US3673354A - Semiconductor stress transducer - Google Patents
Semiconductor stress transducer Download PDFInfo
- Publication number
- US3673354A US3673354A US34505A US3450570A US3673354A US 3673354 A US3673354 A US 3673354A US 34505 A US34505 A US 34505A US 3450570 A US3450570 A US 3450570A US 3673354 A US3673354 A US 3673354A
- Authority
- US
- United States
- Prior art keywords
- cantilever
- piezo
- stylus
- resistive elements
- cartridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 66
- 230000008859 change Effects 0.000 claims abstract description 57
- 239000010408 film Substances 0.000 abstract description 125
- 239000010409 thin film Substances 0.000 abstract description 33
- 230000035882 stress Effects 0.000 abstract description 23
- 230000006355 external stress Effects 0.000 abstract description 6
- 230000004044 response Effects 0.000 abstract description 5
- 241001422033 Thestylus Species 0.000 description 39
- 230000007246 mechanism Effects 0.000 description 19
- 239000012777 electrically insulating material Substances 0.000 description 10
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000000956 alloy Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910001234 light alloy Inorganic materials 0.000 description 5
- 239000007767 bonding agent Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000003190 viscoelastic substance Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000063 preceeding effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R21/00—Variable-resistance transducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/16—Mounting or connecting stylus to transducer with or without damping means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R21/00—Variable-resistance transducers
- H04R21/04—Gramophone pick-ups using a stylus; Recorders using a stylus
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3685469A JPS4835364B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3684769A JPS4919443B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3684669 | 1969-05-08 | ||
JP3685569A JPS4839721B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3684869A JPS4919444B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3685369A JPS4936241B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3685169A JPS4919445B1 (nl) | 1969-05-08 | 1969-05-08 | |
JP3685269 | 1969-05-08 | ||
JP3685069 | 1969-05-08 | ||
JP3684969 | 1969-05-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3673354A true US3673354A (en) | 1972-06-27 |
Family
ID=27579886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US34505A Expired - Lifetime US3673354A (en) | 1969-05-08 | 1970-05-04 | Semiconductor stress transducer |
Country Status (5)
Country | Link |
---|---|
US (1) | US3673354A (nl) |
DE (1) | DE2022652A1 (nl) |
FR (1) | FR2042495B1 (nl) |
GB (1) | GB1309146A (nl) |
NL (1) | NL156886B (nl) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3952171A (en) * | 1974-09-18 | 1976-04-20 | Micro/Acoustics Corporation | Stereo phonograph cartridge |
FR2301891A1 (fr) * | 1975-02-19 | 1976-09-17 | Matsushita Electric Ind Co Ltd | Tete de lecture phonographique |
US4053721A (en) * | 1975-02-18 | 1977-10-11 | Pioneer Electronic Corporation | Piezoelectric type pickup cartridge for stereo with pressing and intermediate members for coupling |
US4138122A (en) * | 1976-06-22 | 1979-02-06 | Ortofon Manufacturing A/S | Pickup |
US5489900A (en) * | 1994-06-03 | 1996-02-06 | International Business Machines Corporation | Force sensitive transducer for use in a computer keyboard |
US20120022796A1 (en) * | 2010-07-22 | 2012-01-26 | Idan Beck | Apparatus and method for detection of mechanical inputs |
US9311907B2 (en) | 2014-03-17 | 2016-04-12 | Incident Technologies, Inc. | Musical input device and dynamic thresholding |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3805601A (en) * | 1972-07-28 | 1974-04-23 | Bell & Howell Co | High sensitivity semiconductor strain gauge |
