US20220244615A1 - Optical phased array radiator - Google Patents

Optical phased array radiator Download PDF

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Publication number
US20220244615A1
US20220244615A1 US17/528,628 US202117528628A US2022244615A1 US 20220244615 A1 US20220244615 A1 US 20220244615A1 US 202117528628 A US202117528628 A US 202117528628A US 2022244615 A1 US2022244615 A1 US 2022244615A1
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US
United States
Prior art keywords
radiator
unit
opa
unit radiators
radiators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US17/528,628
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English (en)
Inventor
Chan-Hee Kang
Hyun-Woo Rhee
Hyeon-Ho Yoon
Nam-Hyun KWON
Hyo-Hoon Park
Geum-Bong Kang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hyundai Motor Co
Korea Advanced Institute of Science and Technology KAIST
Kia Corp
Original Assignee
Hyundai Motor Co
Korea Advanced Institute of Science and Technology KAIST
Kia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Motor Co, Korea Advanced Institute of Science and Technology KAIST, Kia Corp filed Critical Hyundai Motor Co
Assigned to KIA CORPORATION, KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, HYUNDAI MOTOR COMPANY reassignment KIA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KANG, CHAN-HEE, KANG, GEUM-BONG, KWON, NAM-HYUN, PARK, HYO-HOON, RHEE, Hyun-woo, Yoon, Hyeon-Ho
Publication of US20220244615A1 publication Critical patent/US20220244615A1/en
Priority to US18/373,482 priority Critical patent/US20240027868A1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/295—Analog deflection from or in an optical waveguide structure]
    • G02F1/2955—Analog deflection from or in an optical waveguide structure] by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements

