US2570158A - Method and apparatus for separating charged particles of different mass-to-charge ratios - Google Patents

Method and apparatus for separating charged particles of different mass-to-charge ratios Download PDF

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US2570158A
US2570158A US198870A US19887050A US2570158A US 2570158 A US2570158 A US 2570158A US 198870 A US198870 A US 198870A US 19887050 A US19887050 A US 19887050A US 2570158 A US2570158 A US 2570158A
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electrodes
ions
mass
field
voltage
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Paul O Schissel
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General Electric Co
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General Electric Co
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Priority to CH306176D priority patent/CH306176A/de
Priority to FR1049592D priority patent/FR1049592A/fr
Priority to GB28162/51A priority patent/GB698850A/en
Priority to DEI5148A priority patent/DE882769C/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/36—Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers
    • H01J49/38—Omegatrons ; using ion cyclotron resonance

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  • AMPLIFIER 67 RECORDER Invent or: aLU (lschissel,
  • AMPLIFIER RECORDER Inventor-z Pgul schi'ssel
  • This invention relates to mass spectrometry and, in particular, to novel methods and apparatus for separating ions according to their massto-charge ratios.
  • One form of mass spectrometer apparatus employed heretofore comprises means for accelerating a plurality of ions having heterogeneous mass-to-charge ratios through an electrostatic field into a direct current magnetic field wherein they are separated into a plurality of spatially distributed ion beams, each of which is homogeneous with respect to mass-to-charge ratio.
  • ap aratus it is necessary to employ collimating slits and apertured focusing plates which, while they serve their purpose, tend to restrict the amount of output current which may be obtained from a given ion beam.
  • Another form of mass spectrometer a aratus involves the successive application of a plurality of radio frequency and direct current electric fields whereby separation of ions is accomplished by permitting only ions having a given mass-tocharge ratio to pass completely through the succession of fields.
  • This apparatus is not easily adaptable to the production of high beam currents inasmuch as the ultimate passage of ions through the successive fields depends not only upon the mass-to-charge ratio, but also upon the time of origination of the ions with respect to the phase of the radio frequency field. Therefore, it is another principal object of this invention to provide a mass spectrometer method and apparatus in which the separation of ions having a given mass-to-charge ratio does not depend upon the time of their origination.
  • ions having heterogeneous mass-to-charge ratios are accelerated by means of an alternating or R. F. electric field against the force of an electrostatic or direct current electric field having a linear space distribution.
  • Fig. 1 is a graph illustrating the direct current voltage distribution which obtains in devices constructed in accordance with the present invention
  • Fig. 2 is a sectional View presenting one embodiment of the invention
  • Fig. 3 is a sectional view illustrating a second embodiment of the invention
  • Fig. 4 represents in section a third embodiment of the invention
  • Fig. 5 is a. second graph illustrating direct cur-- rent voltage distribution pertinent to an explanation of the invention
  • Fig. 6 is a graph illustrative of operational characteristics pertinent to an adequate explanation of portions of the invention
  • Figs. 7 and 8 illustrate in sectional manner respectively fourth and fifth embodiments of the invention.
  • a parabolically distributed voltage as indicated by the solid line I in Fig. 1 wherein the voltage V is plotted as a function of distance X, is arranged to have its apex 2 positioned upon the y-axis or median plane 3, then, since by definition the electrostatic or direct current electric field is the negative of the first derivative with respect to a: of the voltage, a linear electrostatic field increasing in both directions from the plane 3 will be created.
  • a confined alternating electric or R. Fifield is arranged to have a component parallel to the direction of the x-axis at the apex 2 of the voltage or potential distribution curve I, ions injected into the alternating or R. F. field will continuously extract energy therefrom, providing the period of oscillation of the ions about the alternating or R. F. field is equal to the period of the field.
  • the requirements of ion mass-tocharge ratio and R. F. field frequency may be derived as follows:
  • V is the voltage creating the field 3 Since it has been stipulated that V has a parabolic space distribution
  • a mass spectrometer which comprises an evacuable envelope It having re-entrant seal portions H and i2 disposed respectively at opposite ends thereof.
