US3578278A - Vibration-isolated self-leveling platform and method - Google Patents

Vibration-isolated self-leveling platform and method Download PDF

Info

Publication number
US3578278A
US3578278A US833570A US3578278DA US3578278A US 3578278 A US3578278 A US 3578278A US 833570 A US833570 A US 833570A US 3578278D A US3578278D A US 3578278DA US 3578278 A US3578278 A US 3578278A
Authority
US
United States
Prior art keywords
pressure
platform
air
chamber
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US833570A
Other languages
English (en)
Inventor
Norman C Pickering
Joseph P Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ROBINTECH Inc
Original Assignee
ROBINTECH Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ROBINTECH Inc filed Critical ROBINTECH Inc
Application granted granted Critical
Publication of US3578278A publication Critical patent/US3578278A/en
Anticipated expiration legal-status Critical
Assigned to BANK OF NOVA SCOTIA, THE, FIRST NATIONAL BANK OF BOSTON, THE, BAYBANK MIDDLESEX, STATE STREET BANK AND TRUST COMPANY reassignment BANK OF NOVA SCOTIA, THE SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BARRY WRIGHT CORPORATION
Assigned to BARRY WRIGHT CORPORATION, A CORP. OF MA. reassignment BARRY WRIGHT CORPORATION, A CORP. OF MA. RELEASED BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: NATIONAL BANK OF BOSTON, THE
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness

