US3265801A - Electron beam furnaces - Google Patents

Electron beam furnaces Download PDF

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US3265801A
US3265801A US133201A US13320161A US3265801A US 3265801 A US3265801 A US 3265801A US 133201 A US133201 A US 133201A US 13320161 A US13320161 A US 13320161A US 3265801 A US3265801 A US 3265801A
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chamber
electron
melting chamber
electron gun
melting
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US133201A
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Eaton Norman Frank
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Associated Electrical Industries Ltd
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Associated Electrical Industries Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/05—Electron beam

Definitions

  • Electron beam melting 4furnaces can be employed for lmetals having a high melting point temperature, and for such elements as germanium and silicon and used for example for crystal production.
  • the main object of the invention is to provide improved apparatus which satisfies t-hese requirements.
  • an electron beam furnace comprises ⁇ an evacuated melting chamber, a mould for an ingot at the lower end of the melting chamber, means ⁇ for supporting a vertically extending feed lrod over the ingot, vand a plurality of electron guns located in a separate electron gun chamber which is adjacent to but evacuated to a lower pressure than the melting chamber, said electron gun chamber communieating with the melting chamber through beam ducts, there being a beam duct associated with each gun through which the beam passes into the melting chamber together with ybeam detlecting means whereby the electron beams entering the melting chamber are detlected out of alignment with the ⁇ ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode.
  • the beam deecing means may be electrostatic or electromagnetic.
  • the electron guns have a line focus and are arranged to project electron beams downwards so that deflection of the beams perpendicularly to their greatest cross-section deects the beams towards or away from the ingot.
  • Condensing surfaces may be arranged around the ingot on which vapour condenses ⁇ and is reclaimed.
  • the beams may pass through apertures in the condensing plates.
  • the guns are mounted at the top of a melting chamber 2.
  • the guns are contained within a separately evacuated electron gun chamber 3 and each projects a line focus electron beam 4 which permits an eicient coverage of the ingot being melted.
  • the power of the gums is controlled by the accelerating voltage applied, or the emission characteristics 'of the cathode.
  • the beam-s pass in-to the melting chamber through water cooled ducts 5 which are of elongated cross-section to suit the line focus beams and are connected to, or below the anode.
  • the ducts separating the melting chamber from the electron gun chamber allows a greater pressure differential to be obtained between the two chambers than an aperture in a plate.
  • Magnetic or electrostatic focussing coils 6 surround each of these ducts to focus the beams, while at the end of the tubes magnetic or electrostatic deflection coils 7 are positioned to adjust the angle of incidence of the beams on the ingot 8. This method allows easy control of the position ⁇ of the heat input and allows various size ingots to be melted. Some of the beams can additionally be made to impinge on a feed rod 9 being melted, to drip melt the metal into the mould.
  • a retractable water cooled copper mould assembly 10 is used to continuously produce an ingot whilst feeding the molten pool with metal to be melted. Additionally ingot feed may be by Ahopper ⁇ feed 11 for feeding swarf powder or small scrap material.
  • Vapour Icondensing plates 12 are positioned in the chamber in optical line with the ingot on which volatilised metal can condense and thus the metal is not lost, and ⁇ does not contaminate the chamber.
  • These condensing plates would preferably be of the same ymaterial as the ingot being produced so that an eicient means is provided for reclaiming the volatilised metal, without the necessity for removing it Afrom the separate condenser plates.
  • the use of condensing plates of another metal is not precluded however.
  • deflection arrangements for the electron beam enables heat inputs of variable coverage to be obtained allowing various size moulds to be used, and the beams deflected to melt solid rod feed if required.
  • An electron beam furnace comprising an evacuated melting chamber, an ingot mould, :means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of electr-on gums located in a separate electron -gun chamber and directed downw-ardly, said electron gun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting cham-ber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron gun through which the beam passes into the melting chamber and beam deiiecting means associated with each electron gun whereby the electron beams entering the melting chamber are deflected out of alignment with the beam ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode.
  • An electron beam furnace comprising an evacuated melting chamber, an ingot mould at the lower end of said chamber, means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of electron guns having a line focus located in a separate electron gun chamber and directed downwardly, said electron gun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting chamber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron gun through which the beam passes into the melting chamber and beam deflecting means associated with each electron gun whereby the electron beams entering the melting chamber are deflected out of alignment with the beam ducts to tend to trap positive ions from entering t-he beam ducts and so reaching the cathode.
  • An electron beam furnace comprising an evacuated melting chamber, an ingot mould at the lower end of said chamber, means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of line focus electron guns located in a separate electron gun chamber and directed downwardly, said electron lgun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting chamber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron lgun through which the beam passes into the melting chamber and beam deecting means associated with each electron gun whereby the electron beams entering tihe ⁇ melting chamber are deilected out of align ment with the beam ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode, condensing surfaces for vapour around the upper part of the melting chamber and edges defining apertures in said condensing surfaces through which the beams pass.
  • An electron beam furnace comprising walling deiining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending feed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means for evacuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns located in said electron gun chamber and directed downwardly to project electron beams through said electron beam ducts respectively on to an ingot in said mould and means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode.
  • An electron beam furnace comprising walling deining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending feed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means -for evacuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns each having a line focus located in said electron gun chamber and directed downwardly to project electron 4beams through said electron beam ducts respectively on to an ingot in said mould and means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deflect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode.
  • An electron beam furnace comprising walling defining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending Ifeed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means for evaeuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns located in said electron gun chamber and directed downwardly to project electron beams through said electron beam ducts respectively on to an ingot in said mould, means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode and condensing surfaces for vapour around the upper part of the melting chamber and edges defining apertures in said condensing surfaces through which the beams pass.