  • Opposed cup-shaped collector electrodes is and M are supported within envelope 50 by means of rigid leads l5 and It hermetically introduced through seal portions H and !2 respectively.
  • a source of electrons 18 which may comprise a thermionically emissive filament 59, supported by conductive leads 20 and 2
  • a hollow cylindrical fects may be created. Electrons emanating from heated filament I9 are accelerated, as indicated by the dotted lines 25, through an aperture 26 within an annular member 21, which may be termed an electron trap. Trap 2'! is supported by means of a rigid conductive lead 28, hermetically introduced through sealing boss 22 and connected as shown to a source of direct current 29 whereby accelerating potential is applied between trap 21 and filament l9.
  • are supported respectively by means of rigid conductive leads 34 and 35 between which is connected the secondary winding 36 of a transformer 37.
  • Alternating or R. F. voltag may be supplied to electrodes 33 and EH through transformer 31 by means of an oscillator 38 connected to the primary winding 39 of transformer 31.
  • Oscil-- lator 38 preferably has a'variable frequency output, the reason for which will be more fully appreciated in the light of the following discussion.
  • An electrostatic or direct current electric field may be produced between collector electrodes [3 and [4 by means of a plurality of annular grading rings 49-43 and 44-41. All the grading rings 4941, along with electrodes 30 and 3
  • resistors 52- and '5659 constitute potential dividers which, if the resistances have the proper values, will provide a parabolic voltage distribution increasing positively in both directions from median plan ll between terminal grading rings 43 and 41.
  • Terminal grading rings 43 and 41 are interconnected by lead '63 to assure that the extremities of the parabolically distributed voltage are at the same potential.
  • envelope H has been evacuated through a pump lead 64 and a suitable gas sample or ionizable medium introduced therein in a manner well known to those skilled in the art, it will be realized that a plurality of ions are formed by impact when electrons, emanating from filament I9 and traveling within electron trap 21, strike the gas molecules.
  • the ions thus generated are accelerated to the left or to the right from the median plane, indicated by line ll, depending upon whether electrodes 30 and 31' are respectively positive'and negative or vice'versa at the time of their generation.
  • the ions move under the impetus of the kinetic energy imparted to them by the R. F.
  • the ions having the correct or resonant mass as above described receive enough energy from the R. F. field to overcome the force of the opposing linearly distributed electrostatic field, they emerge from the aperture in terminal grading ring 43 or 41, as the case may be, with substantially zero kinetic energy or velocity and impinge upon collector electrode l3 or I 4.
  • collector electrodes l3 and [4 are connected in parallel such that the total ion current thus generated flows through resistor 65 to the ground connection indicated at 65'.
  • the voltage generated by the ion current flowing through resistor 65 may be supplied to an amplifier 66 and thence to a recorder 61 whereby a permanent record of the concentration of such ions may be obtained.
  • a small negative potential may be provided therebetween, as is indicated by the connection of battery 68 in circuit with resistor 65.
  • solenoidal windings 69 may be positioned about envelope Ill to provide a paraxial magnetic field which tends come the force of the opposing electrostatic field and to reach one of the collector electrodes.
  • E is the peak of value of the R. F. voltage of oscillator 38. If the voltage of battery 61 is selected at 1000 volts, the peak voltage of oscillator 38 chosen to be 1 volt, the frequency of oscillator 38 set at 0.07 megacycle, and the device constructed such that the distance between terminal grading rings 43 and 41 is centimeters; then ions having an atomic mass number of about 100 will be collected upon collectors i3 and M. In such event theresolution, as defined in Equation 8, is of the order of 1600.
  • Electrode I5 is supported by a stud 15 sealed into envelope l0 while electrode 16 is supported by lead 60 as shown.
  • electrodes 15 and 16 have bent surfaces which correspond in shape to that of hyperboloids of revolution, then with the indicated exterior circuit connections the desired parabolically distributed voltage or linearly distributed electrostatic field will exist between the electrodes. Consequently, if it is so desired, electrodes 15 and 16, shaped as hyperboloids of revolution, may be employed to replace the plurality of grading rings and interconnecting resistors illustrated in Fig. 2. It should be observed, however, that the collimating solenoids .69 and 10 are more nearly essential when electrodes l5 and 16 are utilized, because vertical components of the electrostatic field, existing between the electrodes except along the axis thereof, tend to withdraw the ions from the field.
