US3628293A - Apparatus for intercepting air films rotating with grinding wheels - Google Patents
Apparatus for intercepting air films rotating with grinding wheels Download PDFInfo
- Publication number
- US3628293A US3628293A US32614A US3261470A US3628293A US 3628293 A US3628293 A US 3628293A US 32614 A US32614 A US 32614A US 3261470 A US3261470 A US 3261470A US 3628293 A US3628293 A US 3628293A
- Authority
- US
- United States
- Prior art keywords
- grinding wheel
- baffle plate
- air film
- coolant
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
Definitions
- ABSTRACT In apparatus for intercepting the air film rotating with a grinding wheel for positive supply of coolant to the grinding point of the grinding wheel an arcuate baffle plate APPARATUS FOR INTERCEPTING AIR FILMS adjacent to a coolant nozzle for supplying coolant and extend- ROTATING WITH GRINDIN WHEELS ing in parallel with the axis of the grinding wheel is pivotally 3 Cl ims, 3 Dr ing F gs. mounted on the outer end of a cover plate covering a portion 52 us.
- Prior apparatus for intercepting an air film rotating with the grinding wheel I comprises an intercepting baffle plate 17' adjustably secured to a coolant nozzle 10' by means of a bolt 19', as shown in FIG. 1.
- the intercepting baffle plate 17' As the spacing between a front cover 13' secured to a guard 4' for the grinding wheel 1' and the coolant nozzle 10' is relatively narrow, when the gap between the intercepting baffle plate 17 and the generating line of the grinding wheel is adjusted as the wheel wears, the intercepting baffle plate tends to incline, thus rendering it difficult to adjust the gap. Further as the intercepting baffle plate is mounted on the coolant nozzle, variation in the position of the coolant nozzle results in the variation of the gap thus rendering it difficult to completely intercept the air film rotating with the grinding wheel.
- an apparatus for intercepting the air film rotating with a grinding wheel composing a grinding wheel a stationary guard, 21 front cover pivotally mounted on the guard to cover a portion of the periphery of the grinding wheel, an arcuate baffle plate extending in parallel with the axis of the grinding wheel, to take up the air film and deflect it away from the peripheral surface of the grinding wheel and means to pivotally mount the baffle plate on the outer end of the front cover whereby to discharge the air film intercepted by the baffle plate through an opening defined by the baffle plate and the front cover.
- a coolant supply nozzle is positioned behind the baffle plate so that it is possible to positively the coolant to the working point of the grinding wheel without being interferred by the rotating air film.
- FIG. I shows a side elevation, partly in section, of a prior art apparatus for intercepting an air film rotating with a grinding wheel
- FIG. 2 is a view similar to FIG. I illustrating one embodiment of this invention and FIG. 3 is a partial perspective view showing the manner of a mounting the air film intercepting apparatus shown in FIG. 2.
- FIGS. 2 and 3 of the accompanying drawings there is shown a grinding wheel I clamped between flanges 3 secured to a wheel spindle 2 which in turn is rotatably supported by a wheel support, not shown.
- a guard 4 is secured to the wheel support and a support 5 is secured to the upper surface of the guard 4) by means of a bolt 6.
- a coolant pipe 7 is secured to the support 5 by means of clamping plates 8 and a bolt 9.
- a coolant nozzle I is threadably connected to the pipe 7 by screw threads 7a formed on the outer end of coolant pipe 7, and a suitable coolant is supplied to the pipe 7 from a suitable coolant supply source, not shown, during grinding operation and is discharged from a discharge opening 10a of the coolant nozzle 10 onto the working point of the grinding wheel or a point at which a workpiece II to be ground is urged against the periphery to the grinding wheel.
- a cock 112 is included in the coolant pipe 7 to control the flow quantity of the coolant discharged through the discharge opening lltla of the coolant nozzle.
- the position of the coolant nozzle can be adjusted in the horizontal and vertical direction and in the direction perpendicular to the plane of the sheet of the drawing so that the discharge nozzle 10a opposes the point of contact between the grinding wheel and the workpiece II or the working point of the grinding wheel.
