US20230365848A1 - Sealing Material and Method for Producing Sealing Material - Google Patents
Sealing Material and Method for Producing Sealing Material Download PDFInfo
- Publication number
- US20230365848A1 US20230365848A1 US18/246,701 US202118246701A US2023365848A1 US 20230365848 A1 US20230365848 A1 US 20230365848A1 US 202118246701 A US202118246701 A US 202118246701A US 2023365848 A1 US2023365848 A1 US 2023365848A1
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- United States
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- group
- sealing material
- elastomer
- mass
- crosslinking
- Prior art date
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- 239000003566 sealing material Substances 0.000 title claims abstract description 89
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 229920001971 elastomer Polymers 0.000 claims abstract description 146
- 239000000806 elastomer Substances 0.000 claims abstract description 145
- 239000000203 mixture Substances 0.000 claims abstract description 80
- 238000004132 cross linking Methods 0.000 claims abstract description 50
- 229920001973 fluoroelastomer Polymers 0.000 claims abstract description 42
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 31
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 28
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000011737 fluorine Substances 0.000 claims abstract description 24
- 229920006169 Perfluoroelastomer Polymers 0.000 claims abstract description 15
- 150000001875 compounds Chemical class 0.000 claims description 77
- -1 perfluoro skeleton Chemical group 0.000 claims description 40
- 230000005855 radiation Effects 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims description 15
- 239000000945 filler Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 27
- 125000000217 alkyl group Chemical group 0.000 description 18
- 230000000704 physical effect Effects 0.000 description 15
- 229920000642 polymer Polymers 0.000 description 14
- 125000003342 alkenyl group Chemical group 0.000 description 13
- 238000004898 kneading Methods 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 230000006835 compression Effects 0.000 description 10
- 238000007906 compression Methods 0.000 description 10
- 125000001183 hydrocarbyl group Chemical group 0.000 description 10
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 229920003249 vinylidene fluoride hexafluoropropylene elastomer Polymers 0.000 description 9
- 229920002449 FKM Polymers 0.000 description 8
- 125000003118 aryl group Chemical group 0.000 description 8
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 8
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 7
- 229920001577 copolymer Polymers 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- 238000000465 moulding Methods 0.000 description 6
- 125000001246 bromo group Chemical group Br* 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 125000000962 organic group Chemical group 0.000 description 5
- 239000012860 organic pigment Substances 0.000 description 5
- 150000003961 organosilicon compounds Chemical class 0.000 description 5
- 150000002978 peroxides Chemical class 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 230000001747 exhibiting effect Effects 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000010702 perfluoropolyether Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 125000003944 tolyl group Chemical group 0.000 description 4
- KOMNUTZXSVSERR-UHFFFAOYSA-N 1,3,5-tris(prop-2-enyl)-1,3,5-triazinane-2,4,6-trione Chemical compound C=CCN1C(=O)N(CC=C)C(=O)N(CC=C)C1=O KOMNUTZXSVSERR-UHFFFAOYSA-N 0.000 description 3
- DMWVYCCGCQPJEA-UHFFFAOYSA-N 2,5-bis(tert-butylperoxy)-2,5-dimethylhexane Chemical compound CC(C)(C)OOC(C)(C)CCC(C)(C)OOC(C)(C)C DMWVYCCGCQPJEA-UHFFFAOYSA-N 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 231100000987 absorbed dose Toxicity 0.000 description 3
- 239000000370 acceptor Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 125000003710 aryl alkyl group Chemical group 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 125000006165 cyclic alkyl group Chemical group 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000005843 halogen group Chemical group 0.000 description 3
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 239000011256 inorganic filler Substances 0.000 description 3
- 229910003475 inorganic filler Inorganic materials 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012766 organic filler Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- WRXCBRHBHGNNQA-UHFFFAOYSA-N (2,4-dichlorobenzoyl) 2,4-dichlorobenzenecarboperoxoate Chemical compound ClC1=CC(Cl)=CC=C1C(=O)OOC(=O)C1=CC=C(Cl)C=C1Cl WRXCBRHBHGNNQA-UHFFFAOYSA-N 0.000 description 2
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004342 Benzoyl peroxide Substances 0.000 description 2
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical group C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 2
- 229910020388 SiO1/2 Inorganic materials 0.000 description 2
- 229920006172 Tetrafluoroethylene propylene Polymers 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 125000002252 acyl group Chemical group 0.000 description 2
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 2
- 125000000732 arylene group Chemical group 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 235000019400 benzoyl peroxide Nutrition 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 2
- 239000000920 calcium hydroxide Substances 0.000 description 2
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 2
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 230000005251 gamma ray Effects 0.000 description 2
- 125000006038 hexenyl group Chemical group 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 125000000555 isopropenyl group Chemical group [H]\C([H])=C(\*)C([H])([H])[H] 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 150000003077 polyols Chemical class 0.000 description 2
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 125000004434 sulfur atom Chemical group 0.000 description 2
- 125000005023 xylyl group Chemical group 0.000 description 2
- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 1
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- KDGNCLDCOVTOCS-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy propan-2-yl carbonate Chemical compound CC(C)OC(=O)OOC(C)(C)C KDGNCLDCOVTOCS-UHFFFAOYSA-N 0.000 description 1
- OXYKVVLTXXXVRT-UHFFFAOYSA-N (4-chlorobenzoyl) 4-chlorobenzenecarboperoxoate Chemical compound C1=CC(Cl)=CC=C1C(=O)OOC(=O)C1=CC=C(Cl)C=C1 OXYKVVLTXXXVRT-UHFFFAOYSA-N 0.000 description 1
- NOBYOEQUFMGXBP-UHFFFAOYSA-N (4-tert-butylcyclohexyl) (4-tert-butylcyclohexyl)oxycarbonyloxy carbonate Chemical compound C1CC(C(C)(C)C)CCC1OC(=O)OOC(=O)OC1CCC(C(C)(C)C)CC1 NOBYOEQUFMGXBP-UHFFFAOYSA-N 0.000 description 1
- RIPYNJLMMFGZSX-UHFFFAOYSA-N (5-benzoylperoxy-2,5-dimethylhexan-2-yl) benzenecarboperoxoate Chemical compound C=1C=CC=CC=1C(=O)OOC(C)(C)CCC(C)(C)OOC(=O)C1=CC=CC=C1 RIPYNJLMMFGZSX-UHFFFAOYSA-N 0.000 description 1
- BLKRGXCGFRXRNQ-SNAWJCMRSA-N (z)-3-carbonoperoxoyl-4,4-dimethylpent-2-enoic acid Chemical compound OC(=O)/C=C(C(C)(C)C)\C(=O)OO BLKRGXCGFRXRNQ-SNAWJCMRSA-N 0.000 description 1
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- NALFRYPTRXKZPN-UHFFFAOYSA-N 1,1-bis(tert-butylperoxy)-3,3,5-trimethylcyclohexane Chemical compound CC1CC(C)(C)CC(OOC(C)(C)C)(OOC(C)(C)C)C1 NALFRYPTRXKZPN-UHFFFAOYSA-N 0.000 description 1
- OQMIRQSWHKCKNJ-UHFFFAOYSA-N 1,1-difluoroethene;1,1,2,3,3,3-hexafluoroprop-1-ene Chemical group FC(F)=C.FC(F)=C(F)C(F)(F)F OQMIRQSWHKCKNJ-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- MPJPKEMZYOAIRN-UHFFFAOYSA-N 1,3,5-tris(2-methylprop-2-enyl)-1,3,5-triazinane-2,4,6-trione Chemical compound CC(=C)CN1C(=O)N(CC(C)=C)C(=O)N(CC(C)=C)C1=O MPJPKEMZYOAIRN-UHFFFAOYSA-N 0.000 description 1
- IPJGAEWUPXWFPL-UHFFFAOYSA-N 1-[3-(2,5-dioxopyrrol-1-yl)phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC(N2C(C=CC2=O)=O)=C1 IPJGAEWUPXWFPL-UHFFFAOYSA-N 0.000 description 1
- 238000004293 19F NMR spectroscopy Methods 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- BJELTSYBAHKXRW-UHFFFAOYSA-N 2,4,6-triallyloxy-1,3,5-triazine Chemical compound C=CCOC1=NC(OCC=C)=NC(OCC=C)=N1 BJELTSYBAHKXRW-UHFFFAOYSA-N 0.000 description 1
- JGBAASVQPMTVHO-UHFFFAOYSA-N 2,5-dihydroperoxy-2,5-dimethylhexane Chemical compound OOC(C)(C)CCC(C)(C)OO JGBAASVQPMTVHO-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 1
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 239000006057 Non-nutritive feed additive Substances 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910020447 SiO2/2 Inorganic materials 0.000 description 1
- 229910020487 SiO3/2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000005336 allyloxy group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- HZTNYDWTDTYXQC-UHFFFAOYSA-N bis(prop-2-ynyl) benzene-1,4-dicarboxylate Chemical compound C#CCOC(=O)C1=CC=C(C(=O)OCC#C)C=C1 HZTNYDWTDTYXQC-UHFFFAOYSA-N 0.000 description 1
- 125000005998 bromoethyl group Chemical group 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 239000003795 chemical substances by application Substances 0.000 description 1
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- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000002993 cycloalkylene group Chemical group 0.000 description 1
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000004956 cyclohexylene group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- PPSZHCXTGRHULJ-UHFFFAOYSA-N dioxazine Chemical compound O1ON=CC=C1 PPSZHCXTGRHULJ-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
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- 238000011156 evaluation Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002496 iodine Chemical class 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000004957 naphthylene group Chemical group 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 125000002801 octanoyl group Chemical group C(CCCCCCC)(=O)* 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 125000002255 pentenyl group Chemical group C(=CCCC)* 0.000 description 1
- 229920009441 perflouroethylene propylene Polymers 0.000 description 1
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 1
- CSJWOWRPMBXQLD-UHFFFAOYSA-N perfluoromethylvinylether group Chemical group FC(=C(C(F)(F)F)F)OC(=C(F)C(F)(F)F)F CSJWOWRPMBXQLD-UHFFFAOYSA-N 0.000 description 1
- 125000000864 peroxy group Chemical group O(O*)* 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004344 phenylpropyl group Chemical group 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- MHSKRLJMQQNJNC-UHFFFAOYSA-N terephthalamide Chemical compound NC(=O)C1=CC=C(C(N)=O)C=C1 MHSKRLJMQQNJNC-UHFFFAOYSA-N 0.000 description 1
- PNWOTXLVRDKNJA-UHFFFAOYSA-N tert-butylperoxybenzene Chemical compound CC(C)(C)OOC1=CC=CC=C1 PNWOTXLVRDKNJA-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000005628 tolylene group Chemical group 0.000 description 1
- GRPURDFRFHUDSP-UHFFFAOYSA-N tris(prop-2-enyl) benzene-1,2,4-tricarboxylate Chemical compound C=CCOC(=O)C1=CC=C(C(=O)OCC=C)C(C(=O)OCC=C)=C1 GRPURDFRFHUDSP-UHFFFAOYSA-N 0.000 description 1
- 238000004073 vulcanization Methods 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K3/1006—Materials in mouldable or extrudable form for sealing or packing joints or covers characterised by the chemical nature of one of its constituents
- C09K3/1009—Fluorinated polymers, e.g. PTFE
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08L27/16—Homopolymers or copolymers or vinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/24—Crosslinking, e.g. vulcanising, of macromolecules
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/14—Peroxides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/541—Silicon-containing compounds containing oxygen
- C08K5/5425—Silicon-containing compounds containing oxygen containing at least one C=C bond
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/102—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by material
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/16—Homopolymers or copolymers of vinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2427/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2427/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2427/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2427/16—Homopolymers or copolymers of vinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
- C08L2205/035—Polymer mixtures characterised by other features containing three or more polymers in a blend containing four or more polymers in a blend
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/068—Containing also other elements than carbon, oxygen or nitrogen in the polymer main chain
- C09K2200/0685—Containing silicon
Definitions
- One embodiment of the present invention relates to a sealing material or a method for producing a sealing material.
- a sealing material has been widely used in various applications, and among these applications, a sealing material used in, for example, a semiconductor manufacturing apparatus is exemplified as an application of the sealing material applying the most load to the sealing material.
- a crosslinkable fluoroelastomer is used because a sealing material excellent in plasma resistance and radical resistance can be obtained.
- Such a sealing material made of a crosslinkable fluoroelastomer is usually used as a sealing material by molding and crosslinking an elastomer composition that is obtained by blending additives such as a crosslinking agent and a crosslinking aid into the crosslinkable fluoroelastomer.
- crosslinking including a step of irradiating with radiation is performed at the time of the crosslinking (for example, Patent Literature 1: JP 2004-131656 A).
- the components in the elastomer composition need to be uniformly mixed in order to produce a sealing material exhibiting desired physical properties from the elastomer composition.