  • Fig. 4 wherein parts corresponding to those shown in Fig. 2 are designated by like numerals, there is shown a modification of the invention in which the R. F. or alternating electric field, rather than being generated along the median plane I! between collector electrodes l3 and I4, is generated in series with the electrostatic or direct current electric field existing between terminal grading rings 43 and 41.
  • the secondary winding 36 of transformer 31, to which oscillator 38 is connected is now connected through battery 68 to the positive terminal of battery 6
  • are connected together by means of shorting bar 80 and electrode 3
  • Fig. 4 An understanding of the effect of the modification illustrated in Fig. 4 may be obtained from Fig. 5 wherein Fig. l is duplicated.
  • Added curves 82 and 83 illustrate the voltage distribution be- 7 tween terminal grading rings 43 and 41 at two separate instants of time when the R. F. field supplied by oscillator 38 is other than zero.
  • Curve I represents the voltage distribution when the R. F. field is Zero. Therefore, it may be considered that the R. F. voltage generated by oscillator 38 modulates the direct current voltage between terminal grading rings 43 and 41 or, in other words, that it alters the rate of change of slope of the parabolically-shaped voltage distribution and, hence, the value of the electrostatic field.
  • Equation 12 is known as Mathieus equation
  • the essential consideration is that for certain values of a and q resonance occurs. This means that ions having certain mass-to-charge ratios continue to gain energy from oscillator 38 and hence finally reach either collector electrode 53 or collector electrode l4, as the case may be. Ions having mass-tocharge ratios other than the resonant ones do not continue to gain energy from oscillator 38 and therefore do not reach the collector. electrodes.
  • Fig. 6 there is shown a stability chart for Mathieu functions of integral order wherein q is plotted upon the ac-axis while a is, plotted on the y-axis.
  • V and E are both held constant by maintaining the voltage of battery El and oscillator 38 at constant values, then the equation of a straight line having a slope Fig. 6 will continue to gain energy from oscillator 38 and ultimately reach either collector electrode l3 or I4. Those ions having mass-tocharge ratios such that a and q have values falling within the unshaded regions of Fig. 6, marked stable, will not continue to gain energy and hence will not reach the collector electrodes. Consequently, to obtain the best discrimination between ions having heterogeneous mass-to-charge ratios, values of V and E should be selected so that operation of the device will occur along a line such as line 85. Since line traverses essentially only one unstable region, only ions having mass-to-charge ratios such as to cause a" and q to fall within this region will receive energy continuously from the R. F.
  • the operatin line such as line 85, should be kept as near the vertical axis of Fig. 6 as possible in order that ions having mass-to-charge ratios immediately adjacent the desired resonant mass-to-charge ratio will not also receive continuous acceleration.
  • the voltage of battery 6i and the voltage of oscillator 38 in the device of Fig. 4 be maintained constant at a desired value.
  • the frequency of oscillator 38 is varied. With frequency as the independent variable, the following equation may be emplcyed for the determination of the particular ion mass-to-charge ratio being collected upon electrodes l3 and I4:
  • Fig. 7 there is shown a modification of the invention wherein structure similar to that disclosed heretofore in Fig. 3 is utilized in connection with circuitry similar to that disclosed in Fig. 4.
  • amplifier input resistor 65 is connected to the secondary winding 38 of transformer 31 which, in turn, is connected to battery 5
  • Bent surface electrodes 15 and 16 have the shape of hyperboloids of revolution to obtain the desired electrostatic or direct current field distribution therebetween as discussed in connection with Fig. 3.
  • the equation of motion of ions generated within envelope I0 is determined by Equation 12 in a manner similar to that discussed heretofore in connection with Fig. 4.
  • the ions should pass through the R. F. field in a time short compared with the period of the R. F. field in order to insure that they receive an increase of kinetic energy during each traversal thereof. Accordingly, electrodes 30 and 3! should be as closely spaced as possible with respect to each other commensurate with the positioning therebetween of annular trap 21. It should also be noted that, when ions are first formed by impingement of '9 the electrons emanating from filament I9 upon gas molecules, the only means for their escape from the region of trapz'l is by acceleration due to the R. F.
