US20210223691A1 - Substrate of an optical electrical module - Google Patents
Substrate of an optical electrical module Download PDFInfo
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- US20210223691A1 US20210223691A1 US17/225,105 US202117225105A US2021223691A1 US 20210223691 A1 US20210223691 A1 US 20210223691A1 US 202117225105 A US202117225105 A US 202117225105A US 2021223691 A1 US2021223691 A1 US 2021223691A1
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- substrate
- optical electrical
- electrical module
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- mask
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12014—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the wavefront splitting or combining section, e.g. grooves or optical elements in a slab waveguide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/424—Mounting of the optical light guide
- G02B6/4243—Mounting of the optical light guide into a groove
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/121—Channel; buried or the like
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4212—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
Definitions
- the invention relates to an optical electrical module. Particularly, the invention relates to an optical electrical module used for optical communication.
- a signal transmitter uses an optical electrical module that serves as a signal transmitting element to convert an electric signal into an optical signal
- a signal receiver uses the optical electrical module that serves as a signal receiving element to convert the received optical signal into the electric signal. Therefore, the optical electrical module is an indispensable device in the field of optical communication.
- FIG. 1 is a schematic diagram of a conventional optical electrical module.
- the conventional optical electrical module 100 is adapted to provide a light signal, and includes a circuit board 110 , a base 120 , a light-emitting element 130 , an optical fiber 140 and a chip 150 .
- the base 120 and the chip 150 are disposed on the circuit board 110 , and the chip 150 is electrically connected to the circuit board 110 through a bonding wire 162 .
- the base 120 has surfaces 122 and 123 parallel to a bottom surface 121 thereof.
- a reflective surface 124 of the base 120 is connected to the surfaces 122 and 123 and located between the surfaces 122 and 123 , and tilts a predetermined angle relative to the surface 123 .
- the light-emitting element 130 is disposed on a pad 125 on the surface 122 , and is electrically connected to the chip 150 through the pad 125 and a bonding wire 164 . A part of the light-emitting element 130 protrudes out of the pad 125 and faces the reflective surface 124 .
- the optical fiber 140 is disposed on the surface 123 of the base 120 .
- the chip 150 is adapted to control the light-emitting element 130 to emit a corresponding light signal 132 according to information to be transmitted, and the reflective surface 124 reflects the light signal 132 into the optical fiber 140 for transmitting the light signal 132 through the optical fiber 140 .
- a signal receiver can use another optical electrical module to receive the light signal 132 transmitted by the optical fiber 140 .
- the optical electrical module used for receiving the light signal 132 is similar to the optical electrical module 100 , and a difference there between is that the light-emitting element 130 is replaced by a light-receiving element.
- the conventional optical electrical module 100 since a part of the light-emitting element 130 protrudes out of the pad 125 to facilitate providing the light signal 132 to the reflective surface 124 , a contact area between the light-emitting element 130 and the pad 125 is relatively small. Therefore, the light-emitting element 130 can easily fall off, which leads to poor reliability of the optical electrical module 100 .
- the conventional optical electrical module used for receiving the light signal also has the problem that the light-receiving element can easily fall off.
- FIG. 2 is a schematic diagram of a package structure of another optical electrical module according to the conventional technique.
- the optical electrical module 100 A includes a circuit board 101 , a light-emitting/receiving element 103 , an optical fiber 104 (which is also referred to as waveguide), a substrate 102 and a cover plate 106 .
- the substrate 102 is disposed on the circuit board 101 .
- the light-emitting/receiving element 103 is disposed on the substrate 102 .
- the optical fiber 104 used for transmitting a light signal 105 is disposed on the substrate 102 .
- the light signal 105 can be transmitted to the light-emitting/receiving element 103 through a reflective surface 102 a of the substrate 102 .
- the invention is directed to an optical electrical module, which has favorable yield and cost.
- the invention provides a method for manufacturing an optical electrical module which includes steps as follow.
- Forming a plurality of first patterns on a first substrate by a first mask wherein an angle between a primary flat of the first substrate and an arrangement direction having a maximum number of first pattern units of the first mask is ( ⁇ +90°*n), wherein ⁇ is between 22° to 39°, and n is an integer.
- a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 ⁇ m, respectively.
- side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°.
- the method for manufacturing the optical electrical module includes steps as follow. Patterning a second substrate to form a plurality of accommodating cavities in the second substrate. Disposing a plurality of optical electrical elements in the accommodating cavities. Disposing a plurality of light guide elements in the accommodating grooves. Bonding the first substrate and the second substrate, wherein the optical electrical elements and the light guide elements are disposed there between.
