US3270233A - Plural beam electron gun - Google Patents

Plural beam electron gun Download PDF

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Publication number
US3270233A
US3270233A US218283A US21828362A US3270233A US 3270233 A US3270233 A US 3270233A US 218283 A US218283 A US 218283A US 21828362 A US21828362 A US 21828362A US 3270233 A US3270233 A US 3270233A
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United States
Prior art keywords
anode
apertures
hot cathode
focusing electrode
electron gun
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US218283A
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English (en)
Inventor
Dietrich Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
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WC Heraus GmbH and Co KG
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Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
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Publication of US3270233A publication Critical patent/US3270233A/en
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Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Definitions

  • the present invention relates to an electron gun and more particularly one which essentially comprises a hot cathode of an annular shape which serves as a source of electron beams and is provided with an anode, and preferably also with a focusing electrode.
  • the hot cathode When using an annular hot cathode, all of the electron rays together form a conical beam the focus of which is located on or near the metal body to be melted.
  • the hot cathode, the focusing electrode and the continuous slot in the anode of such a known electron gun may, however, also be of a different than an annular shape.
  • the hot cathode may consist of a straight wire, in which case the slot in the anode also extends in a straight direction.
  • annular electron beam system as above described which has a hot cathode, a focusing electrode, and an anode has, however, considerable disadvantages in electronoptical and melting respects.
  • the annular shape of the hot cathode merely permits the emitted electron rays to be electrically influenced in the radial direction thereof, whereas the electrons which are emitted from a single point of the hot cathode are scattered very considerably in the tangential direction.
  • This annular beam system also does not permit the electric fields for focusing the electron rays upon the metal body to be melted to be replaced by magnetic fields which are much more suitable from an electronoptical standpoint and also permit electron beams of a much greater aperture size to be focused.
  • the continuously slotted anode does not permit the electron gun to be evacuated independently of the melting chamber.
  • the anode is provided with a plurality of adjacent apertures.
  • magnetic electronoptical means may be provided for influencing the focusing and/ or changing the direction of the electron beams.
  • anode By employing an anode with a plurality of adjacent apertures, the important advantage is attained over an anode with a continuous slot that the electrons which are emitted from the hot cathode by passing through the separate apertures are concentrated to form separate electron beams whereby the tangential scattering losses which are very considerable in an anode with a continuous slot are reduced to a size which is of no consequence.
  • the anode arrangement according to the invention when made of an annular shape permits the electron beams to be focused in a radial direction and/ or to be deflected by conventional magnetic electronoptical means.
  • the flow resistance of the apertures in the anode of the new electron gun to gas molecules which are contained in the evacuated melting chamber may be made so small that the electron gun may be evacuated independently of the evacuation of the melting chamber so that a certain difference in pressure may be maintained between the melting chamber and the electron gun.
  • the magnetic deflecting means also serve as an effective ion trap for preventing ions which are formed in the melting chamber and are flying in the direction toward the hot cathode from entering the electron gun.
  • this gun comprises a hot cathode 1 which is provided with a negative electric potential.
  • the electrons which are emitted from this hot cathode pass from the latter through the perforated focusing electrode 3 and the apertures in the anode 4 into the melting chamber 5.
  • the focusing electrode 3 is provided with an electric potential which is approximately equal to or more negative than the potential on the hot cathode I, preferably the ground potential.
  • the hot cathode 1 may be of a type which emits electrons uniformly from its entire surface or it may be designed so that electrons are emitted only from those parts thereof which are located directly above the apertures in the focusing electrode. This may be attained in a simple manner, for example, by making the hot cathode of an alternately thicker and thinner cross section or by differently activating the different parts of the surface of the hot cathode. Underneath the anode 4 electromagnetic means are secured thereto which consist of coils 6 with fen-- magnetic cores 7.
  • All of these coils 6 preferably have an equal number of windings and are energized by a current of a constant strength. Of course, some of the coils may also be provided with a larger number of ampere turns so that some of the electron beams 2 may be more strongly deflected than the others.
  • the cross-sectional size of the magnetic field H which is formed between the opposite ends of two adjacent cores 7 is determined by the shape of these ends which may be designed in accordance with the particular requirements to be fulfilled by the electron gun. It is also possible to provide suitable cooling means of a conventional type for cooling the focusing electrode 3, the anode 4, and the electromagnetic means.
  • the hot cathode, anode, and focusing electrode do not have to be of an annular shape, but these elements may also be made of a different shape to suit the particular purpose for which the electron gun is to be used.
  • the hot cathode may be made, for example, in the form of a straight wire and the focusing electrode and anode also be provided with apertures which extend in a straight line.
  • the apertures in the focusing electrode and anode may also be made of any desired shape and some of the adjacent apertures may also differ from each other both in size and shape.
  • the associated apertures in the focusing electrode and in the anode may also differ from each other in size and shape.
  • an electron gun comprising a hot cathode, an anode having a plurality of apertures laterally adjacent but spaced from each other at one side of said hot cathode, a focusing electrode interposed between said hot cathode and said anode, said electrode having a plurality of apertures substantially in axial alignment with the corresponding apertures in said anode for passing separate electron beams from said hot cathode through the different aligned apertures, and a plurality of electromagnets at the other side of said anode each having a coil and a ferromagnetic core, the opposite ends of adjacent cores being spaced from each other to form gaps substantially in alignment with said apertures for forming magnetic fields for independently deflecting each of said electron beams passing through said apertures in said focusing electrode and anode and then through said gaps.
  • an electron gun comprising a hot cathode, an anode having a plurality of apertures laterally adjacent but spaced from each other at one side of said hot cathode, a focusing electrode interposed between said hot cathode and said anode, said electrode having a plurality of apertures substantially in axial alignment with the corresponding apertures in said anode for passing separate electron beams from said hot cathode through the different aligned apertures, and a plurality of electromagnets at the other side of said anode each having a coil and a ferromagnetic core, said coils having an equal number of windings and adapted to be energized by a current of the same strength, the opposite ends of adjacent cores being spaced from each other to form gaps substantially in alignment with said apertures for forming magnetic fields for individually deflecting each of said electron beams passing through said apertures in said focusing electrode and anode and then through said gaps.
  • an electron gun comprising a hot cathode, an anode having a plurality of apertures laterally adjacent but spaced from each other at one side of said hot cathode, a focusing electrode interposed between said hot cathode and said anode and, said electrode having a plurality of apertures substantially in axial alignment with the corresponding apertures in said anode for passing separate electron beams from said hot cathode through the different aligned apertures, and a plurality of electromagnets at the other side of said anode, each of said electromagnets having a coil and a ferromagnetic core, at least one of said coils having a number of windings different from the number of windings of the other coils and adapted to be energized by a current of a different strength than the current for energizing the other coils, the opposite ends of adjacent cores being spaced from each other to form gaps substantially in alignment with said apertures for forming magnetic fields for individually deflecting each of said electron beams
  • an electron gun comprising a hot cathode, an anode having a plurality of apertures laterally adjacent but spaced from each other at one side of said hot cathode, a focusing electrode interposed between said hot cathode and said anode and, said electrode having a plurality of apertures substantially in axial alignment with the corresponding apertures in said anode for passing separate electron beams from said hot cathode through the different aligned apertures, and a plurality of electromagnets at the other side of said anode, each of said electromagnets having a coil and a ferromagnetic core, at least one of said coils having a number of windings different from the number of windings of the other coils and adapted to be energized by a current of a different strength that the current for energizing the other coils, the opposite ends of adjacent cores being spaced from each other to form gaps substantially in alignment with said apertures for forming magnetic fields for individually deflecting each of said electron beams