US3849874A (en) * | 1972-07-28 | 1974-11-26 | Bell & Howell Co | Method for making a semiconductor strain transducer |
DE3041756A1 (de) * | 1980-11-05 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Drucksensor |
GB8322273D0 (en) * | 1983-08-18 | 1983-09-21 | Bell & Howell Co | Applying semiconductor material to substrate |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3055989A (en) * | 1957-08-12 | 1962-09-25 | Columbia Broadcasting Syst Inc | Ceramic reproducer |
US3233047A (en) * | 1961-10-02 | 1966-02-01 | Teleprompter Corp | Stereo piezoelectric transducer |
US3239611A (en) * | 1961-03-09 | 1966-03-08 | Siemens Ag | Converting mechanical into electrical oscillations |
US3266303A (en) * | 1961-01-04 | 1966-08-16 | Bell Telephone Labor Inc | Diffused layer transducers |
GB1155519A (en) * | 1967-12-15 | 1969-06-18 | Standard Telephones Cables Ltd | Electromechanical Transducer |
US3491324A (en) * | 1967-03-21 | 1970-01-20 | Pierre Huet | Electromechanical transducer |
US3501732A (en) * | 1964-05-04 | 1970-03-17 | Endevco Corp | Semiconductive piezoresistive transducer having a grooved support with electrical contacts |
-
1970
- 1970-05-04 US US34505A patent/US3673354A/en not_active Expired - Lifetime
- 1970-05-06 NL NL7006595.A patent/NL156886B/nl not_active IP Right Cessation
- 1970-05-08 DE DE19702022652 patent/DE2022652A1/de active Pending
- 1970-05-08 GB GB2242470A patent/GB1309146A/en not_active Expired
- 1970-05-08 FR FR7016806A patent/FR2042495B1/fr not_active Expired
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3055989A (en) * | 1957-08-12 | 1962-09-25 | Columbia Broadcasting Syst Inc | Ceramic reproducer |
US3266303A (en) * | 1961-01-04 | 1966-08-16 | Bell Telephone Labor Inc | Diffused layer transducers |
US3239611A (en) * | 1961-03-09 | 1966-03-08 | Siemens Ag | Converting mechanical into electrical oscillations |
US3233047A (en) * | 1961-10-02 | 1966-02-01 | Teleprompter Corp | Stereo piezoelectric transducer |
US3501732A (en) * | 1964-05-04 | 1970-03-17 | Endevco Corp | Semiconductive piezoresistive transducer having a grooved support with electrical contacts |
US3491324A (en) * | 1967-03-21 | 1970-01-20 | Pierre Huet | Electromechanical transducer |
GB1155519A (en) * | 1967-12-15 | 1969-06-18 | Standard Telephones Cables Ltd | Electromechanical Transducer |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3952171A (en) * | 1974-09-18 | 1976-04-20 | Micro/Acoustics Corporation | Stereo phonograph cartridge |
US4053721A (en) * | 1975-02-18 | 1977-10-11 | Pioneer Electronic Corporation | Piezoelectric type pickup cartridge for stereo with pressing and intermediate members for coupling |
FR2301891A1 (fr) * | 1975-02-19 | 1976-09-17 | Matsushita Electric Ind Co Ltd | Tete de lecture phonographique |
US4138122A (en) * | 1976-06-22 | 1979-02-06 | Ortofon Manufacturing A/S | Pickup |
US4220341A (en) * | 1976-06-22 | 1980-09-02 | Ortofon Manufacturing A/S | Pickup |
US5489900A (en) * | 1994-06-03 | 1996-02-06 | International Business Machines Corporation | Force sensitive transducer for use in a computer keyboard |
US20120022796A1 (en) * | 2010-07-22 | 2012-01-26 | Idan Beck | Apparatus and method for detection of mechanical inputs |
US9063028B2 (en) * | 2010-07-22 | 2015-06-23 | Incident Technologies, Inc. | Apparatus and method for detection of mechanical inputs |
US9311907B2 (en) | 2014-03-17 | 2016-04-12 | Incident Technologies, Inc. | Musical input device and dynamic thresholding |
Also Published As
Publication number | Publication date |
---|---|
GB1309146A (en) | 1973-03-07 |
NL156886B (nl) | 1978-05-16 |
FR2042495B1 (nl) | 1978-06-02 |
NL7006595A (nl) | 1970-11-10 |
FR2042495A1 (nl) | 1971-02-12 |
DE2022652A1 (de) | 1970-11-19 |
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