US3660146A - Method of coating stiff materials onto fragile, heat vulnerable substrate webs - Google Patents
Method of coating stiff materials onto fragile, heat vulnerable substrate webs Download PDFInfo
- Publication number
- US3660146A US3660146A US861585A US3660146DA US3660146A US 3660146 A US3660146 A US 3660146A US 861585 A US861585 A US 861585A US 3660146D A US3660146D A US 3660146DA US 3660146 A US3660146 A US 3660146A
- Authority
- US
- United States
- Prior art keywords
- substrate
- coating
- web
- screen
- stiff materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 title abstract description 48
- 238000000576 coating method Methods 0.000 title abstract description 27
- 239000011248 coating agent Substances 0.000 title abstract description 24
- 239000000463 material Substances 0.000 title abstract description 15
- 239000011888 foil Substances 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052796 boron Inorganic materials 0.000 abstract description 5
- 230000005855 radiation Effects 0.000 abstract description 5
- 229910052580 B4C Inorganic materials 0.000 abstract description 3
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000004642 Polyimide Substances 0.000 description 3
- 238000010943 off-gassing Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000012779 reinforcing material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000013306 transparent fiber Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Definitions
- ABSTRACT R, 117/106 117/1071, Stiff materials such as boron and boron carbide are coated l 1 onto a polymeric or thin metal heated substrate web, backed [51] Int. Cl. ..C23c 11/00, C230 13/00, C23c 13/10 by a screen carrier web and passing over an evaporant source [58] Field of Search ..1 17/106, 107, 107.1; 118/48, ofthe coating material.
- the screen is transparent to radiation.
- the present invention relates to coating of continuous substrate webs with stiff materials.
- the coatings are stiff reinforcing materials such as boron, boron carbide, aluminum oxide, carbon, and silicon carbide.
- the substrate is selected from low density materials of very thin web form so that the laminate will have a very high volume fraction of the coating material as high stiffness reinforcement (with minimum parasitic volume and weight of the less stiff reinforcement substrate).
- High temperatures are required for coating and under high temperature the substrate web tears or becomes difficult to handle. Lowering temperature of the substrate compromises coating adhesion. Also strength of the deposit is generally a function of deposition temperature. It is desirable that the temperature of the substrate during coating be held at a level which is optimum'for production of high strength coating rather than one determined by the handling characteristics of the substrate;' the former temperature is generally higher than the latter.
- An improved coating process is practiced by passing a substrate web over a source of coating vapors with the substrate web backed by a screencarrier web.
- the screen carrier may have various forms including a porous wire mesh, a flattened wire mesh, an apertured foil, a solid (i.e. non-porous) foil (including films within the term foil) of infrared (IR) transparent material (e.g. polyolefins, polyimides), a reinforced foil and combinations of the above basic approaches, e.g. an IR transparent foil with actual apertures, a glass fiber or polyimide fiber mesh, a foil reinforced with transparent fiber; an apertured transparent foil reinforced with transparent fiber.
- IR infrared
- the screen in its various forms has a high thermal transparency, i.e. transparency to infrared radiation to meet the following prior art problem.
- a large amount of heat reaches the substrate through radiation from the source, particularly in coating stiff materials such as boron wherein the source temperature is raised to 2,000 C.
- the heat reaching the substrate can be quite high because boron and similar materials are transparent to radiant energy.
- the substrates considered herein also tend to have a high degree of thermal transparency. It has been discovered that a thermally opaque carrier web or other opaque backing tends to reflect heat back into the substrate where it is absorbed to raise the substrate to excessively high temperatures, causing degradation of the substrate and of the final coated-substrate product.
- the carrier web in accordance with the present invention allows a substantial portion of the radiation to be transmitted through it to a controlled temperature heat sink where it is absorbed. It therefore becomes possible to coat at higher rates with less damage to the substrate.
- the invention accordingly comprises an improved method of coating stiff materials onto fragile, heat-vulnerable substrates.
- FIGS. 1 and 5 are diagrams of two forms of apparatus for practicing the method of the invention.
- FIGS. 2-4 and 6 are diagrams of several substrate web-carrier combinations utilized in accord with the invention.
- FIG. l there is shown a vacuum coating chamber 10 to be evacuated by a vacuum pumping system 12 (including the conventional diffusion pump, fore pump, trap, valve and total and partial pressure instrumentation).
