US2268539A - Electron microscope - Google Patents

Electron microscope Download PDF

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Publication number
US2268539A
US2268539A US225278A US22527838A US2268539A US 2268539 A US2268539 A US 2268539A US 225278 A US225278 A US 225278A US 22527838 A US22527838 A US 22527838A US 2268539 A US2268539 A US 2268539A
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US
United States
Prior art keywords
vessel
electron
sluice
portions
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US225278A
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English (en)
Inventor
Borries Bodo Von
Ruska Ernst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application granted granted Critical
Publication of US2268539A publication Critical patent/US2268539A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • This invention relates to electron microscopes and consists in means for adjusting the object very exactly with respect to theobjective.
  • the ydischarge vessel of an electron microscope is subdivided in the neighborhood of the object, and the two parts of the vessel are displaceable relative to each other and at right angles to the axis of the electron beam, roller-shaped bodies being provided'to absorb the forces created between these parts by the vacuum. It is thus possible to adjust very accurately the part carrying the object with respect to that carrying the objective, since the roller-shaped pressure bodies only negligibly hinder a displacement of the vtwo movable parts with respect to one another. This displacement will also not be affected if the object -is intensely cooled (for instance, with liquid air), since between the two opposite surfaces lying directly upon each other no grease film is interposed which would solidify at the low temperature.
  • a practical embodiment of -the invention is illustrated in the accompanying drawing in semi-diagrammatic form, in which- Fig. 1 represents a central sectional elevationof the portion of the microscope embodying the invention.
  • Fig. 2 represents a plan view of Fig. 1.
  • Fig. 3 represents in sectional elevation the adjusting screw I6 and its support
  • Fig. 4 represents a bottom view of sluice I in Fig. 1.
  • I designates the objectcarrying member of an electron microscope.
  • the central bore I of this member forms part of the evacuated discharge Vessel of the microscope and is arranged so as to -form a passage for the beam of electron rays which issue ⁇ from a cathode (not illustrated) in the direction of the arrow IIl.
  • the member I is designed as a sluice in order to permit the insertion of objects into the path of the electron rays While the interior of the microscope remains evacuated.
  • the member I has a transverse bore 2 for the reception of a plug or cock into the lateral bore of which the object may be inserted and which allows bringing the object to point 3.
  • This plug structure is not shown here, as its construction does not form part of the present invention proper.
  • a suitable sluice is illustrated and described in the copending application of Heinz Otto Mller, Serial No. 225,915.
  • the second relatively movable part or member of the electron microscope comprises a magnetic rest on the plate 4.
  • this second Vmember is formed by a plate which forms part of the ferromagnetic enclosure offa magnet coil .6 and abuts against the vacuum-tight tubu- -4 lar wall portion 510i the dischargevessel, this wall, portion being non-magnetic.
  • the pole pieces "I and 8 of the magnetic lens are threaded into the tubular wall portion 5.
  • 9 represents a cooling chamber for cooling ,the coil 6, andvg a nipple for supplying the cooling fluid.
  • the other parts -of the-microscope are of common and well-known type, and, for the sake ⁇ of clearness, are omitted inthe drawing.
  • the sluicev carrier with its object 3 is adjusted withrespect to the magnetic lens '1, 8 b y means of the screws I6, I'I and I8 spaced 120 from one another-as carrier I with the aid of a resilient member I9 so as to permit slight adjustments of screws I6 and I'I without backing up or advancing screw I8.
  • the pressure screws I6 and Il, which engage the sluice carrier directly, are as shown in Fig. 3 preferably provided with a steel ball 2l] at their ends which bears against a small agate plate ZI set into the sluice carrier I as shown in detail in Fig. 3.
  • the sluice carrierl is promentioned ducts be arranged symmetrically to K the axis of the discharge device.
  • a cooling duct ⁇ 26 having the form shown in Fig. 4 and which partly surrounds the bore 24 is provided in the sluice carrier I.
  • the cooling duct is preferably produced in such a manner that iirst a groove of suitable form is milled into the lower face of the sluice which is then closed by a plate 21 soldered thereto.
  • the ends of the cooling duct 26 are provided-With nipples, such as nipple 26 shown in Fig. 1, to be connected with iiuid supply conduits.
  • Electron microscopes according to the invention allow very fine adjustments of the object relative to the electron-optical axis of the electron beam in any direction transverse to this axis.
  • a vacuum vessel having a vessel portion for accommodating said holding meansk with part of said holding means disposed exteriorly of said vessel, and another vessel portion containing said lens means with part of said lens means disposed exteriorly of said vessel, said vessel being subdivided transversely with respect to the electron-optical axis and between said two vessel portions, and said vessel portions being transversely movable relative to each other, and mechanical adjusting means connected-between said exteriorly disposed parts of said vessel portions for changing and fixing the relative position of said vessel portions.
  • av vacuum vessel having two adjoining vessel portions movable relative to each other along a plane transverse to said beam path, one of said vessel portions being designed for accommodating said objectholding means and said other vessel portion being rmlyconnected withl said lens means, a cuff of yielding material arranged concentrically to said path and connected with said two vessel portions to provide a gas-tight seal, antifriction means arranged between said portions and within said cuff, and means for adjusting said poraccesso tions relative to each other in any direction of said plane.
  • a vacuum vessel subdivided so as to form two vessel portions, the plane of division extending close to the object and transversely with respect to said beam path, said two'vessel portions being movable relative to each-'otherjinidifferent directions along said plane-ofdivision,lgastight sealing means of yielding ⁇ type tlisp'osed at the junction of said vesselA portion
  • three adjusting screw means spaced circumferentially and mounted on one of lsaid vessel'portions so as to bear against said other vessel-portion, none of said screw means including a bearing yielding towards the two other adjusting means
  • a vacuum vessel having two adjoining vessel portions movable relative yto; each, other along a plane transverse to said beam,path,.one of said vessel portions forming the stationary member of a cock-type sluicing ⁇ ,device for receiving said object-holding means,y and said other vessel portion being associated withr said lens means, said two vessel portions having coaxial central bores, respectively, forming; a passage for said beam and communicating lateral rbypass ducts for equalizing pres-4 forming a passage for said beam, a lateral bypass duct and a cooling duct, said axial borev and saidy by-pass ycluctcommunicating with the vacuum in saidl other vessel portions, and said cooling ductseparated from ⁇ .said vacuum andv arranged so as to vsubstantially surround said axial bore close

