US3123957A - Apparatus for processing a plurality of articles or materials - Google Patents
Apparatus for processing a plurality of articles or materials Download PDFInfo
- Publication number
- US3123957A US3123957A US3123957DA US3123957A US 3123957 A US3123957 A US 3123957A US 3123957D A US3123957D A US 3123957DA US 3123957 A US3123957 A US 3123957A
- Authority
- US
- United States
- Prior art keywords
- chamber
- tubular member
- evacuating
- articles
- inner tubular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 title description 21
- 238000004519 manufacturing process Methods 0.000 claims description 32
- 238000007789 sealing Methods 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 25
- 239000007789 gas Substances 0.000 description 32
- 238000004891 communication Methods 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 230000008859 change Effects 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 239000012671 ceramic insulating material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Definitions
- sealex machine One type of apparatus employed on a relatively large' scale for processing electron tubesto provide an evacuated and sealed. envelope is known as a sealex machine.
- This type of machine includes two turrets, on one 'otwhich a stem wafer is sealed. to a bulb of an electron tube, and on the other of which the envelope formedby the stem and bulb is evacuatedthrough an exhaust tubulation forming part of the envelope, and the tubulation then sealed off to completely and permanently sealthe envelope.
- a bell jar system For processing such other tube types and similar work pieces, use has been made of what is commonly known as a bell jar system.
- This system which is. a batch rather than a continuous process, includes a large demountable bell jar connected to a means ofevacuation and containing some means of heating the work pieces therewithin.
- a disadvantage to the use of existing bell jar systems is that they must be opened to the atmosphere each time the work pieces are loaded or unloaded. This exposes large surface areas of the evacuating system to the atmosphere on which gases may be occluded. Evolution of these gases from the surface areas during subsequent heat and vacuum treating of other batches of work pieces interferes with the eflicient evacuation of the system and increases the time required to process each work piece batch.
- present means to heat the work pieces within the zone to be evacuated are relatively complicated and ineflicient.
- a further object of this invention is to minimize the time required to heat treat, evacuate, seal and cool work pieces.
- One embodiment of this invention comprises a structure including a hollow metal tubular evacuating chamber closed at one end and supported in and enclosed by a housing.
- the housing is hermetically tight and is never opened to the atmosphere, while the chamber, which is also hermetically tight, may be opened to the atmosphere for the loading and unloading of electron tube work pieces therein through a hermetically scalable door.
- valve means are providedfor interconnecting. the chamber and the housing, andfor sealing the one from the other, whereby the evacuating means may be connected to evacuate the chamber and the housing simultaneously or separately.
- the wall of the chamber is made of electrically resistive material.
- the housing evacuating means is allowedto evacuate the housingto arelatively low gas pressure, and during loading and unloading ofelectron tube. work pieces from the chamber the valve: means between the chamberandhousing is kept-closed. After. the closing and the sealing of the chamber from the: atmosphere, the
- valve means between the housing and the chamber is opened to allow a rapid initial evacuation of the chamber into the housing.
- the housingpressure increases somewhat by. this flow of gases, and the: housing andthe chamber are further evacuated by the housing evacuatingis applied by thermal radiation for heat processing theelectron tube work pieces within the chamber.v
- the electrontube work pieces are heat and vacuum treated andthen permanently sealed.
- a gas is directed into the chamber to cause rapid cooling of it and its contents.
- the gas used for this purpose is a noncorrosive one that will not be occluded on the inside walls of the chamber. Also, when the chamber door is opened to the atmosphere, the presence of this noncorro'sive gas will protect the chamber from an excessive inflow of corrosive atmosphere gases;-
- the heat supplied to heat the work pieces within the chamber is conserved due to the fact that the evacuated space between the housing and the chamber is an excellent heat insulator. Also, because'of the low gas pressure surrounding the chamber, gas leakage into the chamber through its sealed joints is minimized. This allows for a rapid and efiicient evacuation of the chamber to the very low gas pressure essential for the processing of the electron tube work pieces.
- FIGURE 1 is an enlarged view in elevation, partly PatentedMar. 1-0, 1964 Electrical connections are supplied to the. ends of the chamber so that current may tube mount including a stem wafer 12, made of a ceramic, such as Forsterite, having lead wires 14 extending therethrough and supporting electrodes therein, as shown in FIGURE 1.