Definitions

  • Kupfrian ABSTRACT A pneumatically supported, load-carrying plat- Sensitivity of response, and adjustment of the system stability results from regulating the supply of air available to the mounts, and furnishing preestablished incremental pressures above the pressures needed for proper operation of the mounts, which incremental pressures are substantially independent of both the mount pressure and the pressure from the source of supply.
  • the supporting structure comprises a table having a relatively massive platform that may be maintained in a level position, through the use of pneumatic supporting ⁇ media responsive to incipient deviations in the position of the platform from the normal level position.
  • This invention utilizes a number of design concepts that contribute to an improved structure offering advantages over the invention may be applied to stabilized lstructures generally, for purposes of illustration the invention is illustrated as applied to a self-leveling table, herein shown as a surface plate which may be of conventional design, normally being formed of granite or cast-ferrousmetal.
  • a self-leveling table herein shown as a surface plate which may be of conventional design, normally being formed of granite or cast-ferrousmetal.
  • This pla'te and a supporting framework together'form the platform which is to be stabiltively thick surface plate; hence by supporting the platform at points near its upper extremity, a pendulous structure results with an inherently greater natural stability, which imparts additional stability to the system, as compared with those structures that-are supported beneath theplatform.
  • the supports for the platform may comprise conventional pneumatic mounts, sometimes called air springs, that functionally comprise pressurized chambers, each having a movable piston or diaphragm on which a portion of the platform rests, the piston or diaphragm being urged upwardly in response to the pressure within the chamber.
  • air mounts or springs are used as are necessary for proper supvporting action, though in a preferred form of the invention four are employed, with the points of support being located at the comers of the illustrated rectangular platform.
  • a group of sensing devices located close to the air mounts d etect incipient deviations in the position of the respective portions of the platform with which each of the devices is associated, and the sensing devices control the flow of pneumatic fluid to the supporting mounts at a time and in a manner effective to restore the vindividually supported portions to their normal positions.
  • Special valve design provisions regulate the flow of air or other pneumatic fluid with the help of pressure-regulating means employed to maintain an input pressure that represents a constant increment over the normal pressure required for proper functioning of the air mounts. Additional features of the invention include a mechanism for throttling and diverting portions of the flow of fluid from the source to a damping chamber, to selectively modify. the response of the air mount.
  • the valve mechanism is designed also to compensate for unusual excursions in the platform position so as to provide a more rapid and a more effective corrective action in the air pressure when such unusual circumstances arise.
  • FIG. 3 is a vertical sectional view taken generally along the line 3-3 of FIG. l to show the generally pendulous nature of the platform support;
  • FIG. 4 is a vertical cross-sectional view of an enlarged embodiment of an air control valve, with vrelated sensing and pressure-regulating mechanisms.
  • the device comprises a table l0, preferably y I having a plurality of tubular supporting legs 1l and suitable reinforcing structural members 12.
  • a sheet metal skirt 13 may tremity, and from which the platform preferably is supported.
  • a plurality of lateral members 16 secured to the platform 14 near the lower extremity serve as a support for a suitable working surface provided as shown in FIGS. 1 and 3 by a relatively massive surface plate 17, illustrated in FIG. 1in phantorn lines.
  • the upper exposed surface 18 of the plate 17 constitutes a relatively precisely formed plane that is to be maintained in a stable state, and which provides a support for a tool, a measuring instrument or the like 19, also illustrated in FIG. l in phantom lines.
  • the platform 14 is supported at several spaced points, as previously indicated, to provide the maximum degree of equilibrium.
  • a pneumatically cushioned air mount or spring 21 is interposed at the top of each leg l1, or at such other points of the table as will provide stable support for the platform.
  • the platform accordingly has four major points of support, two of which may operate in tandem, as will appear, to provide the stability normally associated with a three-point support.
  • two of the supports shown at one end of the table and functioning in tandem might be replaced by a single centrally positioned unit to provide three-point support.
  • a surface plate may measure 24 inches by 36 inches and weigh 250 pounds. A resulting stabilizing pendulous moment of 250 pounds inches is created when the points of support are located l inch above the center of gravity of the combined platform mass.
  • the air spring 2l may be of any conventional design and is illustrated in FIG. 2 as comprising a pressurized chamber 22 formed of a base plate 23, tubular sidewalls 24, and a flexible diaphragm 25 that flexes in the manner of a bellows.
  • the diaphragm 25 preferablyl is made of suitable elastomeric material, or an elastomerically coated polyester resin or nylon fabric that is capable of forming with the base and sidewalls a fluidtight chamber.
  • a plunger 26 having a cover plate 27 is partially enclosed by a lower cup-shaped portion of the diaphragm 25, and is movable in a vertical direction as the diaphragm flexes in response to fluid pressure within the chamber 22.
  • a suitable arrangement may be provided for securing the diaphragm 25 relative to the plunger 26, and for herrnetcally sealing the diaphragm relative to the housing of the air mount 21.
