US3529115A - Heating devices - Google Patents
Heating devices Download PDFInfo
- Publication number
- US3529115A US3529115A US733838A US3529115DA US3529115A US 3529115 A US3529115 A US 3529115A US 733838 A US733838 A US 733838A US 3529115D A US3529115D A US 3529115DA US 3529115 A US3529115 A US 3529115A
- Authority
- US
- United States
- Prior art keywords
- wave
- guide
- source
- energy
- loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title description 22
- 230000008878 coupling Effects 0.000 description 42
- 238000010168 coupling process Methods 0.000 description 42
- 238000005859 coupling reaction Methods 0.000 description 42
- 230000005855 radiation Effects 0.000 description 26
- 239000000463 material Substances 0.000 description 16
- 230000010287 polarization Effects 0.000 description 16
- 239000000543 intermediate Substances 0.000 description 15
- 230000001678 irradiating effect Effects 0.000 description 9
- 238000005070 sampling Methods 0.000 description 7
- 239000008188 pellet Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 101001128135 Homo sapiens NACHT, LRR and PYD domains-containing protein 4 Proteins 0.000 description 1
- 101000982939 Homo sapiens PAN2-PAN3 deadenylation complex catalytic subunit PAN2 Proteins 0.000 description 1
- 101000742934 Homo sapiens Retinol dehydrogenase 14 Proteins 0.000 description 1
- 102100027016 PAN2-PAN3 deadenylation complex catalytic subunit PAN2 Human genes 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- -1 polytetrafluorethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003019 stabilising effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/78—Arrangements for continuous movement of material
Definitions
- a heating device e.g. for preparing plastics material for moulding, utilises a beam of microwave radiation propagated through a wave-guide from a source at one end thereof, past an irradiating zone through which articles to be heated are conveyed, to the other end of the waveguide, and means are provided connecting said other end to an intermediate point of the wave-guide (between the source and the irradiating zone) to form a loop so that the beam passes any point around such loop at least twice.
- This invention relates to heating devices in which the heating medium is microwave electromagnetic radiation.
- a heating device comprising a source of microwave energy coupled to one end of a wave-guide so as to produce a beam of microwave electromagnetic radiation therealong, including means connecting the other end of said wave-guide to an intermediate point thereon so that the portion of the length of said wave-guide between said inter-mediate point and said other end is formed into a closed loop so that said beam passes any point around said loop at least twice, and means for conveying articles to be heated through an irradiating zone comprising a portion of the path of said beam within said loop.
- the rotation of the plane of polarisation may be done in the coupling between the other end and the intermediate point; most simply, said coupling may comprise a length of coaxial cable so connected to the other end and to the intermediate point of the wave-guide as to pick up the residual microwave energy when it first reaches said other end and return it to the wave-guide, at the intermediate point, polarised at 90 to the radiation from the source.
- a directional coupler in which the energy received frm said two pick-ups is combined and delivered to two couplings at the intermediate point, both injecting energy into the wave-guide with polarisation at 90 to that of the source, the outputs to the two couplings being so phased as to cause the energy returned to the waveguide to be propagated away from the source.
- the device includes means for automatic control of the output of the source by feed back of a control signal produced by sensing the intensity of the beam at some convenient part of the loop, so that the heating produced is substantially constant. Also, in some forms of device embodying the invention it is found that some small part of the beam returns to the source after repeated reflections, and such automatic control enables the source to be protected against undesirably high levels of returning radiation without unnecessary limitation of the beam intensity in the loop.
- FIG. 1 is a diagram of one form of device embodying the invention
- FIG. 2 is a section on line IIII of FIG. 1;
- FIGS. 3 and 4 are views (similar to FIGS. 1 and 2 respectively) of a second form of device
- FIG. 5 is a view (similar to FIGS. 1 and 3) of a third form of device.
- FIGS. 6 and 7 are detail views of a modification applicable to any of the three forms of device shown in FIGS. 1 to 5.
- the device there shown includes a microwave source 5 comprising a magnetron oscillator, delivering its output via a radiating antenna RA into a waveguide WG of rectangular section.
- Said waveguide is formed into a rectangular loop, having angled portions at three corners of the rectangle; one long side of the 3 rectangle is extended past the fourth corner, at which the adjacent short side overlaps the extended long side, making a T junction.
- the radiating antenna RA is located in the extended long side, outside the rectangular loop.
- a filter F1 is provided in the waveguide.
- a coupling device CD extends through the walls of the wave-guide where the two sides of the loop overlap at the T junction.
