US3440387A - High frequency heating system with inductive plasma - Google Patents
High frequency heating system with inductive plasma Download PDFInfo
- Publication number
- US3440387A US3440387A US594114A US3440387DA US3440387A US 3440387 A US3440387 A US 3440387A US 594114 A US594114 A US 594114A US 3440387D A US3440387D A US 3440387DA US 3440387 A US3440387 A US 3440387A
- Authority
- US
- United States
- Prior art keywords
- high frequency
- heating system
- inductor
- frequency heating
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/04—Sources of current
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
Definitions
- the present invention relates to a high frequency heating system using ionized gas or plasma as the heating medium. More particularly, the invention relates to an improved ignition circuit for supplying high frequency energy to the discharge plasma,
- variable impedance for example, an adjustable capacitor, is connected between the coupling coil and the inductor, as is shown, for example, in the French patent specification 1,371,963,
- the two capacitances are tuned with the inductance of the inductor to the resonance frequency. In this way, a considerably higher reactive power that is always sufiicient to initiate ignition, and a considerably improved stabilisation, are obtained.
- a variation of the capacitances may be obtained by adding or subtracting further capacitances, whereas the inductance of the inductor may be varied by changing the distance between the turns.
- the figure shows a conventional high frequency generator.
- the high frequency energy thereof is coupled out by means of the coil 2.
- the coil is connected to a resonant circuit formed 'by the series capacitance 3, the inductor 4 and the capacitance 5 connected in parallel therewith.
- the inductor 4 supplies the high frequency energy to the plasma.
- the mode of operation of the arrangement can be varied.
- a comparatively high capacitance 3, for example, provides a rapid action, and a low capacitance 3 provides a slow action of the system,
- An avejrage action is obtained, for example, when the ratio between the two capacitances is about 1:1.
- a high frequency plasma induction heating system wherein the improvement comprises a stabilized ignition circuit for the system comprising, a source of high frequency power of a given frequency, an induction coil for generating the high frequency plasma field, first and second capacitors, means connecting said first and second capacitors in series and in parallel with said coil, respectively, to form a resonant circuit therewith that is tuned on the inductive side of the resonance curve, the resonant frequency of said resonant circuit being approximately the same as said given frequency of the high frequency power source, and means for coupling the output of said high frequency source to the input of said resonant circuit.
- said high frequency power source comprises an oscillator having an inductor and a capacitor connected to form a parallel.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Induction Heating (AREA)
- Furnace Details (AREA)
- Plasma Technology (AREA)
- Arc Welding Control (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP0038111 | 1965-11-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3440387A true US3440387A (en) | 1969-04-22 |
Family
ID=7375687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US594114A Expired - Lifetime US3440387A (en) | 1965-11-12 | 1966-11-14 | High frequency heating system with inductive plasma |
Country Status (8)
Country | Link |
---|---|
US (1) | US3440387A (sv) |
AT (1) | AT273330B (sv) |
BE (1) | BE689622A (sv) |
CH (1) | CH454300A (sv) |
DE (1) | DE1514322C3 (sv) |
GB (1) | GB1139049A (sv) |
NL (1) | NL6615715A (sv) |
SE (1) | SE300663B (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022404A1 (fr) * | 1979-07-04 | 1981-01-14 | Instruments S.A. | Générateur de plasma |
US6399927B1 (en) * | 1998-05-05 | 2002-06-04 | Chapel Et Cie | Method and device for high frequency treatment of products, related materials and uses |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5288971A (en) * | 1991-08-09 | 1994-02-22 | Advanced Energy Industries, Inc. | System for igniting a plasma for thin film processing |
JP2002533868A (ja) | 1997-10-14 | 2002-10-08 | アドバンスト・エナジー・インダストリーズ・インコーポレイテッド | 早い電圧増加によるプラズマ点火を目的としたシステム |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB667657A (en) * | 1950-04-26 | 1952-03-05 | Westinghouse Electric Int Co | Improvements in or relating to high frequency heating systems |
DE896399C (de) * | 1950-10-27 | 1953-11-12 | Westinghouse Electric Corp | Schaltung zur Erzeugung einer im wesentlichen konstanten Verbraucherspannung in Hochfrequenzheizsystemen fuer primaere dielektrische Beheizungen |
US2662162A (en) * | 1951-01-12 | 1953-12-08 | Hartford Nat Bank & Trust Co | High-frequency furnace |
US3277265A (en) * | 1963-01-22 | 1966-10-04 | Soc De Traitements Electrolytiques Et Electrothermiques | Plasma heating systems |
US3340415A (en) * | 1964-10-31 | 1967-09-05 | Philips Corp | Induction gas ionizer having a rotatable envelope |
US3353060A (en) * | 1964-11-28 | 1967-11-14 | Hitachi Ltd | High-frequency discharge plasma generator with an auxiliary electrode |
-
1965
- 1965-11-12 DE DE1514322A patent/DE1514322C3/de not_active Expired
-
1966
- 1966-11-08 NL NL6615715A patent/NL6615715A/xx unknown
- 1966-11-09 SE SE15333/66A patent/SE300663B/xx unknown
- 1966-11-09 GB GB50129/66A patent/GB1139049A/en not_active Expired
- 1966-11-09 CH CH1614266A patent/CH454300A/de unknown
- 1966-11-09 AT AT1035566A patent/AT273330B/de active
- 1966-11-10 BE BE689622D patent/BE689622A/xx unknown
- 1966-11-14 US US594114A patent/US3440387A/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB667657A (en) * | 1950-04-26 | 1952-03-05 | Westinghouse Electric Int Co | Improvements in or relating to high frequency heating systems |
DE896399C (de) * | 1950-10-27 | 1953-11-12 | Westinghouse Electric Corp | Schaltung zur Erzeugung einer im wesentlichen konstanten Verbraucherspannung in Hochfrequenzheizsystemen fuer primaere dielektrische Beheizungen |
US2662162A (en) * | 1951-01-12 | 1953-12-08 | Hartford Nat Bank & Trust Co | High-frequency furnace |
US3277265A (en) * | 1963-01-22 | 1966-10-04 | Soc De Traitements Electrolytiques Et Electrothermiques | Plasma heating systems |
US3340415A (en) * | 1964-10-31 | 1967-09-05 | Philips Corp | Induction gas ionizer having a rotatable envelope |
US3353060A (en) * | 1964-11-28 | 1967-11-14 | Hitachi Ltd | High-frequency discharge plasma generator with an auxiliary electrode |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022404A1 (fr) * | 1979-07-04 | 1981-01-14 | Instruments S.A. | Générateur de plasma |
FR2460589A1 (fr) * | 1979-07-04 | 1981-01-23 | Instruments Sa | Generateur de plasma |
US6399927B1 (en) * | 1998-05-05 | 2002-06-04 | Chapel Et Cie | Method and device for high frequency treatment of products, related materials and uses |
Also Published As
Publication number | Publication date |
---|---|
NL6615715A (sv) | 1967-05-16 |
SE300663B (sv) | 1968-05-06 |
BE689622A (sv) | 1967-04-14 |
AT273330B (de) | 1969-08-11 |
DE1514322C3 (de) | 1974-06-06 |
DE1514322B2 (de) | 1973-11-15 |
GB1139049A (en) | 1969-01-08 |
CH454300A (de) | 1968-04-15 |
DE1514322A1 (de) | 1969-09-04 |
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