US2292087A - Evacuated electronic apparatus - Google Patents

Evacuated electronic apparatus Download PDF

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Publication number
US2292087A
US2292087A US411515A US41151541A US2292087A US 2292087 A US2292087 A US 2292087A US 411515 A US411515 A US 411515A US 41151541 A US41151541 A US 41151541A US 2292087 A US2292087 A US 2292087A
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US
United States
Prior art keywords
enclosure
object support
microscope
vacuum
closure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US411515A
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English (en)
Inventor
Ramo Simon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to BE475636D priority Critical patent/BE475636A/xx
Application filed by General Electric Co filed Critical General Electric Co
Priority to US411515A priority patent/US2292087A/en
Application granted granted Critical
Publication of US2292087A publication Critical patent/US2292087A/en
Priority to GB13226/42A priority patent/GB568259A/en
Priority to FR945685D priority patent/FR945685A/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Definitions

  • the present invention relates to an improved arrangement for facilitating the introduction of specimens or objects into a vacuum chamber, such as the enclosure of an electron microscope, without destroying the vacuum of the entire chamber.
  • the foregoing object is accomplished in accordance with one embodiment of the invention by providing the main wall of the apparatus enclosure with a deformable section having an operating connection with a pair of concurrently movable closure members which are within the enclosure and which are adapted to isolate the object support in the desired manner.
  • the object support is itself r connected to the deformable wall part so that the Y motion of this part can additionally be employed to move the object support from an object-receiving position to an object-viewing position, and vice versa, or to adjust it for focusing purposes when it is in the object-viewing position.
  • Fig. 1 represents in partial section an electron microscope suitably embodying the invention
  • Fig. 2 is an enlarged fragmentary sectional View showing in detail certain of the operative parts of the construction of Fig. l.
  • the cathode is supplied with heating current from an external source I4 and is associated with an apertured anode I6 which acts to focus electrons released from the cathode into a narrow beam and to project them axially of the microscope structure.
  • the anode I6 may be maintained at a positive potential with respect to the anode by connection to a unidirectional potential source IB.
  • An apertured diaphragm 20 which is supported in direct contact with the wall of the enclosure I0 is connected through the enclosure and through ground to the positive terminal of the potential source I8 so that it has the effect of accelerating the electrons to a high velocity as they pass through the diaphragm.
  • the electron beam After traversing the diaphragm 20 the electron beam is caused to pass through an object support 2I (shown in dotted outline in Fig. l and in full in Fig. 2') which is adapted to mount an object or specimen desired to be examined electronoptically.
  • the specimen (not shown in the drawing) is supported in an aperture 23 formed in the extremity of the object support so that it is in the direct path of the electron beam.
  • the section pattern of the electron beam is modied in accordance with the structural character of the object under investigation as the beam traverses the object.
  • the beam In order that the beam, thus conditioned, may be caused to provide an enlarged visible image of the object in accordance with the intended method of use of the microscope, the beam, after passing through the object, is caused to traverse an electron lens system of known character.
  • the lens system is in two parts and includes as a rst part a series of three diaphragms numbered 26 to 28 inclusive.
  • the diaphragms 2'6 and 28 are maintained at the potential of the casing I0 (i. e., at ground potential) and the intermediate diaphragm 21 being insulatingly supported, is biased to cathode potential through a terminal connection 30 which is brought into the microscope enclosure through an insulating bushing 3
  • lens elds are established between these diaphragms which have the effect of refracting the electron beam in a manner analogous to the refraction of a light beam by an optical lens.
  • the second part of the lens system comprises another series of three diaphragms, 34, 35 and 35, of which the central diaphragm is biased to a potential considerably below that of the outer diaphragms by a terminal connection 38 sealed through an insulating bushing 39. Accordingly, additional lens elds are formed within the spaces which separate the various diaphragms last referred to.
  • the diaphragms 26, 21 and 28 form an objective lens
  • the diaphragms 34, 35 and 36 form a projecting lens.
  • an image-reproducing surface (indicated in dotted outline at 4
  • the wall of the microscope enclosure in proximity to the object support is provided with an opening 41 having an externally operable closure member 48.