  • the diaphragm may be cemented to the bottom of the plunger 26, or a clamping plate 31 with suitable fasteners may be utilized.
  • the diaphragm has a radial flanged portion 32 which may be sealed between a clamping ring 33 and a flange 34 projecting from ther-tubular sidewalls 24, as by capscrews 35.
  • the air spring is rendered functional by the admission of pressurized pneumatic fluid through a tube 36, and inlet connection 37 communicating with an air control valve as will appear.
  • the plunger 26 is shown in an equilibrium position, wherein the pressure within the chamber 22 applied to the diaphragm balances the weight applied to the plunger 26.
  • a threaded cavity 38 may receive a threaded stud 39 by which the weight of the platform 14 and load 19 may be transmitted from the flange to the plunger 26.
  • the plunger 26 floats within its supporting enclosure, and has limited freedom in both horizontal and vertical directions.
  • a certain amount of lateral damping may be introduced by controlling the dimensions of the diaphragm 25. It will be observed in FIG. 2 that a smaller diameter portion of the diaphragm extends upwardly about the plunger or piston 26, while a depending larger diameter portion 28 is joined to it by a shifting intermediate section 29.
  • the volumetric capacity of the damping chamber should be a multiple of and preferably at least three times the volumetric capacity of the pressurized work chamber 22.
  • the natural response frequency might vary through a range of from 0.6 Hz. to 2.0 l-Iz., the frequency being regulated in large measure by the valve 42 opening. Opening the valve tends to bypassA more of the fluid to the chamber 43, decreases the natui'al' frequency and increases the response time, producing a softer correction, while closing the valve 42 increases the natural frequency and the stiffness of the system.
  • the force exerted upwardly on each plunger 26 is the product of the effective area of the diaphragm 25 and the pressure within the chamber 22.
  • the effective area of one of the air springs 21 may be of the order of 7.5 square inches.
  • the total capacity of such a table would be 2,400 pounds. If the dead load weight of the platform were 400 pounds, the useful capacity of such a table for live loads would be 2,000 pounds.
  • such a valve 44 includes a valve body 46 having an inlet port 45, illustrated as a standard threaded opening for receiving pipe or tubing that may be connected with a suitable source of compressed pneumatic fluid, not illustrated.
  • a suitable source of compressed pneumatic fluid not illustrated.
  • customarily, well-filtered dry air of the type available in most industrial shops, and under a suitable pressure commonly around p.s.i. is most economical for the purpose, though the relatively low fluid consumption of the present system often justifies the use of bottled gas, such as nitrogen, particularly for mobile applications.
  • the pressure whether regulated from cylinders, or from a pressure-regulated compressor and storage system, primarily determines the load-supporting capability of the self-leveling platform. ln any case it must be adequate so that a predetermined somewhat lower pressure available within the work chamber 22 exerts the required lifting effort on the piston 26.
  • valve 44 includes also an outlet port 4 47, which communicates with the air springs, and a vent port 48 for discharging bleed air to the atmosphere.
  • outlet port 4 47 which communicates with the air springs
  • vent port 48 for discharging bleed air to the atmosphere.
  • the valve 44 has a centrally bored passage 49 extending from the top to the bottom of the valve, with different-diameter portions that form chambers communicating with the respective ports 45, 47 and-48 as will appear.
  • An inlet chamber 51 is formed by an enlargement of the passage 49, being closed off at the bottom by a suitable base plate 52, which extends across and seals the base of the valve 44.
  • the inlet chamber 51 communicates directly with the inlet lport 45 and hence normally contains air at high pressure,
  • a valve disc 53 normally seals off the top of the chamber 51, being urged against a valve seat 55 by a compresthat moderate pressure applied downwardly against the disc 57 causes it to unseat without disturbing the disc 53. The latter however will in turn be unseated if the downward motion of the disc 57 continues beyond a predetermined point, such as may be associated with sudden increasesin the load on the platform, or during startup operations, at which times the high-pressure inlet chamber 51 communicates directly with the outlet port 47, and high-'pressure air or other fluid passes freely from the source to the respective inlet connections 37 of the air springs, until an equilibrium condition is reached.
  • the pressure in the intermediate pressure chamber 56 is maintained at a constant incrementabove that at the outlet port 47 and independent of the inle pressure, through the use of a pressure regulator 6l preferably incorporated within the valve body 44.
  • the regulator valve 6l itself is of generally conventional design and incorporates a high-pressure chamber 62 communicating with inlet chamber 5l.
  • a valve, preferably comprising a hardened ball 63 is held against seat 64 by a compression spring 65, assisted also by the relatively high-pressure in the chamber 62 acting against the ball.
  • the ball may be depressed to admit high-pressure air as by la pin 66 responding to the motion of a conventional regulator diaphragm or piston 67 to which the pin is attached.
  • the piston 67 shown with an O-ring 69 for hennetic seal, operates within a close-fitting cylinder 68 and the piston functions as a moving partition dividing the cylinder into a lower-pressure chamber 7l above the piston, and a higher-pressure chamber 72 below the piston.
  • a heavyduty regulator spring 73 bears downwardly against the piston 67 with a force determined by the position of a regulating screw 74 threaded into the regulator body and operable through a head 75 with the aid of a suitable adjusting tool.