- a plurality of alignment grooves are further formed in one of the first substrate and the second substrate, and a plurality of alignment bumps are further formed in the other one of the first substrate and the second substrate.
- the alignment bumps are adapted to be engaged with the alignment grooves when the first substrate and the second substrate are bonded with each other.
- a depth of each of the accommodating grooves, a depth of the reflective groove, a depth of each of the alignment grooves, a depth of each of the accommodating cavities and a height of each of the alignment bumps are larger than 120 ⁇ m, respectively.
- side walls of the accommodating grooves, side walls of the reflective groove, side walls of the alignment grooves, side walls of the accommodating cavities and side walls of the alignment bumps are respectively inclined surfaces of 42° to 49°.
- the alignment grooves are formed in the first substrate, and the alignment bumps are formed in the second substrate.
- the alignment grooves, the accommodating grooves and the reflective groove are formed simultaneously during the first patterning process.
- a method for forming the alignment bumps includes steps as follow. Forming a plurality of second patterns on the second substrate by a second mask, wherein a primary flat of the second substrate and an angle between an arrangement direction having a maximum number of second pattern units of the second mask is ( ⁇ +90°*n). Subjecting the second substrate to a second patterning process using the second patterns as a mask to form the alignment bumps in the second substrate.
- the accommodating cavities are formed after the alignment bumps are formed.
- a method for forming the accommodating cavities includes steps as follow. Forming a plurality of third patterns on the second substrate by a third mask, wherein an angle between a primary flat of the second substrate and an arrangement direction having a maximum number of third pattern units of the third mask is ( ⁇ +90°*n). Subjecting the second substrate to a third patterning process using the third patterns as a mask to form the accommodating cavities.
- the alignment grooves are formed in the second substrate, and the alignment bumps are formed in the first substrate.
- a method for forming the accommodating cavities and the alignment grooves includes steps as follow. Forming a plurality of second patterns on the second substrate by a second mask, wherein an angle between a primary flat of the second substrate and an arrangement direction having a maximum number of second pattern units of the second mask is ( ⁇ +90°*n). Subjecting the second substrate to a second patterning process using the second patterns as a mask to form the accommodating cavities and the alignment grooves simultaneously.
- a method for forming the alignment bumps includes steps as follow.
- an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the first substrate.
- an etching solution for patterning the first substrate comprises potassium hydroxide (KOH), isopropyl alcohol (IPA), H 2 O, inhibitors, tetramethylammonium hydroxide (TMAH) and methyl alcohol.
- the invention provides a substrate of an optical electrical module.
- the substrate includes a plurality of accommodating grooves and a reflective groove.
- the accommodating grooves respectively extend along a first direction.
- the reflective groove is connected with the accommodating grooves and extends along a second direction perpendicular to the first direction.
- the substrate is a (100) silicon wafer.
- a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 ⁇ m, respectively.
- the depth of each of the accommodating grooves and the depth of the reflective groove are the same.
- side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°.
- the accommodating grooves are parallel to each other.
- all the accommodating grooves are perpendicular to the reflective groove.
- FIG. 1 is a schematic diagram of a conventional optical electrical module.
- FIG. 2 is a schematic diagram of a package structure of another optical electrical module according to the conventional technique.
- FIG. 3A and FIG. 3B are cross-sectional views of an optical electrical module according to a first embodiment of the invention.
- FIG. 4 is a three-dimensional view of a first substrate and elements disposed thereon of FIG. 3A and FIG. 3B .
- FIG. 5 is a three-dimensional view of a second substrate and elements disposed thereon of FIG. 3A and FIG. 3B .
- FIG. 6 is a cross-sectional view of an optical electrical module according to another embodiment of the invention.
- FIG. 7 is a cross-sectional view of an optical electrical module according to still another embodiment of the invention.
- FIG. 8 is a cross-sectional view of an optical electrical module according to yet another embodiment of the invention.
- FIG. 9A is a three-dimensional exploded view of an optical electrical module according to a second embodiment of the invention.
- FIG. 9B is a three-dimensional combination view of the optical electrical module of FIG. 9A .
- FIG. 9C is a cross-sectional view of the optical electrical module of FIG. 9B along a section line IIC.
- FIG. 9D is an enlarged cross-sectional view of a first positioning portion and a second positioning portion of FIG. 9B .
- FIG. 10 is an enlarged cross-sectional view of a first positioning portion and a second positioning portion of an optical electrical module according to another embodiment of the invention.