  • This includes a rubber gasket part 49 which is adapted to seal tightly against an upset embossment 50 provided around the circumference of the opening 41.
  • the closure member 48 may be provided with locking means as indicated at 53, but under operating conditions it will, if appropriately constructed, be held tightly closed merely by the action of the differential pressures existing outside and inside the microscope enclosure.
  • the means provided in this connection include in the first instance a pair of movable closure members 56 and 51, the rst of these being :associated with the accelerating electrode and the second with the lens diaphragm 26.
  • these closure members are on opposite sides of the object support 2
  • Each closure member is provided with a rubber gasket (56, 51) which permits it to seal tightly against an appropriately formed embossment on the cooperating diaphragm part.
  • the enclosure wall is provided with an integrally formed deformable section comprising a collapsible, corrugated ring having two annular parts 60 and 6
  • This ring is deformable in the longitudinal direction and to a smaller degree in the transverse direction.
  • Extending inwardly from the inner surface of the ring there is provided an annular diaphragm or frame 63 on the central portion of which the object support 2
  • Linkage members 65 and 66 serve to connect the opposite surfaces of this frame with the closure members 56 and 51 in such a way that displacement of the frame serves to produce concurrent and oppositely directed motions of the members.
  • is accomplished through the use of a threaded collar 61 which rides on a correspondingly threaded surface 61 provided in connection with the enclosure cylinder I8.
  • This collar loosely engages a pair of annular members 68 and 69 which slide in grooves provided in the outer surface of the collar and which connect with an externally projecting portion of the frame 63 through an axially extending cylinder 1
  • closure members 56 and 51 Concurrently with motion of the object support from its object-receiving position to its object-viewing position, the closure members 56 and 51 are moved to the open positions 56 and 51 in which they appear in dotted outline in Fig. 2.
  • the converse motion of the closure members obviously occurs when the object support is returned to its object-receiving position.
  • the collar 61 is turned in the proper direction to bring the object support into its object-receiving position. Under these circumstances the closure members 56 and 51 are closed so that the object support is segregated from the remainder of the microscope enclosure as previously speciiied.
  • the closure 48 may now be opened with the assurance that only the vacuum in the relatively small compartment between the diaphragms 20 and 26 will be lost.
  • the examined object may be removed and a new object put in place in the object support, being introduced through an opening 13 formed in the side of the supporting structure.
  • auxiliary mechanisms not shown in the drawing, may be employed to assist in manipulating the object into the proper position in the object holder.
  • the closure member 48 is again closed and with the closure members 56 and 51 also retained in closed position, the air-lled compartment is connected to the fore-vacuum pump (not shown). This connection may be made, for example, through the agency of a three-way valve 15 located in the pipe 45.
  • valve 15 may be turned to a second position to reconnect the compartment with the high vacuum pump.
  • the collar 61 may be again rotated to lower the .object support 2
  • the region at which they are secured to the frame 63 is capable of appreciable transverse displacement. Accordingly, by proper adjustment of the micrometer screw 18 and by the use cf a second screw (not shown) acting at right angles to the screw 18 the position of the object support with respect to the axis of the electron microscope may be very accurately controlled.
  • An electronic apparatus comprising a vacuum enclosure in the form of an elongated container which is of cylindrical coniiguration over at least a portion of its length, an object support positioned within the enclosure, means for permitting the introduction of objects into the enclosure in proximity to the object support, and an arrangement for making possible the introduction of such objects without destroying the vacuum in the entire enclosure, said arrangement comprising movable closure means positioned within the enclosure and adapted when in closed position to isolate the object support from the remainder of the enclosure, a deformable metal ring forming an integral part of the wall structure of that portion of said container which is of cylindrical configuration, and means operatively connecting the said ring to the said closure means, whereby upon appropriate deformation of the ring, the said closure means may be moved from open to closed position and vice versa.