  • the head may be shaped as a thumb wheel shown in broken lines, for ease of operation.
  • a locknut 76 or similar device which may include a finger lever 77 for quick-locking action, holds the screw 74 in adjusted position.
  • the lowerpressure chamber 7l communicates with the outlet port 47 through duct 78, and thus imparts substantially the prevailing air spring pressure to the piston 67, assisting spring 73 in exerting downward pressure. ln an equilibrium condition, however, this pressure is not adequate to open valve 63 introducing new air to the mounts, until the system signals a change in the platform position, as will appear.
  • a sensing device 79 of improved design transmits positional data from the platform 14 to the air control valve in a manner to produce corrective action, and upon completion of the corrective servo action, to erase the original signal.
  • the sensor 79 comprises a smooth cylindrical rod 8l that smoothly slides within upper and lower smalldiameter portions of the bored passage 49, and particularly within a close-fitting plastic bushing 82, with good lubricating properties, sealed within the passage 49.
  • the lower end of the rod 8l rests freely upon the valve disc 57 but the rod is of insufficient -weight of itself to open the valve.
  • the clearance between the periphery of the rod, and the surrounding portions of the bushing 82 are minimal, to reduce leakage, which may be even more closely controlled by employing a sealing ring 83, located within a necked-down zone or groove inthe rod.
  • the ring 83 may be of circular cross section, and it may be of moderately deformable elastomeric material, typically using tetrafluorethylene or a related product having a l'ow coefficient of friction. lt is fitted to the surrounding wall preferably with a slight interfering fit so as to provide a relatively smooth sliding action for the rod 8l, with no significant leakage of air past the ring. With small translation of the rod 8l, the ring 83 ⁇ may even tend to roll in its groove, reducing the frictional effects nomially associated with sliding rings.
  • a port 84 allows for the continuous bleeding of such a small amount of air from'the system as leaks into a bore 88 between the bottom of the sensing rod 8l and the valve disc 57.
  • the rate of flow is controlled by the type of finish used on the ad- I joining surfaces, the type of materials used o'n the mating sufficient only to provide a-gradual continuous reduction in the pressure exerted on the pistons 26 so that after a predetermined interval a resultant finite contraction in the volume of the pressurized fluid within an air spring, contracts the diaphragm, producing a measurable lowering of the platform 14.
  • This deviation from an originally established .normal position may be infinitesimal, that is, in microinches, but it is faithfully transmitted to the sensing rod 8l, in any convenient manner, but preferably through a small filamentary linkage that transmits axial forces, but lacks rigidity to exert significant lateral forces that might cause binding of the sensing rod.
  • a tiny bleed hole, 60 typically made with a 07l drill may extend through the disc 57, to connect chamber 56 with the air springs.
  • a similar result might be obtained by having a controlled degree of porosity at the joint between the disc 57 and the seat 58, as by employing mating surfaces of predetermined roughness.
  • the amount of leakage however is not of a magnitude to materially disturb the moderate differential pressure between the chamber 56 and the port 47.
  • a straightenedwire 86 for example of hardened stainless steel or music wire, extends from the sensing rod 8l to a bracket 87 secured beneath the platform, Threaded stems 85 may be soldered or otherwise attached to one or both ends of the wire, and the assembly is adjustably secured by screw threads to the sensing rod and bracket respectively, and heid in the desired relationship to these parts as by locknuts 89.
  • air from the intermediate-pressure chamber 56 also flows through port 78 and increases the pressure within the lowerpressure chamber 71, helping to actuate valve 63 sufficiently to restore the predetermined pressure in the intermediatepressure chamber 56.
  • the platform tends to rise on its air spring supports, and the incipient motion, transmitted through the relatively vfine wire 86 lifts the-rod 8l from the disc S7, allowing free bleeding of air from the air springs via the outlet port 47 to the bore 88 and out through the vent 48.
  • the softness of the response of the system is an inverse function of the differential pressure between the chamber 56 and that at the outlet port 47. Assuming a fixed setting of the bleed valve 42, the lower the pressure in chamber 56 relative to port 47, the more softness, or delay in the corrective action, but the greater the sensitivity a constant differential in chamber 56, of say l0 or l5 p.s.i., as compared with an input pressure of some
  • a similar abnormal operating condition may arise when a heavy load is suddenly applied to the table, in which case a quick downward responsive movement of the rod 8l to a secondary position imparted by axial motion of the filament 86, opens both valves 56 and 53, giving more immediate response by briefly connecting the air springs directly with the pressurized source, until equilibrium is reached. Since the filament 86 is relatively flexible any lateral motion at one end of the wire relative to the other end results in a compliant motion of the wire without imparting significant lateral forces to the rod 8l.
  • valves and air springs may be arranged, according to the required nature of support, and the degree of control needed. lf the need is simply to maintain f height at a given point, a single valve and sensor may be used,
  • any system requiring orientation of a plane fequires at least three sensors and controls, with at least one neighboring air spring operated by each.