- the elastomer composition When a sealing material is formed from the produced elastomer composition with high productivity, the elastomer composition is usually formed into a sheet by a sheeting step. This sheeting step is usually performed by passing through an elastomer composition between rolls. In the case of using a conventional elastomer composition, since the elastomer composition is not caught between the rolls or is not well wound around the rolls, it is not easy to form a sheet (the sheeting property is poor). Thus, conventional elastomer compositions have room for improvement in terms of moldability.
- the sealing material formed from the conventional elastomer composition has room for improvement in terms of properties as a sealing material, such as tensile strength and elongation at break.
- One embodiment of the present invention provides a sealing material that can be manufactured with good molding processability, has excellent sealability, and has high tensile strength and elongation at break.
- An example configuration of the present invention is as follows.
- a sealing material that is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid,
- a method for producing a sealing material including a step of irradiating an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid or a crosslinked product of the elastomer composition with radiation, in which the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- a sealing material which can be produced with good molding processability, is excellent in sealability (compression set is small), and has high tensile strength and elongation at break.
- a sealing material excellent in sealability and having high tensile strength and elongation at break from an elastomer composition which can be made into a uniform elastomer composition in a short time and is excellent in moldability, particularly, sheeting property.
- the sealing material can be suitably used as a sealing material for a semiconductor manufacturing apparatus and a sealing material for a plasma processing apparatus.
- the sealing material according to one embodiment of the present invention is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid (hereinafter, also referred to as the “present composition”), and the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- A1 crosslinkable fluoroelastomer
- the radiation-crosslinked body of the present composition is specifically a radiation-crosslinked body obtained by a method including a step of irradiating the present composition itself or a crosslinked product of the present composition (for example, a crosslinked product obtained by thermally crosslinking the present composition) with radiation.
- the present sealing material can be used as, for example, a gasket or packing of various members, and can be suitably used particularly for a semiconductor manufacturing apparatus, or a plasma processing apparatus, and particularly for a drive unit including a gate valve used for an opening of a plasma processing chamber unit due to the sealing material exhibiting the above effects.
- the present sealing material has, for example, a shape that may be appropriately selected depending on the intended use.
- the present sealing material can be a sealing material that has the following physical properties despite not containing the filler.
- the Shore A hardness (Type A durometer hardness) of the present sealing material measured according to JIS K 6253: 2012 is preferably 60 or more.
- the tensile strength of the present sealing material measured according to JIS K 6251: 2017 is preferably 10 MPa or more.
- the elongation at break of the present sealing material measured according to JIS K 6251: 2017 is preferably 130% or more.
- the 100% modulus of the present sealing material measured according to JIS K 6251: 2017 is preferably 3.5 MPa or more.
- the compression set of the present sealing material measured according to JIS K 6262: 2013 is preferably 35% or less.
- the elastomer (A) is not particularly limited as long as it contains the crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- the elastomer (A) used may be one kind or two or more kinds and the elastomer (A1) used may be one kind or two or more kinds.
- the elastomer (A) may contain a crosslinkable fluoroelastomer (hereinafter, also referred to as “elastomer (A2)”) that is other than a perfluoroelastomer and other than the elastomer (A1), and preferably contains the elastomer (A2) from the viewpoint of, for example, being capable of easily obtaining a sealing material excellent in plasma resistance and chemical resistance such as resistance to chemicals.
- elastomer (A2) crosslinkable fluoroelastomer
- the elastomer (A) contains the elastomer (A2)
- the elastomer (A2) used may be one kind or two or more kinds.
- the elastomer (A) is also referred to as unvulcanized fluorororubber, and examples of the crosslinking type include a peroxide crosslinking type, a polyol crosslinking type, an amine crosslinking type, and a radiation crosslinking type.
- the fluoroelastomer is preferably a peroxide-crosslinkable fluoroelastomer from the viewpoint that, for example, it is not necessary to use an acid acceptor that may be a generation source of particles, for example, in a plasma atmosphere, and thus there is no risk of generating particles during use of the obtained sealing material.
- the elastomer (A) include a fluoroelastomer (FKM), a tetrafluoroethylene-propylene elastomer (FEPM), and a fluorine thermoplastic elastomer (for example, an elastomer containing at least one elastomeric polymer chain segment and at least one non-elastomeric polymer chain segment, at least one of which is a fluorine-containing polymer chain segment).
- FKM fluoroelastomer
- FEPM tetrafluoroethylene-propylene elastomer
- a fluorine thermoplastic elastomer for example, an elastomer containing at least one elastomeric polymer chain segment and at least one non-elastomeric polymer chain segment, at least one of which is a fluorine-containing polymer chain segment.
- an elastomer capable of providing a sealing material exhibiting resistance to plasma (plasma etching treatment) used in various semiconductor dry processes is preferable, and FKM is more preferable because of relatively good plasma resistance and excellent sealability.
- FKM is also preferable from the viewpoints of, for example, being inexpensive and versatile.
- the elastomer (A) one synthesized by a conventionally known method may be used, or a commercially available product may be used.
- the commercially available product include “DAI-EL” manufactured by DAIKIN INDUSTRIES, LTD., “VITON” manufactured by The Chemours Company, “Dyneon” manufactured by 3M Company, and “Tecnoflon” manufactured by Solvay.
- the fluorine content of the elastomer (A1) is 66 to 68% by mass.
- the fluorine content of the elastomer (A2) is not particularly limited as long as it is in a range other than 66 to 68% by mass, but is preferably 69% by mass or more, more preferably 70% by mass or more, more preferably 73% by mass or less, and still more preferably 71% by mass or less from the viewpoint of, for example, being capable of easily obtaining a sealing material excellent in plasma resistance and chemical resistance such as resistance to chemicals.
- a uniform elastomer composition can be made in a short time, an elastomer composition excellent in moldability can be easily obtained, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained.
- the fluorine content can be measured and calculated by, for example, elemental analysis of fluorine using, for example, 19 F-NMR, or 1 H-NMR or mass spectrometry (MS spectrum method).
- the fluorine content in the present invention is a value obtained by rounding to the nearest Integer.
- the Mooney viscosity of the elastomer (A) is preferably 10 or more, more preferably 15 or more, still more preferably 20 or more, and preferably 140 or less, more preferably 120 or less, still more preferably 80 or less, particularly preferably 60 or less.
- the Mooney viscosity refers to a Mooney viscosity (ML 1+10) at 121° C. measured in accordance with ASTM D 1646.
- the use of the elastomers (A2-1) and (A2-2) is preferable because the normal physical properties of the resulting sealing material such as hardness, tensile strength, elongation at break, and 100% Mo and the physical properties of the elastomer composition such as moldability, particularly sheeting property are more excellent in a well-balanced manner.
- the content of the elastomer (A2-1) is preferably 20 to 80% by mass based on 100% by mass of the total of the elastomers (A2-1) and (A2-2).
- the content of the elastomer (A2-1) is preferably in the above range because the normal physical properties of the resulting sealing material such as hardness, tensile strength, elongation at break, and 100% Mo and the physical properties of the elastomer composition such as moldability, particularly sheeting property are more excellent in a well-balanced manner.
- the content of the elastomer (A1) in the solid content of the present composition is preferably 50% by mass or more, more preferably 70% by mass or more, and preferably 97% by mass or less, more preferably 95% by mass or less.
- the solid content refers to a component other than a solvent.
- the content of the elastomer (A1) in the solid content of the present composition is preferably 2% by mass or more, more preferably 5% by mass or more, and preferably 50% by mass or less, more preferably 40% by mass or less.
- the content of the elastomer (A2) in the solid content of the present composition is preferably 40% by mass or more, more preferably 50% by mass or more, and preferably 95% by mass or less, more preferably 85% by mass or less.
- the content of the elastomer (A1) is preferably 5% by mass or more, more preferably 10% by mass or more, and preferably 40% by mass or less, more preferably 35% by mass or less based on the total content of the elastomers (A1) and (A2) in the present composition.
- the FKM is not particularly limited, but examples thereof include polymers containing a hydrogen atom (carbon-hydrogen bond) in the polymer main chain, and specifically, it is preferable to contain a constituent unit derived from vinylidene fluoride.
- the FKM is not particularly limited, but specific examples thereof include a vinylidene fluoride-hexafluoropropylene polymer; a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene polymer; a vinylidene fluoride-propylene-tetrafluoroethylene polymer; an ethylene-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer; and a vinylidene fluoride-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer.
- Preferred example of the perfluoroalkyl vinyl ether is perfluoromethyl vinyl ether.
- a ternary polymer is preferable, and a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene polymer is more preferable from the viewpoint of, for example, being excellent in, for example, plasma resistance, heat resistance, and resistance to chemicals.
- the peroxide-crosslinkable fluoroelastomer preferably has a functional group such as an iodine group, a bromine group, a cyano group, a peroxy group, or an unsaturated group, and more preferably has an iodine group or a bromine group from the viewpoint of ease of introduction of the functional group.
- the fluoroelastomer having an iodine group and/or a bromine group can be obtained, for example, by using one or more kinds of saturated or unsaturated iodine-containing and/or bromine-containing compound(s) at the time of synthesis of the elastomer.
- Examples of the iodine-containing and/or bromine-containing compound include compounds represented by the following formula (1) or (2).
- a fluoroelastomer having an iodine group and/or a bromine group in a side chain can be synthesized, and by using the compound represented by the following formula (2), a fluoroelastomer having an iodine group and/or a bromine group at a terminal can be synthesized.
- Specific examples of the compound represented by the formula (2) include compounds described in JP 2002-97329 A and JP 2008-56739 A.
- crosslinking agent used herein is not particularly limited, and can be selected from conventionally known crosslinking agents depending on the kind of elastomer (A) to be used.
- the crosslinking agent used may be one kind or two or more kinds.
- examples of the crosslinking agent include peroxide crosslinking agents, polyamine crosslinking agents, polyol crosslinking agents, and triazine crosslinking agents.
- a peroxide crosslinking agent is preferable from the viewpoint that, for example, it is not necessary to blend an acid acceptor such as magnesium oxide or calcium hydroxide, which may become a generation source of particles, in the present composition, for example, in a plasma atmosphere, and thus there is no risk of generating particles during use of the obtained sealing material.
- peroxide crosslinking agent examples include 2,5-dimethyl-2,5-di(t-butylperoxy)hexane, dicumyl peroxide, 2,4-dichlorobenzoyl peroxide, di-t-butyl peroxide, t-butyldicumyl peroxide, benzoyl peroxide, 2,5-dimethyl-2,5-(t-butylperoxy)hexyne-3, 2,5-dimethyl-2,5-di(benzoylperoxy)hexane, ⁇ , ⁇ ′-bis(t-butylperoxy-m-isopropyl)benzene, t-butylperoxy isopropyl carbonate, di-(4-t-butylcyclohexyl) peroxydicarbonate, p-chlorobenzoyl peroxide, t-butylperoxy-2-ethylhexanoate, t-butyl peroxybenz
- 2,5-dimethyl-2,5-di(t-butylperoxy)hexane, 2,4-dichlorobenzoyl peroxide, dicumyl peroxide, benzoyl peroxide, and ⁇ , ⁇ ′-bis(t-butylperoxy-m-isopropyl)benzene are preferable, and 2,5-dimethyl-2,5-di(t-butylperoxy)hexane is more preferable.
- the content of the crosslinking agent in the present composition is preferably 0.2 to 4 parts by mass, and more preferably 0.2 to 2.5 parts by mass based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, the crosslinking reaction sufficiently proceeds, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained.
- the crosslinking aid is not particularly limited, and a conventionally known crosslinking aid may be selected depending on the kind of crosslinking agent.
- the crosslinking aid used may be one kind or two or more kinds.
- crosslinking aid examples include compounds capable of radically co-crosslinking (polyfunctional monomers) such as triallyl isocyanurate; triallyl cyanurate; trimethallyl isocyanurate; triallyl formal; triallyl trimellitate; N,N′-m-phenylenebismaleimide; dipropargyl terephthalate; diallyl phthalate; tetraallyl terephthalamide; and polyfunctional (meth)acrylates, for example, ethylene glycol di(meth)acrylate and trimethylolpropane tri(meth)acrylate: metal salts of higher carboxylic acids: polyhydric alcohol (meth)acrylates: and (meth)acrylic acid metal salts.
- polyfunctional monomers such as triallyl isocyanurate; triallyl cyanurate; trimethallyl isocyanurate; triallyl formal; triallyl trimellitate; N,N′-m-phenylenebismaleimide; dipropargyl tere
- triallyl isocyanurate is preferable from the viewpoints of, for example, excellent reactivity, and being capable of easily obtaining a sealing material having excellent heat resistance, high hardness, and high modulus.
- the content of the crosslinking aid in the present composition is preferably 1 part by mass or more, more preferably 2 parts by mass or more, still more preferably 4 parts by mass or more, and preferably 10 parts by mass or less, more preferably 7 parts by mass or less, still more preferably 6 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, the crosslinking reaction sufficiently proceeds, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained.
- the content of the crosslinking aid in the present composition is preferably 2 parts by mass or more, more preferably 4 parts by mass or more, and preferably 7 parts by mass or less, more preferably 6 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoint that, for example, a sealing material having higher hardness and higher modulus can be easily obtained without using a filler as described below.