- a conveyor belt CB runs through the wave-guide in an enclosing tube ET of insulating material (see also FIG. 2). Said conveyor belt and its enclosing tube pass through openings in the wall of the wave-guide fitted with filter stubs FS.
- the Wave-guide In the long side of the rectangular loop remote from the T junction, the Wave-guide includes a twisted section TS. From this section to the T junction (going in the direction of arrows X) the smaller dimension of the wave-guide is measurable in the plane of FIG. 1, while the remainder of the wave-guide (including the extended long side of the loop and the short side through which the conveyor belt passes) is so orientated that its larger dimension is measurable in said plane.
- a further filter F2 is fitted to the wave-guide, and adjoining the filter F2 a sampling coupling SC is also provided;
- the sampling coupling in the form of a power divider, extracts a small fraction of microwave energy passing through the waveguide and feeds it to a detector unit D which is adapted to produce an output signal, e.g. a DC. voltage, representing at any instant the intensity of the microwave beam then passing the coupling SC, and said output signal is carried by a control line CL to the source S in which said control signal is applied to control the output of the source in known manner so as to stabilise the intensity of the microwave beam in the wave-guide.
- an output signal e.g. a DC. voltage
- the coupling SC may be directional, i.e. may sample only the energy travelling in one selected direction, in which case the filter F2 is placed on the other side of coupling SC and the latter is arranged to sample returning radiation.
- the microwave beam in the wave-guide travels as indicated by arrows X from the antenna RA past the filter F1 and the T junction, round the loop to the coupling device CD, and thence embarks upon a second journey round the loop.
- the filter F1 allows radiation from the antenna RA to pass, but reflects radiation polarised at 90 to the plane of polarisation of the beam from the antenna RA. Radiation from the coupling device CD is however polarised at 90 to said plane,-on account of the presence in the loop of wave-guide of the twisted section TS. Hence radiation from the coupling device CD cannot pass the filter F 1 and hence cannot return to the radiating antnenna IRA to damage the source S.
- the filter F2 is similar to filter F1, but so orientated that radiation polarised at 90 to the aforesaid plane can pass it and hence serving to reflect radiation polarised in said plane.
- the beam can, therefore, pass from the radiating antenna round the loop of wave-guide, start a second journey round the loop without feeding back towards the radiating antenna RA, and continue its second journey as far as the filter F2.
- it is reflected, because on its second passage through the twisted section TS the beam has its plane of polarisation altered by a further 90, making 180 in all.
- the reflected radiation returns round the loop, undergoing a 90 polarisation change (in the opposite sense) as it returns through the twisted section; when it reaches the filter F1 the returning beam cannot pass, as its polarisation plane is still at 90 to that of radiation from antenna RA.
- the beam will then oscillate backwards and forwards between the filters F1, F2.
- the beam will necessarily by this time have undergone a number of successive attenuations and such part of the beam as returns to the radiating antenna can be kept to a safe level by suitable setting of the control means comprising detector D connected to source S.
- the purpose of the device is to heat material (e.g. pellets of synthetic resin prior to their use in an injection moulding machine) and such material is fed through the device on conveyor belt CB.
- material e.g. pellets of synthetic resin prior to their use in an injection moulding machine
- the mircrowave beam will be of several times the intensity of the beam generated by the source S and radiating antenna RA, due to the recirculation of the beam described above, hence for any given power delivered by source S, the heating of the material will be correspondingly faster than in known devices wherein no recirculation occurs.
- This attenuation is sensed by means of the sampling coupling SC and detector D, and the control of source S in accordance with this sensing causes the output of source S to be increased to balance this attenuation, the control of such increase being however so arranged that the proportion of the radiation which (as explained above) ultimately returns to the radiating antenna is never permitted to reach a level at which damage to the source is possible.
- the flow of material carried by conveyor belt CB may be allowed to vary, as the consequent variations in microwave beam attenuation are automatically balanced (by the stabilising control exercised through detector D) thus enabling the fastest practicable heating to be obtained in all circumstances.
- a phasing network PN is provided, to permit adjustment of the electrical length of the loop of waveguide.
- FIG. 3 various parts of the device here shown are generally similar to those of FIGS. 1 and 2 and hence will not be described again, but merely given the same references on the drawing.
- the wave-guide WG has no twisted section TS, and is not formed into a complete loop but into a substantially U shape.
- the end portion of the wave-guide remote from the microwave source S is linked to the coupling device CD by coaxial cable CC, having a pick-up coupling PC in said end-portion.
