US2267137A - Electron microscope - Google Patents

Electron microscope Download PDF

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Publication number
US2267137A
US2267137A US289714A US28971439A US2267137A US 2267137 A US2267137 A US 2267137A US 289714 A US289714 A US 289714A US 28971439 A US28971439 A US 28971439A US 2267137 A US2267137 A US 2267137A
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US
United States
Prior art keywords
image
electron
photographic
screen
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US289714A
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English (en)
Inventor
Ruska Ernst
Ruska Helmut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
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Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
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Publication of US2267137A publication Critical patent/US2267137A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen

Definitions

  • This invention relates to an electron microscope and a method of photographically recording electron-microscopic images.
  • the above-mentioned drawback may be removed according to the present invention bylaterally deviating the electron ray in the space between the projection lens and the photographic layer, preferably in the immediate neighborhood of the ⁇ latter, after introducing the object and the photographic plate into the vacuum chamber and before the exposure proper of the plate.
  • the electron ray may be laterally deviated with the ⁇ aid of any known means for deflecting electron rays.
  • solenoids, vacuum-tightly embedded in insulating material t-o prevent the escape of occluded gases during the operation are particularly suitable.
  • These solenoids, for instance, may be vacuum-tightly sealed with the aid of a glass flux into an inorganic insulating substance.
  • This insulating and vacuum-tight substance may consist of the known ceramic materials which contain magnesium silicates or aluminum silicates, and which are formed by a dry pressing method from such materials as soapstone (steatite), talc, or sericite.
  • the metallic coating of the ceramic insulating body is preferably made of a high-melting base metal, for instance iron, and the soldering is effected by means of a relatively heat-resistant hard solder.
  • the iron coating may be produced by covering the surface portion, to be coated, with a layer of powdered iron, and sintering it on the ceramic body in an atmosphere free of oxygen.
  • the lateral deection of the electron beam is effected between the microscopic lens system and the photographic layer; i. e. after the beam has passed through, and has been electron-optically biased by, the lens system, it is also possible to deiiect the electron beam in an intermediate stage of the lens system, for instance in the neighborhood of an intermediate diaphragm. It has been found, however, that the beam, if thus deflected, is liable to produce disturbing electric charges of the intermediate diaphragm, which result in a displacement of the intermediate image. This displacement is considerably increased by the projection lens. This drawback is avoided if the deflection of the beam is effected directly in front of the photographic plate. This has the further advantage that the image may be inspected and its focusing checked to a certain extent while the beam is in deflected condition. To this end, a fluorescent screen is arranged adjacent to the photographic plate, as well be described in the followmg.
  • Figs. l and 2 represent two diierent embodiments in part-sectional side views.
  • Like reference numerals designate similar elements.
  • l denotes the vacuum vessel of the microscope
  • l2 an auxiliary discharge tube which serves as an electron source.
  • 2, 3 and li represent schematically the condenser coil, the objective coil and the projection coil respectively.
  • the inspection window as indicated at 5, permits an inspection of the intermediate image produced in the neighborhood of the window.
  • the photographic plate 1 is arranged in the lower part 6 of the microscope vessel.
  • the devices for introducing the object (object carrier) and photographic plate (magazine or the like) into the Vacuum chamber are not shown.
  • the solenoids which serve to laterally deflect the electron beam of which one is shown as indicated at 8.
  • protective metal screens or ybaies 9 are provided.
  • a uorescent screen I may be arranged according to the invention close to the photographic plate .1, as is shown in Fig. 2.
  • the electric circuit means for energizing the coils are preferably of such nature as to reduce the energizing current practically instantaneously to zero so that the deflected beam returns into its normal position with an extremely rapid speed as compared with the exposure time.
  • the microscopes are operated as follows. At first the object, or its carrier, and the photo- Ygraphic plate in its holder or magazine are adjusted in their accurate position relative to the undeflected electron beam. Then the coils 8 are energized thereby, diverting the beam from the plate. Now the plate is uncovered and the coils 8 are deenergized, thereby exposing the plate to the beam. Y
  • An electron microscope having a vacuumivessel, an electron source vfor producing a beam of electrons in said vessel, a carrier for holding an object in the path of said beam, means for holding a photosensitive layer, a set of electronoptical lenses concentrically surrounding said beam for causing said beam tol produce a magnied image of the object, means for producing a beam-deilecting field arranged laterally of the beam axis between said object carrier and said holding means for shifting said image from said l layer to a lateral wall portion of said vessel, a luminescent screen arranged on said wall portion for visualizing said image, said screen and said layer being disposed relatively to each other so that said image when focused on 4one of them is also in focus when deected onto the other.
  • An electron microscope having a vacuum vessel, an electron source for producing a beam of electrons in said vessel, acarrier for holding an object in the path of said beam, means for holding a photosensitive layer, a setr of electronoptical lenses concentrically surrounding said beam for causing saidbeam to produce a magnied image of the object, means for producing a beam-deflecting field arranged laterally to the beam axis between said object carrier and said holding means for shifting said image from said layer to a lateral wall portion of said vessel, a luminescent screen arranged on said wall portion for visualizing said image, and protective officers arranged between said screen and -said layer to prevent said layer from being aiected by said beam when the image is shifted onto said screen.
  • An electron microscope having a vacuum vessel, an electron source in said vessel for producing an electron beam, a carrier for holding an object in the path of said beam, an electrony optical lens system concentrically surrounding said beam for causing said beam to produce a magnified image of said beam, a luminescent screen disposed in said vessel for visualizing said image when focusing said beam, photographic means in said vessel for recording said image, said screen being arranged laterally to said photographic means relative to the axis of said lens system, and an exposing device having beamdeflecting eld means for laterally shifting said beam so as to place said ⁇ image selectively on said screen and said photographic means, said deecting means being arranged laterally to said beam between said lens system and said photographic means.
  • An electron microscope having a vacuum vessel, an electron source in said vessel for producing an electron beam, a carrier for holding an object in the path of said beam, an electronoptical lens system concentrically surrounding said beam for causing said beam to produce a magnified image of said beam, a luminescent screen disposed in said vessel for Visualizing said image when focusing said beam, photographic means in said vessel for recording said image, said screen being arranged laterally to said photographic means relative to thek axis of said lens system, and an exposing device having beamdeflecting eld means arranged laterally to the beam axis between said lens system and said photographic means for laterally shifting said beam so as to place said image selectively on said screen and said photographic means, and baille means disposed between said screen and said photographic means for preventing the latter from being affected by said beamwhen said image is shifted onto said screen.
  • An electron microscope having va vacuum vessel, an electron source in said vessel for producing an electron beam, a carrier for holding an object in the path of said beam, a system of electron-optical lenses concentrically surrounding said beam for causing said beam to produce a magnified image of the object, a luminescent screen in said vessel for visualizing said image, means for accommodating a photographic layer disposed Vin said vessel ⁇ for recording said image, said screen and said means being disposed laterally to each ⁇ other at the side of said system opposite to said carrier, and a magnetic deflecting coil disposed laterally relative to the normal direction of said beam and arranged between As aid lens system and said photographic layer forV selectively deflecting saidbeam from said layer onto said screen.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electron Sources, Ion Sources (AREA)
US289714A 1938-08-18 1939-08-12 Electron microscope Expired - Lifetime US2267137A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES7156D DE907325C (de) 1938-08-18 1938-08-18 Elektronenmikroskop