- the mass ratio of the content of the crosslinking aid to the content of the crosslinking agent in the present composition is preferably 4 or more, more preferably 6 or more, and preferably 30 or less, more preferably 20 or less from the viewpoints of, for example, allowing the crosslinking agent to react without excess or deficiency and being capable of easily obtaining a sealing material exhibiting desired physical properties, particularly from the viewpoint of, for example, being capable of easily obtaining a sealing material having higher hardness and higher modulus without using a filler as described below.
- the present composition may contain, as necessary, conventionally known other components that have been blended in the sealing material as long as the effects of the present invention are not impaired.
- the other component include ethylenically unsaturated bond-containing compounds; reactive organosilicon compounds having two or more hydrosilyl groups in the molecule; catalysts; acid acceptors such as magnesium oxide and calcium hydroxide; organic pigments such as anthraquinone pigments, perylene pigments, and dioxazine pigments; plasticizers; processing aids; vulcanization accelerators; antiaging agents; antioxidants; inorganic fillers; and organic fillers.
- Each of the other components used may be one kind or two or more kinds.
- the present composition preferably includes an ethylenically unsaturated bond-containing compound (hereinafter, also referred to as “compound (B)”) from the viewpoint of, for example, being capable of easily obtaining a non-adhesive sealing material having excellent plasma resistance.
- compound (B) an ethylenically unsaturated bond-containing compound
- the compound (B) there may be mentioned at least one compound selected from compounds (B1) having a perfluoro skeleton having an ethylenically unsaturated bond and compounds (B2) having a siloxane skeleton having an ethylenically unsaturated bond.
- the compound (B) preferably contains the compound (B1) from the viewpoint of, for example, being capable of easily obtaining a sealing material having more excellent plasma resistance.
- Examples of the ethylenically unsaturated bond include alkenyl groups having 2 to 8 carbon atoms such as a vinyl group, a methylvinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, a pentenyl group, a hexenyl group, and a heptenyl group, a vinylphenyl group, a (meth)acryloyl group, an allyloxy group, a styryl group, and a propargyl group.
- the ethylenically unsaturated bond is preferably an alkenyl group, more preferably an alkenyl group having 2 to 4 carbon atoms, and particularly preferably a vinyl group.
- the compound (B) may have two or more kinds of ethylenically unsaturated bonds.
- the compound (B) a compound synthesized by a conventionally known method may be used, or a commercially available product may be used.
- the commercially available product is, for example, “SIFEL” (manufactured by Shin-Etsu Chemical Co., Ltd.).
- Examples of the commercially available product containing the compound (B) include commercially available products of one-component type and commercially available products of two-component type, and any of these may be used.
- Examples of the commercially available product containing the compound (B) include products in a liquid form, a paste form, an oil form, and a millable form, but any of these may be used.
- the commercially available product may contain additives such as a reactive organosilicon compound having two or more hydrosilyl groups in the molecule (for example, an organosilicon compound described in, for example, JP 2003-183402 A or JP H11-116684 A), a catalyst (for example, a catalyst described in, for example, JP 2003-183402 A or JP H11-116684 A), and a filler (for example, silica), and as the compound (B), one containing these additives may be used.
- a reactive organosilicon compound having two or more hydrosilyl groups in the molecule for example, an organosilicon compound described in, for example, JP 2003-183402 A or JP H11-116684 A
- a catalyst for example, a catalyst described in, for example, JP 2003-183402 A or JP H11-116684 A
- a filler for example, silica
- the content of the compound (B) in the present composition is preferably 0.5 parts by mass or more, more preferably 1 part by mass or more, and preferably 50 parts by mass or less, more preferably 25 parts by mass or less, still more preferably 10 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, a uniform elastomer composition can be made in a shorter time, and a sealing material having more excellent plasma resistance can be easily obtained.
- the mass ratio of the content of the compound (B) to the content of the crosslinking agent in the present composition is preferably 1 or more, more preferably 2 or more, and preferably 20 or less, more preferably 10 or less, from the viewpoint that, for example, a sealing material having more excellent plasma resistance can be easily obtained.
- the compound (B1) is a compound other than the elastomer (A).
- Examples of the compound (B1) include compounds having a perfluoropolyether structure having an ethylenically unsaturated bond and compounds having a perfluoroalkylene structure having an ethylenically unsaturated bond, and among these compounds, compounds having a perfluoropolyether structure having an ethylenically unsaturated bond (hereinafter, also referred to as “compounds (B1-1)”) are preferable.
- the compound (B1) contained in the present composition may be one kind or two or more kinds.
- the compound (B1-1) is preferably a perfluoropolyether having two or more ethylenically unsaturated bonds in one molecule.
- Preferred examples of the compound (B1-1) include compounds described in JP 2003-183402 A, JP H11-116684 A, JP H11-116685 A, and JP 2015-67737 A.
- Examples of the compound (B1-1) include compounds represented by the following formula (1).
- X is independently —CH 2 —, —CH 2 O—, —CH 2 OCH 2 —, *—Si(R 2 ) 2 -Ph- (wherein Ph: phenylene group), *—Y—NR 1 SO 2 — or *—Y—NR 1 —CO— (wherein Y is —CH 2 — or *—Si(R 2 ) 2 -Ph-, and * the moiety is bonded to Z 1 or Z 2 ).
- Rf is a divalent perfluoropolyether group (divalent perfluorooxyalkylene group).
- the subscript p is independently 0 or 1.
- the subscript a is an integer of 0 or more, preferably an integer of 0 to 10, and more preferably an integer of 0 to 6.
- Q is a group represented by the following formula (2), (3), or (4).
- R 2 is a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms, and examples thereof include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a t-butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group; cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, and a cycloheptyl group; alkenyl groups such as a vinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, and a hexenyl group; aryl groups such as a phenyl group, a tolyl group,
- R 1 is a hydrogen atom or a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms which is the same as the group exemplified for R 2
- examples of R 1 include a hydrogen atom and groups which are the same as groups for R 2 , and specifically include alkyl groups such as a methyl group, an ethyl group, a propyl group, and an isopropyl group; cycloalkyl groups such as a cyclohexyl group; alkenyl groups such as a vinyl group and an allyl group, aryl groups such as a phenyl group and a tolyl group; and substituted forms of these groups in which some of the hydrogen atoms are substituted with, for example, a halogen atom (for example, a chloromethyl group, a chloropropyl group, and fluorine-substituted alkyl groups such as a 3,3,3-tri
- Z 1 and Z 2 are each independently an ethylenically unsaturated bond-containing group, and may be —Si(ethylenically unsaturated bond-containing group)(R′) 2 .
- the ethylenically unsaturated bond-containing group is preferably a monovalent alkenyl group, more preferably a monovalent alkenyl group having 2 to 4 carbon atoms, and particularly preferably a monovalent vinyl group.
- R′ is independently a substituted or unsubstituted monovalent hydrocarbon group, and specific examples thereof include alkyl groups such as a methyl group, an ethyl group, a n-propyl group, an i-propyl group, a n-butyl group, an i-butyl group, a t-butyl group, a pentyl group, and a hexyl group; aryl groups such as a phenyl group, a tolyl group, and a xylyl group; and halogenated alkyl groups such as a 3-chloropropyl group and a 3,3,3-trifluoropropyl group. Among these, an alkyl group having 1 to 5 carbon atoms is preferable.
- X, p and R 1 are as defined for X, p and R 1 in the formula (1).
- R 3 and R 4 are each independently a substituted or unsubstituted divalent hydrocarbon group in which one or more atoms selected from an oxygen atom, a nitrogen atom, a silicon atom, and a sulfur atom may be interposed between the bonding, and R 3 in Formula (2) and R 4 in Formula (3) may each independently be a group represented by the following formula (5) or (6).
- R 5 is a substituted or unsubstituted monovalent hydrocarbon group
- R 6 is a group containing one or more atoms selected from a carbon atom, an oxygen atom, a nitrogen atom, a silicon atom, and a sulfur atom.
- R 3 and R 4 are not particularly limited as long as they are substituted or unsubstituted divalent hydrocarbon groups, but divalent hydrocarbon groups having 1 to 20 carbon atoms, particularly 2 to 12 carbon atoms are suitable, and specific examples thereof include alkylene groups such as a methylene group, an ethylene group, a propylene group, a methylethylene group, a butylene group, and a hexamethylene group; cycloalkylene groups such as a cyclohexylene group; arylene groups such as a phenylene group, a tolylene group, a xylylene group, a naphthylene group, and a biphenylene group; substituted forms of these groups in which some of the hydrogen atoms are substituted with, for example, a halogen atom; and combinations of these substituted or unsubstituted alkylene groups and/or arylene groups.
- alkylene groups such as a methylene group, an ethylene group,
- —(X) p —(Rf-Q) a —Rf—(X) p — is —(O—R 7 ) n — [wherein R 7 represents a perfluoroalkanediyl group, subscript n represents an integer of 2 or more, and plural R 7 groups may be the same or different from each other].
- Examples of the perfluoroalkanediyl group represented by R 7 include groups represented by C m F 2m (wherein subscript m is an integer of 2 or more), and the perfluoroalkanediyl group may be linear or branched.
- the number of carbon atoms of the perfluoroalkanediyl group (that is, subscript m) is, for example, 1 to 10, preferably 2 to 6, more preferably 2 to 4, and particularly preferably 2 to 3.
- the subscript n may be 2 or more, and is, for example, 10 or more, preferably 40 or more, and more preferably 70 or more. Also, subscript n is, for example, 300 or less, preferably 200 or less, and more preferably 150 or less.
- —(O—R 7 ) n — may be a group which is the same as the following Rf.
- the compound represented by the formula (1) is preferably a compound represented by the following formula (1-1).
- the compound represented by the formula (1-1) is preferably a compound in which subscript a is 0, and in this case, the compound is represented by the following formula (1-1-1).
- Rf include the following groups.
- the compound (B2) is preferably a polysiloxane having two or more ethylenically unsaturated bonds in one molecule, and is preferably an organopolysiloxane having two or more ethylenically unsaturated bonds in one molecule and having an organic group bonded to its silicon atom.
- the bonding site of the ethylenically unsaturated bond is not particularly limited.
- the compound (B2) contained in the present composition may be one kind or two or more kinds.
- Examples of the organic group bonded to the silicon atom include the ethylenically unsaturated bond, a linear alkyl group, a branched alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, and a halogenated alkyl group.
- linear alkyl group examples include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as a methyl group, an ethyl group, a propyl group, a hexyl group, an octyl group, and a decyl group.
- Examples of the branched alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as an isopropyl group, an isobutyl group, a t-butyl group, and a 2-ethylhexyl group.
- cyclic alkyl group examples include groups having 3 to 20 carbon atoms such as a cyclopentyl group and a cyclohexyl group.
- aryl group examples include groups having 6 to 20 carbon atoms such as a phenyl group and a tolyl group.
- aralkyl group examples include groups having 7 to 20 carbon atoms such as a benzyl group, a 2-phenylethyl group, and a 2-methyl-2-phenylethyl group.
- halogenated alkyl group examples include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as a 3,3,3-trifluoropropyl group, a 2-(nonafluorobutyl)ethyl group, and a 2-(heptadecafluorooctyl)ethyl group.
- a linear alkyl group, an alkenyl group, and an aryl group are preferable, a linear alkyl group that has 1 to 6 carbon atoms, an alkenyl group, and an aryl group are more preferable, and a methyl group, a vinyl group, and a phenyl group are particularly preferable.
- the molecular structure of the compound (B2) is not particularly limited, and examples thereof include linear, branched, partially branched linear, and dendritic (dendrimer-like) and preferred structure being linear and partially branched linear.
- the compound (B2) may be a single polymer having such a molecular structure, a copolymer having such a molecular structure, or a mixture of two or more of these polymers.
- Examples of the compound (B2) include dimethylpolysiloxane capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylpolysiloxane capped at both molecular chain terminals with methylphenylvinylsiloxy groups, dimethylsiloxane-methylphenylsiloxane copolymers capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylsiloxane-methylvinylsiloxane copolymers capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylsiloxane-methylvinylsiloxane copolymers capped at both molecular chain terminals with silanol groups, dimethylsiloxane-methylvinylsiloxane-methylphenylsiloxane copolymers capped at both molecular chain terminals with silanol groups, dimethylsiloxane-methylvinyls
- R 1 is each independently an unsubstituted or substituted monovalent hydrocarbon group
- R 2 is independently an alkyl group, an alkoxyalkyl group, an alkenyl group, or an acyl group
- subscript b is an integer of 2 to 100
- subscript a is an integer of 1 to 3, provided that at least two of R 1 and R 2 in Formula (7) contain the ethylenically unsaturated bond.