- the sampling coupling SC is placed in the cable CC, which cable also contains a phasing network PN, and the coupling PC and coupling device CD are arranged respectively to pick up radiation with the polarisation of source S and to inject energy into the wave-guide with polarisation at to that of the source S.
- the operation of the device of FIG. 3 is similar to that of the device of FIG. 1; it will however be noted that as the change of polarisation plane is effected by the relationship between the couplings at the two ends of the coaxial cable CC and the wave-guide WG, and hence no twisted section TS is needed, equally it is not necessary to employ a rectangular-section wave-guide and (as shown in FIG. 4) the wave-guide WG of FIG. 3 is of circular section.
- the device of FIG. 5 again has much in common with the devices of FIGS. 1 and 3 and the same references are given to similar parts.
- the loop round which microwave radiation circulates is in part made 'of coaxial cable.
- a rather more complex cable connection is provided in the device of FIG. 5, however, a rather more complex cable connection is provided.
- the pick-up coupling P02 is arranged to collect radiation polarised in the plane of radiation direct from source S (i.e. on its first passage round the loop) while pick-up coupling PC1 collects radiation polarised at 90 to that direct from the source (i.e. on its second or subsequent passage).
- Coupling devices CD1, CD2 are both arranged so that radiation they inject into the wave-guide WG is polarised at 90 to that coming direct from the source through filter F1; also, the phases and amplitudes of the energy so injected by devices CD1, CD2 are so regulated by networks PANl, PANZ and the unit DCU that the radiation from said devices propagates forward (i.e. as indicated by arrows X).
- the networks PANl, PANZ are desirably adjustable to provide correct phasing and amplitude at each of the devices CD1, CD2.
- a convenient arrangement is for one of said networks to serve as an attenuator and the other as a phase-shifter; the latter may with advantage be arranged to be controlled automatically by the power levels applied to the two inputs of the directional coupler unit DCU, as it is the ratio between these levels that determines the relative phasing of the two outputs from the coupler unit. 1
- Sampling coupling SC is in the device of FIG. 5 placed at a point between the coupling devices CD1, CD2 and the part of the wave-guide WG through which the conveyor belt CB passes; said sampling coupling is arranged to extract a fraction of the total microwave beam passing it, i.e. to sample both the radiation direct from source S and that recirculated with different polarisation.
- the filters F1, F2 are represented as simple dashed lines but may each comprise a plurality of parallel screens, each screen comprising parallel wires, said wires and screens being at carefully set distances from their neighbours.
- the closed ends of the wave-guide WG of each form of device will normally have adjustable caps to allow tuning of the end portions of the waveguide, so that the antenna RA (FIGS. 1, 3 and 5) and pick-up couplings PC (FIG. 3) and PC1 (FIG. 5) may be correctly spaced from said closed ends, and filter stubs PS (FIGS. 1, 3 and 5) may be adjustable also for tuning purposes.
- a known characteristic of dielectric heating by highfrequency electromagnetic radiation is that the heat is generated within the material being heated.
- pellets for example, are to be heated by this method, their interior may reach a maximum desired temperature while their outer parts are still at a lower temperature than desired.
- radiant heating may be applied simultaneously with dielectric heating by making the section of the wave-guide through which the material passes, or the section of tube ET within the wave-guide, of electrically conductive material of such resistance as to absorb part of the microwave radiation, so that the temperature of that section of wave-guide or tube is raised and the wave-guide or tube itself functions as a radiant heater. It will be seen that the radiant heating thus applied is necessarily kept in a fixed ratio to the dielectric heating. If it is necessary to provide for variation of this ratio, this may be done by providing adjustable cooling by any convenient means.
- FIGS. 6 and 7 illustrate a modification particularly adapted for use when pellets e.g. of synthetic resin, are to be heated.
- FIGS. 6 and 7 show a part of the wave-guide WG of any one of the devices of FIGS.l-5, namely that part which, in said earlier Figures, accommodates the conveyor belt CB.
- the conveyor belt and its enclosing tube are omitted, hence removing the need for the filter stubs FS also.
- This part of wave-guide WG as illustrated in FIG. 6 has a gap occupied by a peripheral portion of a rotatable disc RD.
- the disc RD has a carrier insert CI, of material not significantly heated when subjected to microwave radiation (e.g. of ceramic or polytetrafluorethylene) and said insert has four carrier pockets CP each containing a pellet P of material to be heated. Elsewhere on the disc RD further similar inserts (not shown) may be provided, so that successive groups of pellets may be subjected to the microwave radiation by successive partial rotations of the disc RD.