- a front cover 13 is mounted on the guard t by means of a pivot pin 12a extending through openings of a hinge ta formed on the guide so that the front cover I3 may swing in parallel with.
- An arcuate slot having a center at the axis of the pivot pin 12a is provided for each side plate of the front cover to receive a bolt 15 which is threadably connected to a side cover 114 of the guard 4 through a washer I6 so as to connect the cover 113 to the side cover 14 with a suitable spacing between the cover 13 and the periphery of the grinding wheel 1.
- the intercepting apparatus 17 comprises an arcuate baffle plate 17b extending in parallel with the axis of the grinding wheel and a pair of circular side plates 117a welded to the opposite ends of the baffle plate 17b thus forming a troughlike configuration.
- the side plates 1711 are secured to the opposite sides of the outer end of the cover 113 by means of bolts I9 and washers IS.
- the inner edge of the baffle plate 17b confronting to the periphery of the grinding wheel is formed with a notch 17c having a width slightly wider than that of the grinding wheel and the remaining portions 17d of the baffle plate 17b are extending along the side surfaces of the grinding wheel.
- the air film intercepting apparatus I7 may be rotated about these bolts I9 to vary the angle of intercepting the air film rotating with the grinding wheel at or near the peripheral surface thereof.
- the air film rotating therewith is taken up with the arcuate baffle plate 17b deflected away from the surface of the grinding wheel by being guided by the arcuate inner surface thereof and is finally discharged in the opposite direction to the air film which is caused along the outer surface of the grinding wheel I as viewed in FIG. 2 through an opening defined among the lower edge of the cover I3, the upper or outer edge of baffle plate 17b and side plates 17.
- the rotating air film intercepting apparatus I7 is bolted to the opposite sides of front cover I3, fine adjustment of the gap between the baffle plate 17b and the generating line of the grinding wheel can be readily provided by merely loosening bolts 19 and then rotating intercepting apparatus about these bolts.
- respective side plates 17a of the air film intercepting apparatus 17 are guided by the side surface of cover l3 and since the side plates 1170 are rotatably mounted by the bolts 119 the arcuate baffle plate ll7b does not incline with respect to the generating line of the grinding wheel thus maintaining uniformity of the width of the gap between the inner edge of the arcuate baffle plate 17a and the generating line of the grinding wheel.
- the air film rotating with the peripheral surface of the grinding wheel is taken up by the inner edge of the arcuate baffle plate and is then discharged upwardly along the arcuate inner surface of the baffle plate, the air film is nearly perfectly intercepted near the working point of the grinding wheel. Consequently, the coolant discharged from the discharge opening 10a of the coolant nozzle I0 is positively supplied to the working point without being intercepted by the rotating air film.
- the front cover 13 and the coolant nozzle 10 are manually adjusted independently of each other in accordance with decrease in the diameter of the wheel I due to wear thereof.
- apparatus for intercepting the air film rotating with a grinding wheel comprising a rotary grinding wheel, a stationary front cover to cover a portion of the periphery of said grinding wheel, a coolant nozz'le for supplying coolant to the grinding point of said grinding wheel, and a baffle plate disposed between said cover plate and said coolant nozzle to take up said air film and to deflect the same away from the peripheral surface of said grinding wheel, the improvement which comprises an arcuate baffle plate extending in parallel with the axis of said grinding wheel, and means to pivotally mount said baffle plate on said cover plate whereby to discharge the air film intercepted by said baffle plate through an opening defined by said baffle plate and said front cover.
- arcuate baffle plate is provided with side plates on the opposite ends thereof and secured to the opposite sides of said cover plates at its outer ends.
Abstract
In apparatus for intercepting the air film rotating with a grinding wheel for positive supply of coolant to the grinding point of the grinding wheel, an arcuate baffle plate adjacent to a coolant nozzle for supplying coolant and extending in parallel with the axis of the grinding wheel is pivotally mounted on the outer end of a cover plate covering a portion of the periphery of the grinding wheel to take up the air film and deflect the same away from the periphery of the grinding wheel.