- R 1 is each independently an unsubstituted or substituted monovalent hydrocarbon group having preferably 1 to 10 carbon atoms, and examples thereof include groups which are the same as the groups exemplified for the organic group bonded to the silicon atom. Among them, a monovalent hydrocarbon group having 1 to 6 carbon atoms is preferable, and an alkenyl group, an aryl group, and an alkyl group having 1 to 3 carbon atoms are more preferable.
- Examples of the alkyl group and alkenyl group in R 2 in Formula (7) include a linear alkyl group, a branched alkyl group, a cyclic alkyl group, and an alkenyl group which are the same as the groups exemplified for the organic group bonded to the silicon atom.
- Examples of the alkoxyalkyl group in R 2 in Formula (7) include groups having 2 to 10 carbon atoms such as a methoxyethyl group and a methoxypropyl group.
- Examples of the acyl group in R 2 in Formula (7) include groups having 2 to 10 carbon atoms such as an acetyl group and an octanoyl group.
- subscript b in Formula (7) is preferably an integer of 10 to 50, and subscript a is preferably 3.
- the reactive organosilicon compound is a compound other than the compound (B2), and suitable examples thereof include the same compounds as the compounds having two or more hydrosilyl groups in the molecule described in, for example, JP 2003-183402 A and JP H11-116684 A.
- Suitable examples of the catalyst include catalysts which are the same as the catalysts described in, for example, JP 2003-183402 A and JP H11-116684 A.
- organic pigments which are the same as the organic pigments described in, for example, WO 2016/043100 A, JP 4720501 B2, and WO 2004/094527 A.
- the inorganic filler and the organic filler are particulate (powdery) components other than the crosslinking agent, the crosslinking aid, and the compound (B).
- examples of the inorganic filler include carbon black, silica, barium sulfate, titanium oxide, and aluminum oxide.
- organic filler examples include fluororesins such as PTFE, PFA, FEP, ETFE, and PVDF, polyethylene resins, polyimide resins, silicone resins, and melamine resins.
- the content of the filler is preferably 5 parts by mass or less, more preferably 3 parts by mass or less, and most preferably 0 parts by mass based on 100 parts by mass of the elastomer (A).
- the present composition can be produced by mixing (kneading) the elastomer (A), the crosslinking agent, the crosslinking aid, and the other components as necessary, and preferably by mixing (kneading) the elastomer (A), the crosslinking agent, the crosslinking aid, the compound (B), and the other components as necessary.
- the order of mixing the elastomer (A) with the crosslinking agent, the crosslinking aid, and the other components is not particularly limited. They may be sequentially mixed (kneaded) in any order, or may be mixed (kneaded) all at once, but it is preferable that they are sequentially mixed (kneaded) such that the respective components are uniform.
- a conventionally known mixing (kneading) machine can be used, and examples thereof include an open roll, a Banbury mixer, a biaxial roll, and a kneader.
- mixing may be performed under heating or cooling as necessary depending on a mixing (kneading) machine.
- the present sealing material can be produced by a method including a step of irradiating the present composition or a crosslinked product thereof with radiation (step of irradiating with radiation).
- a sealing material which is more excellent in, for example, plasma resistance (radical resistance), crack resistance, compression set, and non-adhesiveness and is excellent is hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner, and it is possible to easily suppress cracks that may occur in the sealing material, for example, in a plasma atmosphere.
- This sheeting step is usually performed using, for example, a roll, and is usually also a step of preliminarily forming the present composition into a sheet.
- the sheet obtained in the sheeting step is preferably preformed into a desired sealing material shape before the crosslinking step or the step of irradiating with radiation.
- a desired sealing material shape may be directly formed from the sheet obtained in the sheeting step, or the sheet obtained in the sheeting step may be formed into, for example, a rope shape (having the same meaning as, for example, a ribbon shape or a noodle shape) by, for example, cutting or extrusion molding, and then the obtained rope-shaped product may be formed into a desired sealing material shape.
- a rope shape having the same meaning as, for example, a ribbon shape or a noodle shape
- the crosslinking step more preferably includes a primary crosslinking step and a secondary crosslinking step.
- the crosslinking step is preferably performed using a desired sealing material-shaped object that is obtained in the preforming.
- the primary crosslinking step is preferably a step of heating and pressurizing a desired sealing material-shaped object that is obtained in the preforming, and as a specific example, there may be mentioned a step of crosslinking the preformed material which is cast into a mold, at a temperature of, for example, 150 to 200° C. for, for example, about 5 to 20 minutes under a pressure of about 2 to 15 MPa by, for example, a heating press machine.
- the secondary crosslinking step is preferably a step of heating the molded body obtained in the primary crosslinking step, and as a specific example, there may be mentioned a step of heating the molded body at a temperature of, for example, 150 to 300° C. for about 1 to 24 hours, more preferably about 3 to 24 hours using various ovens, preferably a vacuum oven, under from normal pressure to reduced pressure.
- crosslinking can be promoted, or even if an unreacted component remains after the primary crosslinking step, the unreacted component can be decomposed and volatilized, and a sealing material with less generation of release gas can be obtained.
- the radiation used for irradiation in the step of irradiating with radiation is not particularly limited as long as it can crosslink the elastomer (A).
- Examples thereof include an X-ray, a gamma ray, an electron beam, a proton beam, a neutron beam, a heavy particle beam, an alpha beam, and a beta beam, and among these, a gamma ray and an electron beam are preferable.
- the radiation used for irradiation may be one kind or two or more kinds.
- the absorbed dose is preferably 1 to 120 kGy, and more preferably 20 to 100 kGy.
- the absorbed dose is preferably 1 to 120 kGy, and more preferably 20 to 100 kGy.
- the step of irradiating with radiation may be performed in two or more stages with conditions changed.
- the step of irradiating with radiation is preferably performed in an atmosphere of an inert gas such as nitrogen or argon.
- At least one of SIFEL 8070A and SIFEL 8070B contains a compound having a perfluoro skeleton having an ethylenically unsaturated bond.
- the resulting bulk elastomer composition was subjected to a sheeting step (sheet forming step) using a roll (roll interval: 8 mm, temperature: 50° C.)
- the sheeting property was evaluated as follows. The case where a sheet was able to be formed from the bulk elastomer composition at this step was rated as “OK” in terms of the sheeting property, and the case where the elastomer composition was not caught between rolls or the adhesion to rolls was poor, failing to obtain a good sheet by sheeting was rated as “NG” in terms of the sheeting property. The results are shown in Table 1.
- the sheet obtained in the sheeting step was press-molded at 170° C. for 10 minutes under a pressure of 5 MPa using a compression vacuum press machine (primary crosslinking), and then the sheet after the press-molding was heated at 200° C. for 16 hours under reduced pressure in a vacuum oven (degree of vacuum: 50 Pa) (secondary crosslinking). Thereafter, the secondary-crosslinked sheet was irradiated with radiation such that the absorbed dose was 80 kGy, thereby obtaining a molded body.
- the obtained molded body was measured for the following normal physical properties. The results are shown in Table 1.
- the Shore A hardness was measured in accordance with JIS K 6253: 2012, and the tensile strength, the elongation at break, and the tensile stress at 100% elongation (100% Mo) were measured in accordance with JIS K 6251: 2017.
- Example 1 Various evaluations were performed in the same manner as in Example 1 except that the elastomers shown in Table 1 were used in the amounts shown in Table 1 instead of the elastomers used in Example 1. The results are shown in Table 1.
- Comparative Examples 1 and 2 it took a long time to produce a uniform elastomer composition, and the elastomer compositions obtained in Comparative Examples 1 and 2 had poor sheeting property, and specifically, the elastomer composition was not caught between rolls or was not well wound around rolls, failing to form a good sheet.
- the obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- a bulk elastomer composition was obtained in the same manner as in Example 7 except that the amount of SIFEL 3590-N used in Example 7 was changed to 10 parts by mass and the amount of PERHEXA 25B used in Example 7 was changed to 1 part by mass.
- the obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- a bulk elastomer composition was obtained in the same manner as in Example 7 except that the amount of SIFEL 3590-N used in Example 7 was changed to 20 parts by mass and the amount of PERHEXA 25B used in Example 7 was changed to 1 part by mass.
- the obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- a bulk elastomer composition was obtained in the same manner as in Example 7 except that 2 parts by mass of KE-1830 (containing a compound having a siloxane skeleton having an ethylenically unsaturated bond, one-component liquid type, manufactured by Shin-Etsu Chemical Co., Ltd.) was used instead of 2 parts by mass of SIFEL 3590-N in Example 7.
- KE-1830 containing a compound having a siloxane skeleton having an ethylenically unsaturated bond, one-component liquid type, manufactured by Shin-Etsu Chemical Co., Ltd.
- the obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- the obtained molded body was measured for the plasma resistance (mass reduction ratio). Specifically, measurement was performed as follows.
- the obtained molded body was irradiated with plasma for 3 hours under the conditions of an RF 500 W, a CF 4 gas flow rate of 50 sccm, an O 2 gas flow rate of 150 sccm, and a degree of vacuum of 1 torr.
- the obtained molded body was placed at a position 6 cm away from the plasma electrode. Next, the mass of the molded body before and after the test was measured, and the mass reduction ratio (%) was determined by the following formula to evaluate the plasma resistance. It can be said that the smaller the mass reduction ratio is, the better the plasma resistance is.
- Mass reduction ratio (%) [(mass of molded body before test ⁇ mass of molded body after test)/mass of molded body before test] ⁇ 100
- the obtained bulk elastomer composition was filled in a mold, and press-molded at 170° C. for 10 minutes under a pressure of 5 MPa using a compression vacuum press machine (primary crosslinking), and then the sheet after the press-molding was heated at 200° C. for 16 hours under reduced pressure in a vacuum oven (degree of vacuum: 50 Pa) (secondary crosslinking). Thereafter, the secondary-crosslinked sheet was irradiated with radiation such that the absorbed dose was 80 kGy, thereby obtaining a molded body.
- Example 15 SIFEL 8070A and SIFEL 8070B were not used.
Abstract
One embodiment of the present invention relates to a sealing material or a method for producing a sealing material, in which the sealing material is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid, and the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
Description
- This application is the United States national phase of International Application No. PCT/JP2021/033158 filed Sep. 9, 2021, and claims priority to Japanese Patent Application No. 2020-162301 filed Sep. 28, 2020, the disclosures of which are hereby incorporated by reference in their entireties.
- One embodiment of the present invention relates to a sealing material or a method for producing a sealing material.
- Conventionally, a sealing material has been widely used in various applications, and among these applications, a sealing material used in, for example, a semiconductor manufacturing apparatus is exemplified as an application of the sealing material applying the most load to the sealing material.
- For such a sealing material, a crosslinkable fluoroelastomer is used because a sealing material excellent in plasma resistance and radical resistance can be obtained.
- Such a sealing material made of a crosslinkable fluoroelastomer is usually used as a sealing material by molding and crosslinking an elastomer composition that is obtained by blending additives such as a crosslinking agent and a crosslinking aid into the crosslinkable fluoroelastomer. In particular, from the viewpoints of, for example, plasma resistance, and sealability of the sealing material to be obtained, crosslinking including a step of irradiating with radiation is performed at the time of the crosslinking (for example, Patent Literature 1: JP 2004-131656 A).
- As described above, when an additive is blended in a crosslinkable fluoroelastomer to form an elastomer composition, the components in the elastomer composition need to be uniformly mixed in order to produce a sealing material exhibiting desired physical properties from the elastomer composition.
- However, when a conventional crosslinkable fluoroelastomer is used, particularly when a liquid or oily component is used, it takes a long time to produce such a uniform elastomer composition, and there is room for improvement in this respect.
- When a sealing material is formed from the produced elastomer composition with high productivity, the elastomer composition is usually formed into a sheet by a sheeting step. This sheeting step is usually performed by passing through an elastomer composition between rolls. In the case of using a conventional elastomer composition, since the elastomer composition is not caught between the rolls or is not well wound around the rolls, it is not easy to form a sheet (the sheeting property is poor). Thus, conventional elastomer compositions have room for improvement in terms of moldability.
- Moreover, the sealing material formed from the conventional elastomer composition has room for improvement in terms of properties as a sealing material, such as tensile strength and elongation at break.
- One embodiment of the present invention provides a sealing material that can be manufactured with good molding processability, has excellent sealability, and has high tensile strength and elongation at break.
- As a result of intensive studies to solve the above problems, the present inventor has found that the above problems can be solved according to the following example configuration, and has completed the present invention.
- An example configuration of the present invention is as follows.
- [1] A sealing material that is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid,
-
- in which the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- [2] The sealing material according to [1], in which the fluoroelastomer (A) is a peroxide-crosslinkable fluoroelastomer.
- [3] The sealing material according to [1] or [2], in which the elastomer composition includes at least one ethylenically unsaturated bond-containing compound selected from compounds having a perfluoro skeleton having an ethylenically unsaturated bond and compounds having a siloxane skeleton having an ethylenically unsaturated bond.
- [4] The sealing material according to any one of [1] to [3], in which a content of a filler is 5 parts by mass or less based on 100 parts by mass of the fluoroelastomer (A).
