US3777209A - Non-thermionic electron emissive tube comprising a ceramic heater substrate - Google Patents
Non-thermionic electron emissive tube comprising a ceramic heater substrate Download PDFInfo
- Publication number
- US3777209A US3777209A US00254259A US3777209DA US3777209A US 3777209 A US3777209 A US 3777209A US 00254259 A US00254259 A US 00254259A US 3777209D A US3777209D A US 3777209DA US 3777209 A US3777209 A US 3777209A
- Authority
- US
- United States
- Prior art keywords
- cathode
- tube
- layer
- electron emissive
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 34
- 239000000919 ceramic Substances 0.000 title claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 13
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 239000011733 molybdenum Substances 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 229910052792 caesium Inorganic materials 0.000 claims description 5
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 4
- 230000003213 activating effect Effects 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- FHGTUGKSLIJMAV-UHFFFAOYSA-N tricesium;antimony Chemical compound [Sb].[Cs+].[Cs+].[Cs+] FHGTUGKSLIJMAV-UHFFFAOYSA-N 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229960001948 caffeine Drugs 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- RYYVLZVUVIJVGH-UHFFFAOYSA-N trimethylxanthine Natural products CN1C(=O)N(C)C(=O)C2=C1N=CN2C RYYVLZVUVIJVGH-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J40/00—Photoelectric discharge tubes not involving the ionisation of a gas
- H01J40/02—Details
- H01J40/04—Electrodes
- H01J40/06—Photo-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/08—Cathode arrangements
Definitions
- ABSTRACT A non-thermionic electron emissive tube of the type comprising an evacuated envelope, an electron emis sive cathode assembly in the envelope, and a collector anode for electrons emitted from the emissive layer.
- the cathode assembly comprises a thin ceramic substrate. On one face of the substrate is a nonthermionic cathode. On the opposite surface is a heater pattern of resistive metallizing.
- the invention relates to non-thermionic electron emissive tubes.
- Non-thermionic electron emissive tubes generally contain an electron emitting surface, or cathode which need not be heated for operation.
- the cathode commonly is a layer of semiconductor material, the surface of which is cesiated by application thereon of a workfunction-reducing layer of cesium or cesium and oxygen.
- the process for applying the work-function-reducing layer includes heating the cathode layer to a relatively high temperature, on the order of 400C to 600C, after the cathode layer has been mounted in the tube, but before the work function reducing layer is applied thereon.
- One present means for providingthe'heating is by a resistance heated filament wire situated in closeproximity to the back side of a metal substrate on which the semiconductor layer is disposed.
- a resistance heated filament wire situated in closeproximity to the back side of a metal substrate on which the semiconductor layer is disposed.
- the filament is heated,'radient energy therefrom heats the metal substrate and the cathode layer.
- Another present means for the heating is the use of a focussed external intense light source, such as a high intensity quartz lamp in conjunction with a parabolic mirror. The light is focussed through the transparent tube envelope directly onto the cathode material. Both of these approaches utilize transfer of heat by radiant energy, and result in substantial losses of heat to other structures of the tube.
- some radiant energy given off by the filament can pass by the cathode substrate as stray radiation and heat nearby dynodes so that they are damaged. Also, some of the radiant energy is reflected from the metal substrate of the cathode to other components. Similarly, the focussed light from the external light source is reflected on passing through the tube envelope, and further reflected from the cathode layer itself to other internal tube components.
- the dynodes having an antimony layer for later cesiation to cesium antimonide, are heated during the heating of the cathode, the antimony evaporates from the surface onto other portions of the tube envelope, thus degrading the quality of the tube.
- Another difficulty with present heating means is that the heating is often nonuniform. This results in nonuniformities in the characteristics of the activated cathode.
- a cathode assembly comprising a thin ceramic substrate on which a cathode 2 is disposed.
- a heater pattern of metallizing is provided on the substrate in direct thermally conducting contact with the cathode.
- the cathode is heated by thermal conduction rather than by radiation.
- the direct thermal contact provides much more efficient heat transfer between the heater and the cathode. Therefore, the heater need not be heated to temperatures so high as to result in damaging stray radiation to other tube components. Also, the heating of the cathode layer is uniform. After activation of the cathode, the heater pattern becomes a passive structure, since the non-thermionic cathode need not be heated for operation.
- FIG. 1 is a side view of a photomultiplier tube in accordance with the preferred embodiment of the invention.
- FIG. 3 is a plan view of one face of the cathode substrate of the tube of FIGS. 1 and 2.
- FIG. 4 is a plan view of the opposite face of the substrate of FIG. 3.
- a photomultiplier tube 10 shown in FIGS. 1 and 2 includes a photocathode assembly 12 in accordance with the invention.