  • An electron microscope having an object support positioned within the microscope enclosure, a closable opening in the said enclosure for facilitating the introduction of objects into the enclosure in proximity to the said object support, movable closure means within the enclosure and adapted when in closed position to isolate the object support from the remainder of the enclosure, a deformable metal ring forming an integral part of the Wall of the said enclosure and having an intermediate portion thereof capable of displacement in the axial direction, and connections between said intermediate portion and said closure means, whereby upon appropriate axial displacement of said portion the closure means can be moved from open to closed position and vice versa so as to permit the introduction of objects through said closable opening without destroying the vacuum of the entire enclosure.
  • An electronic apparatus comprising a vacuum enclosure, an object support Within the enclosure, a closable opening in the enclosure for facilitating the introduction of objects into the enclosure in proximity to the said object support, movable closure means within the enclosure and adapted when in closed position to isolate the object support from the remainder of the enclosure, an axially deformable metal ring forming an integral part of the wall of the enclosure, a connection between said ring and said closure means whereby the motion of the latter may be controlled by deformation of the former, an internally threaded collar riding upon a cooperatively threaded external surface of the enclosure, and a connection between said collar and said ring, whereby rotation of the former produces controlled deformation of the latter.
  • An electron microscope including an object support positioned at an intermediate point along the axis of the microscope enclosure, a closable opening in the enclosure for facilitating the introduction of objects into the enclosure in proximity to the said object support, a pair of movable closure elements positioned within the microscope enclosure on opposite sides of the object support and adapted when in closed position to isolate the object support from the remainder of the enclosure, a collapsible metal ring forming an integral part of the wall of the enclosure and having an intermediate portion thereof capable of both axial and transverse displacement, connections between said intermediate portion of the ring and said closure members whereby upon appropriate axial displacement of said portion said closure members may be moved from open to closed position and vice versa, and a further connection between said intermediate portion and the object support whereby through transverse motion of said portion the object support may be manipulated into alignment with the axis of the enclosure.
  • An electron microscope including Within the microscope enclosure an object support having an object-receiving position and an object-viewing position, a closable opening in the wall of the microscope enclosure for facilitating the application of objects to the object support when the latter is in its object-receiving position, a pair of closure members respectively positioned on opposite sides of the object support and adapted when in closed position to isolate the object support from the remainder of the enclosure thereby to avoid destroying the vacuum of the entire closure while objects are being introduced through said closable opening, ⁇ a deformable structure forming a part of the Wall of the microscope enclosure While objects are being introduced support and the said structure for permitting the position of the object support to be controlled externally of the enclosure through deformation of the said structure, and further connections between the said structure and the said closure member by which said members are moved from an open to a closed position concurrently with the motion of the obj ect support from its objectviewing to its object-receiving position.
  • An electron microscope including an object support positioned Within the microscope enclosure, a closable opening in the enclosure for facilitating the introduction of objects into the enclosure in proximity to the said object support, a pair of movable closure members Within the enclosure on opposite sides of the object support and adapted when in closed position to isolate the object support from the remainder of the enclosure, a collapsible metal ring forming an integral part of the Wall of the enclosure, a frame extending inwardly from the said ring for securing the object support to the ring, linkages eX- tending from the frame to the said closure members for controlling the movement of the mem-- bers in accordance with the movement of the frame, and means accessible outside of the enclosure for controllably deforming the said ring, thereby to control through the resultant motion of the said frame both the said closure members and the said object support.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Microscoopes, Condenser (AREA)
US411515A 1941-09-19 1941-09-19 Evacuated electronic apparatus Expired - Lifetime US2292087A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
BE475636D BE475636A (en)) 1941-09-19
US411515A US2292087A (en) 1941-09-19 1941-09-19 Evacuated electronic apparatus
GB13226/42A GB568259A (en) 1941-09-19 1942-09-18 Improvements in and relating to evacuated electronic apparatus
FR945685D FR945685A (fr) 1941-09-19 1947-04-25 Perfectionnements aux tubes électroniques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US411515A US2292087A (en) 1941-09-19 1941-09-19 Evacuated electronic apparatus