- [5] A method for producing a sealing material, the method including a step of irradiating an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid or a crosslinked product of the elastomer composition with radiation, in which the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- According to one embodiment of the present invention, it is possible to provide a sealing material which can be produced with good molding processability, is excellent in sealability (compression set is small), and has high tensile strength and elongation at break. Specifically, it is possible to provide a sealing material excellent in sealability and having high tensile strength and elongation at break from an elastomer composition which can be made into a uniform elastomer composition in a short time and is excellent in moldability, particularly, sheeting property.
- In addition, according to one embodiment of the present invention, it is possible to obtain a sealing material that is excellent in hardness, tensile strength, elongation at break, and tensile stress at 100% elongation (100% Mo) in a well-balanced manner, and is further excellent in, for example, plasma resistance (radical resistance), crack resistance, and compression set. Thus, the sealing material can be suitably used as a sealing material for a semiconductor manufacturing apparatus and a sealing material for a plasma processing apparatus.
- <<Sealing Material>>
- The sealing material according to one embodiment of the present invention (hereinafter, also referred to as the “present sealing material”) is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid (hereinafter, also referred to as the “present composition”), and the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- The radiation-crosslinked body of the present composition is specifically a radiation-crosslinked body obtained by a method including a step of irradiating the present composition itself or a crosslinked product of the present composition (for example, a crosslinked product obtained by thermally crosslinking the present composition) with radiation.
- The present sealing material can be used as, for example, a gasket or packing of various members, and can be suitably used particularly for a semiconductor manufacturing apparatus, or a plasma processing apparatus, and particularly for a drive unit including a gate valve used for an opening of a plasma processing chamber unit due to the sealing material exhibiting the above effects.
- The present sealing material has, for example, a shape that may be appropriately selected depending on the intended use.
- The present sealing material can be a sealing material that has the following physical properties despite not containing the filler.
- The Shore A hardness (Type A durometer hardness) of the present sealing material measured according to JIS K 6253: 2012 is preferably 60 or more.
- The tensile strength of the present sealing material measured according to JIS K 6251: 2017 is preferably 10 MPa or more.
- The elongation at break of the present sealing material measured according to JIS K 6251: 2017 is preferably 130% or more.
- The 100% modulus of the present sealing material measured according to JIS K 6251: 2017 is preferably 3.5 MPa or more.
- The compression set of the present sealing material measured according to JIS K 6262: 2013 is preferably 35% or less.
- <Crosslinkable Fluoroelastomer (A) Other than Perfluoroelastomer>
- The elastomer (A) is not particularly limited as long as it contains the crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
- The elastomer (A) used may be one kind or two or more kinds and the elastomer (A1) used may be one kind or two or more kinds.
- In the present invention, “elastomer” and “rubber” have the same meaning, and are not particularly distinguished from each other.
- The elastomer (A) may contain a crosslinkable fluoroelastomer (hereinafter, also referred to as “elastomer (A2)”) that is other than a perfluoroelastomer and other than the elastomer (A1), and preferably contains the elastomer (A2) from the viewpoint of, for example, being capable of easily obtaining a sealing material excellent in plasma resistance and chemical resistance such as resistance to chemicals.
- When the elastomer (A) contains the elastomer (A2), the elastomer (A2) used may be one kind or two or more kinds.
- The elastomer (A) is also referred to as unvulcanized fluororubber, and examples of the crosslinking type include a peroxide crosslinking type, a polyol crosslinking type, an amine crosslinking type, and a radiation crosslinking type. Among them, the fluoroelastomer is preferably a peroxide-crosslinkable fluoroelastomer from the viewpoint that, for example, it is not necessary to use an acid acceptor that may be a generation source of particles, for example, in a plasma atmosphere, and thus there is no risk of generating particles during use of the obtained sealing material.
- Specific examples of the elastomer (A) include a fluoroelastomer (FKM), a tetrafluoroethylene-propylene elastomer (FEPM), and a fluorine thermoplastic elastomer (for example, an elastomer containing at least one elastomeric polymer chain segment and at least one non-elastomeric polymer chain segment, at least one of which is a fluorine-containing polymer chain segment).
- As the elastomer (A), an elastomer capable of providing a sealing material exhibiting resistance to plasma (plasma etching treatment) used in various semiconductor dry processes is preferable, and FKM is more preferable because of relatively good plasma resistance and excellent sealability. In addition, FKM is also preferable from the viewpoints of, for example, being inexpensive and versatile.
- As the elastomer (A), one synthesized by a conventionally known method may be used, or a commercially available product may be used. Examples of the commercially available product include “DAI-EL” manufactured by DAIKIN INDUSTRIES, LTD., “VITON” manufactured by The Chemours Company, “Dyneon” manufactured by 3M Company, and “Tecnoflon” manufactured by Solvay.
- The fluorine content of the elastomer (A1) is 66 to 68% by mass.
- The fluorine content of the elastomer (A2) is not particularly limited as long as it is in a range other than 66 to 68% by mass, but is preferably 69% by mass or more, more preferably 70% by mass or more, more preferably 73% by mass or less, and still more preferably 71% by mass or less from the viewpoint of, for example, being capable of easily obtaining a sealing material excellent in plasma resistance and chemical resistance such as resistance to chemicals.
- By using at least two elastomers having a fluorine content in the above range, a uniform elastomer composition can be made in a short time, an elastomer composition excellent in moldability can be easily obtained, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained. The fluorine content can be measured and calculated by, for example, elemental analysis of fluorine using, for example, 19F-NMR, or 1H-NMR or mass spectrometry (MS spectrum method).
- The fluorine content in the present invention is a value obtained by rounding to the nearest Integer.
- The Mooney viscosity of the elastomer (A) is preferably 10 or more, more preferably 15 or more, still more preferably 20 or more, and preferably 140 or less, more preferably 120 or less, still more preferably 80 or less, particularly preferably 60 or less.
- When the Mooney viscosity of the elastomer (A) is in the above range, an elastomer composition excellent in moldability, particularly, sheeting property can be easily obtained.
- In the present specification, the Mooney viscosity refers to a Mooney viscosity (ML 1+10) at 121° C. measured in accordance with ASTM D 1646.
- As one aspect of the elastomer (A2), it is preferable to use an elastomer (A2-1) having a Mooney viscosity of preferably in a range of 40 to 140, more preferably 40 to 120, and still more preferably 40 to 60 and an elastomer (A2-2) having a Mooney viscosity of preferably in a range of 10 or more and less than 40, and more preferably 10 to 30.
- The use of the elastomers (A2-1) and (A2-2) is preferable because the normal physical properties of the resulting sealing material such as hardness, tensile strength, elongation at break, and 100% Mo and the physical properties of the elastomer composition such as moldability, particularly sheeting property are more excellent in a well-balanced manner.
- When the elastomer (A2-1) and the elastomer (A2-2) are used as the elastomer (A2), the content of the elastomer (A2-1) is preferably 20 to 80% by mass based on 100% by mass of the total of the elastomers (A2-1) and (A2-2).
- The content of the elastomer (A2-1) is preferably in the above range because the normal physical properties of the resulting sealing material such as hardness, tensile strength, elongation at break, and 100% Mo and the physical properties of the elastomer composition such as moldability, particularly sheeting property are more excellent in a well-balanced manner.
- When the elastomer (A) is composed of only the elastomer (A1), the content of the elastomer (A1) in the solid content of the present composition is preferably 50% by mass or more, more preferably 70% by mass or more, and preferably 97% by mass or less, more preferably 95% by mass or less.
- When the content of the elastomer (A1) is in the above range, a sealing material excellent in sealability, moldability, and chemical resistance can be easily obtained.
- In the present specification, the solid content refers to a component other than a solvent.
- When the elastomer (A) contains the elastomer (A2), the content of the elastomer (A1) in the solid content of the present composition is preferably 2% by mass or more, more preferably 5% by mass or more, and preferably 50% by mass or less, more preferably 40% by mass or less.
- When the content of the elastomer (A1) is in the above range, a sealing material excellent in moldability and chemical resistance in a well-balanced manner can be easily obtained.
- When the elastomer (A) contains the elastomer (A2), the content of the elastomer (A2) in the solid content of the present composition is preferably 40% by mass or more, more preferably 50% by mass or more, and preferably 95% by mass or less, more preferably 85% by mass or less.
- When the content of the elastomer (A2) is in the above range, a sealing material excellent in plasma resistance and chemical resistance such as resistance to chemicals can be easily obtained.
- When the elastomer (A) contains the elastomer (A2), the content of the elastomer (A1) is preferably 5% by mass or more, more preferably 10% by mass or more, and preferably 40% by mass or less, more preferably 35% by mass or less based on the total content of the elastomers (A1) and (A2) in the present composition.
- When the mass ratio of the contents of the elastomers (A1) and (A2) is in the above range, a sealing material excellent in moldability and chemical resistance in a well-balanced manner can be easily obtained.
- [FKM]
- The FKM is not particularly limited, but examples thereof include polymers containing a hydrogen atom (carbon-hydrogen bond) in the polymer main chain, and specifically, it is preferable to contain a constituent unit derived from vinylidene fluoride.
- The FKM is not particularly limited, but specific examples thereof include a vinylidene fluoride-hexafluoropropylene polymer; a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene polymer; a vinylidene fluoride-propylene-tetrafluoroethylene polymer; an ethylene-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer; and a vinylidene fluoride-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer.
- Preferred example of the perfluoroalkyl vinyl ether is perfluoromethyl vinyl ether.
- Among them, a ternary polymer is preferable, and a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene polymer is more preferable from the viewpoint of, for example, being excellent in, for example, plasma resistance, heat resistance, and resistance to chemicals.
- The peroxide-crosslinkable fluoroelastomer preferably has a functional group such as an iodine group, a bromine group, a cyano group, a peroxy group, or an unsaturated group, and more preferably has an iodine group or a bromine group from the viewpoint of ease of introduction of the functional group.
- The fluoroelastomer having an iodine group and/or a bromine group can be obtained, for example, by using one or more kinds of saturated or unsaturated iodine-containing and/or bromine-containing compound(s) at the time of synthesis of the elastomer.
- Examples of the iodine-containing and/or bromine-containing compound include compounds represented by the following formula (1) or (2).
- By using the compound represented by the following formula (1), a fluoroelastomer having an iodine group and/or a bromine group in a side chain can be synthesized, and by using the compound represented by the following formula (2), a fluoroelastomer having an iodine group and/or a bromine group at a terminal can be synthesized.
-
CY1 2═CY2RfX (1) -
- wherein Y1 and Y2 are each independently a fluorine atom, a hydrogen atom, or a methyl group, Rf is a linear or branched fluorine-containing alkylene group in which some or all of the hydrogen atoms are substituted with a fluorine atom, or a group containing an ether bond in a part of the fluorine-containing alkylene group, and X is an iodine atom or a bromine atom.
- Specific examples of the compound represented by the formula (1) include the compounds described in WO 2009/119409 A.
-
InBrmR (2) -
- wherein R is a fluorohydrocarbon group having 1 to 12 carbon atoms, subscripts n and m are each independently an integer of 0 to 2, and n+m is 1 or 2.
- Specific examples of the compound represented by the formula (2) include compounds described in JP 2002-97329 A and JP 2008-56739 A.
- <Crosslinking Agent>
- The crosslinking agent used herein is not particularly limited, and can be selected from conventionally known crosslinking agents depending on the kind of elastomer (A) to be used.
- The crosslinking agent used may be one kind or two or more kinds.
- For example, when FKM is used, examples of the crosslinking agent include peroxide crosslinking agents, polyamine crosslinking agents, polyol crosslinking agents, and triazine crosslinking agents.
- Among them, a peroxide crosslinking agent is preferable from the viewpoint that, for example, it is not necessary to blend an acid acceptor such as magnesium oxide or calcium hydroxide, which may become a generation source of particles, in the present composition, for example, in a plasma atmosphere, and thus there is no risk of generating particles during use of the obtained sealing material.
- Examples of the peroxide crosslinking agent include 2,5-dimethyl-2,5-di(t-butylperoxy)hexane, dicumyl peroxide, 2,4-dichlorobenzoyl peroxide, di-t-butyl peroxide, t-butyldicumyl peroxide, benzoyl peroxide, 2,5-dimethyl-2,5-(t-butylperoxy)hexyne-3, 2,5-dimethyl-2,5-di(benzoylperoxy)hexane, α,α′-bis(t-butylperoxy-m-isopropyl)benzene, t-butylperoxy isopropyl carbonate, di-(4-t-butylcyclohexyl) peroxydicarbonate, p-chlorobenzoyl peroxide, t-butylperoxy-2-ethylhexanoate, t-butyl peroxybenzoate, 1,1-bis(t-butylperoxy)-3,5,5-trimethylcyclohexane, 2,5-dimethylhexane-2,5-dihydroperoxide, α,α-bis(t-butylperoxy)-p-diisopropylbenzene, t-butyl peroxybenzene, and t-butyl peroxymaleic acid.