Definitions

  • the present disclosure relates to an optical phased array (OPA) radiator using a thermo-optical effect based on optical phased arrays.
  • OPA optical phased array
  • RADAR radio detection and ranging
  • 3-D three-dimensional
  • a radiator for emitting a collimated beam in a desired direction is an important component.
  • a typical structure of the radiator includes a plurality of grating radiators 110 that are arranged in parallel as a basic unit and being capable of adjusting a horizontal direction of a collimating beam emitted from a grating radiator array by adjusting a phase difference between pieces of light 130 which input to the plurality of grating radiators 110 .
  • a size of a horizontal viewing angle (a horizontal radiation angle), which is a steerable maximum range, has a characteristic of being inversely proportional to an arrangement interval between grating radiator arrays, and when the arrangement interval is half a wavelength of the input light 130 , a maximum horizontal viewing angle (a maximum horizontal radiation angle) can be obtained.
  • a vertical radiation angle of a radiation beam is determined according to a grating period and an effective refractive index n eff .
  • a vertical direction of a collimated beam which is radiated can be adjusted by adjusting a temperature of the grating radiator array and the effective refractive index n eff using the vertical radiation angle.
  • Joule heating is used so as to adjust the temperature of the grating radiator array, a metal and a high concentration doping region are used as a conductive line 120 , and an intrinsic silicon region constituting the grating radiator array is used as resistance, thereby adjusting the Joule heating.
  • a resistor capable of adjusting a temperature of a grating structure is disposed in an electrode structure for adjusting the vertical radiation angle of the beam emitted from the grating radiator array, and an electrode 214 and a conductive line 216 are included so as to supply power to the resistor.
  • a high concentration doping region 215 for supplying power is formed in the grating radiator array.
  • the resistor arrangement according to the related art cannot expect a uniform temperature variation in the entire region of the grating radiator array.
  • a non-uniform temperature distribution occurs to cause phase non-uniformity of laser light.
  • instability of the laser light may occur.
  • a distance between electrodes is determined according to an overall width of the grating radiator array, and as the grating radiator array has better performance, the distance between electrodes is increased.
  • An embodiment of the present disclosure is directed to an optical phased array (OPA) radiator for efficiently vertically steering a beam radiated from a radiator through an OPA.
  • OPA optical phased array
  • an OPA radiator which includes a plurality of unit radiators configured to serve as optical waveguides, each of the unit radiators being made of a silicon material and each having a predetermined length, where the unit radiators are disposed in parallel; a cladding portion configured to cover the plurality of unit radiators; and a plurality of electrodes arranged in parallel with the plurality of unit radiators on the cladding portion, wherein the plurality of electrodes are arranged so as not to overlap the plurality of unit radiators in a vertical direction.
  • the plurality of electrodes may be arranged between the plurality of unit radiators in the vertical direction.
  • the OPA radiator may further include doping regions formed in a base portion below the plurality of unit radiators to correspond to in number to the plurality of electrodes, respectively, and conductive lines configured to connect the plurality of electrodes to a plurality of doping regions.
  • the plurality of doping regions may be arranged so as not to overlap the plurality of unit radiators in the vertical direction.
  • the cladding portion may be a silica cladding having a refractive index that is lower than a refractive index of the unit radiator.
  • the plurality of unit radiators may have a same interval, and an irregular structure may be formed in each of the unit radiators at the same interval in a lengthwise direction.
  • an OPA radiator which includes a plurality of unit radiators configured to serve as optical waveguides, each of the unit radiators being made of a silicon material and each having a predetermined length, where the unit radiators are disposed in parallel; a cladding portion configured to cover the plurality of unit radiators; first electrodes disposed to be spaced apart from each other on one side of an upper surface of the cladding portion in a widthwise direction of the cladding portion; and second electrodes disposed to be spaced apart from each other and to be opposite to the first electrodes on the other side of the upper surface of the cladding portion in the widthwise direction of the cladding portion.
  • the OPA radiator may further include a plurality of doping regions formed in a base portion below the plurality of unit radiators and arranged so as not to overlap the plurality of unit radiators in a vertical direction, and conductive lines configured to connect the plurality of doping regions to the first electrodes or the second electrodes.
  • the plurality of doping regions may be arranged between the plurality of unit radiators.
  • the plurality of unit radiators may have a same interval, and an irregular structure may be formed in each of the unit radiators at the same interval in a lengthwise direction.
  • each of the plurality of unit radiators may be divided into an irregular structure region in which the irregular structure is formed and a non-irregular structure region in which the irregular structure is not formed, and each of the plurality of unit radiators may be tapered such that a width is gradually decreased as being away from the irregular structure region.
  • each of the plurality of doping regions may be divided into a first doping region corresponding to a region which corresponds to the irregular structure region and a second doping region corresponding to a region which corresponds to the non-irregular structure region, and each of the plurality of doping regions may be tapered such that a width is gradually increased as being away from the first doping region.
  • the conductive line may be connected to the second doping region of each of the plurality of doping regions.
  • the cladding portion may be a silica cladding having a refractive index that is lower than a refractive index of the unit radiator.
  • FIGS. 1 to 3 are diagrams illustrating a grating radiator array according to the related art.
  • FIG. 4 is a diagram illustrating a difference in vertical radiation angle due to heat according to the related art.
  • FIG. 5 is a plan cross-sectional view illustrating an optical phased array (OPA) radiator according to one embodiment of the present disclosure.
  • OPA optical phased array
  • FIG. 6 is a cross-sectional view taken along line B-B′ of FIG. 5 .
  • FIG. 7 is a plan cross-sectional view illustrating an OPA radiator according to a modified embodiment of the present disclosure.
  • FIG. 8 is a cross-sectional view taken along line C-C′ of FIG. 7 .
  • FIG. 9 is a cross-sectional view taken along line D-D′ of FIG. 7 .
  • vehicle or “vehicular” or other similar term as used herein is inclusive of motor vehicles in general such as passenger automobiles including sports utility vehicles (SUV), buses, trucks, various commercial vehicles, watercraft including a variety of boats and ships, aircraft, and the like, and includes hybrid vehicles, electric vehicles, plug-in hybrid electric vehicles, hydrogen-powered vehicles and other alternative fuel vehicles (e.g. fuels derived from resources other than petroleum).
  • a hybrid vehicle is a vehicle that has two or more sources of power, for example both gasoline-powered and electric-powered vehicles.
  • control logic of the present disclosure may be embodied as non-transitory computer readable media on a computer readable medium containing executable program instructions executed by a processor, controller or the like.
  • Examples of computer readable media include, but are not limited to, ROM, RAM, compact disc (CD)-ROMs, magnetic tapes, floppy disks, flash drives, smart cards and optical data storage devices.