Publications (1)

Publication Number Publication Date
US2267137A true US2267137A (en) 1941-12-23

Family

ID=7993047

Family Applications (1)

Application Number Title Priority Date Filing Date
US289714A Expired - Lifetime US2267137A (en) 1938-08-18 1939-08-12 Electron microscope

Country Status (6)

Country Link
US (1) US2267137A (fr)
BE (1) BE436010A (fr)
DE (1) DE907325C (fr)
FR (1) FR859096A (fr)
NL (1) NL94844C (fr)
SE (1) SE100657C1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886728A (en) * 1955-06-02 1959-05-12 Vakutronik Veb Electron-optical device
US3601575A (en) * 1964-07-24 1971-08-24 Steigerwald Gmbh K H Method and apparatus for viewing the impact spot of a charge carrier beam
US4764674A (en) * 1985-06-11 1988-08-16 Hamamatsu Photonics Kabushiki Kaisha High time resolution electron microscope
US4880977A (en) * 1987-05-28 1989-11-14 Jeol Ltd. Analytical electron microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE760761C (de) * 1941-06-21 1954-03-08 Siemens & Halske A G Vorrichtung zur Belichtung der Photoschicht in Korpuskular-strahlapparaten, insbesondere Elektronenmikroskopen

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886728A (en) * 1955-06-02 1959-05-12 Vakutronik Veb Electron-optical device
US3601575A (en) * 1964-07-24 1971-08-24 Steigerwald Gmbh K H Method and apparatus for viewing the impact spot of a charge carrier beam
US4764674A (en) * 1985-06-11 1988-08-16 Hamamatsu Photonics Kabushiki Kaisha High time resolution electron microscope
US4880977A (en) * 1987-05-28 1989-11-14 Jeol Ltd. Analytical electron microscope

Also Published As

Publication number Publication date
DE907325C (de) 1954-03-25
NL94844C (fr) 1900-01-01
BE436010A (fr) 1900-01-01
FR859096A (fr) 1940-12-10
SE100657C1 (sv) 1941-01-14

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