- a ring 26 of any well-known soldering material having a melting temperature of about 1000 C. is disposed adjacent to the periphery of the wafer 12, and the end of the bulb 10, which is closed by loosely positioning the wafer 12 thereon.
- the periphery of the wafer 12 may have a metallic coating 18 thereon, made of molybdenum, for example.
- a processing of the described work pieces by apparatus involves degassing metal components of the electron tube by heating, activating a cathode, also by heating, and sealing the periphery of the wafer 12 to the inner wall of the bulb 10.
- an apparatus including a cylindrical tank 21 including an evacuable chamber 22 therein, which in turn is partially surrounded by a heat shield 23, as shown in FIGURE 2.
- tank 21 is about four feet in length and has a diameter of one foot.
- tank 21 and chamber 22 are hermetically sealed from one another, and a flow of gases between the two is permitted only at certain specified times. Also, tank 21 is permanently sealed from atmospheric pressure.
- a mechanical pump 24, of any type well known in the art communicates with tank 21 by means of a duct 26 and aperture 27 in the wall of the tank. In the embodiment shown, pump 24 has a capacity of cu. feet per minute which is sufficient to maintain the gas pressure of the volume within the tank surrounding chamber 22 at a value of about 10x10 mm. of mercury.
- Chamber 22 is closed at one end 30, and its other end terminates in a flange 31 which is rigidly attached as by welding to plate 32 closing the upper end thereof of tank 21.
- Plate 32 has a hole 33 in register with the end of chamber 22, and access may be obtained to the interior of the chamber 22 therethrough.
- a vacuum tight closure door must be provided for the chamber, which may be any of a variety of commercially available gate style vacuum valves such as Vacuum Research Company VG102T. As shown in FIGURE 2, however, the door in this embodiment comprises simply a circular plate 36 contacting deformable sealing members 37, such as commercially available 0 rings, which sit in annular grooves 38 in plate 32.
- chamber 22 is evacuated and atmospheric pressure forcibly presses plate 36 against the sealing members 37 which are deformed to fill up and seal the region between them and plate 36.
- the connection between flange 31 and plate 32 is vacuum tight and removal of plate 36 does not open the interior of tank 21 to the atmosphere.
- the outer diameter of the chamber 22, for reasons hereinafter disclosed, may vary between 2%; to 2%", while the inner diameter of the chamber is a constant 2". Also, the chamber is three feet long. Flange 31, fastened to plate 32, mentioned above, provides the sole support of the chamber, which extends otherwise freely into tank 21..
- the abovementioned pumps comprise a vapor diffusion pump 55 with a capacity, for example, of 1490 liters per second, backed up by a mechanical pump 56 with a capacity of, for example, 15 cubic feet per minute.
- valves 57, 58 and 59 are provided to control the flow of gases within the apparatus.
- Valve 57 is provided to isolate and protect the sensitive vapor diffusion pump 55 from duct 56 during the times when chamber 22 and duct 50 are opened to atmospheric pressure.
- Valve 58 along with tubulation 6% ⁇ opening into tank 21 and duct 50 through vacuum sealed apertures 61 and 62, respectively, permits the flow of gases between chamber 22 and tank 21, as previously mentioned.
- valve 59 permits the inflow of a noncorrosive gas such as nitrogen, into duct 50 and chamber 22 through tubulation 63.
- the tubulation 63 is connected to a source of nitrogen and opens into duct 50 through vacuum sealed aperture 64.
- chamber 22 may be made of any one of a number of materials well known in the trade such as an alloy known as Inconel, composed of iron, cobalt and nickel, and which has high hot strength, low thermal conductivity, and relatively high electrical resistivity.
- an alloy known as Inconel composed of iron, cobalt and nickel, and which has high hot strength, low thermal conductivity, and relatively high electrical resistivity.
- An electrical energy supply is provided, which is connected by means of connecting wires 74 and '72 to the bottom end 30 of chamber 22 through a vacuum tight and insulating seal 'il in the end of tank 21.
- the complete electrical circuit comprises connecting wires '74 and 72, and the chamber 22, with the tank walls and wire 54 serving as the return path to the electrical supply.
