US3780334A - Vacuum tube for generating a wide beam of fast electrons - Google Patents

Vacuum tube for generating a wide beam of fast electrons Download PDF

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Publication number
US3780334A
US3780334A US00258440A US3780334DA US3780334A US 3780334 A US3780334 A US 3780334A US 00258440 A US00258440 A US 00258440A US 3780334D A US3780334D A US 3780334DA US 3780334 A US3780334 A US 3780334A
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Prior art keywords
enclosure
vacuum tube
elongated
control electrode
electron
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Expired - Lifetime
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US00258440A
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English (en)
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H Leboutet
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Thales SA
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Thomson CSF SA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming

Definitions

  • the acceleration energy of the electrons may not be of critical importance for applications of this kind, since the thickness of the material being processed is small, nevertheless sufficient energy is re quired for the electrons to exit from the window of the evacuated enclosure where they are produced, that is tosay for them to be able to penetrate some tenths of a millimetre of material and a thin gas film.
  • the acceleration of the particles should be at least 400 kV if they are to reach the target with sufficient energy.
  • the wide electron beam generator tube which forms the subject of the present invention, in meeting these requirements, provides a solution to the problem set out hereinbefore.
  • a generator tube for producing a wide beam of fast electrons comprises a vacuumtight enclosure and in said enclosure, at least one elongated cathode for emitting an electron beam throughout its length, a control electrode for controlling the form and the homogeneity of said beam, said control electrode comprising an elongated gap along which said cathode extends and through which said beam propagates said control electrode comprising a plurality of electrode elements, electrically insulated from one another means for respectively connecting said elements to a voltage supply means for accelerating said beam said enclosure comprising an elongated electron-transparent window for the propagation of said beam outside said enclosure.
  • FIGS. 1 and 2 respectively illustrate, in longitudinal and transversal sectional views, a vacuum tube in accordancewith the invention
  • FIG. 3 illustrates in detail the attachment system of thewire cathode
  • FIG. 4 illustrates an elongated cathode provided with electrodes for focussing and controlling the uniformity of the beam, in accordance with the invention
  • FIG. 5 illustrates in detail the control electrode
  • FIG. 6 illustrates, in section, the window of the evacuated enclosure, in accordance with the invention.
  • FIG. I an evacuated enclosure 1 of cylindrical form has been illustrated, containing a cathode made up of two tungsten filaments 2 and 3 (only the filament 2 being visible in FIG. 1).
  • These two filaments are arranged one beside the other, parallel to the axis of the tube and are attached on the one hand, to the base 4 of the enclosure 1, through which they pass, an insulating material 5 being provided to electrically insulate each filament from the metal base 4 of the enclosure 1, and, on the other hand, to a bracket 7 of insulating material, movable about a shaft 8.
  • Electrodes 12, 13, 14 which are concentric and insulated from one another.
  • the electrode 12 called control electrode is shown in FIGS. 4 and 5.
  • This electrode 12 controls the form and the homogeneity of the electron beam.
  • It is constituted withseveral electrode elements which are substantially cylindrical similar and coaxial metal sleeves 15, 16, 17 and 18 arranged in succession and electrically insulated from one another by means insulating rings r. These sleeves and rings are provided with openings m,n, running along the cathode.
  • a voltage is respectively applied to. each of these sleeves 15, 16, 17 and 18 by means of connections 19, 20, 21 and 22 these voltages are separately adjustable, enabling accurate control of the focussing and uniformity of the beam to be achieved.
  • Two accelerator anodes l3 and 14 of cylindrical form, concentric with the control electrode 12 present a longitudinal opening, opposite the wire cathodes 2 and 3, for the passage of the beam. These anodes are respectively connected to two separately controllable voltage sources by means of conductors 23 and 24, as shown in FIG. 1.
  • this kind of generator comprises a cathode made up of two parallel tungsten wires 50 cm long, this cathode operating in the saturation condition (due to the space charge), so that the disuniformities in the cathode emission are smoothed out the control electrode 12, made up, for example, of. four sleeves each 8 cm wide separated from one an other by 5 mm wide rings r of insulating material, enable fine correction requiring a voltage of between one and two percent of the total voltage, namely 4 to 8 kV, to be carried out.