Description
States Patent o ill. [Ill [72} Inventors Akiyoshi Kobayashi; [5 Ref ren Cit d KIkllJIIO Nomura, both of Kariya, Japan UNITED STATES PATENTS P 32'614 1,862,583 6/1932 Skriba 51/267 Med 1970 3 325 949 6/1967 F' b 51/267 45] Patented Dec 21, 1971 lS er [73] Assignee Toyoda Koki Kabushiki Kaisha Primary Examiner-William R. Armstrong Kariya-shi, Aichi-ken, Japan Attorney-Wenderoth, Lind & Ponack [32] Priority May 12, 1969 [33] Japan [31 44/43405 ABSTRACT: In apparatus for intercepting the air film rotating with a grinding wheel for positive supply of coolant to the grinding point of the grinding wheel an arcuate baffle plate APPARATUS FOR INTERCEPTING AIR FILMS adjacent to a coolant nozzle for supplying coolant and extend- ROTATING WITH GRINDIN WHEELS ing in parallel with the axis of the grinding wheel is pivotally 3 Cl ims, 3 Dr ing F gs. mounted on the outer end of a cover plate covering a portion 52 us. Cl 5l/267 of the Periphery the grinding Wheel mm [5 1] ML Cl I B24!) 55/02 and deflect the same away from the periphery of the grinding 50 Field of Search .i 51/267, wheel- PATENTEU nc21 I97! PRIUR ART "IIIIIIIIIIIIIIII INVENTORS ATTORNEYS APPARATUS FOR INTERCEPTING AIR FILMS ROTATING WITII GRINDING WHEELS BACKGROUND OF THE INVENTION This invention relates to an improved apparatus for intercepting an air film rotating with a grinding wheel.
When a grinding wheel operates a workpiece it is necessary to ensure positive supply to coolant to the working point of the grinding wheel.
Prior apparatus for intercepting an air film rotating with the grinding wheel I comprises an intercepting baffle plate 17' adjustably secured to a coolant nozzle 10' by means of a bolt 19', as shown in FIG. 1. With this construction, however, as the spacing between a front cover 13' secured to a guard 4' for the grinding wheel 1' and the coolant nozzle 10' is relatively narrow, when the gap between the intercepting baffle plate 17 and the generating line of the grinding wheel is adjusted as the wheel wears, the intercepting baffle plate tends to incline, thus rendering it difficult to adjust the gap. Further as the intercepting baffle plate is mounted on the coolant nozzle, variation in the position of the coolant nozzle results in the variation of the gap thus rendering it difficult to completely intercept the air film rotating with the grinding wheel.
SUMMARY OF THE INVENTION It is therefore an object of this invention to provide an improved apparatus for intercepting an air film rotating with a grinding wheel which can ensure a positive supply of coolant to the working point of the grinding wheel without being interferred by the rotating air film and which can be adjusted readily as the diameter of the grinding wheel varies.
According to one embodiment of this invention there is provided an apparatus for intercepting the air film rotating with a grinding wheel composing a grinding wheel, a stationary guard, 21 front cover pivotally mounted on the guard to cover a portion of the periphery of the grinding wheel, an arcuate baffle plate extending in parallel with the axis of the grinding wheel, to take up the air film and deflect it away from the peripheral surface of the grinding wheel and means to pivotally mount the baffle plate on the outer end of the front cover whereby to discharge the air film intercepted by the baffle plate through an opening defined by the baffle plate and the front cover. A coolant supply nozzle is positioned behind the baffle plate so that it is possible to positively the coolant to the working point of the grinding wheel without being interferred by the rotating air film.
BRIEF DESCRIPTION OF THE DRAWINGS Further objects and advantages of the present invention will become apparent and the invention will be better understood from the following description, reference being made to the accompanying drawings in which:
FIG. I shows a side elevation, partly in section, of a prior art apparatus for intercepting an air film rotating with a grinding wheel;
FIG. 2 is a view similar to FIG. I illustrating one embodiment of this invention and FIG. 3 is a partial perspective view showing the manner of a mounting the air film intercepting apparatus shown in FIG. 2.