- the tube 10 includes a glass envelope 14, a number of cesium-antimonide-coated electron multiplying dynodes 16, a number of field electrodes 18, and an anode 20 for collecting multiplied electrons which travel from one dynode 16 to another generally along the path indicated by the dashed lines 22.
- the photocathode assembly 12 is shown in more detail in FIGS. 3 and 4.
- the assembly 12 comprises a thin rectangular wafer 24 ofaluminum oxide (A1 0 about 1 cm (centimeter) wide, 3.5 cm long, and 0.5 mm thick.
- A1 0 about 1 cm (centimeter) wide, 3.5 cm long, and 0.5 mm thick.
- One surface of the wafer is provided with a rectangular pad 26 of molybdenum metallizing about 25 pm thick, which is applied by screen printing and firing a molybdenum-steatite metallizing ink commonly used for metallizing ceramics.
- a lead portion 28 of the pad 26 extends to a contact-fastening hole 30 at the base end of the wafer 24.
- a thin photocathodelayer 31 of vapor-phase-grown polycrystalline gallium arsenide phosphide between about 5pm and 30 um thick containing about percent gallium arsenide. Details of vaporphase-growth are described, for instance, in U.S. Pat. No. 3,218,205 issued 16 Nov. 1965 to Ruehrwein.
- the opposite face of the wafer 24 is provided with a zig-zag pattern of molybdenum about 25 pm thick to form a resistance heater strip 32 in contact with the wafer 24.
- a resistance heater strip 32 in contact with the wafer 24.
- These apertures 36, 38 provide heat dams to improve the uniformity of heating by minimizing end heat losses.
- the heater strip 32 is narrowed somewhat at portions 40, 42 near the heat dams 36, 38. The purpose of this is to increase the heat output from the heater in these regions to compensate for heat losses which occur at the top and bottom ends despite the heat dams.
- heating of the photocathode layer 26 is by direct thermal conduction. Since there is relatively little heat loss to other tube components such as the dynodes 16, undesirable evaporation of antimony from the dynodes 16 is avoided.
- Electrical leads 44 of high temperature spring metal are connected to the wafer 24 through the holes 30, 34 in the base of the wafer 24 after it is mounted in the tube, as shown in FIG. 1.
- the invention has utility in various types of electron emissive tubes utilizing non-thermionic cathodes, and in which it is desirable to avoid unnecessary heating of other internal components of the tube when activating the cathode.
- non-thermionic cathodes are generally cesiated.
- the cathode can be a forward-biasedjunction emitter cathode, photocathode, or secondary emitter.
- the semiconductor can be any semiconductor suitable for a cathode layer. It may be, for instance, silicon or a compound or alloy from Groups lIlA and VA or IIB and VIA of the Periodic Chart of the Elements.
- the thickness of the ceramic wafer material is preferably great enough to result in a relatively uniform temperature on the cathode side. If the substrate wafer is too thick, however, there may be spalling of the ceramic due to thermal stress.
- the pattern of the heater element can be any of various patterns which result in a relatively uniform heat output over the surface. It is desirable, however, where the substrate wafer iselongated, as in the preferred embodiment, to provide for additional heat input to the substrate wafer near the ends of the substrate.
- Various metals can be used for the heater pattern and for the metallizing on the emitter cathode face.
- Refractory metals such as molybdenum and tungsten are preferably used where the cathode layer must be grown on the substrate wafer directly by vapor deposition. This is due to the severe conditions in the growth furnace for Ill-V compound vapor phase deposition.
- the substrate wafer is exposed to highly reactive gases at temperatures on the order of 600C to 1,000C.
- Molybdenum and tungsten are the only metals in general use which can withstand such conditions and which are compatible with Ill-V compounds to the extent needed for growing a layer of sufficiently regular crystallinity for efficient performance of the cathode layer.
- the cathode layer is itself sufficiently conductive to operate without a metallizing pad under it, the cathode layer may be deposited directly on the ceramic.
- the heater pattern may be on the same side of the ceramic substrate wafer as the cathode, and may be separated from the cathode layer by an interposed electrically insulating layer such as silicon dioxide or be in direct physical contact with the cathode layer.
- the heater pattern is in direct thermally conductive contact with the cathode layer.
- Direct thermally conductive contact means that the heat transfer from the heater to the cathode layer is primarily by thermal conduction, either by direct physical contact, or through intermediate thermally conducting material.
- An electron emissive tube of the type comprising:
- a non-thermionic, electron emissive cathode having a photocathode layer and a work function reducing material on said photocathode layer, in the envelope, and
- a ceramic substrate on one surface of which the cathode is disposed, and a heater pattern of metallizing on the substrate in direct thermally conducting contact with the cathode.
- the semiconductor comprises at least one element from Groups lIIA, VA, 11B, and VIA of the Periodic Chart of the Elements.
- An electron emissive tube in accordance with claim 1 characterized in that the ceramic substrate has a pair of spaced apertures therethrough and said heater pattern of metallizing extends over the ceramic substrate between-the apertures.