  • This kind of system requiring four control voltages which are isolate-d from one another, can utilise a high-voltage source of the type employing cascades of transformers with a single primary.
  • the window can be made of a very thin rectangular strip, of thickness substantially equal to 0.1 mm if made of aluminum 0.05 inches if made of stainless steel 0.05 inches if made of titanium 0.1 inches if made of oxyde of beryllium (or glucine).
  • Its length can range between 0.5 and 1 metre and its width is substantially 3 cm (the beam in this example) having a width of about 2 cm).
  • This window must be able to dissipate about 20 to 40 watts per cm But it should be pointed out that these wide windows are more brittle than the usual windows of linear accelerators where the power density, which moreover can be higher at the window is furnished by a smalldiameter cylindrical beam, allowing the heat to be transmitted to the periphery of the plate, whilst, in the generator in accordance with the invention, the window, which is wide, only effectively transmits the heat to two sides.
  • This kind of window if cooled solely by conduction, does not enable a current density in excess of 50 [.LA/Cl'fl to be used.
  • FIG. 6 illustrates, in transverse section, a window of the kind used in the tube.
  • This window is constituted by a first thin strip 25, of 0.03 mm thick, for example, which is electron-transparent and is 50 cm long and 3 cm wide.
  • This first strip 25 is welded by electron bombardment to a copper base 26 which is brazed to a frame 27 of stainless steel.
  • This frame 27 is is turn attached to a metal block 29 of rectangular form by argon arc welding 28, the dimensions of said block 29 being larger than those of the window.
  • the metal block 29 is fixed to the evacuated enclosure 1 by means of a brazing 30.
  • a cut-out 31 machined in the block 29 enables the window assembly to withstand the distortions due to the difference of the pressure on both sides of said window.
  • a second strip 32 which is electron-transparent, is arranged.
  • This second strip 32 is an aluminum strip between and a thick. It is arranged between two metal components 33 and 34 (made of stainless steel for example) and held in a vacuumtight fashion between thesetwo components by means of a set of screws 35. These strips and 32 are separated from each other by a space s.
  • the metal component 34 is itself attached to the block 29 by means of screws 36.
  • a cooling system not shown in the figure, enables an inert purified cooling gas (nitrogen or argon for example) to be circulated through the space s defined between the first strip 25 and the second strip 32.
  • the vacuum-tight closure providedwith this window is robustand enables the enclosure to be opened repeatedly.
  • the titanium first strip can be replaced, of course, by a beryllium oxide strip, a material well known for its excellent thermal conductivity however, a large-sized window is difficult to produce in this material.
  • a vacuum tube for generating a wide beam for electrons comprising a vacuumtight enclosure in said enclosure at least one elongated cathode for emitting an electron beam throughout its length, a control electrode for controlling the form and the homogeneity of said beam, said electrode comprising an elongated gap along which said cathode extends and through which said beam propagates said control electrode comprising a plurality of electrode elements electrically insulated from one another means for respectively connecting said elements to a voltage supply means for accelerating, said beam said vacuum-tight enclosure comprising an elongated electron-transparent window for the propagation of said beam outside said enclosure.
  • a vacuum tube as claimed in claim 1, wherein said electron-transparent window comprises thin first and second strips, supporting block for supporting said strips, said block being integrally connected with said vacuumtight enclosure said strips being separated from each other thus defining a space said cooling system comprising means for circulating an inert purified gas within said space.
  • a vacuum tube for generating a wide beam for electrons comprising a vacuumtight enclosure in said enclosure at least one elongated cathode for emitting an electron beam throught its length, a control electrode for controlling the form and the homogeneity of said beam, said electrode comprising an elongated gap along which said cathode extends and through which said beam propagates said control electrode comprising a plurality of electrode elements electrically insulated from one another means for respectively connecting said elements to a voltage supply means for accelerating said beam said vacuum-tight enclosure comprising an elongated electron transparent window for the propagation of said beam outside said enclosure said control electrode elements being substantially cylindrical similar and coaxial metal sleeves provided with a longitudinal opening, said openings forming said gap said sleeves being insulated from each other by means of insulating rings, coaxial with and having an opening substantially coextensive with said sleeve openings.