DESCRIPTION OF THE PREFERRED EMBODIMENT Referring now to FIGS. 2 and 3 of the accompanying drawings there is shown a grinding wheel I clamped between flanges 3 secured to a wheel spindle 2 which in turn is rotatably supported by a wheel support, not shown. A guard 4 is secured to the wheel support and a support 5 is secured to the upper surface of the guard 4) by means of a bolt 6. A coolant pipe 7 is secured to the support 5 by means of clamping plates 8 and a bolt 9. A coolant nozzle I is threadably connected to the pipe 7 by screw threads 7a formed on the outer end of coolant pipe 7, and a suitable coolant is supplied to the pipe 7 from a suitable coolant supply source, not shown, during grinding operation and is discharged from a discharge opening 10a of the coolant nozzle 10 onto the working point of the grinding wheel or a point at which a workpiece II to be ground is urged against the periphery to the grinding wheel. As shown a cock 112 is included in the coolant pipe 7 to control the flow quantity of the coolant discharged through the discharge opening lltla of the coolant nozzle. The position of the coolant nozzle can be adjusted in the horizontal and vertical direction and in the direction perpendicular to the plane of the sheet of the drawing so that the discharge nozzle 10a opposes the point of contact between the grinding wheel and the workpiece II or the working point of the grinding wheel. A front cover 13 is mounted on the guard t by means of a pivot pin 12a extending through openings of a hinge ta formed on the guide so that the front cover I3 may swing in parallel with.
the axis of the grinding wheel. An arcuate slot having a center at the axis of the pivot pin 12a is provided for each side plate of the front cover to receive a bolt 15 which is threadably connected to a side cover 114 of the guard 4 through a washer I6 so as to connect the cover 113 to the side cover 14 with a suitable spacing between the cover 13 and the periphery of the grinding wheel 1.
The intercepting apparatus 17 comprises an arcuate baffle plate 17b extending in parallel with the axis of the grinding wheel and a pair of circular side plates 117a welded to the opposite ends of the baffle plate 17b thus forming a troughlike configuration. The side plates 1711 are secured to the opposite sides of the outer end of the cover 113 by means of bolts I9 and washers IS. The inner edge of the baffle plate 17b confronting to the periphery of the grinding wheel is formed with a notch 17c having a width slightly wider than that of the grinding wheel and the remaining portions 17d of the baffle plate 17b are extending along the side surfaces of the grinding wheel. When bolts 19 are loosened the air film intercepting apparatus I7 may be rotated about these bolts I9 to vary the angle of intercepting the air film rotating with the grinding wheel at or near the peripheral surface thereof. Thus, during the grinding operation of the grinding wheel the air film rotating therewith is taken up with the arcuate baffle plate 17b deflected away from the surface of the grinding wheel by being guided by the arcuate inner surface thereof and is finally discharged in the opposite direction to the air film which is caused along the outer surface of the grinding wheel I as viewed in FIG. 2 through an opening defined among the lower edge of the cover I3, the upper or outer edge of baffle plate 17b and side plates 17.
As above described since according to this invention the rotating air film intercepting apparatus I7 is bolted to the opposite sides of front cover I3, fine adjustment of the gap between the baffle plate 17b and the generating line of the grinding wheel can be readily provided by merely loosening bolts 19 and then rotating intercepting apparatus about these bolts. Moreover as respective side plates 17a of the air film intercepting apparatus 17 are guided by the side surface of cover l3 and since the side plates 1170 are rotatably mounted by the bolts 119 the arcuate baffle plate ll7b does not incline with respect to the generating line of the grinding wheel thus maintaining uniformity of the width of the gap between the inner edge of the arcuate baffle plate 17a and the generating line of the grinding wheel. As the air film rotating with the peripheral surface of the grinding wheel is taken up by the inner edge of the arcuate baffle plate and is then discharged upwardly along the arcuate inner surface of the baffle plate, the air film is nearly perfectly intercepted near the working point of the grinding wheel. Consequently, the coolant discharged from the discharge opening 10a of the coolant nozzle I0 is positively supplied to the working point without being intercepted by the rotating air film.