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
US225278A 1937-08-17 1938-08-17 Electron microscope Expired - Lifetime US2268539A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE517704X 1937-08-17

Publications (1)

Publication Number Publication Date
US2268539A true US2268539A (en) 1941-12-30

Family

ID=6549657

Family Applications (1)

Application Number Title Priority Date Filing Date
US225278A Expired - Lifetime US2268539A (en) 1937-08-17 1938-08-17 Electron microscope

Country Status (5)

Country Link
US (1) US2268539A (fr)
BE (1) BE429638A (fr)
FR (1) FR841824A (fr)
GB (1) GB517704A (fr)
NL (1) NL52570C (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2418317A (en) * 1944-04-27 1947-04-01 Rca Corp Electronic gun adjustment
US2423158A (en) * 1944-04-19 1947-07-01 Rca Corp Specimen chamber for electron microscopes
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece
US3939353A (en) * 1972-05-22 1976-02-17 Kabushiki Kaisha Akashi Seisakusho Electron microscope specimen mounting apparatus
US20070029202A1 (en) * 2004-11-02 2007-02-08 Stefan Falk-Jordan Microfluidic system with adjustment for an optical detection

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE955537C (de) * 1942-01-17 1957-01-03 Siemens Ag Halter fuer Objekttraeger, der in das Innere eines Vakuumraumes eines Korpuskularstrahlapparates, insbesondere eines Elektronenmikroskops, eingebaut ist
CN103730312B (zh) * 2014-01-09 2015-12-02 东北大学 一种纳米力学测试系统用样品台及其使用方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2423158A (en) * 1944-04-19 1947-07-01 Rca Corp Specimen chamber for electron microscopes
US2418317A (en) * 1944-04-27 1947-04-01 Rca Corp Electronic gun adjustment
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece
US3939353A (en) * 1972-05-22 1976-02-17 Kabushiki Kaisha Akashi Seisakusho Electron microscope specimen mounting apparatus
US20070029202A1 (en) * 2004-11-02 2007-02-08 Stefan Falk-Jordan Microfluidic system with adjustment for an optical detection

Also Published As

Publication number Publication date
BE429638A (fr)
NL52570C (fr)
GB517704A (en) 1940-02-06
FR841824A (fr) 1939-05-31

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