  • the requisite linearly distributed electrostatic field, or parabolically distributed voltage is provided by means of a plurality of spaced, plate-shaped, grading rings Hill-409 and potential dividing resistors IIll-IIl connected as shown;
  • a Source of electrons H8 is positioned adjacent median plane I1 and comprises a thermionically emissive filament H9, hollow cylindrical shield lZil and supporting leads I2I and I22.
  • Heating current for filament I I9 is supplied by a source of direct current, indicated conventionally by battery I23 connected between leads HI and I22.
  • An electron trap I24 is supported by means of a rigid conductive lead I25 in the space between grading rings I95 and I06. Accelerating voltage may be supplied between filament H9 and trap I24'by a unidirectional voltage source I26. Trap I24 is maintained at approximatel the average potential between rings I and I06 by means of a suitable source of unidirectional voltage I21 connected between the positive terminal of battery I26 and the center-tap 62 of transformer36. As indicated, rings or electrodes Hi4 and I 05, supported by leads I28 and I29, are spaced as closely as possible with respect to each other to minimize the axial extent of the R. F. field generated therebetween by oscillator 38.
  • ions generated by bombardment within trap I24 are at once subjected to the force of the electrostatic field whereby they are propelled through the R. F. fieldbetween rings I04 and I05 with a considerable velocity on their first traversal thereof.
  • displacement of trap I24 and electron source IIB from median plane I1 permits the closer spacing of electrodes I04 and H15 to reduce the axial'extent of the R. F. field.
  • c'ourse,fth'at trap I24 and source II 8 maybe positioned between any of the plurality of grading rings to achieve the above described purposes. 'Also, the same expedients are equally applicable to the modifications shown in Figs. 3 and 7 wherein hyperbolically-shapedelectrodes I5 and I5 render unnecessary the employmentof grading rings;
  • the grading rings may be evenly spaced and the desired parabolic voltage distribution obtained by selecting suitable values for the resistors.
  • other arrangements having unequally spaced grading rings may be employed for this purpose, as will appear to those skilled in the art from the foregoing considerations.
  • a mass spectrometer comprising an evacu able envelope, a pairof electrodes mounted in' spaced apart relationship within said envelope,
  • a mass spectrometer comprising an evacuable envelope, a pair of electrodes mounted in spaced apart relationship within said envelope, means for producing in the space between said electrodes an electrostatic field having a linear space distribution, the axial component of said field being substantially zero upon the median plane between said electrodes and increasing from the median plane toward each of said electrodes, means for generating an alternating electric field between said electrodes, means for directing a magnetic field along the common axis of said electrodes, means for injecting electrons into the space between said electrodes, and means for introducing an ionizable medium into said envelope.
  • a mass spectrometer comprising an evacuable envelope, a pair of electrodes mounted in spaced apart relationship within said envelope, means for injecting electrons into the space between said electrodes, means for introducing an ionizable medium into said envelope whereby said medium may be ionized by said electrons to form ions having a plurality of mass-tocharge ratios, means for producing in the space' between said electrodes a direct current voltage having a parabolic space distribution, said parabolic voltage having its apex lying substantially upon the median plane between said electrodes and increasing positively from the median plane toward each of said electrodes, means for generating an alternating electric field between said electrodes, the combined effect of said direct current voltage and said alternating electric field being to cause resonant ions to be continuously accelerated by said alternating electric field during successive passages therethrough while nonresonant ions are accelerated to only a limited extent, and means for collecting and measuring said resonant ions.
  • a mass spectrometer comprising an evacuable envelope, a pair of electrodes mounted in spaced apart relationship within said envelope, means for injecting electrons into the space between said electrodes, means for introducing an ionizable medium into said envelope whereby said medium may be ionized by said electrons to form, ions having a plurality of mass-tocharge ratios, means for producing in the space between said electrodes a direct current voltage bolic voltage having its apex lying substantially upon the median plane between said electrodes 1 and increasing positively from the median plane toward each of said electrodes, means for genmass-to-charge ratio are accelerated to and fro by said radio frequency field against the opposing force of said parabolic potential distribution to ultimately overcome said opposing force, and means for collecting said ions having a given mass-to-charge ratio.