- a source 14 of coating material heated by means such as an induction coil, electron gun or resistance heater to emit vapor stream 16 which condenses on a substrate 18 to be coated.
- the substrate is moving in the direction indicated by arrow M.
- a shutter 20 may be interposed between the source and substrate to prevent coating during source warm-up.
- the substrate is backed by a plate 22 which is cooled by coil 24 carrying a temperature control fluid.
- a radiant pre-heater 26 is provided for bringing the substrate up in temperature.
- the substrate is a web which is unwound from a feed roll 28 and wound up after coating in a finish roll 30 and passes over guide roll 32.
- Drive motor means (not shown) drive the substrate through the coating process under the necessary tension.
- a screen web 34 backs up the substrate and is interleaved with it in the rolls 28 and 30.
- one embodiment of screen is indicated as a mesh of wires 234 over the substrate 18. This provides a considerable improvement over no screen in taking up the necessary drive tension and holding the substrate web flat.
- the screen limits billowing of the substrate to small ridges l7 limited by the weave of the screen.
- the carrier 234 of FIG. 2 in the form of a flattened screen web.
- the screen has essentially no weave and the substrate billowing is limited to separate small bumps.
- a third embodiment of the invention shown in FIG. 3 involves the use of a perforated sheet 334 as the screen web with hole to hole average distance at least one-fourth of average hole diameter.
- the holes may be in an ordered array or randomly arranged.
- FIG. 4 shows a wound up substrate web 18 (before coating) interleaved with a screen carrier of the flat sheet type 334 of FIG. 3 or of woven wire type 234 of FIG. 2.
- the flat type screen has the advantage that the substrate can be placed in an outgassing oven (prior to insertion in coater 10 of FIG. 1 or using the coater as an oven with the source 14 inactive) and then interleavedwith the screen to provide the roll 28 of FIG. 4 with closed ends essentially impervious to gas penetration during storage.
- a web 28 with a woven screen can be outgassed without unwinding the web and enclosed in a container for storage.
- FIG. 5 shows another apparatus for practicing the invention in an air-to-air vacuum coating process.
- the chamber 510 has several sub-chambers separated by seals (not shown) and pumped by appropriate vacuum pumping means 512.
- the substrate web 18 is unwound and rewound in air.
- the screen carrier web 534 is an endless belt with drive and tension adjust means 535 outside thevacuum zone. Additional guide rolls may be provided in the vacuum zones as necessary.
- FIG. 6 shows a screen web 634 of non-porous form used as a carrier for substrate web 18 in passing over back-up plate 22.
- the screen is an IR transparent foil such as a polyimide or a polyolefin resin of sufficient thickness (I 2 mils) and strength to serve as a carrier.
- Method of coating a fragile, heat vulnerable substrate web comprising A. supporting the substrate web on a screen carrier which C. heating the substrate web during the coating step of (B) carrier (i) is transparent with respect to radiant heat and to d c i g cragking stresses, f compnses a mes]? dem'mg 531d transparency of 2
- the screen carrier is of 1) from actual open porosity thereof; flattened mesh form lrarlspomng the Substrate web to be coated and Screen 5 3.
- the screen carrier is an carrier assembled together and unadhered to one another through a coating zone with web'flattening tension applied at least in part to said screen carrier; and
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Stiff materials such as boron and boron carbide are coated onto a polymeric or thin metal heated substrate web, backed by a screen carrier web and passing over an evaporant source of the coating material. The screen is transparent to radiation. The present invention relates to coating of continuous substrate webs with stiff materials.