- Ceramic insulator '73 is provided to electrically insulate connection 74 from the tank walls.
- the electrical connecting link 72 to chamber 22 within tank 21 is necessarily flexible so as not to interfere with the expansion of chamber 22 when it is heated.
- the wall thickness of the chamber is varied to control the amount of heating caused by the current flow.
- chamber portion 75 has walls with a thickness of about thousandths of an inch, while for a length of about two feet, the wall thickness of the central portion '76 of the chamber is but 70 thousandths of an inch, with the remaining six inch portion 77 again having a wall thickness of 125 thousandths or an inch.
- the differences in ohmic resistance per unit length created by the different wall thicknesses are such that when the current passes through the chamber walls the central thin wall portion becomes very hot, while the end portions remain relatively cool.
- thermocouples 78 are provided which extend through vacuum tight seals '79 in the side of tank 21, through holes 81) in shield 23, and which are fixed at different points along the chamber wall.
- the internal crosssection of chamber 22 remains constant while the external diameter of the chamber varies.
- Shoulders 83 and 84 are used tolocate the ceramic insulation spacers 85 and 86, to which are fixed the heat shield 23.
- the ceramic spacers fit loosely around the chamber central portion to permit independent thermal expansion of the chamber and the shield, and also to prevent current flow through the shield.
- the shield is made of any shiny, highly reflective material, such as stainless steel, to reflect thermal radiated energy from the heated chamber portions back to the chamber.
- Ducts 43 and 49 are rigidly connected to chamber 22, and to avoid interference with thermal expansion of the chamber, they are provided with bellows-like Wall portions 90 and 21. These wall portions are made of a thin, convoluted material, such as stainless steel, and like bellows, are readily deformable to permit the axial length of ducts 4-3 and 49 to change along with the thermally induced changes in the chamber length. Small ceramic insulating disks 93 and 94 are used to fasten the wall portions 99 and 91 to the ducts 48 and 49. These disks are used to prevent current flow through and useless heating of the metallic. ducts.
- a charging rack as shown in FTGURES 3 and 4 which cornprises a central support rod 98, to which are fixed a plurality of parallel and spaced disks 99.
- the disks have holes in them to receive electron tubes, as shown, and the entire charging rack with the loosely assembled electron tube work pieces therein, is inserted into the chamber 22 as in FlGURE 2.
- the lower end lititl of support rod 98 rests on the chamber closed end 30, and the disks are so positioned along the support rod to insure that the electron tubes are located within the thin Walled portion of the chamber.
- the disks are about two inches in diameter, and engage the chamber walls to center the charging rack within the chamber.
- the edges of the disks and the lower end 1% of support rod @3 are made of a ceramic insulating material.
- the remaining portions of the charging rack are preferrentially made of stainless steel, or other low thermal capacity material to facilitate rapid heating and cooling of the charging rack.
- tank 21 is preliminarily evacuated to a low gas pressure by pump 24.
- Pump 24 operates to evacuate tank 21 continuously, and in the processing of subsequent batches of electron tube work pieces, this preliminary tank exhaust step is unnecessary, as will be seen.
- the charging rack With plate 36 separated from the chamber opening, the charging rack, with a batch of loosely assembled electron tube work pieces therein, is inserted into chamber 22. Plate as is then located to close the chamber 22 and valve 58 between the tank 21 and duct 54 ⁇ is opened to allow an initial evacuation of the chamber into the tank.
- the purpose of this initial evacuation is twofold: first, it provides rapid initial rough evacuation of the chamber; and, second, it serves to protect the sensitive vapor diffusion pump 55 from being overloaded by a charge of gases at atmospheric pressure.
- Valve 58 is left open and pump 24 is allowed to re-evacuate tank 21 along with chamber 22 and its associated ducts back to the original low pressure value of the tank.
- Valve 58 is then closed and the valve 57 between duct St? and pumps 55 and 56 is opened to allow these pumps to further lower the gas pressure in chamber 22 and the associated ducts.
- Valve 57 is. then closed, isolating pump 55 from the chamber, andvalve'59 is opened to allow a'flow of nitrogen into the chamber and around'the sealed electron tubes. This inflow of nitrogen serves to hasten the cooling of the electron tubes and to shorten the processing cycle.