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
US218283A 1961-09-05 1962-08-21 Plural beam electron gun Expired - Lifetime US3270233A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH43568A DE1156521B (de) 1961-09-05 1961-09-05 Elektronenstrahlkanone zum Erhitzen von Metallen

Publications (1)

Publication Number Publication Date
US3270233A true US3270233A (en) 1966-08-30

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ID=7155232

Family Applications (1)

Application Number Title Priority Date Filing Date
US218283A Expired - Lifetime US3270233A (en) 1961-09-05 1962-08-21 Plural beam electron gun

Country Status (4)

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US (1) US3270233A (de)
CH (1) CH403104A (de)
DE (1) DE1156521B (de)
GB (1) GB1014200A (de)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3514656A (en) * 1966-12-16 1970-05-26 Air Reduction Electron beam gun assembly for producing a ribbon shaped beam and magnet means for transversely deflecting the beam about its major axis
US3518479A (en) * 1968-02-27 1970-06-30 United Aircraft Corp Apparatus for traversing a cold cathode discharge
US3519873A (en) * 1968-12-18 1970-07-07 Westinghouse Electric Corp Multiple beam electron source for pattern generation
US3655902A (en) * 1970-10-19 1972-04-11 Air Reduction Heating system for electron beam furnace
US3746909A (en) * 1970-10-26 1973-07-17 Northrop Corp Area electron flood gun
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
DE2815627A1 (de) * 1977-05-18 1978-11-23 Airco Inc Aufbau einer aufdampfquelle mit mehrfachelektronenstrahl
US4891821A (en) * 1989-03-27 1990-01-02 Hanks Charles W Magnetic correcting fence for adjacent e-guns
EP0698907A3 (de) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Elektronenkanone.
US20140346368A1 (en) * 2013-05-23 2014-11-27 National University Of Singapore Gun configured to generate charged particles
WO2018158422A1 (de) * 2017-03-03 2018-09-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Vorrichtung zum erzeugen beschleunigter elektronen
WO2023248234A1 (en) * 2022-06-23 2023-12-28 Pharmalab India Pvt. Ltd. Sterilization of an object using low energy electron beam