Description
United States Patent [151 3,660,146 Chadsey, Jr. et a1. May 2, 1972 METHOD OF COATING STIFF [56] References Cited MATERIALS ONTO FRAGILE, HEAT UNITED STATES PATENTS VULNERABLE SUBSTRATE WEBS 2,405,662 8/1946 McManus et al. ..1 17/ 107.1 X [72] Inventors: Earl E. Chadsey, Jr., Sudbury; Frank 2,754,230 7/1956 MCI-earl e! --l l7/1 7-l X Feakes Lexington both of Mass. Averbach ..1 [73 Assignee: National Research Corporation Primary Examiner Alfred L. Leavm [22] Filed: Sept. 29, 1969 Assistant ExaminerKenneth P. Glynn Attorney0liver W, Hayes and Jerry Cohen [211 Appl. No.: 861,585
[57] ABSTRACT R, 117/106 117/1071, Stiff materials such as boron and boron carbide are coated l 1 onto a polymeric or thin metal heated substrate web, backed [51] Int. Cl. ..C23c 11/00, C230 13/00, C23c 13/10 by a screen carrier web and passing over an evaporant source [58] Field of Search ..1 17/106, 107, 107.1; 118/48, ofthe coating material. The screen is transparent to radiation.
The present invention relates to coating of continuous substrate webs with stiff materials.
3 Claims, 6 Dlawing Figures PATENTED MAY 2 I972 [III II v A A A AYAVEA HA A Fig 3.
METHOD OF COATING STIFF MATERIALS ONTO F RAGILE, HEAT VULNERABLE SUBSTRATE WEBS BACKGROUND It is prior invention to produce structural composites by making laminates of coated web substrates. The coatings are stiff reinforcing materials such as boron, boron carbide, aluminum oxide, carbon, and silicon carbide. The substrate is selected from low density materials of very thin web form so that the laminate will have a very high volume fraction of the coating material as high stiffness reinforcement (with minimum parasitic volume and weight of the less stiff reinforcement substrate).
High temperatures are required for coating and under high temperature the substrate web tears or becomes difficult to handle. Lowering temperature of the substrate compromises coating adhesion. Also strength of the deposit is generally a function of deposition temperature. It is desirable that the temperature of the substrate during coating be held at a level which is optimum'for production of high strength coating rather than one determined by the handling characteristics of the substrate;' the former temperature is generally higher than the latter.
It is the object of the invention to provide an improved coatin g process allowing deposition of stiff reinforcing materials at higher temperatures to produce coated webs of reliably higher strength, stiffness and flatness and improved freedom from coating defects and to accomplish this on very thin, low density webs notwithstanding the fragility and heat vulnerability of such substrates.
GENERAL DESCRIPTION An improved coating process is practiced by passing a substrate web over a source of coating vapors with the substrate web backed by a screencarrier web.
The screen carrier may have various forms including a porous wire mesh, a flattened wire mesh, an apertured foil, a solid (i.e. non-porous) foil (including films within the term foil) of infrared (IR) transparent material (e.g. polyolefins, polyimides), a reinforced foil and combinations of the above basic approaches, e.g. an IR transparent foil with actual apertures, a glass fiber or polyimide fiber mesh, a foil reinforced with transparent fiber; an apertured transparent foil reinforced with transparent fiber.
The screen in its various forms has a high thermal transparency, i.e. transparency to infrared radiation to meet the following prior art problem. In a vacuum coating system a large amount of heat reaches the substrate through radiation from the source, particularly in coating stiff materials such as boron wherein the source temperature is raised to 2,000 C. Even after initiating formation of the coating, the heat reaching the substrate can be quite high because boron and similar materials are transparent to radiant energy. The substrates considered herein also tend to have a high degree of thermal transparency. It has been discovered that a thermally opaque carrier web or other opaque backing tends to reflect heat back into the substrate where it is absorbed to raise the substrate to excessively high temperatures, causing degradation of the substrate and of the final coated-substrate product. The carrier web in accordance with the present invention allows a substantial portion of the radiation to be transmitted through it to a controlled temperature heat sink where it is absorbed. It therefore becomes possible to coat at higher rates with less damage to the substrate.
The invention accordingly comprises an improved method of coating stiff materials onto fragile, heat-vulnerable substrates.
Specific embodiments of the invention are now described with reference to the accompanying drawings wherein:
FIGS. 1 and 5 are diagrams of two forms of apparatus for practicing the method of the invention; and
FIGS. 2-4 and 6 are diagrams of several substrate web-carrier combinations utilized in accord with the invention.