Description

Aug. 9, 1966 N. F. EATON 3,265,801
ELECTRON BEAM FURNACES Filed Aug. 22. 1961 @frag/VFY United States Patent O 3,265,801 ELECTRQN BEAM FURNACES Norman Frank Eaton, Uplands, Swansea, Wales, assigner to Associated Eiectrical Industries Limited, London, England, a British company Filed Ang. 22, 1961, Ser. No. 133,201 Claims priority, application Great Britain, Ang. 22, 1960, 28,989/60 7 Claims. (Cl. 13a- 31) This invention relates to electron beam melting furnaces.
Electron beam melting 4furnaces can be employed for lmetals having a high melting point temperature, and for such elements as germanium and silicon and used for example for crystal production.
It is necessary, since an electron beam is used, to operate the furnace at a pressure below atmosphere. At the same time, owing to the high voltages employed with the `gun it is necessary that the gun be at an appreciably higher vacuum than is necessary for the furnace.
Furthermore it is important to prevent the backward movement of positive ions along the beam which causes damage to the gun cathode.
`The main object of the invention is to provide improved apparatus which satisfies t-hese requirements.
According to the present invention an electron beam furnace comprises `an evacuated melting chamber, a mould for an ingot at the lower end of the melting chamber, means `for supporting a vertically extending feed lrod over the ingot, vand a plurality of electron guns located in a separate electron gun chamber which is adjacent to but evacuated to a lower pressure than the melting chamber, said electron gun chamber communieating with the melting chamber through beam ducts, there being a beam duct associated with each gun through which the beam passes into the melting chamber together with ybeam detlecting means whereby the electron beams entering the melting chamber are detlected out of alignment with the `ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode.
The beam deecing means may be electrostatic or electromagnetic. Preferably the electron guns have a line focus and are arranged to project electron beams downwards so that deflection of the beams perpendicularly to their greatest cross-section deects the beams towards or away from the ingot.
Condensing surfaces may be arranged around the ingot on which vapour condenses `and is reclaimed. The beams may pass through apertures in the condensing plates.
In order that the invention may be more clearly understood, reference will now be made to the accompanying drawing which shows a vertical sectional view of a furnace embodying t-he invention.
In the arrangement shown several electron guns 1 are mounted at the top of a melting chamber 2. The guns are contained within a separately evacuated electron gun chamber 3 and each projects a line focus electron beam 4 which permits an eicient coverage of the ingot being melted. The power of the gums is controlled by the accelerating voltage applied, or the emission characteristics 'of the cathode. The beam-s pass in-to the melting chamber through water cooled ducts 5 which are of elongated cross-section to suit the line focus beams and are connected to, or below the anode. The ducts separating the melting chamber from the electron gun chamber allows a greater pressure differential to be obtained between the two chambers than an aperture in a plate.
Magnetic or electrostatic focussing coils 6 surround each of these ducts to focus the beams, while at the end of the tubes magnetic or electrostatic deflection coils 7 are positioned to adjust the angle of incidence of the beams on the ingot 8. This method allows easy control of the position `of the heat input and allows various size ingots to be melted. Some of the beams can additionally be made to impinge on a feed rod 9 being melted, to drip melt the metal into the mould.
Moreover since the directions of the beam pat-hs in the melting chamber are offset from the passages through the ducts, positive ions emitted from the bombarded surface and passing backwards along the beams are mainly deflected from the tube passages and hence the positive ions reaching the cathode are minimised.
A retractable water cooled copper mould assembly 10 is used to continuously produce an ingot whilst feeding the molten pool with metal to be melted. Additionally ingot feed may be by Ahopper `feed 11 for feeding swarf powder or small scrap material.
Vapour Icondensing plates 12 are positioned in the chamber in optical line with the ingot on which volatilised metal can condense and thus the metal is not lost, and `does not contaminate the chamber. These condensing plates would preferably be of the same ymaterial as the ingot being produced so that an eicient means is provided for reclaiming the volatilised metal, without the necessity for removing it Afrom the separate condenser plates. The use of condensing plates of another metal is not precluded however. The main advantages of this invention can be summarised:
The use of deflection arrangements for the electron beam enables heat inputs of variable coverage to be obtained allowing various size moulds to be used, and the beams deflected to melt solid rod feed if required.