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  • Electron Sources, Ion Sources (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
US00258440A 1971-06-09 1972-05-31 Vacuum tube for generating a wide beam of fast electrons Expired - Lifetime US3780334A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7120938A FR2140840A5 (enrdf_load_stackoverflow) 1971-06-09 1971-06-09

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US3780334A true US3780334A (en) 1973-12-18

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US (1) US3780334A (enrdf_load_stackoverflow)
JP (1) JPS4829367A (enrdf_load_stackoverflow)
DE (1) DE2228294A1 (enrdf_load_stackoverflow)
FR (1) FR2140840A5 (enrdf_load_stackoverflow)
NL (1) NL7207708A (enrdf_load_stackoverflow)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863163A (en) * 1973-04-20 1975-01-28 Sherman R Farrell Broad beam electron gun
US4079328A (en) * 1976-09-21 1978-03-14 Radiation Dynamics, Inc. Area beam electron accelerator having plural discrete cathodes
US4100450A (en) * 1977-02-17 1978-07-11 Energy Sciences Inc. Method of and apparatus for generating longitudinal strips of energetic electron beams
FR2428913A1 (fr) * 1978-06-15 1980-01-11 Energy Sciences Inc Procede permettant l'obtention de faisceaux electroniques energetiques sous forme de bandes longitudinales et moyens pour la mise en oeuvre de ce procede
US4362965A (en) * 1980-12-29 1982-12-07 The United States Of America As Represented By The Secretary Of The Army Composite/laminated window for electron-beam guns
US4446373A (en) * 1981-01-12 1984-05-01 Sony Corporation Process and apparatus for converged fine line electron beam treatment objects
US4559102A (en) * 1983-05-09 1985-12-17 Sony Corporation Method for recrystallizing a polycrystalline, amorphous or small grain material
US4592799A (en) * 1983-05-09 1986-06-03 Sony Corporation Method of recrystallizing a polycrystalline, amorphous or small grain material
US4703256A (en) * 1983-05-09 1987-10-27 Sony Corporation Faraday cups
DE19518717A1 (de) * 1994-09-16 1996-11-28 Messer Griesheim Schweistechni Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen
US20040187243A1 (en) * 1999-09-01 2004-09-30 Diethard Trenz Brush
US20050092929A1 (en) * 2003-07-08 2005-05-05 Schneiker Conrad W. Integrated sub-nanometer-scale electron beam systems
US7148613B2 (en) 2004-04-13 2006-12-12 Valence Corporation Source for energetic electrons
US7656236B2 (en) 2007-05-15 2010-02-02 Teledyne Wireless, Llc Noise canceling technique for frequency synthesizer
US8179045B2 (en) 2008-04-22 2012-05-15 Teledyne Wireless, Llc Slow wave structure having offset projections comprised of a metal-dielectric composite stack
US20140091702A1 (en) * 2011-07-04 2014-04-03 Tetra Laval Holdings & Finance S.A. Cathode housing suspension of an electron beam device
US9202660B2 (en) 2013-03-13 2015-12-01 Teledyne Wireless, Llc Asymmetrical slow wave structures to eliminate backward wave oscillations in wideband traveling wave tubes
US20160111244A1 (en) * 2013-05-31 2016-04-21 Christophe Constancias Electrostatic lens having a dielectric semiconducting membrane

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117183A (en) * 1974-07-23 1978-09-26 United States Gypsum Company Starch-coated paper and gypsum wallboard prepared therewith
US4382186A (en) * 1981-01-12 1983-05-03 Energy Sciences Inc. Process and apparatus for converged fine line electron beam treatment of objects
FR2574978B1 (fr) * 1984-12-14 1987-01-16 Commissariat Energie Atomique Dispositif d'irradiation de matiere par un faisceau electronique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1696103A (en) * 1921-08-26 1928-12-18 Seibt Georg Electric discharge tube
US3105916A (en) * 1960-09-08 1963-10-01 High Voltage Engineering Corp Radiation beam window
US3375387A (en) * 1967-01-24 1968-03-26 Commerce Usa Fluid cooled multi-foil radiation beam window for high power beam tubes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1696103A (en) * 1921-08-26 1928-12-18 Seibt Georg Electric discharge tube
US3105916A (en) * 1960-09-08 1963-10-01 High Voltage Engineering Corp Radiation beam window
US3375387A (en) * 1967-01-24 1968-03-26 Commerce Usa Fluid cooled multi-foil radiation beam window for high power beam tubes