Referring now to FIG. l there is shown a vacuum coating chamber 10 to be evacuated by a vacuum pumping system 12 (including the conventional diffusion pump, fore pump, trap, valve and total and partial pressure instrumentation). Within the chamber is a source 14 of coating material heated by means (not shown) such as an induction coil, electron gun or resistance heater to emit vapor stream 16 which condenses on a substrate 18 to be coated. The substrate is moving in the direction indicated by arrow M. A shutter 20 may be interposed between the source and substrate to prevent coating during source warm-up. The substrate is backed by a plate 22 which is cooled by coil 24 carrying a temperature control fluid. A radiant pre-heater 26 is provided for bringing the substrate up in temperature.
The substrate is a web which is unwound from a feed roll 28 and wound up after coating in a finish roll 30 and passes over guide roll 32. Drive motor means (not shown) drive the substrate through the coating process under the necessary tension.
A screen web 34 backs up the substrate and is interleaved with it in the rolls 28 and 30.
Referring now to FIG. 2, one embodiment of screen is indicated as a mesh of wires 234 over the substrate 18. This provides a considerable improvement over no screen in taking up the necessary drive tension and holding the substrate web flat. The screen limits billowing of the substrate to small ridges l7 limited by the weave of the screen.
Another species of the invention is the carrier 234 of FIG. 2 in the form of a flattened screen web. The screen has essentially no weave and the substrate billowing is limited to separate small bumps.
A third embodiment of the invention shown in FIG. 3 involves the use of a perforated sheet 334 as the screen web with hole to hole average distance at least one-fourth of average hole diameter. The holes may be in an ordered array or randomly arranged.
Further, web flatness improvement is obtained in this embodiment.
FIG. 4 shows a wound up substrate web 18 (before coating) interleaved with a screen carrier of the flat sheet type 334 of FIG. 3 or of woven wire type 234 of FIG. 2. The flat type screen has the advantage that the substrate can be placed in an outgassing oven (prior to insertion in coater 10 of FIG. 1 or using the coater as an oven with the source 14 inactive) and then interleavedwith the screen to provide the roll 28 of FIG. 4 with closed ends essentially impervious to gas penetration during storage. On the other hand a web 28 with a woven screen can be outgassed without unwinding the web and enclosed in a container for storage. If a screen is used to carry the substrate web through an unwind-heat-rewind outgassing process, it should be noted whether web stretching takes place during outgassing. lfthis occurs it should be compensated, e.g. by rewinding and interleaving with a separate screen.
FIG. 5 shows another apparatus for practicing the invention in an air-to-air vacuum coating process. The chamber 510 has several sub-chambers separated by seals (not shown) and pumped by appropriate vacuum pumping means 512. The substrate web 18 is unwound and rewound in air. The screen carrier web 534 is an endless belt with drive and tension adjust means 535 outside thevacuum zone. Additional guide rolls may be provided in the vacuum zones as necessary.
FIG. 6 shows a screen web 634 of non-porous form used as a carrier for substrate web 18 in passing over back-up plate 22. The screen is an IR transparent foil such as a polyimide or a polyolefin resin of sufficient thickness (I 2 mils) and strength to serve as a carrier.
It will be apparent from the above disclosure to those skilled in the art that further variations and embodiments can be made within the scope of the invention. Accordingly it is intended that the above disclosure shall be read as illustrative and not in a limiting sense.
What is claimed is:
1. Method of coating a fragile, heat vulnerable substrate web comprising A. supporting the substrate web on a screen carrier which C. heating the substrate web during the coating step of (B) carrier (i) is transparent with respect to radiant heat and to d c i g cragking stresses, f compnses a mes]? dem'mg 531d transparency of 2 The method of claim 1 wherein the screen carrier is of 1) from actual open porosity thereof; flattened mesh form lrarlspomng the Substrate web to be coated and Screen 5 3. The method of claim 1 wherein the screen carrier is an carrier assembled together and unadhered to one another through a coating zone with web'flattening tension applied at least in part to said screen carrier; and
apertured foil.
I! I I l
Claims (2)
- 2. The method of claim 1 wherein the screen carrier is of flattened mesh form.