  • a mass spectrometer comprising an evacuable envelope, a first plurality of coaxially aligned potential grading rings disposed on one side of a plane traversing said envelope, a second plurality of coaxiall aligned potential gradin rings disposed within said envelope on the opposite side of said plane, the grading rings terminating each of said pluralities of grading rings adjacent said plane being adapted to serve also as electrodes for the establishment of a radio frequency field, means constituting a potential divider connected to said pluralities of grading rings, means for energizing said potential divider to establish along said pluralities of grading rings a parabolic potential distribution having its apex lying upon said plane and increasing positively in both directions from said plane, means for establishing a radio frequency field between said terminating grading rings serving also as electrodes, and means for generating ions within said envelope whereby ions having a given massto-charge ratio are accelerated to and fro by said radio frequency field against the opposing force of said parabolic potential distribution to
  • a mass spectrometer comprising an evacuable envelope, a pair of opposed electrodes supported within said envelope, said electrodes having the shape of hyperboloids of revolution, a source of direct current voltage connected to said electrodes to establish therebetween a parabolically distributed voltage the apex of which lies upon the median plane between said electrodes, means for generating ions having a plurality of mass-to-charge ratios between said electrodes, means for generating a radio frequency field between said electrodes and along said plane whereby ions having a given mass-to-charge ratio will be accelerated to and fro by said radio frequency field against the opposing force of said parabolicall distributed voltage to overcome ultimately said opposing force while ions having other mass-to-charge ratios will fail to overcome said opposing force, and means for collecting said ions having a given mass-to-charge ratio.
  • a mass spectrometer comprising an evacuable envelope, a first pair of spaced electrodes supported within said envelope, said electrodes having the shape of hyperboloids of revolution, a source of direct current voltage connected to said electrodes to establish therebetween a parabolically distributed voltage the apex of which lies upon the median plane between said electrodes, a second pair of spaced electrodes supported between said first pair of electrodes, said electrodes in said second pair being positioned on opposite sides of said plane between said first pair of electrodes, means for generating ions having a plurality of mass-to-charge ratios between said electrodes, and a source of radio frequency voltage connected to said second pair of electrodes for generating therebetween a radio frequency field whereby ions having a given massto-charge ratio will be accelerated to and fro by said radio frequency field against the opposing force of said parabolically distributed voltage to overcome ultimately said opposing force while ions having other mass-to-charge ratios will fail to overcome said opposing force, and means for collecting said ions having a given mass-to
  • a mass spectrometer comprising an evacuable envelope, a first pair of spaced electrodes supported within said envelope, said electrodes having the shape of hyperboloids of revolution, a source of direct current voltage connected to said electrodes to establish therebetween a parabolically distributed voltage the apex of which lies upon the median plane .between said electrodes, a second pair of spaced electrodes supported between said first pair of electrodes, said electrodes in said second pair being positioned on opposite sides of said plane between said first pair of electrodes, means for generating ions having a plurality of mass-to-charge ratios between said electrodes, and a source of radio frequency voltage connected to said second pair of electrodes for generating therebetween a radio frequency field whereb ions having a given mass-' to-charge ratio will be accelerated to and fro by said radio frequency field against the opposing force of said parabolically distribute-d voltage to overcome ultimately said opposing dorce while ions having other mass-to-charge ratios will fail to overcome said opposing force, magnetic means positioned exteriorly
  • a mass spectrometer comprising an evacuable envelope, a first plurality of coaxially aligned potential grading rings disposed within said envelope on one side of a plane traversing said envelope, a second plurality of coaxially aligned potential grading rings disposed within said envelope on the opposite side of said plane, a source of direct current voltage connected to said first, and second pluralities of grading rings for es-- tablishing therealong a parabolic potential dis-- tribution having its apex lying upon said plane; and increasing positively in both directions from, said plane, a source of radio frequency voltage,- connected in circuit with said source of direct, current voltage for varying the rate of change of slope of said parabolic potential distribution, means for generating ions Within said envelope; whereby ions having a given mass-to-charge rartio will be accelerated to and fro by said vary-- ing potential distribution to emerge ultimatelyfrom the region of influence thereof while ions: having other mass-to-charge ratios will fail to
  • a mass spectrometer comprising an evacuable envelope, a first plurality of coaxially aligned potential grading rings disposed on one side of a plane traversing said envelope, a second plurality of coaxially aligned potential grading rings disposed within said envelope on the opposite side of said plane, means constituting a potential divider connected to said pluralities of grading rings, means for energizing said potential divider to establish along said pluralities of grading rings a parabolic potential distribution having its apex lying upon said plane and increasing positively in both directions from said plane, a source of radio frequency voltage connected in circuit with said potential divider energizing means for generating ions within said envelope whereby ions having a givenmass-to-charge ratio will be accelerated to and fro by said varying potential distribution to emerge ultimately from the region of influence thereof while ions having other mass-to-charge ratios will fail to so emerge, and means for collecting said ions having a given mass-to-charge ratio.