- the pressure within the chamber 22 is allowed to build up to slightly higher than that of atmospheric pressure, and plate 36 is then removed. Thepresence of the nitrogen gas within the chamber 22 protects it from an inflow of atmospheric gases which would tend to occlude onto the chamber and duct walls and make evacuation more difiicult during processing of'the next 'batch' of work pieces.
- the charging rack is removed, and a new batch is inserted into chamber 22 to repeat the cycle.
- the vacuum plate 36 is re-added, valve 59 is closed to stop the flow of nitrogen, and 'valve 58 may then be immediately opened.
- Tank 21, as described, is already at its low gas pressure, and time need not therefore be taken to reevacuate it.
- a further advantage to the low pressure region of tank 21 surrounding the heated chamber 22 is that it practically eliminates conductive and convective heat losses from most of the chamber surface.
- Shield 23 in addition, reduces the heat loss due to thermal radiation; and in operation, the above two insulating means permit'heating of chamber 22 well above red heat while the walls of tank 21 remain at a temperature below 100 C.
- thermocouples 78 also serve to permit free flow of gases between the interior of the shield immediately surrounding chamber 22 and the remaining portions of tank 21 for efiicient evacuation of the tank.
- Apparatus for evacuating and sealing articles of manufacture having an envelope comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed and means for heating said inner member, an outer housing member surrounding and enclosing said inner member and having a vacuum fit therewith, passage means for gas communication between said inner member and said outer housing member, said passage means having a valve therein, evacuation means connected to said inner member, and evacuation means connected to said outer housing member, whereby said inner member and said outer housing member may be evacuated together when said valve is open, or both of said members may be evacuated separately when said valve is closed.
- Apparatus for evacuating and sealing articles of manufacture having an envelope
- said apparatus comprising an inner member providing a chamber for receiving 10 articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member and having a vacuum-tight fit therewith, said inner member being of a resistive material whereby said inner member may be heated by the passage of a current therethrough, first evacuating means communicating with said outer housing member, evacuating means communicating with said inner tubular member, and openable and closeable means for communicating gases between said inner member and said outer housing member.
- Apparatus for evacuating and sealing articles of manufacture having an envelope
- said apparatus comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member and having a vacuum-tight fit therewith, said inner member being of a resistive material whereby said inner member may be heated by the passage of a current therethrough, evacuating means communicating with the outer housing member, evacuating means communicating with said inner member and said outer housing member, said last evacuating means having means for closing communication with said outer housing member to provide communication with said inner member only and for providing communication between said inner member and said outer housing member.
- Apparatus for heating, evacuating and sealing articles of manufacture having an envelope and a closure member to be sealed to said envelope, said apparatus comprising an inner tubular member providing an elongated chamber for receiving said articles of manufacture, an outer tubular member substantially surrounding and enclosing said inner tubular member and having a vacuumtight fit therewith, said inner tubular member being of a resistive material whereby said inner tubular member may be heated by the passage of a current therethrough, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said last evacuating means having means for closing communicattion with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner and said outer 6O tubular members.
- Apparatus for heating, evacuating and sealing articles of manufacture having an envelope and a closure member to be sealed to said envelope, said apparatus comprising an inner tubular member provided an elongated chamber for receiving said articles of manufacture, an outer tubular member substantially surrounding and enclosing said inner tubular member and havin' vacuumtight fit therewtih, said inner tubular member being of a resistive material whereby said inner tubular member may be heated by the passage of a current therethrough, said inner tubular member being supported at one end only whereby said member may expand and contract upon change of temperature therein, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said last evacuating means having means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner and said outer tubular members.
- Apparatus for heating, evacuating and sealing articles of manufacture having an envelope and a closure member to be sealed to said envelope, said apparatus comprising an inner tubular member providing an elongated chamber for receiving said articles of manufacture, an outer tubular member substantially surrounding and enclosing said inner tubular member and having a vacuum-tight fit therewith, said inner tubular mem ber being of a resistive material whereby said inner tubular member may be heated by the passage of a current therethrough, and means for supporting said inner tubular member whereby said member may expand and contract upon change of temperature therein, a heat shield closely surrounding and insulatingly supported on said inner tubular member, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said last evacuating means having means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner and said outer tubular members.