In the above-described embodiment, the front cover 13 and the coolant nozzle 10 are manually adjusted independently of each other in accordance with decrease in the diameter of the wheel I due to wear thereof.
It is, however, possible to automatically adjust the front cover and the coolant nozzle in unison in accordance with decrease in the diameter of the wheel due to wear thereof by slidably mounting the front cover and the coolant nozzle in a body on the stationary wheel guard and by effecting slide movement thereof in accordance with decrease in the diameter of the wheel.
What is claimed is:
1. ln apparatus for intercepting the air film rotating with a grinding wheel comprising a rotary grinding wheel, a stationary front cover to cover a portion of the periphery of said grinding wheel, a coolant nozz'le for supplying coolant to the grinding point of said grinding wheel, and a baffle plate disposed between said cover plate and said coolant nozzle to take up said air film and to deflect the same away from the peripheral surface of said grinding wheel, the improvement which comprises an arcuate baffle plate extending in parallel with the axis of said grinding wheel, and means to pivotally mount said baffle plate on said cover plate whereby to discharge the air film intercepted by said baffle plate through an opening defined by said baffle plate and said front cover.
2. An apparatus as defined in claim 1 wherein said arcuate baffle plate is provided with side plates on the opposite ends thereof and secured to the opposite sides of said cover plates at its outer ends.
3. An apparatus as defined in claim 1 wherein the inner edge of said arcuate baffle plate closely confronting to the periphery of said grinding wheel is notched to receive the same.
i I! I t
Claims (3)
1. In apparatus for intercepting the air film rotating with a grinding wheel comprising a rotary grinding wheel, a stationary front cover to cover a portion of the periphery of said grinding wheel, a coolant nozzle for supplying coolant to the grinding point of said grinding wheel, and a baffle plate disposed between said cover plate and said coolant nozzle to take up said air film and to deflect the same away from the peripheral surface of said grinding wheel, the improvement which comprises an arcuate baffle plate extending in parallel with the axis of said grinding wheel, and means to pivotally mount said baffle plate on said cover plate whereby to discharge the air film intercepted by said baffle plate through an opening defined by said baffle plate and said front cover.
2. An apparatus as defined in claim 1 wherein said arcuate baffle plate is provided with side plates on the opposite ends thereof and secured to the opposite sides of said cover plates at its outer ends.
3. An apparatus as defined in claim 1 wherein the inner edge of said arcuate baffle plate closely confronting to the periphery of said grinding wheel is notched to receive the same.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1969043405U JPS4720382Y1 (en) | 1969-05-12 | 1969-05-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3628293A true US3628293A (en) | 1971-12-21 |
Family
ID=12662838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US32614A Expired - Lifetime US3628293A (en) | 1969-05-12 | 1970-04-28 | Apparatus for intercepting air films rotating with grinding wheels |
Country Status (5)
Country | Link |
---|---|
US (1) | US3628293A (en) |
JP (1) | JPS4720382Y1 (en) |
DE (1) | DE2023200A1 (en) |
FR (1) | FR2047487A5 (en) |
GB (1) | GB1256216A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4619081A (en) * | 1985-02-28 | 1986-10-28 | General Signal Corporation | Combined nozzle with air foil |
WO1998009772A1 (en) * | 1996-09-03 | 1998-03-12 | Unova Industrial Automation Systems, Inc. | Variable volume coolant system |