  • a mass spectrometer comprising an evacuable envelope, a pair of opposed electrodes sup ported within said envelope, said electrodes having the shape of hyperboloids of revolution, a source of direct current voltage connected to said electrodes to establish therebetween a parabolically distributed voltage the apex of which lies upon the median plane between said eelctrodes, means for generating ions having a plurality of mass-to-charge ratios between said electrodes, 2; source of radio frequency voltage connected in circuit with said source of direct current voltage for varying with time the rate of change of slope of said parabolicall-y distributed voltage whereby ions having a given -mass.to-charge ratio will be accelerated to and fro between said electrodes until they ultimately reach'a desired axial dis placement while ions having other mass-tocharge ratios will fail to reachsuch displacement, and means for collecting said ions having a given mass-to-charge ratio.
  • a mass spectrometer comprising an evacii able envelope, apair of opposed electrodes supported within said envelope, said electrodes having the shape of hyperboloids of revolution, a source of direct current voltage connected to said electrodes to establish therebetween a parabolically distributed voltage the apex of which lies upon the median plane between said electrodes, means for generating ions having a plurality of mass-to-charge ratios between said electrodes, a source of radio frequency voltagecon nected with said source of direct current voltage for varying with time the rate of change of slope of said parabolically distributed voltage whereby ions having a given mass-to-charge ratio will be accelerated to and fro between said electrodes until they ultimately impinge thereupon While ions having other mass-to-charge ratios will not receive sufiicient' acceleration to reach said electrodes, and means in circuit with said electrodesfor measuring the ion current generated by the impingement thereupon of said ions having a given mass-to-charge ratio.

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US198870A 1950-12-02 1950-12-02 Method and apparatus for separating charged particles of different mass-to-charge ratios Expired - Lifetime US2570158A (en)

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Application Number Priority Date Filing Date Title
NL86953D NL86953C (enrdf_load_stackoverflow) 1950-12-02
US198870A US2570158A (en) 1950-12-02 1950-12-02 Method and apparatus for separating charged particles of different mass-to-charge ratios
CH306176D CH306176A (de) 1950-12-02 1951-11-30 Massenspektrometer.