- a heating device comprising a wave-guide a source of microwave energy coupled to one end of said waveguide to radiate said energy as a beam along a path defined by said wave-guide, means connecting the other end of said wave-guide to an intermediate point thereon whereby said connecting means and a part of said waveguide form a closed loop for the transmission of said energy, said connecting means being such that any of said energy reaching said other end passes through the connecting means and is radiated from said connecting means into said wave-guide to travel in a direction away from said source, means for rotating the plane of polarization of the energy through during travel around the loop consisting of said connecting means and said part of said wave-guide whereby said energy radiated by said connecting means into the wave-guide has its plane of polarization at right-angles to the plane of polarization energy entering the loop from the source, a polarization filter interposed between said source and said intermediate point to permit microwave energy from said source to pass therethrough and to reflect microwave energy having its plane of polarization at right angles to that of energy from said source, an
- a device as claimed in claim 2 comprising a further polarization filter interposed between said length of waveguide formed with a 90 twist and said connecting means to permit microwave energy from said source to pass therethrough and to reflect microwave energy having its plane of polarization at right-angles to that of energy from said source.
- a device as claimed in claim 4 comprising a further polarization filter interposed between said intermediate point of said loop and said connecting means to permit microwave energy from said source to pass therethrough and to refiect microwave energy having its plane of polarization at right-angles to that of energy from said source.
- said connecting means comprises two energy pick-ups adjacent to the other end of the wave-guide, one of said pick-ups being arranged to collect energy polarized in the source plane and the other of said pick-ups being arranged to collect energy polarized at 90 to the source plane, a coupling unit, coaxial cable connecting said pick-ups to said coupling unit, said coupling unit having two outputs and means connecting said outputs to said intermediate point of said wave-guide, said coupling unit being so arranged that the phasing of the two outputs is such as to cause the energy returned to the wave-guide to be propagated away from the source.
- a device as claimed in claim 1 including means for sensing the intensity of the beam in the loop and producing a control signal, and means for feeding back said control signal to the source to control the output thereof.
- a device as claimed in claim 7 comprising a further polarization filter interposed in said wave-guide between said two energy pick-ups to permit microwave energy from said source to pass therethrough and to reflect microwave energy having its plane of polarization at right- 25 angles to that of energy from said source.
- a device as claimed in claim 1 wherein said means for positioning articles to be heated in said irradiating 53 zone comprises means for conveying articles through said irradiating zone.
- a device as claimed in claim 1 comprising a further polarization filter in said wave-guide on the opposite side of said irradiating zone from said source to permit microwave energy from said source to pass therethrough and to reflect microwave energy having its plane of polarization at right-angles to that of energy from said source.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Variable-Direction Aerials And Aerial Arrays (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB26098/67A GB1185363A (en) | 1967-06-06 | 1967-06-06 | Improvements relating to Microwave Heating Devices. |
Publications (1)
Publication Number | Publication Date |
---|---|
US3529115A true US3529115A (en) | 1970-09-15 |
Family
ID=10238345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US733838A Expired - Lifetime US3529115A (en) | 1967-06-06 | 1968-06-03 | Heating devices |
Country Status (5)
Country | Link |
---|---|
US (1) | US3529115A (fr) |
CH (1) | CH499943A (fr) |
DE (1) | DE1765536A1 (fr) |
FR (1) | FR1567759A (fr) |
GB (1) | GB1185363A (fr) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3710063A (en) * | 1971-05-25 | 1973-01-09 | H Aine | Microwave applicator |
US3761665A (en) * | 1972-05-25 | 1973-09-25 | Tokyo Shibaura Electric Co | Microwave heating apparatus with looped wave guide and phase shifting means |