US6471573B1 (en) * | 2001-02-28 | 2002-10-29 | Dana Corporation | Adapter for supplying lubricating fluid to a workpiece-engaging tool |
US20030236059A1 (en) * | 2002-06-20 | 2003-12-25 | Toyoda Koki Kabushiki Kaisha | Grinding method and grinding machine |
US20130157542A1 (en) * | 2010-06-14 | 2013-06-20 | David C. Graham | Apparatuses Methods for Coolant Delivery |
US20140099870A1 (en) * | 2012-10-09 | 2014-04-10 | Samsung Display Co., Ltd. | Grinding apparatus for a substrate |
CN109262466A (en) * | 2018-10-23 | 2019-01-25 | 华辰精密装备(昆山)股份有限公司 | The totally-enclosed protective hood of grinding wheel of high-speed grinding |
FR3108543A1 (en) * | 2020-03-30 | 2021-10-01 | Soitec | Device for projecting an etching solution onto a substrate |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4017716A1 (en) * | 1990-06-01 | 1991-12-05 | Diskus Werke Frankfurt Main Ag | DEVICE FOR THE COOLANT LUBRICANT SUPPLY FOR HIGH-SPEED CIRCUIT GRINDING OF EXTERNAL CONTOURS |
DE4035798C1 (en) * | 1990-11-10 | 1992-04-16 | Fortuna-Werke Maschinenfabrik Gmbh, 7000 Stuttgart, De | Supplying liq. coolant to grinding work - feeds coolant by nozzle to contact zone between grinding wheel and workpiece |
DE4402318A1 (en) * | 1994-01-27 | 1995-08-03 | Gerhard Dipl Chem Huber | Simple, economic process for prodn. of high quality tubes from paper |
JP5023635B2 (en) * | 2006-09-27 | 2012-09-12 | 株式会社ジェイテクト | Coolant supply device for grinding machine |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1862583A (en) * | 1927-04-27 | 1932-06-14 | Western Electric Co | Abrading apparatus |
US3325949A (en) * | 1964-11-24 | 1967-06-20 | Cincinnati Milling Machine Co | Workpiece cooling apparatus for grinding machines |
-
1969
- 1969-05-12 JP JP1969043405U patent/JPS4720382Y1/ja not_active Expired
-
1970
- 1970-04-28 US US32614A patent/US3628293A/en not_active Expired - Lifetime
- 1970-05-05 GB GB21582/70A patent/GB1256216A/en not_active Expired
- 1970-05-08 FR FR7016808A patent/FR2047487A5/fr not_active Expired
- 1970-05-12 DE DE19702023200 patent/DE2023200A1/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1862583A (en) * | 1927-04-27 | 1932-06-14 | Western Electric Co | Abrading apparatus |
US3325949A (en) * | 1964-11-24 | 1967-06-20 | Cincinnati Milling Machine Co | Workpiece cooling apparatus for grinding machines |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4619081A (en) * | 1985-02-28 | 1986-10-28 | General Signal Corporation | Combined nozzle with air foil |
WO1998009772A1 (en) * | 1996-09-03 | 1998-03-12 | Unova Industrial Automation Systems, Inc. | Variable volume coolant system |
US5833523A (en) * | 1996-09-03 | 1998-11-10 | Hykes; Timothy W. | Variable volume coolant system |
US6471573B1 (en) * | 2001-02-28 | 2002-10-29 | Dana Corporation | Adapter for supplying lubricating fluid to a workpiece-engaging tool |
US20030236059A1 (en) * | 2002-06-20 | 2003-12-25 | Toyoda Koki Kabushiki Kaisha | Grinding method and grinding machine |
US6921321B2 (en) * | 2002-06-20 | 2005-07-26 | Toyoda Koki Kabushiki Kaisha | Grinding method and grinding machine |
US20130157542A1 (en) * | 2010-06-14 | 2013-06-20 | David C. Graham | Apparatuses Methods for Coolant Delivery |
US9242344B2 (en) * | 2010-06-14 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Apparatuses methods for coolant delivery |
US20140099870A1 (en) * | 2012-10-09 | 2014-04-10 | Samsung Display Co., Ltd. | Grinding apparatus for a substrate |
CN109262466A (en) * | 2018-10-23 | 2019-01-25 | 华辰精密装备(昆山)股份有限公司 | The totally-enclosed protective hood of grinding wheel of high-speed grinding |
FR3108543A1 (en) * | 2020-03-30 | 2021-10-01 | Soitec | Device for projecting an etching solution onto a substrate |
Also Published As
Publication number | Publication date |
---|---|
FR2047487A5 (en) | 1971-03-12 |
JPS4720382Y1 (en) | 1972-07-08 |
GB1256216A (en) | 1971-12-08 |
DE2023200A1 (en) | 1970-12-03 |
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