- Apparatus for heating, evacuating and sealing articles of manufacture having an envelope and a closure member to be sealed to said envelope, said apparatus comprising an inner tubular member providing an elongated chamber for receiving said articles of manufacture, an outer tubular member substantially surrounding and enclosing said inner tubular member and having a vacuum-tight fit therewith, said inner tubular member being of a resistive material whereby said inner tubular member may be heated by the passage of a current therethrough, said inner tubular member being supported at one end only whereby said member may expand and contract upon change of temperature therein, a heat shield closely surrounding and insulatingly supported on said inner tubular member, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said last evacuating means having means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner and said outer tubular members.
- Apparatus for evacuating and scaling articles of manufacture having an envelope and a header to be sealed thereto, said apparatus comprising an inner tubular member providing an elongated chamber for receiving articles of manufacture to be evacuated and sealed, an outer tubular member substantially surrounding and enclosing said inner tubular member and having a vacuum-tight fit therewith, said inner tubular member being of a resistive material whereby said inner tubular member may be heated by the passage of current therethrough, and means for supporting said inner tubular member whereby said inner tubular member may expand and contract upon change of temperature therein, a heat shield closely surrounding and insulatingly supported on said inner tubular member, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular memher and said outer tubular member, said last evacuating means having means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner tubular member and said outer tubular member, the evacuating means communicating with said inner and outer tubular
- Apparatus for evacuating and sealing articles of manufacture having an envelope and a header to be sealed thereto, said apparatus comprising an inner tubular member providing an elongated chamber for receiving articles of manufacture to be evacuated and sealed, an outer tubular member surrounding and enclosing said inner tubular 'member and having a vacuum-tight fit therewith, the walls of said inner tubular member having portions thereof of different thicknesses of a resistive material whereby said wall portions may be preferentially heated, said inner tubular member being supported at one end only whereby said member may expand and contract upon change of temperature therein, a shiny, reflective heat shield closely surrounding and insulatingly supported on said inner tubular member, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said last evacuating means hving means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner tubular member and said outer tubular member, the evacuating means communicating
- Apparatus for evacuating and sealing articles of manufacture having an envelope and a header to be sealed thereto, said apparatus comprising an inner tubular member providing an elongated chamber for receiving articles of manufacture to be evacuated and sealed, an outer tubular member surrounding and enclosing said inner tubular member and having a vacuum-tight fit therewith, said inner tubular member being of a resistive material whereby said inner tubular member may be heated by the passage of current therethrough, said inner tubular member being supported at one end only whereby said member may expand and contract upon change of temperature therein, a heat shield closely surrounding and insulatingly supported on said inner tubular member, evacuating means communicating with said outer tubular member, evacuating means communicating with said inner tubular member and said outer tubular member, said lastevacuating means having means for closing communication with said outer tubular member to provide communication with said inner tubular member only and for providing communication between said inner tubular member and said outer tubular member, and means for providing communication between said inner tubular member and a source of flushing gas
- Apparatus for evacuating and sealing articles of manufacture comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member, means for providing hermetic sealing of said members from one another, means adapted for receiving power from a source for heating said inner member, and passageways communicating with each of said outer housing member and said inner member allowing evacuation of said members.
- Apparatus for evacuating and sealing articles of manufacture comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member, means adapted for receiving power from a source for heating said inner member, and means for evacuating said inner and outer members together and for evacuating said inner and outer members separately, said last-named means including means for hermetically sealing said inner and outer members from one another.
- Apparatus for evacuating and sealing articles of manufacture comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member and having a vacuum-tight fit therewith, means adapted for heating said inner member, passageways communicating with said outer housing member and passageways communicating with the inner member allowing evacuation of said housing member and said inner member, and means for providing and closing off communication between said inner member and said outer housing member.
- Apparatus for evacuating and sealing articles of manufacture comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member, means for providing hermetic sealing of said members from one another, the wall of said inner member being of electrically resistive material to permit heating thereof, and passageways communicating with each of said outer housing member and with said inner member allowing evacuation of said members.