FR1049592D FR1049592A (fr) 1950-12-02 1951-11-30 Procédé de séparation des particules chargées de rapports masse-à-charge différents
GB28162/51A GB698850A (en) 1950-12-02 1951-11-30 Improvements in and relating to apparatus for separating charged particles of different mass-to-charge ratios
DEI5148A DE882769C (de) 1950-12-02 1951-12-02 Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis

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CH (1) CH306176A (enrdf_load_stackoverflow)
DE (1) DE882769C (enrdf_load_stackoverflow)
FR (1) FR1049592A (enrdf_load_stackoverflow)
GB (1) GB698850A (enrdf_load_stackoverflow)
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Cited By (20)

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US2688088A (en) * 1951-10-19 1954-08-31 Cons Eng Corp Mass spectrometer
US2782316A (en) * 1952-06-20 1957-02-19 Cons Electrodynamics Corp Mass separation
US2917628A (en) * 1955-03-16 1959-12-15 Otto G Schwede Isotope separator
US2983820A (en) * 1954-03-08 1961-05-09 Schlumberger Well Surv Corp Well logging apparatus
US2988642A (en) * 1958-06-30 1961-06-13 Schlumberger Well Surv Corp Particle accelerating system
US3143647A (en) * 1960-03-09 1964-08-04 Siemens Ag Demountable mass-filter cell for use in high vacuum
US3161802A (en) * 1960-05-27 1964-12-15 Varian Associates Sputtering cathode type glow discharge device vacuum pump
US3174034A (en) * 1961-07-03 1965-03-16 Max Planck Gesellschaft Mass spectrometer
US3223038A (en) * 1964-09-10 1965-12-14 Company Wachovia Bank An Trust Electrical thrust producing device
US3258591A (en) * 1961-12-22 1966-06-28 Pulse type mass spectrometer wherein ions are separated by oscillations in an electrostatic field
US3258592A (en) * 1961-12-23 1966-06-28 Dynamic mass spectrometer wherein ions are periodically oscillated until se- lectively accelerated to a detector
US3329848A (en) * 1963-09-05 1967-07-04 Tokyo Shibaura Electric Co Particle accelerating tubes
US3342404A (en) * 1964-11-19 1967-09-19 Atomic Energy Authority Uk Annular electrodes in differential pumping tubes for electrostatic accelerators
US3342993A (en) * 1964-09-21 1967-09-19 Bendix Corp Time-of-flight mass spectrometer having an accelerating tube with a continuous resistive coating
US4093856A (en) * 1976-06-09 1978-06-06 Trw Inc. Method of and apparatus for the electrostatic excitation of ions
US20070110625A1 (en) * 2002-12-02 2007-05-17 Cfd Research Corporation Miniaturized electrothermal flow induced infusion pump
US20100084549A1 (en) * 2006-11-13 2010-04-08 Alexei Victorovich Ermakov Electrostatic Ion Trap
US20100324833A1 (en) * 2007-10-22 2010-12-23 Shimadzu Corporation Mass analysis data processing apparatus
US8586918B2 (en) 2009-05-06 2013-11-19 Brooks Automation, Inc. Electrostatic ion trap
CN113311496A (zh) * 2021-06-11 2021-08-27 中国科学院精密测量科学与技术创新研究院 一种基于双组分原子交织干涉效应的重力仪

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US2764691A (en) * 1953-08-03 1956-09-25 Jr John A Hipple Analysis by imparting unequal energies to ions
US2769093A (en) * 1953-09-08 1956-10-30 Beckman Instruments Inc Radio frequency mass spectrometer
US3047717A (en) * 1956-03-31 1962-07-31 Iwata Giichi Focusing mass spectrometer
DE1177850B (de) * 1957-06-06 1964-09-10 Oesterr Studien Atomenergie Verfahren und Einrichtung zum Trennen elektrisch geladener Teilchen mit Hilfe von Massenspektrometern
JPS60119067A (ja) * 1983-11-30 1985-06-26 Shimadzu Corp 飛行時間型質量分析装置

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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2688088A (en) * 1951-10-19 1954-08-31 Cons Eng Corp Mass spectrometer
US2782316A (en) * 1952-06-20 1957-02-19 Cons Electrodynamics Corp Mass separation
US2983820A (en) * 1954-03-08 1961-05-09 Schlumberger Well Surv Corp Well logging apparatus
US2917628A (en) * 1955-03-16 1959-12-15 Otto G Schwede Isotope separator
US2988642A (en) * 1958-06-30 1961-06-13 Schlumberger Well Surv Corp Particle accelerating system
US3143647A (en) * 1960-03-09 1964-08-04 Siemens Ag Demountable mass-filter cell for use in high vacuum
US3161802A (en) * 1960-05-27 1964-12-15 Varian Associates Sputtering cathode type glow discharge device vacuum pump
US3174034A (en) * 1961-07-03 1965-03-16 Max Planck Gesellschaft Mass spectrometer
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Also Published As

Publication number Publication date
FR1049592A (fr) 1953-12-30
NL86953C (enrdf_load_stackoverflow)
CH306176A (de) 1955-03-31
GB698850A (en) 1953-10-21
DE882769C (de) 1953-07-13

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