What I claim is:
1. An electron beam furnace `comprising an evacuated melting chamber, an ingot mould, :means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of electr-on gums located in a separate electron -gun chamber and directed downw-ardly, said electron gun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting cham-ber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron gun through which the beam passes into the melting chamber and beam deiiecting means associated with each electron gun whereby the electron beams entering the melting chamber are deflected out of alignment with the beam ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode.
2. An electron beam furnace comprising an evacuated melting chamber, an ingot mould at the lower end of said chamber, means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of electron guns having a line focus located in a separate electron gun chamber and directed downwardly, said electron gun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting chamber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron gun through which the beam passes into the melting chamber and beam deflecting means associated with each electron gun whereby the electron beams entering the melting chamber are deflected out of alignment with the beam ducts to tend to trap positive ions from entering t-he beam ducts and so reaching the cathode.
3. An electron beam furnace comprising an evacuated melting chamber, an ingot mould at the lower end of said chamber, means for supporting a vertically extending feed rod over the ingot in said melting chamber, a plurality of line focus electron guns located in a separate electron gun chamber and directed downwardly, said electron lgun chamber being adjacent to said melting chamber, means for evacuating said gun chamber to a lower pressure than the melting chamber, beam ducts connecting the melting chamber and the electron gun chamber, there being a beam duct associated with each electron lgun through which the beam passes into the melting chamber and beam deecting means associated with each electron gun whereby the electron beams entering tihe `melting chamber are deilected out of align ment with the beam ducts to tend to trap positive ions from entering the beam ducts and so reaching the cathode, condensing surfaces for vapour around the upper part of the melting chamber and edges defining apertures in said condensing surfaces through which the beams pass.
4. The structure of claim 1, wherein an additional material feed duct is positioned in communication with said melting chamber.
5. An electron beam furnace comprising walling deiining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending feed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means for evacuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns located in said electron gun chamber and directed downwardly to project electron beams through said electron beam ducts respectively on to an ingot in said mould and means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode.
6. An electron beam furnace comprising walling deining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending feed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means -for evacuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns each having a line focus located in said electron gun chamber and directed downwardly to project electron 4beams through said electron beam ducts respectively on to an ingot in said mould and means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deflect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode.
7. An electron beam furnace comprising walling defining a melting chamber, means for evacuating said melting chamber, an ingot mould located in the lower part of said melting chamber, means for supporting a vertically extending Ifeed rod over said ingot mould, walling defining an electron gun chamber located over the melting chamber, means for evaeuating said electron gun chamber to a lower pressure than the melting chamber, electron beam ducts connecting the electron gun chamber with the melting chamber, a plurality of electron guns located in said electron gun chamber and directed downwardly to project electron beams through said electron beam ducts respectively on to an ingot in said mould, means for deecting electron beams entering the melting chamber out of alignment with the beam ducts to deect upwardly moving positive ions and prevent said ions entering the beam ducts and passing to the cathode and condensing surfaces for vapour around the upper part of the melting chamber and edges defining apertures in said condensing surfaces through which the beams pass.
References Cited by the Examiner UNITED STATES PATENTS 2,423,729 7 1947 Ruhle.
2,541,764 2/1951 Herres et al. 75-10 2,793,282 5/1957 4Steigerwald 219-69 2,932,588 4/1960 Frank 117-106 2,994,801 8/ 1961 Hanks.
3,219,435 11/1965 Gruber et al 219-121 X FOREIGN PATENTS 1,249,096 11/1960 France.
ANTHONY BARTIS, Acting Primary Examiner.
RAY K. WINDHAM, JOSEPH V. TRUHE, Examiners.
F. R. LAWSON, Assistant Examiner.