  • the computer readable medium can also be distributed in network coupled computer systems so that the computer readable media is stored and executed in a distributed fashion, e.g., by a telematics server or a Controller Area Network (CAN).
  • a telematics server or a Controller Area Network (CAN).
  • CAN Controller Area Network
  • FIG. 5 is a plan cross-sectional view illustrating an optical phased array (OPA) radiator according to one embodiment of the present disclosure
  • FIG. 6 is a cross-sectional view taken along line B-B′ of FIG. 5 .
  • OPA optical phased array
  • the OPA radiator includes N unit radiators 313 each of which has a predetermined length, the N unit radiators 313 being arranged in parallel and connected by a base portion 313 - 1 below the N unit radiators 313 , and a cladding portion 311 configured to cover each unit radiator 313 .
  • the OPA radiator preferably is implemented on an inner flat surface of a chip.
  • the unit radiator 313 is an optical waveguide made of silicon having a high refractive index, and a phase-adjusted beam is transmitted through the unit radiator 313 in a lengthwise direction.
  • the cladding portion 311 is a silica cladding having a low refractive index of silicon oxide (SiO 2 ) and allows a beam to be transmitted through the unit radiator 313 .
  • the plurality of unit radiators 313 are formed to have different heights at equal intervals in the lengthwise direction so that an irregular structure is formed.
  • the plurality of unit radiators 313 are disposed at predetermined intervals and have a characteristic in which, as the interval is decreased, a horizontal viewing angle (a horizontal radiation angle) of a steered beam radiated through the OPA radiator is increased.
  • the interval between the unit radiators 313 may be smaller than or half of a wavelength of the steered beam.
  • each unit radiator 313 In addition, in order to adjust the vertical radiation angle of the radiated steering beam, it is necessary to adjust an effective refractive index by adjusting a temperature of each unit radiator 313 , and according to the present disclosure, the temperature of each unit radiator 313 is uniformly adjusted to solve a phase imbalance and prevent performance of a vertically steered radiation beam from being degraded.
  • a plurality of electrodes 314 which are parallel to the lengthwise direction of the unit radiator 313 on the cladding portion 311 and are arranged between the unit radiators 313 , are formed. That is, the plurality of electrodes 314 are arranged so as not to overlap the plurality of unit radiators 313 in the vertical direction.
  • a plurality of high-concentration doping regions 315 are formed and each of the doping region 315 is electrically connected to a corresponding electrode 314 by a conductive line 316 .
  • the doping region 315 is formed in the base portion 313 - 1 on a side of each unit radiator 313 , including between the unit radiators 313 , and arranged parallel to the unit radiator 313 so that the doping region 315 serves as a resistor in an intrinsic region 312 to adjust Joule heating.
  • FIG. 7 is a plan cross-sectional view illustrating an OPA radiator according to a modified embodiment of the present disclosure
  • FIG. 8 is a cross-sectional view taken along line C-C′ of FIG. 7
  • FIG. 9 is a cross-sectional view taken along line D-D′ of FIG. 7 .
  • the OPA radiator according to a modified embodiment of the present disclosure includes N unit radiators 413 each of which has a predetermined length, the N unit radiators 413 being arranged in parallel on a base portion 413 - 3 , and a cladding portion 411 configured to cover the N unit radiators 413 .
  • the unit radiator 413 is an optical waveguide made of silicon having a high refractive index, and a phase-adjusted beam is transmitted through the unit radiator 413 in a lengthwise direction.
  • the cladding portion 411 is a silica cladding having a low refractive index and allows a beam to be transmitted through the unit radiator 413 .
  • the plurality of unit radiators 413 are formed to have different heights at equal intervals in the lengthwise direction so that an irregular structure is formed.
  • Each of the unit radiators 413 may be divided into an irregular structure region 413 - 1 , in which an irregular structure is formed, and a non-irregular structure region 413 - 2 .
  • a width of the irregular structure region 413 - 1 is kept constant, and a width of the non-irregular structure region 413 - 2 has a tapered structure in which the width is gradually decreased as being away from the irregular structure region 413 - 1 .
  • first electrodes 414 - 1 are formed on one side of an upper surface of the cladding portion 411 and spaced apart from each other in a widthwise direction of the cladding portion 411
  • second electrodes 414 - 2 are formed to opposite to the first electrodes 414 - 1 on the other side of the upper surface of the cladding portion 411 and spaced apart from each other in the widthwise direction of the cladding portion 411 .
  • the first electrodes 414 - 1 and the second electrodes 414 - 2 are formed as a plurality of first electrodes 414 - 1 and a plurality of second electrodes 414 - 2 , respectively, and spaced apart from each other in the widthwise direction of the cladding portion 411 .
  • a plurality of high-concentration doping regions 415 are formed and each of the doping region 415 is electrically connected to a corresponding electrode 414 by the conductive line 416 .
  • the doping region 415 is formed in the base portion 413 - 3 on a side of each unit radiator 413 , including between the unit radiators 413 , thereby adjusting Joule heating as resistance in an intrinsic region 412 .
  • positions of the conductive line 416 connecting the doping region 415 to the electrodes 414 - 1 and 414 - 2 on a surface of the chip are disposed out of a range of the OPA radiator.
  • the doping region 415 may be divided into a doping region connected to the first electrode 414 - 1 and a doping region connected to the second electrode 414 - 2 .
  • each doping region 415 may be divided into a first doping region 415 - 1 corresponding to a region which corresponds to the irregular structure region 413 - 1 of the unit radiator 413 in the lengthwise direction, and a second doping region 415 - 2 corresponding to a region which corresponds to the non-irregular structure region 413 - 2 in the lengthwise direction.
  • a width of the first doping region 415 - 1 is kept constant, and a width of the second doping region 415 - 2 has a tapered structure in which the width is gradually increased as being away from the first doping region 415 - 1 and being close to positions corresponding to the first and second electrodes 414 - 1 and 414 - 2 .
  • the conductive line 416 is connected to the second doping region 415 - 2 having the width that is greater than the width of the first doping region 415 - 1 , a wider conductive line can be connected.
  • the modified embodiment when the interval between the unit radiators is narrow, in order to improve the performance of the OPA radiator, it is possible to overcome a process limitation and solve a problem in that the doping region 415 and the conductive line 416 cannot be disposed between the unit radiators 413 , and due to the tapered structure, it is possible to prevent exceeding of the allowable current limit which may occur when a narrow width is connected.
  • a high-concentration doping region applied to a conventional radiator array is disposed between grating radiators, and thus the high-concentration doping region serves as an electrode and the grating radiator serves as a resistor so that heat can be uniformly applied to all regions of a grating radiator array.
  • OPA optical phased array
  • the interval between grating radiators is reduced so that a wide horizontal viewing angle can be obtained.
  • due to the reduction in interval it is possible to solve difficulty of a process of forming the high-concentration doping region and a metal conductive line for connecting the high-concentration doping region to a surface of a chip.
  • a local temperature limit and exceeding of an allowable current due to an increase in interval between the grating radiators can be prevented so that durability of the grating radiator can be increased.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
US17/528,628 2021-02-03 2021-11-17 Optical phased array radiator Abandoned US20220244615A1 (en)