US4003554A (en) * | 1974-03-04 | 1977-01-18 | Solvay & Cie | Equipment for heating polar polymers to the temperature at which they become plastic |
US4334136A (en) * | 1979-10-01 | 1982-06-08 | Douglas P. Mahan | Microwave treating mechanism |
DE3420280A1 (de) * | 1983-05-31 | 1984-12-06 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Vorrichtung zum vorwaermen von pressharz fuer eine halbleitervorrichtung |
US4510361A (en) * | 1982-05-03 | 1985-04-09 | Mahan Douglas P | Horizontal axis tumbler type microwave drying mechanism |
US4866233A (en) * | 1983-08-10 | 1989-09-12 | Snowdrift Corporation N.V. | System for heating objects with microwaves |
US20100116821A1 (en) * | 2008-11-13 | 2010-05-13 | Kabushiki-Kaisha Takumi | Structure heating system by microwave, microwave oscillation waveguide apparatus and microwave oscillator cooling method |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE441640B (sv) * | 1980-01-03 | 1985-10-21 | Stiftelsen Inst Mikrovags | Forfarande och anordning for uppvermning medelst mikrovagsenergi |
GB8511049D0 (en) * | 1985-05-01 | 1985-06-12 | Shell Int Research | Apparatus for uniform microwave bulk heating |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2495429A (en) * | 1945-10-08 | 1950-01-24 | Raytheon Mfg Co | Method of treating foodstuffs |
US2790054A (en) * | 1954-11-12 | 1957-04-23 | Raytheon Mfg Co | Mode-shifting devices |
US3210513A (en) * | 1962-03-27 | 1965-10-05 | Electrolux Ab | Dielectric cooking apparatus |
US3281567A (en) * | 1963-10-28 | 1966-10-25 | Litton Prec Products Inc | Oven protective device |
US3286208A (en) * | 1964-05-12 | 1966-11-15 | Kenneth E Niebuhr | R-f high power simulation |
US3344363A (en) * | 1965-02-12 | 1967-09-26 | Commissariat Energie Atomique | Cavity, wave guide and klystron interaction space form a resonant circuit |
US3412227A (en) * | 1965-11-18 | 1968-11-19 | Tappan Co | Electronic oven protection circuit |
-
1967
- 1967-06-06 GB GB26098/67A patent/GB1185363A/en not_active Expired
-
1968
- 1968-06-03 US US733838A patent/US3529115A/en not_active Expired - Lifetime
- 1968-06-06 DE DE19681765536 patent/DE1765536A1/de active Pending
- 1968-06-06 FR FR1567759D patent/FR1567759A/fr not_active Expired
- 1968-06-06 CH CH851968A patent/CH499943A/fr not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2495429A (en) * | 1945-10-08 | 1950-01-24 | Raytheon Mfg Co | Method of treating foodstuffs |
US2790054A (en) * | 1954-11-12 | 1957-04-23 | Raytheon Mfg Co | Mode-shifting devices |
US3210513A (en) * | 1962-03-27 | 1965-10-05 | Electrolux Ab | Dielectric cooking apparatus |
US3281567A (en) * | 1963-10-28 | 1966-10-25 | Litton Prec Products Inc | Oven protective device |
US3286208A (en) * | 1964-05-12 | 1966-11-15 | Kenneth E Niebuhr | R-f high power simulation |
US3344363A (en) * | 1965-02-12 | 1967-09-26 | Commissariat Energie Atomique | Cavity, wave guide and klystron interaction space form a resonant circuit |
US3412227A (en) * | 1965-11-18 | 1968-11-19 | Tappan Co | Electronic oven protection circuit |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3710063A (en) * | 1971-05-25 | 1973-01-09 | H Aine | Microwave applicator |
US3761665A (en) * | 1972-05-25 | 1973-09-25 | Tokyo Shibaura Electric Co | Microwave heating apparatus with looped wave guide and phase shifting means |
US4003554A (en) * | 1974-03-04 | 1977-01-18 | Solvay & Cie | Equipment for heating polar polymers to the temperature at which they become plastic |
US4334136A (en) * | 1979-10-01 | 1982-06-08 | Douglas P. Mahan | Microwave treating mechanism |
US4510361A (en) * | 1982-05-03 | 1985-04-09 | Mahan Douglas P | Horizontal axis tumbler type microwave drying mechanism |
US4952763A (en) * | 1983-03-24 | 1990-08-28 | Snowdrift Corp. N.V. | System for heating objects with microwaves |
DE3420280A1 (de) * | 1983-05-31 | 1984-12-06 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Vorrichtung zum vorwaermen von pressharz fuer eine halbleitervorrichtung |
US4577078A (en) * | 1983-05-31 | 1986-03-18 | Kabushiki Kaisha Toshiba | Apparatus for preheating mold resin for a semiconductor device |
US4866233A (en) * | 1983-08-10 | 1989-09-12 | Snowdrift Corporation N.V. | System for heating objects with microwaves |
US20100116821A1 (en) * | 2008-11-13 | 2010-05-13 | Kabushiki-Kaisha Takumi | Structure heating system by microwave, microwave oscillation waveguide apparatus and microwave oscillator cooling method |
Also Published As
Publication number | Publication date |
---|---|
CH499943A (fr) | 1970-11-30 |
GB1185363A (en) | 1970-03-25 |
FR1567759A (fr) | 1969-05-16 |
DE1765536A1 (de) | 1971-07-29 |
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