Claims (1)

1. AN ELECTRON BEAM FURNACE COMPRISING AN EVACUATED MELTING CHAMBER, AN INGOT MOULD, MEANS FOR SUPPORTING A VERTICALLY EXTENDING FEED ROD OVER THE INGOT IN SAID MELTING CHAMBER, A PLURALITY OF ELECTRON GUNS LOCATED IN A SEPARATE ELECTRON GUN CHAMBER AND DIRECTED DOWNWARDLY, SAID ELECTRON GUN CHAMBER BEING ADJACENT TO SAID MELTING CHAMBER, MEANS FOR EVACUATING SAID GUN CHAMBER TO A LOWER PRESSURE THAN THE MELTING CHAMBER, BEAM DUCTS CONNECTING THE MELTING CHAMBER AND THE ELECTRON GUN CHAMBER, THERE BEING A BEAM DUCT ASSOCIATED WITH EACH ELECTRON GUN THROUGH WHICH THE BEAM PASSES INTO THE MELTING CHAMBER AND BEAM DEFLECTING MEANS ASSOCIATED WITH EACH ELECTRON GUN WHEREBY THE ELECTRON BEAMS ENTERING THE MELTING CHAMBER ARE DEFLECTED OUT OF ALIGN-
US133201A 1960-08-22 1961-08-22 Electron beam furnaces Expired - Lifetime US3265801A (en)

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GB28989/60A GB915657A (en) 1960-08-22 1960-08-22 Improvements relating to electron beam furnaces