- Apparatus for evacuating and sealing articles of manufacture comprising an inner member providing a chamber for receiving articles of manufacture to be evacuated and sealed, an outer housing member substantially surrounding and enclosing said inner member, the wall of said inner member being of electrically resistive material permitting heating thereof, and means for evacuating said inner and outer members together and for evacuating said inner and outer members separately,
- said last-named means including means for hermetically sealing said inner and outer members from one another.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Furnace Details (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1686660A | 1960-03-22 | 1960-03-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3123957A true US3123957A (en) | 1964-03-10 |
Family
ID=21779423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US3123957D Expired - Lifetime US3123957A (en) | 1960-03-22 | Apparatus for processing a plurality of articles or materials |
Country Status (6)
Country | Link |
---|---|
US (1) | US3123957A (enrdf_load_stackoverflow) |
DE (1) | DE1154204B (enrdf_load_stackoverflow) |
FR (1) | FR1283747A (enrdf_load_stackoverflow) |
GB (1) | GB957895A (enrdf_load_stackoverflow) |
IT (1) | IT649658A (enrdf_load_stackoverflow) |
NL (1) | NL262638A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110067952A1 (en) * | 2009-09-23 | 2011-03-24 | Ernest Oxenknecht | Heat shield and an insulating isolator for the heat shield |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19757184A1 (de) | 1997-12-22 | 1999-06-24 | Schaeffler Waelzlager Ohg | Schaltgabel für ein Gangschaltgetriebe eines Kraftfahrzeugs |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1670892A (en) * | 1926-01-11 | 1928-05-22 | Kellogg Switchboard & Supply | Method of treating tubes |
US2522062A (en) * | 1943-08-18 | 1950-09-12 | Hartford Nat Bank & Trust Co | Vacuum tube seal |
US2749203A (en) * | 1951-06-30 | 1956-06-05 | Gen Electric | Manufacture of decorative lamps |
US2894795A (en) * | 1955-05-23 | 1959-07-14 | Jr Charles P Marsden | Automatic evacuation system for electron tubes |
US3057130A (en) * | 1959-03-05 | 1962-10-09 | Rca Corp | Apparatus for processing articles or materials in a continuous flow operation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB777030A (en) * | 1952-01-16 | 1957-06-12 | Rangabe Alexander Rizo | Improvements in electron discharge tubes |
DE1032411B (de) | 1952-02-16 | 1958-06-19 | Csf | Verfahren zur Herstellung von bestaendigen Dichtungsverbindungen an stumpf aneinanderliegenden Bauteilen von luftdichten Kolben |
US2868610A (en) * | 1954-10-22 | 1959-01-13 | Gen Electric | Method and apparatus for making vacuum enclosures |
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0
- IT IT649658D patent/IT649658A/it unknown
- US US3123957D patent/US3123957A/en not_active Expired - Lifetime
- NL NL262638D patent/NL262638A/xx unknown
-
1961
- 1961-02-23 GB GB6728/61A patent/GB957895A/en not_active Expired
- 1961-02-28 DE DER29766A patent/DE1154204B/de active Pending
- 1961-03-16 FR FR855795A patent/FR1283747A/fr not_active Expired
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1670892A (en) * | 1926-01-11 | 1928-05-22 | Kellogg Switchboard & Supply | Method of treating tubes |
US2522062A (en) * | 1943-08-18 | 1950-09-12 | Hartford Nat Bank & Trust Co | Vacuum tube seal |
US2749203A (en) * | 1951-06-30 | 1956-06-05 | Gen Electric | Manufacture of decorative lamps |
US2894795A (en) * | 1955-05-23 | 1959-07-14 | Jr Charles P Marsden | Automatic evacuation system for electron tubes |
US3057130A (en) * | 1959-03-05 | 1962-10-09 | Rca Corp | Apparatus for processing articles or materials in a continuous flow operation |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110067952A1 (en) * | 2009-09-23 | 2011-03-24 | Ernest Oxenknecht | Heat shield and an insulating isolator for the heat shield |
US8104573B2 (en) | 2009-09-23 | 2012-01-31 | Dana Automotive Systems Group, Llc | Heat shield and an insulating isolator for the heat shield |
Also Published As
Publication number | Publication date |
---|---|
NL262638A (enrdf_load_stackoverflow) | |
IT649658A (enrdf_load_stackoverflow) | |
GB957895A (en) | 1964-05-13 |
FR1283747A (fr) | 1962-02-02 |
DE1154204B (de) | 1963-09-12 |
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