  • a single spring and valve is sufficient. With the system illustrated, four separated air springs are used, each of two being controlled by separate valves and sensors, and the remaining two being operated in tandem by the third valve and sensor.
  • a self-leveling vibration-isolated mounting system comprising a platform, pressure-responsive pneumatic means for adjustably supporting said platform, a sensor responsive to deviations in the position of said platform from a predetermined norm, and valve means operable by said sensor for conducting pneumatic fluid from a pressurized source to said pneumatic means, said valve means including an inlet port for connection to said pressurized source of pneumatic fluid, an intermediate-pressure chamber for receiving pneumatic fluidv from said inlet port, an outlet port for receiving pneumatic fluid from said intermediate pressure chamber, and pressure regulator means operative to maintain a substantiallyconstant I differential between the pressure acting at said outlet portancl the pressure in said intennediate chamber.
  • a vibration-isolated mounting system as claimed in claim l wherein said differential is maintained substantially independent ofthe pressures at said ports.
  • valve means includes a valve body enclosing said regulator means.
  • a vibration-isolated mounting system as set forth in claim l including a damping chamber also communicating with said valve means and with said pneumatic means, and a throttle device for regulating the proportion of fluid flowing from said source to said pneumatic means and to said damping chamber respectively.
  • a stabilized structure having pneumatic positioning means responsive to controlled pressure of air for adjusting the position of said structure, and a sense responsive to deviations in the position of said structurefrom a predetermined normal position for regulating the flow of compressed air to said positioning means, the improvement comprising an air control valve having an inlet chamber for communication with a supply of air under pressure, an outlet port for communicating with said pneumatic positioning means, an intermediatepressure chamber, a first-valve means actuated by said sensor for conducting air from said intermediate-pressure chamber to said outlet port, and regulator valve means having pressureresponsive means communicating respectively with said outlet port and with said intermediate-pressure chamber, and being operable by adifferential pressure between said outlet port and said intermediate-pressure chamber for controlling the passage of air from said inlet chamber to said intermediatepressure chamber.
  • Apparatus as claimed in claim l0 including means for regulating the effective force of said spring means.
  • Apparatus as claimed in claim l0 including a bleed path extending between said intennediate-pressure chamber and said outlet port, said path allowing continuous predetermined minimal flow of air to bypass said first-valve means to help in minimizing Athe differential pressure between said intermediate-pressure chamber and said outlet port.
  • a vibration-isolated mount comprising a load-bearing platform, a plurality of air springs supporting said platform at spaced points, a valve for each of said air springs, sensing means associated with each of said valves for controlling the flow from a source of air under pressure to said respective springs in response to deviations in the position of said platform from an established norm, and regulator means for reducing the pressure from said source to a substantially con- Y stant increment above a normal pressure required in said air springs for the support of said platform.
  • the method of supporting a stabilized structure within predetermined limits from an established normal position comprising adjustably supporting the structure pneumatically with fluid under normal pressure ⁇ detecting incipient deviations in the position of said structure from said normal positions as during a reduction in said normal pressure, varying the pressure of said fluid applied to said structure in accordance with said deviations so as to restore said normal position, and maintaining the upper limit 'of said applied fluid pressure at an established increment above said normal pressure.
  • a self-leveling platform having pneumatic supporting and positioning means responsive to controlled pressure of air for adjusting the level of said platform, and a sensor responsive to deviations in the position of said platform from a predetermined normal position for regulating the flow of compressed airito said positioning means, the improvement comprising an air control valve having an inlet chamber for communication with a supply of air under pressure, an outlet port for communicating with said pneumatic positioning means, and vent means, said sensor including means operable when said sensor is moved in one direction from anormal position to admit compressed air to said outlet port, and being operable when in a normal position to bleed small predetermined quantities of leakage air from said outlet port toI said vent means, said sensor also including means when said sensor is moved in the opposite direction to provide paths of successively increased cross section and accordingly of progressively reduced resistance to the flow of air from said outlet port to said vent means as the motion of said sensor increases.
  • said sensor includes a rod normally responsive to the motion of said platform and being slidably contained within a close-fitting bore within said valve, said rod being sufficiently responsive to the air pressure at said outlet port when said platform moves beyond predetermined limits as to be ejected from said bore, whereupon said bore provides an additional path for venting air from said outlet port.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Reinforced Plastic Materials (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
US833570A 1969-06-16 1969-06-16 Vibration-isolated self-leveling platform and method Expired - Lifetime US3578278A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83357069A 1969-06-16 1969-06-16