Landscapes
- Electrodes For Cathode-Ray Tubes (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25425972A | 1972-05-17 | 1972-05-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3777209A true US3777209A (en) | 1973-12-04 |
Family
ID=22963565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00254259A Expired - Lifetime US3777209A (en) | 1972-05-17 | 1972-05-17 | Non-thermionic electron emissive tube comprising a ceramic heater substrate |
Country Status (7)
Country | Link |
---|---|
US (1) | US3777209A (enrdf_load_stackoverflow) |
JP (1) | JPS4950863A (enrdf_load_stackoverflow) |
CA (1) | CA998732A (enrdf_load_stackoverflow) |
DE (1) | DE2325136B2 (enrdf_load_stackoverflow) |
FR (1) | FR2184980B1 (enrdf_load_stackoverflow) |
GB (1) | GB1425194A (enrdf_load_stackoverflow) |
NL (1) | NL7306812A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930139A (en) * | 1974-05-28 | 1975-12-30 | David Grigorievich Bykhovsky | Nonconsumable electrode for oxygen arc working |
US6259193B1 (en) * | 1998-06-08 | 2001-07-10 | General Electric Company | Emissive filament and support structure |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3066236A (en) * | 1958-05-14 | 1962-11-27 | Int Standard Electric Corp | Electron discharge devices |
AU281761A (en) * | 1960-03-30 | 1963-03-28 | Westinghouse Brake (australasia ) Proprietary Limited | Improvements relating to fluid pressure engines |
FR1432317A (fr) * | 1964-05-05 | 1966-03-18 | Philips Nv | Procédé de fabrication d'une cathode à chauffage indirect et cathode obtenue par ce procédé |
US3307974A (en) * | 1962-03-19 | 1967-03-07 | Rank Radio And Television Ltd | Method of forming thermionic cathodes |
US3330991A (en) * | 1963-07-12 | 1967-07-11 | Raytheon Co | Non-thermionic electron emission devices |
US3408521A (en) * | 1965-11-22 | 1968-10-29 | Stanford Research Inst | Semiconductor-type photocathode for an infrared device |
-
1957
- 1957-03-22 DE DE19572325136 patent/DE2325136B2/de active Granted
-
1972
- 1972-05-17 US US00254259A patent/US3777209A/en not_active Expired - Lifetime
-
1973
- 1973-05-14 CA CA171,256A patent/CA998732A/en not_active Expired
- 1973-05-16 JP JP5454373A patent/JPS4950863A/ja active Pending
- 1973-05-16 NL NL7306812A patent/NL7306812A/xx unknown
- 1973-05-17 FR FR7317931A patent/FR2184980B1/fr not_active Expired
- 1973-05-17 GB GB2363373A patent/GB1425194A/en not_active Expired
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3066236A (en) * | 1958-05-14 | 1962-11-27 | Int Standard Electric Corp | Electron discharge devices |
AU281761A (en) * | 1960-03-30 | 1963-03-28 | Westinghouse Brake (australasia ) Proprietary Limited | Improvements relating to fluid pressure engines |
US3307974A (en) * | 1962-03-19 | 1967-03-07 | Rank Radio And Television Ltd | Method of forming thermionic cathodes |
US3330991A (en) * | 1963-07-12 | 1967-07-11 | Raytheon Co | Non-thermionic electron emission devices |
FR1432317A (fr) * | 1964-05-05 | 1966-03-18 | Philips Nv | Procédé de fabrication d'une cathode à chauffage indirect et cathode obtenue par ce procédé |
US3408521A (en) * | 1965-11-22 | 1968-10-29 | Stanford Research Inst | Semiconductor-type photocathode for an infrared device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930139A (en) * | 1974-05-28 | 1975-12-30 | David Grigorievich Bykhovsky | Nonconsumable electrode for oxygen arc working |
US6259193B1 (en) * | 1998-06-08 | 2001-07-10 | General Electric Company | Emissive filament and support structure |
US6464551B1 (en) * | 1998-06-08 | 2002-10-15 | General Electric Company | Filament design, method, and support structure |
Also Published As
Publication number | Publication date |
---|---|
FR2184980A1 (enrdf_load_stackoverflow) | 1973-12-28 |
FR2184980B1 (enrdf_load_stackoverflow) | 1977-12-30 |
DE2325136B2 (de) | 1977-09-01 |
CA998732A (en) | 1976-10-19 |
NL7306812A (enrdf_load_stackoverflow) | 1973-11-20 |
DE2325136A1 (de) | 1973-11-29 |
DE2325136C3 (enrdf_load_stackoverflow) | 1978-05-11 |
GB1425194A (en) | 1976-02-18 |
JPS4950863A (enrdf_load_stackoverflow) | 1974-05-17 |
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