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442321A (en) * 1965-06-03 1969-05-06 Commissariat Energie Atomique Device for continuous casting of refractory materials
US3702389A (en) * 1970-08-03 1972-11-07 Jean Pierre Peyrot Welding by electron bombardment
US4163889A (en) * 1974-05-27 1979-08-07 U.S. Philips Corporation Device for the simultaneous operation of a number of gas discharge electron guns
US5222547A (en) * 1990-07-19 1993-06-29 Axel Johnson Metals, Inc. Intermediate pressure electron beam furnace
US5263044A (en) * 1989-09-05 1993-11-16 Bremer Siegfried M K Remelting method for recognition and recovery of noble metals and rare metals
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
EP1845325A1 (en) * 2005-01-25 2007-10-17 Toho Titanium Co., Ltd. Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus
US20080105400A1 (en) * 2005-01-25 2008-05-08 Takeshi Shiraki Apparatus For Melting Metal By Electron Beams And Process For Producing High-Melting Metal Ingot Using This Apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3923899A1 (en) * 1989-07-19 1991-01-31 Leybold Ag METHOD FOR REGULATING THE HIT POSITIONS OF SEVERAL ELECTRON BEAMS ON A MOLT BATH
US5126633A (en) * 1991-07-29 1992-06-30 Energy Sciences Inc. Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments

Citations (6)

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Publication number Priority date Publication date Assignee Title
US2423729A (en) * 1939-02-22 1947-07-08 Ruhle Rudolf Vaporization of substances in a vacuum
US2541764A (en) * 1948-04-15 1951-02-13 Battelle Development Corp Electric apparatus for melting refractory metals
US2793282A (en) * 1951-01-31 1957-05-21 Zeiss Carl Forming spherical bodies by electrons
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
FR1249096A (en) * 1959-04-24 1960-12-23 Heraeus Gmbh W C Process for the production, by fusion, of metal ingots using electron rays
US2994801A (en) * 1959-06-05 1961-08-01 Stauffer Chemical Co Electron beam generation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2423729A (en) * 1939-02-22 1947-07-08 Ruhle Rudolf Vaporization of substances in a vacuum
US2541764A (en) * 1948-04-15 1951-02-13 Battelle Development Corp Electric apparatus for melting refractory metals
US2793282A (en) * 1951-01-31 1957-05-21 Zeiss Carl Forming spherical bodies by electrons
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
FR1249096A (en) * 1959-04-24 1960-12-23 Heraeus Gmbh W C Process for the production, by fusion, of metal ingots using electron rays
US3219435A (en) * 1959-04-24 1965-11-23 Heraeus Gmbh W C Method and apparatus for producing metal blocks by electron beams
US2994801A (en) * 1959-06-05 1961-08-01 Stauffer Chemical Co Electron beam generation

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442321A (en) * 1965-06-03 1969-05-06 Commissariat Energie Atomique Device for continuous casting of refractory materials
US3702389A (en) * 1970-08-03 1972-11-07 Jean Pierre Peyrot Welding by electron bombardment
US4163889A (en) * 1974-05-27 1979-08-07 U.S. Philips Corporation Device for the simultaneous operation of a number of gas discharge electron guns
US5263044A (en) * 1989-09-05 1993-11-16 Bremer Siegfried M K Remelting method for recognition and recovery of noble metals and rare metals
US5222547A (en) * 1990-07-19 1993-06-29 Axel Johnson Metals, Inc. Intermediate pressure electron beam furnace
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
EP1845325A1 (en) * 2005-01-25 2007-10-17 Toho Titanium Co., Ltd. Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus
US20080105400A1 (en) * 2005-01-25 2008-05-08 Takeshi Shiraki Apparatus For Melting Metal By Electron Beams And Process For Producing High-Melting Metal Ingot Using This Apparatus
EP1845325A4 (en) * 2005-01-25 2008-12-24 Toho Titanium Co Ltd Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus
US7757748B2 (en) 2005-01-25 2010-07-20 Toho Titanium Co., Ltd. Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus
CN101147037B (en) * 2005-01-25 2012-07-04 东邦钛株式会社 Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus
CN102175077B (en) * 2005-01-25 2012-08-15 东邦钛株式会社 Apparatus for melting metal by electron beams and process for producing high-melting metal ingot using this apparatus

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GB915657A (en) 1963-01-16

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