Publications (1)

Publication Number Publication Date
US3578278A true US3578278A (en) 1971-05-11

Family

ID=25264776

Family Applications (1)

Application Number Title Priority Date Filing Date
US833570A Expired - Lifetime US3578278A (en) 1969-06-16 1969-06-16 Vibration-isolated self-leveling platform and method

Country Status (5)

Country Link
US (1) US3578278A (enrdf_load_stackoverflow)
CA (1) CA930753A (enrdf_load_stackoverflow)
DE (1) DE2029814A1 (enrdf_load_stackoverflow)
FR (1) FR2052670A5 (enrdf_load_stackoverflow)
GB (1) GB1311303A (enrdf_load_stackoverflow)

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908940A (en) * 1973-06-27 1975-09-30 Stricht Pablo M V D Cable-suspension device for apparatus to be protected from impacts
US3917201A (en) * 1974-11-07 1975-11-04 Ehrenreich Photo Optical Ind Vibration isolated table with improved mounts
US4909473A (en) * 1988-12-20 1990-03-20 Kohler Co. Shock absorber assembly for a table or the like
US5320047A (en) * 1992-03-06 1994-06-14 Monarch Hydraulics, Inc. Desk having self-releveling height adjustment and hydraulic circuit therefor
US5322025A (en) * 1992-05-29 1994-06-21 Steelcase Inc. Adjustable dual worksurface support
US5356110A (en) * 1993-06-08 1994-10-18 Newport Corporation Pneumatic isolation systems for damping vertical, horizontal and rotational vibrations
US5379980A (en) * 1991-12-23 1995-01-10 Newport Corporation Stabilization systems for vibration isolators
US5406713A (en) * 1988-10-03 1995-04-18 Oman; Robert Apparatus for maintaining a scientific and measuring instrument or the like in a level plane
US5482303A (en) * 1995-03-07 1996-01-09 Meloy; John Carriage table
US6062551A (en) * 1996-07-15 2000-05-16 Toyo Tire & Rubber Co., Ltd. Active vibration-isolating device
US6202492B1 (en) * 1996-04-05 2001-03-20 Nikon Corporation Anti-vibration apparatus and exposure apparatus
US20020021502A1 (en) * 2000-08-14 2002-02-21 Melles Griot Limited Optical workstation
US6394407B1 (en) * 1998-07-14 2002-05-28 Newport Corporation Passive vibration isolator with profiled supports
US20020079198A1 (en) * 1999-02-23 2002-06-27 Nguyen Van Diep Process and device for displacing a moveable unit on a base
US6438461B1 (en) 1999-02-23 2002-08-20 Newport Corporation Method and device for displacing a moving body on a base mounted elastically with respect to the ground
US6511035B1 (en) 1999-08-03 2003-01-28 Newport Corporation Active vibration isolation systems with nonlinear compensation to account for actuator saturation
US6516130B1 (en) 1998-12-30 2003-02-04 Newport Corporation Clip that aligns a fiber optic cable with a laser diode within a fiber optic module
US6568666B2 (en) 2001-06-13 2003-05-27 Newport Corporation Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload
US6601524B2 (en) 2001-03-28 2003-08-05 Newport Corporation Translation table with a spring biased dovetail bearing
US6614601B2 (en) 1998-08-17 2003-09-02 Newport Corporation Gimballed optical mount
US6619611B2 (en) 2001-07-02 2003-09-16 Newport Corporation Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration
US20030209646A1 (en) * 2002-05-07 2003-11-13 Ryaboy Vyacheslav M. Snubber for pneumatically isolated platforms
US6655840B2 (en) 2001-02-13 2003-12-02 Newport Corporation Stiff cross roller bearing configuration
US20040046294A1 (en) * 2002-09-10 2004-03-11 Canon Kabushiki Kaisha Shock absorbing apparatus in a positioning apparatus
US6791058B2 (en) 2001-04-25 2004-09-14 Newport Corporation Automatic laser weld machine for assembling photonic components
US20060119026A1 (en) * 2004-12-07 2006-06-08 Ryaboy Vyacheslav M Methods and devices for active vibration damping of an optical structure
US20070201209A1 (en) * 2006-02-27 2007-08-30 Francis Sally J Connection apparatus and method
US7320455B2 (en) 2003-10-24 2008-01-22 Newport Corporation Instrumented platform for vibration-sensitive equipment
USD568066S1 (en) * 2006-09-19 2008-05-06 Warren Cohen Cooler stand
US20100006179A1 (en) * 2008-07-10 2010-01-14 Lee-Cheng Chang Combined base assembly and granite jointer table for hand jointer
US20130125793A1 (en) * 2011-11-22 2013-05-23 Alex K. Deyhim Two degrees of freedom optical table
US20130264455A1 (en) * 2005-04-06 2013-10-10 Jody G. Robbins Method and apparatus for an adaptive suspension support system
US8777177B2 (en) 2011-10-21 2014-07-15 Stephen A. Youngers Hydraulic fluid actuated equipment leveling assembly
US9574613B1 (en) 2014-06-23 2017-02-21 Stephen A. Youngers Machine leveling pedestal
US9625080B1 (en) 2014-06-23 2017-04-18 Stephen A. Youngers Assembly for hydraulic fluid actuated machine leveling
US20170129010A1 (en) * 2014-06-18 2017-05-11 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US20170129011A1 (en) * 2014-01-14 2017-05-11 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US10575443B2 (en) 2005-12-22 2020-02-25 Scalematrix Method and apparatus for a distributed cooling system for electronic equipment enclosures
CN112664605A (zh) * 2020-11-30 2021-04-16 陕西威斯特高新技术投资有限公司 一种便于维护且稳定性好的工业自动化设备安装架
CN114990740A (zh) * 2022-06-29 2022-09-02 江苏今达纺织实业有限公司 一种银离子改性纤维抗菌布生产用原料混合装置
US20220373059A1 (en) * 2021-05-20 2022-11-24 Dynamica Design Ltd. System, Device, and Method of Protecting Sensitive Equipment Against Vibrations and Earthquakes
US20230085971A1 (en) * 2021-09-17 2023-03-23 Carl Zeiss Smt Gmbh Vibration isolator for supporting a payload

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2525763A1 (de) * 1975-06-10 1976-12-16 Brumme Kg Effbe Werk Regelventil
DE3329327A1 (de) * 1983-08-13 1985-02-28 Fa. Carl Freudenberg, 6940 Weinheim Gasdruckfeder

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2173342A (en) * 1938-11-16 1939-09-19 Rosenzweig Siegfried Vibration isolation unit
US2605066A (en) * 1946-12-21 1952-07-29 Firestone Tire & Rubber Co Air spring for heavy machinery
US2706607A (en) * 1950-03-31 1955-04-19 British Petroleum Co Supporting of engines and other machinery
GB1064671A (en) * 1963-07-12 1967-04-05 Yarrow & Company Improvements in and relating to anti-vibration mountings

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2173342A (en) * 1938-11-16 1939-09-19 Rosenzweig Siegfried Vibration isolation unit
US2605066A (en) * 1946-12-21 1952-07-29 Firestone Tire & Rubber Co Air spring for heavy machinery
US2706607A (en) * 1950-03-31 1955-04-19 British Petroleum Co Supporting of engines and other machinery
GB1064671A (en) * 1963-07-12 1967-04-05 Yarrow & Company Improvements in and relating to anti-vibration mountings