- Among them, 2,5-dimethyl-2,5-di(t-butylperoxy)hexane, 2,4-dichlorobenzoyl peroxide, dicumyl peroxide, benzoyl peroxide, and α,α′-bis(t-butylperoxy-m-isopropyl)benzene are preferable, and 2,5-dimethyl-2,5-di(t-butylperoxy)hexane is more preferable.
- The content of the crosslinking agent in the present composition is preferably 0.2 to 4 parts by mass, and more preferably 0.2 to 2.5 parts by mass based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, the crosslinking reaction sufficiently proceeds, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained.
- <Crosslinking Aid>
- The crosslinking aid is not particularly limited, and a conventionally known crosslinking aid may be selected depending on the kind of crosslinking agent.
- The crosslinking aid used may be one kind or two or more kinds.
- Examples of the crosslinking aid to be used in the case of using a peroxide crosslinking agent include compounds capable of radically co-crosslinking (polyfunctional monomers) such as triallyl isocyanurate; triallyl cyanurate; trimethallyl isocyanurate; triallyl formal; triallyl trimellitate; N,N′-m-phenylenebismaleimide; dipropargyl terephthalate; diallyl phthalate; tetraallyl terephthalamide; and polyfunctional (meth)acrylates, for example, ethylene glycol di(meth)acrylate and trimethylolpropane tri(meth)acrylate: metal salts of higher carboxylic acids: polyhydric alcohol (meth)acrylates: and (meth)acrylic acid metal salts.
- Among them, triallyl isocyanurate is preferable from the viewpoints of, for example, excellent reactivity, and being capable of easily obtaining a sealing material having excellent heat resistance, high hardness, and high modulus.
- The content of the crosslinking aid in the present composition is preferably 1 part by mass or more, more preferably 2 parts by mass or more, still more preferably 4 parts by mass or more, and preferably 10 parts by mass or less, more preferably 7 parts by mass or less, still more preferably 6 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, the crosslinking reaction sufficiently proceeds, and a sealing material excellent in hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner can be easily obtained.
- In particular, in order to suppress cracks that may be generated in the sealing material, for example, in a plasma atmosphere, a radiation-crosslinked sealing material (radiation-treated product) is preferable. In this case, the content of the crosslinking aid in the present composition is preferably 2 parts by mass or more, more preferably 4 parts by mass or more, and preferably 7 parts by mass or less, more preferably 6 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoint that, for example, a sealing material having higher hardness and higher modulus can be easily obtained without using a filler as described below.
- The mass ratio of the content of the crosslinking aid to the content of the crosslinking agent in the present composition (the content of the crosslinking aid/the content of the crosslinking agent) is preferably 4 or more, more preferably 6 or more, and preferably 30 or less, more preferably 20 or less from the viewpoints of, for example, allowing the crosslinking agent to react without excess or deficiency and being capable of easily obtaining a sealing material exhibiting desired physical properties, particularly from the viewpoint of, for example, being capable of easily obtaining a sealing material having higher hardness and higher modulus without using a filler as described below.
- <Other Components>
- In addition to the above components, the present composition may contain, as necessary, conventionally known other components that have been blended in the sealing material as long as the effects of the present invention are not impaired. Examples of the other component include ethylenically unsaturated bond-containing compounds; reactive organosilicon compounds having two or more hydrosilyl groups in the molecule; catalysts; acid acceptors such as magnesium oxide and calcium hydroxide; organic pigments such as anthraquinone pigments, perylene pigments, and dioxazine pigments; plasticizers; processing aids; vulcanization accelerators; antiaging agents; antioxidants; inorganic fillers; and organic fillers.
- Each of the other components used may be one kind or two or more kinds.
- [Ethylenically Unsaturated Bond-Containing Compound]
- The present composition preferably includes an ethylenically unsaturated bond-containing compound (hereinafter, also referred to as “compound (B)”) from the viewpoint of, for example, being capable of easily obtaining a non-adhesive sealing material having excellent plasma resistance.
- As the compound (B), there may be mentioned at least one compound selected from compounds (B1) having a perfluoro skeleton having an ethylenically unsaturated bond and compounds (B2) having a siloxane skeleton having an ethylenically unsaturated bond. Of these, the compound (B) preferably contains the compound (B1) from the viewpoint of, for example, being capable of easily obtaining a sealing material having more excellent plasma resistance.
- Examples of the ethylenically unsaturated bond include alkenyl groups having 2 to 8 carbon atoms such as a vinyl group, a methylvinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, a pentenyl group, a hexenyl group, and a heptenyl group, a vinylphenyl group, a (meth)acryloyl group, an allyloxy group, a styryl group, and a propargyl group. Among them, the ethylenically unsaturated bond is preferably an alkenyl group, more preferably an alkenyl group having 2 to 4 carbon atoms, and particularly preferably a vinyl group.
- The compound (B) may have two or more kinds of ethylenically unsaturated bonds.
- As the compound (B), a compound synthesized by a conventionally known method may be used, or a commercially available product may be used. The commercially available product is, for example, “SIFEL” (manufactured by Shin-Etsu Chemical Co., Ltd.).
- Examples of the commercially available product containing the compound (B) include commercially available products of one-component type and commercially available products of two-component type, and any of these may be used. Examples of the commercially available product containing the compound (B) include products in a liquid form, a paste form, an oil form, and a millable form, but any of these may be used.
- When a commercially available product is used as the compound (B), the commercially available product may contain additives such as a reactive organosilicon compound having two or more hydrosilyl groups in the molecule (for example, an organosilicon compound described in, for example, JP 2003-183402 A or JP H11-116684 A), a catalyst (for example, a catalyst described in, for example, JP 2003-183402 A or JP H11-116684 A), and a filler (for example, silica), and as the compound (B), one containing these additives may be used.
- When the present composition includes the compound (B), the content of the compound (B) in the present composition is preferably 0.5 parts by mass or more, more preferably 1 part by mass or more, and preferably 50 parts by mass or less, more preferably 25 parts by mass or less, still more preferably 10 parts by mass or less based on 100 parts by mass of the elastomer (A) from the viewpoints that, for example, a uniform elastomer composition can be made in a shorter time, and a sealing material having more excellent plasma resistance can be easily obtained.
- When the present composition includes the compound (B) and a crosslinking agent, the mass ratio of the content of the compound (B) to the content of the crosslinking agent in the present composition (the content of the compound (B)/the content of the crosslinking agent) is preferably 1 or more, more preferably 2 or more, and preferably 20 or less, more preferably 10 or less, from the viewpoint that, for example, a sealing material having more excellent plasma resistance can be easily obtained.
- [Compound (B1)]
- The compound (B1) is a compound other than the elastomer (A).
- Examples of the compound (B1) include compounds having a perfluoropolyether structure having an ethylenically unsaturated bond and compounds having a perfluoroalkylene structure having an ethylenically unsaturated bond, and among these compounds, compounds having a perfluoropolyether structure having an ethylenically unsaturated bond (hereinafter, also referred to as “compounds (B1-1)”) are preferable.
- When the present composition contains the compound (B1), the compound (B1) contained in the present composition may be one kind or two or more kinds.
- Compound (B1-1) The compound (B1-1) is preferably a perfluoropolyether having two or more ethylenically unsaturated bonds in one molecule.
- Preferred examples of the compound (B1-1) include compounds described in JP 2003-183402 A, JP H11-116684 A, JP H11-116685 A, and JP 2015-67737 A.
- Examples of the compound (B1-1) include compounds represented by the following formula (1).
-
Z1—(X)p—(Rf-Q)a-Rf—(X)p—Z2 (1) - X is independently —CH2—, —CH2O—, —CH2OCH2—, *—Si(R2)2-Ph- (wherein Ph: phenylene group), *—Y—NR1SO2— or *—Y—NR1—CO— (wherein Y is —CH2— or *—Si(R2)2-Ph-, and * the moiety is bonded to Z1 or Z2).
- Rf is a divalent perfluoropolyether group (divalent perfluorooxyalkylene group).
- The subscript p is independently 0 or 1. The subscript a is an integer of 0 or more, preferably an integer of 0 to 10, and more preferably an integer of 0 to 6.
- Q is a group represented by the following formula (2), (3), or (4).
- R2 is a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms, and examples thereof include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a t-butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group; cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, and a cycloheptyl group; alkenyl groups such as a vinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, and a hexenyl group; aryl groups such as a phenyl group, a tolyl group, a xylyl group, and a naphthyl group; aralkyl groups such as a benzyl group, a phenylethyl group, and a phenylpropyl group; and substituted forms of these groups in which some or all of the hydrogen atoms are substituted with, for example, a halogen atom (for example, a chloromethyl group, chloropropyl group, a bromoethyl group, and fluorine-substituted alkyl groups such as a 3,3,3-trifluoropropyl group and a 6,6,6,5,5,4,4,3,3-nonafluorohexyl group).
- R1 is a hydrogen atom or a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms which is the same as the group exemplified for R2, and examples of R1 include a hydrogen atom and groups which are the same as groups for R2, and specifically include alkyl groups such as a methyl group, an ethyl group, a propyl group, and an isopropyl group; cycloalkyl groups such as a cyclohexyl group; alkenyl groups such as a vinyl group and an allyl group, aryl groups such as a phenyl group and a tolyl group; and substituted forms of these groups in which some of the hydrogen atoms are substituted with, for example, a halogen atom (for example, a chloromethyl group, a chloropropyl group, and fluorine-substituted alkyl groups such as a 3,3,3-trifluoropropyl group and a 6,6,6,5,5,4,4,3,3-nonafluorohexyl group).
- Z1 and Z2 are each independently an ethylenically unsaturated bond-containing group, and may be —Si(ethylenically unsaturated bond-containing group)(R′)2.
- The ethylenically unsaturated bond-containing group is preferably a monovalent alkenyl group, more preferably a monovalent alkenyl group having 2 to 4 carbon atoms, and particularly preferably a monovalent vinyl group.
- R′ is independently a substituted or unsubstituted monovalent hydrocarbon group, and specific examples thereof include alkyl groups such as a methyl group, an ethyl group, a n-propyl group, an i-propyl group, a n-butyl group, an i-butyl group, a t-butyl group, a pentyl group, and a hexyl group; aryl groups such as a phenyl group, a tolyl group, and a xylyl group; and halogenated alkyl groups such as a 3-chloropropyl group and a 3,3,3-trifluoropropyl group. Among these, an alkyl group having 1 to 5 carbon atoms is preferable.
- In Formulae (2) to (4), X, p and R1 are as defined for X, p and R1 in the formula (1). R3 and R4 are each independently a substituted or unsubstituted divalent hydrocarbon group in which one or more atoms selected from an oxygen atom, a nitrogen atom, a silicon atom, and a sulfur atom may be interposed between the bonding, and R3 in Formula (2) and R4 in Formula (3) may each independently be a group represented by the following formula (5) or (6).
- In Formulae (5) and (6), R5 is a substituted or unsubstituted monovalent hydrocarbon group, and R6 is a group containing one or more atoms selected from a carbon atom, an oxygen atom, a nitrogen atom, a silicon atom, and a sulfur atom.
- R3 and R4 are not particularly limited as long as they are substituted or unsubstituted divalent hydrocarbon groups, but divalent hydrocarbon groups having 1 to 20 carbon atoms, particularly 2 to 12 carbon atoms are suitable, and specific examples thereof include alkylene groups such as a methylene group, an ethylene group, a propylene group, a methylethylene group, a butylene group, and a hexamethylene group; cycloalkylene groups such as a cyclohexylene group; arylene groups such as a phenylene group, a tolylene group, a xylylene group, a naphthylene group, and a biphenylene group; substituted forms of these groups in which some of the hydrogen atoms are substituted with, for example, a halogen atom; and combinations of these substituted or unsubstituted alkylene groups and/or arylene groups.
- Preferably, —(X)p—(Rf-Q)a—Rf—(X)p— is —(O—R7)n— [wherein R7 represents a perfluoroalkanediyl group, subscript n represents an integer of 2 or more, and plural R7 groups may be the same or different from each other].
- Examples of the perfluoroalkanediyl group represented by R7 include groups represented by CmF2m (wherein subscript m is an integer of 2 or more), and the perfluoroalkanediyl group may be linear or branched. The number of carbon atoms of the perfluoroalkanediyl group (that is, subscript m) is, for example, 1 to 10, preferably 2 to 6, more preferably 2 to 4, and particularly preferably 2 to 3.
- The subscript n may be 2 or more, and is, for example, 10 or more, preferably 40 or more, and more preferably 70 or more. Also, subscript n is, for example, 300 or less, preferably 200 or less, and more preferably 150 or less.
- Also, —(O—R7)n— may be a group which is the same as the following Rf.
- The compound represented by the formula (1) is preferably a compound represented by the following formula (1-1).
-
CH2═CH—(X)p—(Rf-Q)a—Rf—(X)p—CH═CH2 (1-1) -
- [The definition of each symbol in Formula (1-1) is the same as the definition of each symbol in Formula (1).]