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4487673A (en) * 1982-04-21 1984-12-11 Rca Corporation Method of making a line cathode having localized emissive coating
DE3639683A1 (de) * 1986-11-20 1988-05-26 Leybold Ag Verdampferanordnung mit einem rechteckigen verdampfertiegel und mehreren elektronenkanonen

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2083203A (en) * 1932-10-01 1937-06-08 Schlesinger Kurt Braun tube
US2660612A (en) * 1949-12-14 1953-11-24 Jr Frank M Wood Color television receiving system
US2690517A (en) * 1952-09-30 1954-09-28 Rca Corp Plural beam electron gun
US2743389A (en) * 1954-01-28 1956-04-24 Columbia Broadcasting Syst Inc Television circuit
US2757313A (en) * 1951-06-21 1956-07-31 Westinghouse Electric Corp Tricolor television picture tube
US2758234A (en) * 1952-11-28 1956-08-07 Loewe Opta Ag Electrode system for cathode ray tubes
US3040112A (en) * 1960-06-03 1962-06-19 Stauffer Chemical Co Electron-beam furnace with beam emission suppressors
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1074766B (de) * 1960-02-04 Loewe Opta Aktiengesellschaft Berlin-Steglitz Elektronenstrahlröhre, vorzugsweise Fernsehbildröhre
DE768131C (de) * 1932-03-18 1956-03-15 Siegmund Loewe Dr Braunsche Roehre, bei welcher saemtliche Elektroden unter Verwendung von am Quetschfuss befestigten Halterungen gehaltert sind
DE1100826B (de) * 1955-05-27 1961-03-02 Telefunken Gmbh Elektrodenanordnung zur gemeinsamen Fokussierung von in einer Ebene verlaufenden Elektronenstrahlen einer Mehrfachkathodenstrahlroehre

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2083203A (en) * 1932-10-01 1937-06-08 Schlesinger Kurt Braun tube
US2660612A (en) * 1949-12-14 1953-11-24 Jr Frank M Wood Color television receiving system
US2757313A (en) * 1951-06-21 1956-07-31 Westinghouse Electric Corp Tricolor television picture tube
US2690517A (en) * 1952-09-30 1954-09-28 Rca Corp Plural beam electron gun
US2758234A (en) * 1952-11-28 1956-08-07 Loewe Opta Ag Electrode system for cathode ray tubes
US2743389A (en) * 1954-01-28 1956-04-24 Columbia Broadcasting Syst Inc Television circuit
US3040112A (en) * 1960-06-03 1962-06-19 Stauffer Chemical Co Electron-beam furnace with beam emission suppressors
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3514656A (en) * 1966-12-16 1970-05-26 Air Reduction Electron beam gun assembly for producing a ribbon shaped beam and magnet means for transversely deflecting the beam about its major axis
US3518479A (en) * 1968-02-27 1970-06-30 United Aircraft Corp Apparatus for traversing a cold cathode discharge
US3519873A (en) * 1968-12-18 1970-07-07 Westinghouse Electric Corp Multiple beam electron source for pattern generation
US3655902A (en) * 1970-10-19 1972-04-11 Air Reduction Heating system for electron beam furnace
US3746909A (en) * 1970-10-26 1973-07-17 Northrop Corp Area electron flood gun
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
DE2815627A1 (de) * 1977-05-18 1978-11-23 Airco Inc Aufbau einer aufdampfquelle mit mehrfachelektronenstrahl
FR2391557A1 (fr) * 1977-05-18 1978-12-15 Airco Inc Montage de sources de vapeurs a plusieurs faisceaux electroniques
US4131753A (en) * 1977-05-18 1978-12-26 Airco, Inc. Multiple electron-beam vapor source assembly
US4891821A (en) * 1989-03-27 1990-01-02 Hanks Charles W Magnetic correcting fence for adjacent e-guns
EP0698907A3 (de) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Elektronenkanone.
US20140346368A1 (en) * 2013-05-23 2014-11-27 National University Of Singapore Gun configured to generate charged particles
US9093243B2 (en) * 2013-05-23 2015-07-28 National University Of Singapore Gun configured to generate charged particles
WO2018158422A1 (de) * 2017-03-03 2018-09-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Vorrichtung zum erzeugen beschleunigter elektronen
US10806018B2 (en) 2017-03-03 2020-10-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for generating accelerated electrons
WO2023248234A1 (en) * 2022-06-23 2023-12-28 Pharmalab India Pvt. Ltd. Sterilization of an object using low energy electron beam

Also Published As

Publication number Publication date
GB1014200A (en) 1965-12-22
CH403104A (de) 1965-11-30
DE1156521B (de) 1963-10-31

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