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908940A (en) * 1973-06-27 1975-09-30 Stricht Pablo M V D Cable-suspension device for apparatus to be protected from impacts
US3917201A (en) * 1974-11-07 1975-11-04 Ehrenreich Photo Optical Ind Vibration isolated table with improved mounts
US5406713A (en) * 1988-10-03 1995-04-18 Oman; Robert Apparatus for maintaining a scientific and measuring instrument or the like in a level plane
US4909473A (en) * 1988-12-20 1990-03-20 Kohler Co. Shock absorber assembly for a table or the like
US5379980A (en) * 1991-12-23 1995-01-10 Newport Corporation Stabilization systems for vibration isolators
US5320047A (en) * 1992-03-06 1994-06-14 Monarch Hydraulics, Inc. Desk having self-releveling height adjustment and hydraulic circuit therefor
US5322025A (en) * 1992-05-29 1994-06-21 Steelcase Inc. Adjustable dual worksurface support
US5356110A (en) * 1993-06-08 1994-10-18 Newport Corporation Pneumatic isolation systems for damping vertical, horizontal and rotational vibrations
US5482303A (en) * 1995-03-07 1996-01-09 Meloy; John Carriage table
US6202492B1 (en) * 1996-04-05 2001-03-20 Nikon Corporation Anti-vibration apparatus and exposure apparatus
US6062551A (en) * 1996-07-15 2000-05-16 Toyo Tire & Rubber Co., Ltd. Active vibration-isolating device
US6394407B1 (en) * 1998-07-14 2002-05-28 Newport Corporation Passive vibration isolator with profiled supports
US6614601B2 (en) 1998-08-17 2003-09-02 Newport Corporation Gimballed optical mount
US6608959B2 (en) 1998-12-30 2003-08-19 Newport Corporation Apparatus and process for welding a fiber optic cable
US6516130B1 (en) 1998-12-30 2003-02-04 Newport Corporation Clip that aligns a fiber optic cable with a laser diode within a fiber optic module
US6438461B1 (en) 1999-02-23 2002-08-20 Newport Corporation Method and device for displacing a moving body on a base mounted elastically with respect to the ground
US6996506B2 (en) 1999-02-23 2006-02-07 Newport Corporation Process and device for displacing a moveable unit on a base
US20020079198A1 (en) * 1999-02-23 2002-06-27 Nguyen Van Diep Process and device for displacing a moveable unit on a base
US20050126892A9 (en) * 1999-02-23 2005-06-16 Nguyen Van D. Process and device for displacing a moveable unit on a base
US6511035B1 (en) 1999-08-03 2003-01-28 Newport Corporation Active vibration isolation systems with nonlinear compensation to account for actuator saturation
US20020021502A1 (en) * 2000-08-14 2002-02-21 Melles Griot Limited Optical workstation
US6655840B2 (en) 2001-02-13 2003-12-02 Newport Corporation Stiff cross roller bearing configuration
US6601524B2 (en) 2001-03-28 2003-08-05 Newport Corporation Translation table with a spring biased dovetail bearing
US6791058B2 (en) 2001-04-25 2004-09-14 Newport Corporation Automatic laser weld machine for assembling photonic components
US6568666B2 (en) 2001-06-13 2003-05-27 Newport Corporation Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload
US6619611B2 (en) 2001-07-02 2003-09-16 Newport Corporation Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration
US20030209646A1 (en) * 2002-05-07 2003-11-13 Ryaboy Vyacheslav M. Snubber for pneumatically isolated platforms
US6966535B2 (en) 2002-05-07 2005-11-22 Newport Corporation Snubber for pneumatically isolated platforms
US7198141B2 (en) * 2002-09-10 2007-04-03 Canon Kabushiki Kaisha Shock absorbing apparatus in a positioning apparatus
US20040046294A1 (en) * 2002-09-10 2004-03-11 Canon Kabushiki Kaisha Shock absorbing apparatus in a positioning apparatus
US7320455B2 (en) 2003-10-24 2008-01-22 Newport Corporation Instrumented platform for vibration-sensitive equipment
US20060119026A1 (en) * 2004-12-07 2006-06-08 Ryaboy Vyacheslav M Methods and devices for active vibration damping of an optical structure
US8651447B2 (en) 2004-12-07 2014-02-18 Newport Corporation Methods and devices for active vibration damping of an optical structure
US8231098B2 (en) 2004-12-07 2012-07-31 Newport Corporation Methods and devices for active vibration damping of an optical structure
US20130264455A1 (en) * 2005-04-06 2013-10-10 Jody G. Robbins Method and apparatus for an adaptive suspension support system
US9528567B2 (en) * 2005-04-06 2016-12-27 Zero Shock Seating, Llc Method and apparatus for an adaptive suspension support system
US10575443B2 (en) 2005-12-22 2020-02-25 Scalematrix Method and apparatus for a distributed cooling system for electronic equipment enclosures
US20070201209A1 (en) * 2006-02-27 2007-08-30 Francis Sally J Connection apparatus and method
USD568066S1 (en) * 2006-09-19 2008-05-06 Warren Cohen Cooler stand
US20100006179A1 (en) * 2008-07-10 2010-01-14 Lee-Cheng Chang Combined base assembly and granite jointer table for hand jointer
US8777177B2 (en) 2011-10-21 2014-07-15 Stephen A. Youngers Hydraulic fluid actuated equipment leveling assembly
US20130125793A1 (en) * 2011-11-22 2013-05-23 Alex K. Deyhim Two degrees of freedom optical table
US11407033B2 (en) * 2014-01-14 2022-08-09 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US20170129011A1 (en) * 2014-01-14 2017-05-11 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US11407032B2 (en) * 2014-06-18 2022-08-09 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US20170129010A1 (en) * 2014-06-18 2017-05-11 Hoden Seimitsu Kako Kenkyusho Co., Ltd. Three-dimensional shaping apparatus
US9574613B1 (en) 2014-06-23 2017-02-21 Stephen A. Youngers Machine leveling pedestal
US9625080B1 (en) 2014-06-23 2017-04-18 Stephen A. Youngers Assembly for hydraulic fluid actuated machine leveling
CN112664605A (zh) * 2020-11-30 2021-04-16 陕西威斯特高新技术投资有限公司 一种便于维护且稳定性好的工业自动化设备安装架
US20220373059A1 (en) * 2021-05-20 2022-11-24 Dynamica Design Ltd. System, Device, and Method of Protecting Sensitive Equipment Against Vibrations and Earthquakes
US12123473B2 (en) * 2021-05-20 2024-10-22 Dynamica Design Ltd. System, device, and method of protecting sensitive equipment against vibrations and earthquakes
US20230085971A1 (en) * 2021-09-17 2023-03-23 Carl Zeiss Smt Gmbh Vibration isolator for supporting a payload
US12392391B2 (en) * 2021-09-17 2025-08-19 Carl Zeiss Smt Gmbh Vibration isolator for supporting a payload
CN114990740A (zh) * 2022-06-29 2022-09-02 江苏今达纺织实业有限公司 一种银离子改性纤维抗菌布生产用原料混合装置
CN114990740B (zh) * 2022-06-29 2023-05-12 江苏今达纺织实业有限公司 一种银离子改性纤维抗菌布生产用原料混合装置