- The compound represented by the formula (1-1) is preferably a compound in which subscript a is 0, and in this case, the compound is represented by the following formula (1-1-1).
-
CH2═CH—(X)p—Rf—(X)p—CH═CH2 . . . (1-1-1) -
- [The definition of each symbol in Formula (1-1-1) is the same as the definition of each symbol in Formula (1).]
- Specific examples of the Rf include the following groups.
-
—[CF(Z)OCF2]p—(CF2)r—[CF2OCF(Z)]q— -
- (wherein Z is a fluorine atom or —CF3, and subscripts p, q, and r are integers satisfying p≥1, q≥1, 2≤p+q≤200, preferably 2≤p+q≤110, and 0≤r≤6),
-
—CF2CF2OCF2—(CF(CF3)OCF2)s—(CF2)r—(CF2OCF(CF3))t—CF2OCF2CF2— -
- (wherein subscripts r, s, and t are integers satisfying 0≤r≤6, s≥0, t≥0, 0≤s+t≤200, and preferably 2≤s+t≤110),
-
—CF(Z)—(OCF(Z)CF2)u—(OCF2)v—OCF(Z)— -
- (wherein Z is a fluorine atom or —CF3, and subscripts u and v are integers satisfying 1≤u≤100 and 1≤v≤50),
-
—CF2CF2—[OCF2CF2CF2]w—OCF2CF2— -
- (wherein subscript w is an integer satisfying 1≤w≤100)
- [Compound (B2)]
- The compound (B2) is preferably a polysiloxane having two or more ethylenically unsaturated bonds in one molecule, and is preferably an organopolysiloxane having two or more ethylenically unsaturated bonds in one molecule and having an organic group bonded to its silicon atom. The bonding site of the ethylenically unsaturated bond is not particularly limited.
- When the present composition contains the compound (B2), the compound (B2) contained in the present composition may be one kind or two or more kinds.
- Examples of the organic group bonded to the silicon atom include the ethylenically unsaturated bond, a linear alkyl group, a branched alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, and a halogenated alkyl group.
- Examples of the linear alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as a methyl group, an ethyl group, a propyl group, a hexyl group, an octyl group, and a decyl group.
- Examples of the branched alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as an isopropyl group, an isobutyl group, a t-butyl group, and a 2-ethylhexyl group.
- Examples of the cyclic alkyl group include groups having 3 to 20 carbon atoms such as a cyclopentyl group and a cyclohexyl group.
- Examples of the aryl group include groups having 6 to 20 carbon atoms such as a phenyl group and a tolyl group.
- Examples of the aralkyl group include groups having 7 to 20 carbon atoms such as a benzyl group, a 2-phenylethyl group, and a 2-methyl-2-phenylethyl group.
- Examples of the halogenated alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms, such as a 3,3,3-trifluoropropyl group, a 2-(nonafluorobutyl)ethyl group, and a 2-(heptadecafluorooctyl)ethyl group.
- As the organic group bonded to the silicon atom, a linear alkyl group, an alkenyl group, and an aryl group are preferable, a linear alkyl group that has 1 to 6 carbon atoms, an alkenyl group, and an aryl group are more preferable, and a methyl group, a vinyl group, and a phenyl group are particularly preferable.
- The molecular structure of the compound (B2) is not particularly limited, and examples thereof include linear, branched, partially branched linear, and dendritic (dendrimer-like) and preferred structure being linear and partially branched linear. The compound (B2) may be a single polymer having such a molecular structure, a copolymer having such a molecular structure, or a mixture of two or more of these polymers.
- Examples of the compound (B2) include dimethylpolysiloxane capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylpolysiloxane capped at both molecular chain terminals with methylphenylvinylsiloxy groups, dimethylsiloxane-methylphenylsiloxane copolymers capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylsiloxane-methylvinylsiloxane copolymers capped at both molecular chain terminals with dimethylvinylsiloxy groups, dimethylsiloxane-methylvinylsiloxane copolymers capped at both molecular chain terminals with silanol groups, dimethylsiloxane-methylvinylsiloxane-methylphenylsiloxane copolymers capped at both molecular chain terminals with silanol groups, dimethylsiloxane-methylvinylsiloxane copolymers capped at both molecular chain terminals with trimethylsiloxy groups, methyl(3,3,3-trifluoropropyl)polysiloxane capped at both molecular chain terminals with dimethylvinylsiloxy groups, organosiloxane copolymers including a siloxane unit represented by Formula: (CH3)3SiO1/2, a siloxane unit represented by Formula: (CH3)2(CH2═CH)SiO1/2, a siloxane unit represented by Formula: CH3SiO3/2, and a siloxane unit represented by Formula: (CH3)2SiO2/2, and compounds represented by the following formula (7).
- In Formula (7), R1 is each independently an unsubstituted or substituted monovalent hydrocarbon group, R2 is independently an alkyl group, an alkoxyalkyl group, an alkenyl group, or an acyl group, subscript b is an integer of 2 to 100, and subscript a is an integer of 1 to 3, provided that at least two of R1 and R2 in Formula (7) contain the ethylenically unsaturated bond.
- In Formula (7), R1 is each independently an unsubstituted or substituted monovalent hydrocarbon group having preferably 1 to 10 carbon atoms, and examples thereof include groups which are the same as the groups exemplified for the organic group bonded to the silicon atom. Among them, a monovalent hydrocarbon group having 1 to 6 carbon atoms is preferable, and an alkenyl group, an aryl group, and an alkyl group having 1 to 3 carbon atoms are more preferable.
- Examples of the alkyl group and alkenyl group in R2 in Formula (7) include a linear alkyl group, a branched alkyl group, a cyclic alkyl group, and an alkenyl group which are the same as the groups exemplified for the organic group bonded to the silicon atom.
- Examples of the alkoxyalkyl group in R2 in Formula (7) include groups having 2 to 10 carbon atoms such as a methoxyethyl group and a methoxypropyl group.
- Examples of the acyl group in R2 in Formula (7) include groups having 2 to 10 carbon atoms such as an acetyl group and an octanoyl group.
- The subscript b in Formula (7) is preferably an integer of 10 to 50, and subscript a is preferably 3.
- [Reactive Organosilicon Compound]
- The reactive organosilicon compound is a compound other than the compound (B2), and suitable examples thereof include the same compounds as the compounds having two or more hydrosilyl groups in the molecule described in, for example, JP 2003-183402 A and JP H11-116684 A.
- [Catalyst]
- Suitable examples of the catalyst include catalysts which are the same as the catalysts described in, for example, JP 2003-183402 A and JP H11-116684 A.
- [Organic Pigment]
- Suitable examples of the organic pigment include organic pigments which are the same as the organic pigments described in, for example, WO 2016/043100 A, JP 4720501 B2, and WO 2004/094527 A.
- [Filler]
- The inorganic filler and the organic filler (hereinafter, these are also collectively and simply referred to as a “filler”) are particulate (powdery) components other than the crosslinking agent, the crosslinking aid, and the compound (B).
- Examples of the inorganic filler include carbon black, silica, barium sulfate, titanium oxide, and aluminum oxide.
- Examples of the organic filler include fluororesins such as PTFE, PFA, FEP, ETFE, and PVDF, polyethylene resins, polyimide resins, silicone resins, and melamine resins.
- When the present sealing material is used in such applications where generation of particles, for example, in a plasma atmosphere is a problem, the content of the filler is preferably 5 parts by mass or less, more preferably 3 parts by mass or less, and most preferably 0 parts by mass based on 100 parts by mass of the elastomer (A).
- <Method for Producing Present Composition>
- The present composition can be produced by mixing (kneading) the elastomer (A), the crosslinking agent, the crosslinking aid, and the other components as necessary, and preferably by mixing (kneading) the elastomer (A), the crosslinking agent, the crosslinking aid, the compound (B), and the other components as necessary.
- The order of mixing the elastomer (A) with the crosslinking agent, the crosslinking aid, and the other components is not particularly limited. They may be sequentially mixed (kneaded) in any order, or may be mixed (kneaded) all at once, but it is preferable that they are sequentially mixed (kneaded) such that the respective components are uniform.
- At the time of the mixing (kneading), a conventionally known mixing (kneading) machine can be used, and examples thereof include an open roll, a Banbury mixer, a biaxial roll, and a kneader.
- At the time of the mixing (kneading), mixing (kneading) may be performed under heating or cooling as necessary depending on a mixing (kneading) machine.
- <Method for Producing Present Sealing Material>
- The present sealing material can be produced by a method including a step of irradiating the present composition or a crosslinked product thereof with radiation (step of irradiating with radiation).
- By including a step of irradiating with radiation in this manner, it is possible to easily obtain a sealing material which is more excellent in, for example, plasma resistance (radical resistance), crack resistance, compression set, and non-adhesiveness and is excellent is hardness, tensile strength, elongation at break, and 100% Mo in a well-balanced manner, and it is possible to easily suppress cracks that may occur in the sealing material, for example, in a plasma atmosphere.
- At the time of forming a sealing material from the present composition, it is preferable to perform the sheeting step from the viewpoints of, for example, improving the efficiency of the molding operation and reducing the defect rate. This sheeting step is usually performed using, for example, a roll, and is usually also a step of preliminarily forming the present composition into a sheet.
- The sheet obtained in the sheeting step is preferably preformed into a desired sealing material shape before the crosslinking step or the step of irradiating with radiation.
- In this preforming, a desired sealing material shape may be directly formed from the sheet obtained in the sheeting step, or the sheet obtained in the sheeting step may be formed into, for example, a rope shape (having the same meaning as, for example, a ribbon shape or a noodle shape) by, for example, cutting or extrusion molding, and then the obtained rope-shaped product may be formed into a desired sealing material shape.
- At the time of producing the present sealing material, it is preferable to include a crosslinking step before the step of irradiating with radiation, and the crosslinking step more preferably includes a primary crosslinking step and a secondary crosslinking step.
- The crosslinking step is preferably performed using a desired sealing material-shaped object that is obtained in the preforming.
- The primary crosslinking step is preferably a step of heating and pressurizing a desired sealing material-shaped object that is obtained in the preforming, and as a specific example, there may be mentioned a step of crosslinking the preformed material which is cast into a mold, at a temperature of, for example, 150 to 200° C. for, for example, about 5 to 20 minutes under a pressure of about 2 to 15 MPa by, for example, a heating press machine.
- The secondary crosslinking step is preferably a step of heating the molded body obtained in the primary crosslinking step, and as a specific example, there may be mentioned a step of heating the molded body at a temperature of, for example, 150 to 300° C. for about 1 to 24 hours, more preferably about 3 to 24 hours using various ovens, preferably a vacuum oven, under from normal pressure to reduced pressure.
- By this secondary crosslinking step, crosslinking can be promoted, or even if an unreacted component remains after the primary crosslinking step, the unreacted component can be decomposed and volatilized, and a sealing material with less generation of release gas can be obtained.
- The radiation used for irradiation in the step of irradiating with radiation is not particularly limited as long as it can crosslink the elastomer (A). Examples thereof include an X-ray, a gamma ray, an electron beam, a proton beam, a neutron beam, a heavy particle beam, an alpha beam, and a beta beam, and among these, a gamma ray and an electron beam are preferable.
- The radiation used for irradiation may be one kind or two or more kinds.
- At the time of irradiating with radiation, it is desirable to irradiate with radiation such that the absorbed dose is preferably 1 to 120 kGy, and more preferably 20 to 100 kGy. When radiation is applied in such an amount, it is possible to reduce unreacted components that may be particles or release gas, and a sealing material excellent in, for example, plasma resistance and crack resistance can be easily obtained without excessively reducing the molecular weight of the elastomer (A).
- The step of irradiating with radiation may be performed in two or more stages with conditions changed.
- At the time of irradiating with radiation, irradiation may be performed in the air. However, when oxygen is present at the time of irradiating with radiation, the crosslinking reaction may be inhibited, and there is a possibility that the mechanical strength of the sealing material is reduced or stickiness appears on the surface of the sealing material. Thus, the step of irradiating with radiation is preferably performed in an atmosphere of an inert gas such as nitrogen or argon.
- Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited thereto.
- <Elastomer>
- Elastomers used in the following examples and comparative examples are as follows.
-
- Elastomer (A1-1): Tecnoflon P757 (fluorine content: 67% by mass, manufactured by Solvay)
- Elastomer (A1-2): Tecnoflon P457 (fluorine content: 67% by mass, manufactured by Solvay)
- Elastomer (A2-1): DAI-EL G912 (fluorine content: 71% by mass, manufactured by DAIKIN INDUSTRIES, LTD.)
- Elastomer (A2-2): Tecnoflon P959 (fluorine content: 70% by mass, manufactured by Solvay)
- Elastomer (A2-3): Tecnoflon P459 (fluorine content: 70% by mass, manufactured by Solvay)
- Elastomer (A2-4): Tecnoflon PL855 (fluorine content: 64% by mass, manufactured by Solvay)
- Elastomer (A2-5): DAI-EL LT302 (fluorine content: 65% by mass, manufactured by DAIKIN INDUSTRIES, LTD.)