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US18/373,482 US20240027868A1 (en) 2021-02-03 2023-09-27 Optical phased array radiator

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KR1020210015562A KR20220112050A (ko) 2021-02-03 2021-02-03 광 위상배열 방사기
KR10-2021-0015562 2021-02-03

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JP (1) JP2022119176A (ja)
KR (1) KR20220112050A (ja)
CN (1) CN114859621A (ja)
DE (1) DE102021130821A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024073151A1 (en) * 2022-09-30 2024-04-04 Purdue Research Foundation Optical phased array gratings based on extreme skin-depth metamaterial waveguides

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101630B2 (en) * 2016-04-28 2018-10-16 Analog Photonic Llc Optical waveguide device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101702436B1 (ko) 2010-05-10 2017-02-03 에스프린팅솔루션 주식회사 현상유닛 및 그를 구비한 화상형성장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101630B2 (en) * 2016-04-28 2018-10-16 Analog Photonic Llc Optical waveguide device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024073151A1 (en) * 2022-09-30 2024-04-04 Purdue Research Foundation Optical phased array gratings based on extreme skin-depth metamaterial waveguides

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US20240027868A1 (en) 2024-01-25
CN114859621A (zh) 2022-08-05
JP2022119176A (ja) 2022-08-16
KR20220112050A (ko) 2022-08-10
DE102021130821A1 (de) 2022-08-04

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