Publications (1)

Publication Number Publication Date
US2292087A true US2292087A (en) 1942-08-04

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US411515A Expired - Lifetime US2292087A (en) 1941-09-19 1941-09-19 Evacuated electronic apparatus

Country Status (4)

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US (1) US2292087A (en))
BE (1) BE475636A (en))
FR (1) FR945685A (en))
GB (1) GB568259A (en))

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424788A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope
US2547994A (en) * 1947-03-13 1951-04-10 Csf Electronic microscope
US2585297A (en) * 1949-05-23 1952-02-12 Rupert Diecasting Company Aluminum die-casting machine
US2632115A (en) * 1947-06-21 1953-03-17 Csf Focusing device for electron microscopes
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2878387A (en) * 1956-09-10 1959-03-17 Alfred W Chesterman Beam control probe
US2898467A (en) * 1955-05-20 1959-08-04 Vakutronik Veb Electron oscillograph
US2946886A (en) * 1956-10-19 1960-07-26 Jersey Prod Res Co Adjustable ion collector slit for mass spectrometer
US3003061A (en) * 1956-04-02 1961-10-03 Berghaus Elektrophysik Anst Electric discharges in gases
US3135889A (en) * 1962-05-22 1964-06-02 Jack A Soules Protected window x-ray tube
US3449759A (en) * 1967-02-27 1969-06-10 Minnesota Mining & Mfg Electron beam recorder having sealing means
US3470412A (en) * 1962-06-13 1969-09-30 Shimadzu Corp Apparatus for exchanging the filament of an electron gun
US3479544A (en) * 1963-12-11 1969-11-18 Stromberg Datagraphix Inc Cathode-ray tube with a removable face for space vehicles
US3886358A (en) * 1974-05-23 1975-05-27 Us Energy Specimen transfer container for ion microprobe mass analyzer
US4020353A (en) * 1974-09-06 1977-04-26 Hitachi, Ltd. Sample analysis apparatus using electron beam irradiation
US4207489A (en) * 1977-11-28 1980-06-10 Agence Nationale De Valorisation De La Recherche (Anvar) Movable extraction electrode for an ion source
US4651003A (en) * 1984-02-27 1987-03-17 Siemens Aktiengesellschaft Particle-accelerating electrode
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope
US20100294049A1 (en) * 2009-05-22 2010-11-25 Sion Power Corporation Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424788A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope
US2547994A (en) * 1947-03-13 1951-04-10 Csf Electronic microscope
US2632115A (en) * 1947-06-21 1953-03-17 Csf Focusing device for electron microscopes
US2585297A (en) * 1949-05-23 1952-02-12 Rupert Diecasting Company Aluminum die-casting machine
US2898467A (en) * 1955-05-20 1959-08-04 Vakutronik Veb Electron oscillograph
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US3003061A (en) * 1956-04-02 1961-10-03 Berghaus Elektrophysik Anst Electric discharges in gases
US2878387A (en) * 1956-09-10 1959-03-17 Alfred W Chesterman Beam control probe
US2946886A (en) * 1956-10-19 1960-07-26 Jersey Prod Res Co Adjustable ion collector slit for mass spectrometer
US3135889A (en) * 1962-05-22 1964-06-02 Jack A Soules Protected window x-ray tube
US3470412A (en) * 1962-06-13 1969-09-30 Shimadzu Corp Apparatus for exchanging the filament of an electron gun
US3479544A (en) * 1963-12-11 1969-11-18 Stromberg Datagraphix Inc Cathode-ray tube with a removable face for space vehicles
US3449759A (en) * 1967-02-27 1969-06-10 Minnesota Mining & Mfg Electron beam recorder having sealing means
US3886358A (en) * 1974-05-23 1975-05-27 Us Energy Specimen transfer container for ion microprobe mass analyzer
US4020353A (en) * 1974-09-06 1977-04-26 Hitachi, Ltd. Sample analysis apparatus using electron beam irradiation
US4207489A (en) * 1977-11-28 1980-06-10 Agence Nationale De Valorisation De La Recherche (Anvar) Movable extraction electrode for an ion source
US4651003A (en) * 1984-02-27 1987-03-17 Siemens Aktiengesellschaft Particle-accelerating electrode
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope
US20100294049A1 (en) * 2009-05-22 2010-11-25 Sion Power Corporation Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment
US8087309B2 (en) * 2009-05-22 2012-01-03 Sion Power Corporation Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment

Also Published As

Publication number Publication date
BE475636A (en))
GB568259A (en) 1945-03-27
FR945685A (fr) 1949-05-11

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