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863163A (en) * 1973-04-20 1975-01-28 Sherman R Farrell Broad beam electron gun
US4079328A (en) * 1976-09-21 1978-03-14 Radiation Dynamics, Inc. Area beam electron accelerator having plural discrete cathodes
US4100450A (en) * 1977-02-17 1978-07-11 Energy Sciences Inc. Method of and apparatus for generating longitudinal strips of energetic electron beams
FR2428913A1 (fr) * 1978-06-15 1980-01-11 Energy Sciences Inc Procede permettant l'obtention de faisceaux electroniques energetiques sous forme de bandes longitudinales et moyens pour la mise en oeuvre de ce procede
US4362965A (en) * 1980-12-29 1982-12-07 The United States Of America As Represented By The Secretary Of The Army Composite/laminated window for electron-beam guns
US4446373A (en) * 1981-01-12 1984-05-01 Sony Corporation Process and apparatus for converged fine line electron beam treatment objects
US4559102A (en) * 1983-05-09 1985-12-17 Sony Corporation Method for recrystallizing a polycrystalline, amorphous or small grain material
US4592799A (en) * 1983-05-09 1986-06-03 Sony Corporation Method of recrystallizing a polycrystalline, amorphous or small grain material
US4703256A (en) * 1983-05-09 1987-10-27 Sony Corporation Faraday cups
DE19518717C2 (de) * 1994-09-16 2001-01-11 Igm Robotersysteme Ag Wiener N Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen
DE19518717A1 (de) * 1994-09-16 1996-11-28 Messer Griesheim Schweistechni Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen
US20040187243A1 (en) * 1999-09-01 2004-09-30 Diethard Trenz Brush
US20050092929A1 (en) * 2003-07-08 2005-05-05 Schneiker Conrad W. Integrated sub-nanometer-scale electron beam systems
US7279686B2 (en) 2003-07-08 2007-10-09 Biomed Solutions, Llc Integrated sub-nanometer-scale electron beam systems
US7148613B2 (en) 2004-04-13 2006-12-12 Valence Corporation Source for energetic electrons
US7656236B2 (en) 2007-05-15 2010-02-02 Teledyne Wireless, Llc Noise canceling technique for frequency synthesizer
US8179045B2 (en) 2008-04-22 2012-05-15 Teledyne Wireless, Llc Slow wave structure having offset projections comprised of a metal-dielectric composite stack
US20140091702A1 (en) * 2011-07-04 2014-04-03 Tetra Laval Holdings & Finance S.A. Cathode housing suspension of an electron beam device
US9142377B2 (en) * 2011-07-04 2015-09-22 Tetra Laval Holdings & Finance S.A. Cathode housing suspension of an electron beam device
US9202660B2 (en) 2013-03-13 2015-12-01 Teledyne Wireless, Llc Asymmetrical slow wave structures to eliminate backward wave oscillations in wideband traveling wave tubes
US20160111244A1 (en) * 2013-05-31 2016-04-21 Christophe Constancias Electrostatic lens having a dielectric semiconducting membrane
US9934934B2 (en) * 2013-05-31 2018-04-03 Commissariat A L'energie Atomique Et Aux Energies Alternatives Electrostatic lens having a dielectric semiconducting membrane

Also Published As

Publication number Publication date
JPS4829367A (enrdf_load_stackoverflow) 1973-04-18
FR2140840A5 (enrdf_load_stackoverflow) 1973-01-19
DE2228294A1 (de) 1972-12-14
NL7207708A (enrdf_load_stackoverflow) 1972-12-12

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