Also Published As

Publication number Publication date
GB1311303A (en) 1973-03-28
DE2029814A1 (enrdf_load_stackoverflow) 1970-12-23
FR2052670A5 (enrdf_load_stackoverflow) 1971-04-09
CA930753A (en) 1973-07-24

Similar Documents

Publication Publication Date Title
US3578278A (en) Vibration-isolated self-leveling platform and method
CN101646918B (zh) 具有用于平衡竖直移动构件重量的装置的坐标测量机
US4360184A (en) Pneumatic device for attenuation of vertical, horizontal and rotational dynamic forces
US5956951A (en) Adjustable magneto-rheological fluid device
US4850261A (en) Non-contacting electro-pneumatic servo for vibration isolation
US5379980A (en) Stabilization systems for vibration isolators
US5285995A (en) Optical table active leveling and vibration cancellation system
US3730473A (en) Pneumatic self-positioning shock and vibration isolation stabilizing absorber
US4730541A (en) Non contacting electro-pneumatic servo for vibration isolation
US3921286A (en) Pressure balanced hydrostatic slip bearing used in a guide and restraint system
JPH0437294B2 (enrdf_load_stackoverflow)
JPH0562245B2 (enrdf_load_stackoverflow)
JPS61500957A (ja) 車両用懸架方法及び装置
US5042784A (en) Damping support structure
JPS5952292B2 (ja) 圧力平衡型流体軸受システム
US6042079A (en) Device for vibration isolation
US3289967A (en) Tension regulator
US3310263A (en) Gravity-sensitive levelling
US6457369B1 (en) Loading assembly having a soft actuator
JPH02504068A (ja) 圧力標準化装置
US3856266A (en) Balancing apparatus with servo relief valve
US2981572A (en) Hydrostatic bearing system
Ben-Dov et al. A force-controlled pneumatic actuator for use in teleoperation masters
JP3190409B2 (ja) 構造物の制振装置
US3340943A (en) Air cushion stability control device with adjustable plenum chamber volume

Legal Events

Date Code Title Description
AS Assignment

Owner name: FIRST NATIONAL BANK OF BOSTON, THE

Free format text: SECURITY INTEREST;ASSIGNOR:BARRY WRIGHT CORPORATION;REEL/FRAME:004923/0769

Effective date: 19880509

Owner name: BAYBANK MIDDLESEX

Free format text: SECURITY INTEREST;ASSIGNOR:BARRY WRIGHT CORPORATION;REEL/FRAME:004923/0769

Effective date: 19880509

Owner name: STATE STREET BANK AND TRUST COMPANY

Free format text: SECURITY INTEREST;ASSIGNOR:BARRY WRIGHT CORPORATION;REEL/FRAME:004923/0769

Effective date: 19880509

Owner name: BANK OF NOVA SCOTIA, THE

Free format text: SECURITY INTEREST;ASSIGNOR:BARRY WRIGHT CORPORATION;REEL/FRAME:004923/0769

Effective date: 19880509

AS Assignment

Owner name: BARRY WRIGHT CORPORATION, A CORP. OF MA., MASSACHU

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:NATIONAL BANK OF BOSTON, THE;REEL/FRAME:005128/0441

Effective date: 19890526