | 1985-10-28 | 1987-09-23 | International Business Machines Corporation | Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
US20080149885A1 (en) * | 2006-12-22 | 2008-06-26 | Shenzhen Futaihong Precision Industry Co.,Ltd. | Etchant for etching workpieces made of aluminum and aluminum alloys |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2850564C2 (de) * | 1978-11-22 | 1982-12-23 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und Vorrichtung zum Regenerieren einer Kupfer(II)-Chlorid und/oder Eisen(III)-Chlorid enthaltenden Ätzlösung in einer Elektrolysezelle |
DK395481A (da) * | 1980-10-01 | 1982-04-02 | United Technologies Corp | Fremgangsmaade og middel til bearbejdelse af emner af en nikkel-aluminium legering |
CA1221896A (en) * | 1983-06-06 | 1987-05-19 | Norvell J. Nelson | Aqueous process for etching copper and other metals |
-
1971
- 1971-09-21 GB GB4386571A patent/GB1353960A/en not_active Expired
-
1972
- 1972-09-12 US US00288309A patent/US3836473A/en not_active Expired - Lifetime
- 1972-09-13 DE DE2244958A patent/DE2244958A1/de active Pending
- 1972-09-14 IT IT29198/72A patent/IT967463B/it active
- 1972-09-20 JP JP47094431A patent/JPS4838845A/ja active Pending
- 1972-09-21 FR FR7233474A patent/FR2153379B1/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4244833A (en) * | 1979-11-15 | 1981-01-13 | Oxy Metal Industries Corporation | Composition and process for chemically stripping metallic deposits |
EP0223920A3 (en) * | 1985-10-28 | 1987-09-23 | International Business Machines Corporation | Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
US20080149885A1 (en) * | 2006-12-22 | 2008-06-26 | Shenzhen Futaihong Precision Industry Co.,Ltd. | Etchant for etching workpieces made of aluminum and aluminum alloys |
Also Published As
Publication number | Publication date |
---|---|
IT967463B (it) | 1974-02-28 |
GB1353960A (en) | 1974-05-22 |
JPS4838845A (enrdf_load_stackoverflow) | 1973-06-07 |
FR2153379B1 (enrdf_load_stackoverflow) | 1976-05-21 |
DE2244958A1 (de) | 1973-04-05 |
FR2153379A1 (enrdf_load_stackoverflow) | 1973-05-04 |
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