- Into a kneader, 20 parts by mass of the elastomer (A1-1), 80 parts by mass of the elastomer (A2-2), 1.0 parts by mass of SIFEL 8070A (manufactured by Shin-Etsu Chemical Co., Ltd.), 1.0 parts by mass of SIFEL 8070B (manufactured by Shin-Etsu Chemical Co., Ltd.), 6.0 parts by mass of TRIC (triallyl isocyanurate, manufactured by Mitsubishi Chemical Corporation), and 0.5 parts by mass of PERHEXA 25B (manufactured by NOF CORPORATION) were sequentially fed and the contents were kneaded until the current value was stabilized to obtain a bulk elastomer composition.
- At least one of SIFEL 8070A and SIFEL 8070B contains a compound having a perfluoro skeleton having an ethylenically unsaturated bond.
- The total time from the addition of the first component into the kneader to the time when the current value was stabilized after the addition of the final component was defined as the kneading time by the kneader. The results are shown in Table 1.
- In general, in the case of kneading using a kneader, the current value is stabilized when each component added is uniformly kneaded. Thus, using this as an indication of completion of kneading, it is often determined that a uniform composition has been obtained at the time when the current value is stabilized.
- The resulting bulk elastomer composition was subjected to a sheeting step (sheet forming step) using a roll (roll interval: 8 mm, temperature: 50° C.)
- The sheeting property was evaluated as follows. The case where a sheet was able to be formed from the bulk elastomer composition at this step was rated as “OK” in terms of the sheeting property, and the case where the elastomer composition was not caught between rolls or the adhesion to rolls was poor, failing to obtain a good sheet by sheeting was rated as “NG” in terms of the sheeting property. The results are shown in Table 1.
- The sheet obtained in the sheeting step was press-molded at 170° C. for 10 minutes under a pressure of 5 MPa using a compression vacuum press machine (primary crosslinking), and then the sheet after the press-molding was heated at 200° C. for 16 hours under reduced pressure in a vacuum oven (degree of vacuum: 50 Pa) (secondary crosslinking). Thereafter, the secondary-crosslinked sheet was irradiated with radiation such that the absorbed dose was 80 kGy, thereby obtaining a molded body.
- The obtained molded body was measured for the following normal physical properties. The results are shown in Table 1.
- <Normal Physical Properties>
- As normal physical properties, the Shore A hardness was measured in accordance with JIS K 6253: 2012, and the tensile strength, the elongation at break, and the tensile stress at 100% elongation (100% Mo) were measured in accordance with JIS K 6251: 2017.
- Various evaluations were performed in the same manner as in Example 1 except that the elastomers shown in Table 1 were used in the amounts shown in Table 1 instead of the elastomers used in Example 1. The results are shown in Table 1.
-
TABLE 1 Comparative Example Example 1 2 3 4 5 6 1 2 Elastomer (A1-1) 20 30 10 10 20 20 Elastomer (A2-1) Elastomer (A2-2) 80 70 45 65 20 40 100 70 Elastomer (A2-3) 45 25 60 40 30 Kneading time by kneader 0:52 0:52 1:29 1:13 1:25 1:09 1:54 1:45 (time) Sheeting property OK OK OK OK OK OK NG NG Normal Hardness 66 66 67 67 66 66 — — physical (shore A) properties Tensile 14.4 15.6 14.4 13.6 11.1 11.8 — — strength (MPa) Elongation at 180 180 170 160 150 150 — — break (%) 100% Mo(MPa) 3.9 4.5 5.0 5.7 5.4 5.7 — — - It was found that, in Examples 1 to 6, the time required to produce a uniform elastomer composition was short, and the elastomer compositions obtained in Examples 1 to 6 were excellent in sheeting property (sheet moldability).
- In Comparative Examples 1 and 2, it took a long time to produce a uniform elastomer composition, and the elastomer compositions obtained in Comparative Examples 1 and 2 had poor sheeting property, and specifically, the elastomer composition was not caught between rolls or was not well wound around rolls, failing to form a good sheet.
- Into a kneader, 30 parts by mass of the crosslinkable fluoroelastomer (A1-1), 70 parts by mass of the crosslinkable fluoroelastomer (A2-1), 2 parts by mass of SIFEL 3590-N (containing a compound having a perfluoro skeleton having an ethylenically unsaturated bond, one-component liquid type, manufactured by Shin-Etsu Chemical Co., Ltd.), 6 parts by mass of TRIC, and 0.5 parts by mass of PERHEXA 25B were sequentially fed and the contents were kneaded until the current value was stabilized to obtain a bulk elastomer composition.
- Using the obtained bulk elastomer composition, a molded body was obtained in the same manner as in Example 1.
- The obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- A bulk elastomer composition was obtained in the same manner as in Example 7 except that the amount of SIFEL 3590-N used in Example 7 was changed to 10 parts by mass and the amount of PERHEXA 25B used in Example 7 was changed to 1 part by mass.
- Using the obtained bulk elastomer composition, a molded body was obtained in the same manner as in Example 1.
- The obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- A bulk elastomer composition was obtained in the same manner as in Example 7 except that the amount of SIFEL 3590-N used in Example 7 was changed to 20 parts by mass and the amount of PERHEXA 25B used in Example 7 was changed to 1 part by mass.
- Using the obtained bulk elastomer composition, a molded body was obtained in the same manner as in Example 1.
- The obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- A bulk elastomer composition was obtained in the same manner as in Example 7 except that 2 parts by mass of KE-1830 (containing a compound having a siloxane skeleton having an ethylenically unsaturated bond, one-component liquid type, manufactured by Shin-Etsu Chemical Co., Ltd.) was used instead of 2 parts by mass of SIFEL 3590-N in Example 7.
- Using the obtained bulk elastomer composition, a molded body was obtained in the same manner as in Example 1.
- The obtained molded body was measured for the normal physical properties and the following plasma resistance. The results are shown in Table 2.
- <Plasma Resistance>
- The obtained molded body was measured for the plasma resistance (mass reduction ratio). Specifically, measurement was performed as follows.
- Using a flat plate plasma processing apparatus having an electrode diameter of φ300 mm and an inter-electrode distance of 50 mm, the obtained molded body was irradiated with plasma for 3 hours under the conditions of an RF 500 W, a CF4 gas flow rate of 50 sccm, an O2 gas flow rate of 150 sccm, and a degree of vacuum of 1 torr.
- The obtained molded body was placed at a position 6 cm away from the plasma electrode. Next, the mass of the molded body before and after the test was measured, and the mass reduction ratio (%) was determined by the following formula to evaluate the plasma resistance. It can be said that the smaller the mass reduction ratio is, the better the plasma resistance is.
-
Mass reduction ratio (%)=[(mass of molded body before test−mass of molded body after test)/mass of molded body before test]×100 -
TABLE 2 Example 7 8 9 10 Elastomer (A1-1) 30 30 30 30 Elastomer (A2-1) 70 70 70 70 Normal Hardness 67 68 71 70 physical (shore A) properties Tensile 10.2 11.2 12.4 10.2 strength (MPa) Elongation at 150 160 150 135 break (%) 100%Mo(MPa) 5.6 5.5 5.9 6.1 Plasma Mass reduction 0.76 0.57 0.47 1.10 resistance Ratio (%) - Bulk elastomer compositions were obtained in the same manner as in Example 1 except that the elastomers shown in Table 3 were used in the amounts shown in Table 3 instead of the elastomers used in Example 1.
- The obtained bulk elastomer composition was filled in a mold, and press-molded at 170° C. for 10 minutes under a pressure of 5 MPa using a compression vacuum press machine (primary crosslinking), and then the sheet after the press-molding was heated at 200° C. for 16 hours under reduced pressure in a vacuum oven (degree of vacuum: 50 Pa) (secondary crosslinking). Thereafter, the secondary-crosslinked sheet was irradiated with radiation such that the absorbed dose was 80 kGy, thereby obtaining a molded body.
- The obtained molded body was measured for the normal physical properties. The results are shown in Table 3.
-
TABLE 3 Example Comparative Example 11 12 3 4 5 6 7 Elastomer (A1-1) 100 30 Elastomer (A2-1) 100 70 50 Elastomer (A2-2) 70 30 Elastomer (A2-3) 100 Elastomer (A2-4) 100 Elastomer (A2-5) 50 Tensile strength (MPa) 12.2 15.6 7.9 7.8 6.2 5.2 6.0 Elongation at break (%) 225 180 110 110 110 120 110 - Radiation-crosslinked bodies were produced in the same manner as in Example 11 except that the elastomers shown in Table 4 were used in the amounts shown in Table 4 instead of the elastomer used in Example 11.
- However, in Example 15, SIFEL 8070A and SIFEL 8070B were not used.
- Secondary crosslinked bodies were produced in the same manner as in Example 11 except that the elastomers shown in Table 4 were used in the amounts shown in Table 4 instead of the elastomer used in Example 11 and irradiation with radiation was not performed.
- <Compression Set>
- In accordance with JIS K 6262: 2013, measurement samples (AS214 O-rings) were produced from the radiation-crosslinked bodies obtained in Examples 13 to 15 or the secondary crosslinked bodies obtained in Comparative Examples 8 and 9, and each O-ring produced was compressed by 25% in the thickness direction at 200° C. for 70 hours, then the thickness of the crosslinked body was measured at 30 minutes after being taken out of the compression device, and the compression set was calculated. The results are shown in Table 4.
-
TABLE 4 Comparative Example Example 13 14 15 8 9 Elastomer (A1-1) 100 30 30 100 30 Elastomer (A1-2) 70 70 Elastomer (A2-1) 70 Compression set (%) 30 29 27 41 43
Claims (5)
1. A sealing material that is a radiation-crosslinked body of an elastomer composition comprising a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid,
wherein the fluoroelastomer (A) comprises a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
2. The sealing material according to claim 1 , wherein the fluoroelastomer (A) is a peroxide-crosslinkable fluoroelastomer.
3. The sealing material according to claim 1 , wherein the elastomer composition comprises at least one ethylenically unsaturated bond-containing compound selected from compounds having a perfluoro skeleton having an ethylenically unsaturated bond and compounds having a siloxane skeleton having an ethylenically unsaturated bond.
4. The sealing material according to claim 1 , wherein a content of a filler is 5 parts by mass or less based on 100 parts by mass of the fluoroelastomer (A).
5. A method for producing a sealing material, the method comprising a step of irradiating an elastomer composition comprising a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid or a crosslinked product of the elastomer composition with radiation,
wherein the fluoroelastomer (A) comprises a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.
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PCT/JP2021/033158 WO2022065055A1 (en) | 2020-09-28 | 2021-09-09 | Sealing material and method for producing sealing material |
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EP (1) | EP4219644A1 (en) |
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JP3487744B2 (en) | 1997-10-09 | 2004-01-19 | 信越化学工業株式会社 | Curable composition |
JPH11116684A (en) | 1997-10-13 | 1999-04-27 | Shin Etsu Chem Co Ltd | Hardening composition |
JP4345214B2 (en) | 2000-09-20 | 2009-10-14 | ユニマテック株式会社 | Fluorine-containing copolymer composition |
JP2003183402A (en) | 2001-10-12 | 2003-07-03 | Nichias Corp | Plasma-resistant fluoroelastomer sealing material |
JP2004131656A (en) | 2002-10-11 | 2004-04-30 | Asahi Glass Co Ltd | Encapsulant material for semiconductor devices |
US7678858B2 (en) | 2003-04-22 | 2010-03-16 | Daikin Industries, Ltd. | Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof |
JP2008056739A (en) | 2006-08-29 | 2008-03-13 | Nok Corp | Fluorine rubber composition |
US7608216B2 (en) * | 2006-12-27 | 2009-10-27 | Freudenberg-Nok General Partnership | Methods for preparing articles from processable and dimensionally stable elastomer compositions |
ES2623436T3 (en) | 2008-03-27 | 2017-07-11 | Daikin Industries, Ltd. | Composition of elastomer containing crosslinkable fluorine with peroxide |
JP5722003B2 (en) * | 2010-11-11 | 2015-05-20 | 三菱電線工業株式会社 | Rubber composition, rubber member using the same, transport roller and seal member |
JP6253328B2 (en) | 2013-09-30 | 2017-12-27 | 日本バルカー工業株式会社 | Thermally conductive resin composition and thermal conductive sheet using the same |
CN107075219A (en) | 2014-09-16 | 2017-08-18 | 大金工业株式会社 | Fluoroelastomer composition and products formed |
JP2018127510A (en) * | 2017-02-06 | 2018-08-16 | Nok株式会社 | Retardant master batch for peroxide cross-linked rubber and manufacturing method therefor |
WO2019137920A1 (en) * | 2018-01-10 | 2019-07-18 | Solvay Specialty Polymers Italy S.P.A. | Fluoroelastomer curable composition |
EP3873985A1 (en) * | 2018-10-31 | 2021-09-08 | Solvay Specialty Polymers Italy S.p.A. | Curable composition of elastomers |
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