- 3. The method of claim 1 wherein the screen carrier is an apertured foil.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86158569A | 1969-09-29 | 1969-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3660146A true US3660146A (en) | 1972-05-02 |
Family
ID=25336200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US861585A Expired - Lifetime US3660146A (en) | 1969-09-29 | 1969-09-29 | Method of coating stiff materials onto fragile, heat vulnerable substrate webs |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US3660146A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3915779A (en) * | 1973-07-10 | 1975-10-28 | Kureha Chemical Ind Co Ltd | Method for effecting vacuum evaporation |
| US5738729A (en) * | 1995-11-13 | 1998-04-14 | Balzers Aktiengesellschaft | Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method |
| US20040159285A1 (en) * | 2003-02-19 | 2004-08-19 | Joachim Doehler | Gas gate for isolating regions of differing gaseous pressure |
| EP2339047A1 (en) * | 2009-12-14 | 2011-06-29 | FHR Anlagenbau GmbH | Assembly for tempering tape-shaped substrates |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2405662A (en) * | 1941-08-30 | 1946-08-13 | Crown Cork & Seal Co | Coating |
| US2754230A (en) * | 1952-10-25 | 1956-07-10 | Bell Telephone Labor Inc | Method of making electrical capacitors |
| US3206325A (en) * | 1961-09-14 | 1965-09-14 | Alloyd Corp | Process for producing magnetic product |
-
1969
- 1969-09-29 US US861585A patent/US3660146A/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2405662A (en) * | 1941-08-30 | 1946-08-13 | Crown Cork & Seal Co | Coating |
| US2754230A (en) * | 1952-10-25 | 1956-07-10 | Bell Telephone Labor Inc | Method of making electrical capacitors |
| US3206325A (en) * | 1961-09-14 | 1965-09-14 | Alloyd Corp | Process for producing magnetic product |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3915779A (en) * | 1973-07-10 | 1975-10-28 | Kureha Chemical Ind Co Ltd | Method for effecting vacuum evaporation |
| US5738729A (en) * | 1995-11-13 | 1998-04-14 | Balzers Aktiengesellschaft | Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method |
| US20040159285A1 (en) * | 2003-02-19 | 2004-08-19 | Joachim Doehler | Gas gate for isolating regions of differing gaseous pressure |
| WO2004073893A3 (en) * | 2003-02-19 | 2004-12-16 | Energy Conversion Devices Inc | Gas gate for isolating regions of differing gaseous pressure |
| US6878207B2 (en) * | 2003-02-19 | 2005-04-12 | Energy Conversion Devices, Inc. | Gas gate for isolating regions of differing gaseous pressure |
| EP2339047A1 (en) * | 2009-12-14 | 2011-06-29 | FHR Anlagenbau GmbH | Assembly for tempering tape-shaped substrates |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5968240A (en) | Method and device for dressing electronic radiation irradia-ted cured coating surface on radiation sensing base body | |
| US5065697A (en) | Laser sputtering apparatus | |
| JP3768547B2 (en) | Double-sided film formation method | |
| US20160229758A1 (en) | Continuous chemical vapor deposition/infiltration coater | |
| US3086882A (en) | Method and apparatus for filming articles by vacuum deposition | |
| US2971862A (en) | Vapor deposition method and apparatus | |
| AU2023222984B2 (en) | Improved vapour deposition system, method and moisture control device | |
| US3660146A (en) | Method of coating stiff materials onto fragile, heat vulnerable substrate webs | |
| US2665228A (en) | Apparatus and process for vapor coating | |
| CN100545298C (en) | Preparation method of composite material | |
| JPH02118064A (en) | Vacuum deposition device | |
| US3895129A (en) | Method for metallizing plastic film | |
| US3671306A (en) | Boron carbide film product | |
| EP0026106A1 (en) | Method of bonding two surfaces together and article obtained by this method | |
| US3594214A (en) | Method of applying a zinc coating to a sheet-steel base | |
| JP2003089164A (en) | Transparent gas barrier material and method for producing the same | |
| JP4120865B2 (en) | Gas barrier film roll, laminate using the same, and packaging bag | |
| JP5300765B2 (en) | Gas barrier film | |
| JP2011195850A (en) | Film-forming method and gas barrier film | |
| JP2017101270A (en) | Thin film formation apparatus and thin film formation method | |
| GB2064427A (en) | Bonding Two Surfaces Together | |
| US3255035A (en) | Tin oxide coating | |
| JP3633276B2 (en) | Method for producing gas barrier material | |
| US3702261A (en) | Method of providing substrates with stiff reinforcing material | |
| JP4117523B2 (en) | Gas barrier film roll and method for producing the same |