- FIG. 11 is an enlarged cross-sectional view of a first positioning portion and a second positioning portion of an optical electrical module according to still another embodiment of the invention.
- FIG. 12 is a partial cross-sectional schematic diagram, illustrating an optical electrical module according to an embodiment of the invention.
- FIG. 13 is a top schematic diagram, illustrating a first substrate of the optical electrical module according to the embodiment of the invention.
- FIG. 14A to FIG. 14F are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the first substrate in FIG. 13 .
- FIG. 15 is a top schematic diagram, illustrating a first mask disposed over the first substrate to be processed.
- FIG. 16 is a top schematic diagram, illustrating a second substrate of the optical electrical module according to the embodiment of the invention.
- FIG. 17A to FIG. 17I are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the second substrate in FIG. 16 .
- FIG. 18 is a top schematic diagram, illustrating a second mask disposed over the second substrate to be processed.
- FIG. 19A is a partial cross-sectional schematic diagram, illustrating another first substrate of the optical electrical module according to the embodiment of the invention.
- FIG. 19B is a partial cross-sectional schematic diagram, illustrating another second substrate of the optical electrical module according to the embodiment of the invention.
- FIG. 3A and FIG. 3B are cross-sectional views of an optical electrical module according to the first embodiment of the invention.
- FIG. 4 is a three-dimensional view of a first substrate and elements disposed thereon of FIG. 3A and FIG. 3B .
- FIG. 5 is a three-dimensional view of a second substrate and elements disposed thereon of FIG. 3A and FIG. 3B .
- the optical electrical module 200 of the present embodiment is a light signal transmitting module.
- the optical electrical module 200 includes a first substrate 210 , a second substrate 220 , a bearing portion 222 and at least one optical electrical element 240 .
- the bearing portion 222 is disposed between the first substrate 210 and the second substrate 220 .
- the bearing portion 222 is, for example, formed on the second substrate 220 . In other embodiments, the bearing portion can also be formed on the first substrate.
- the optical electrical module 200 further includes at least one light guide element 230 or is externally connected to at least one light guide element 230 , and the bearing portion 222 is used to limit the light guide element 230 .
- a plurality of the light guide elements 230 and a plurality of the optical electrical elements 240 are illustrated. However, the numbers of the light guide elements 230 and the optical electrical elements 240 are not limited by the invention.
- the optical electrical element 240 is, for example, a light-emitting element.
- the first substrate 210 is, for example, a semiconductor substrate
- the second substrate 220 is, for example, a semiconductor substrate or a glass substrate.
- the semiconductor substrate is, for example, a silicon substrate, though the invention is not limited thereto.
- the second substrate 220 is combined with the first substrate 210 .
- the second substrate 220 has a reflective surface 221 facing the first substrate 210 .
- the optical electrical element 240 is disposed on a surface 211 of the first substrate 210 facing the reflective surface 221 .
- the surface 211 is opposite to the reflective surface 221 .
- the optical electrical element 240 is configured for providing a light signal 242 to the reflective surface 221 .
- the reflective surface 221 and the light guide element 230 are disposed on an optical path of the light signal 242 .
- the reflective surface 221 is adapted to reflect the light signal 242 into the light guide element 230 , so that the light signal 242 can be transmitted through the light guide element 230 .
- the first substrate 210 may have a cavity 212 , and the optical electrical elements 240 are disposed in the cavity 212 .
- the optical electrical element 240 can be a laser or other suitable light-emitting elements, where the laser can be a vertical cavity surface emitting laser (VCSEL).
- a size of the cavity 212 is determined according to a size of the optical electrical elements 240 disposed therein. In principle, a minimum size of the cavity 212 is required to accommodate the optical electrical elements 240 .
- each of the optical electrical elements 240 is, for example, electrically connected to an internal circuit (not shown) of the first substrate 210 through a bonding wire 241 .
- the light guide element 230 faces the reflective surface 221 , and a space is maintained between the light guide element 230 and the reflective surface 221 .
- the light guide element 230 of the present embodiment is, for example, an optical fiber or a light guide strip made of polymer or a dielectric material.
- the second substrate 220 may have a cavity 223 , and the reflective surface 221 is a surface of the cavity 223 .
- the reflective surface 221 can be selectively coated with a reflection material to improve reflectivity thereof.
- the bearing portion 222 is configured with at least one positioning structure 226 for fixing the light guide element 230 .
- the number of the positioning structures 226 can correspond to the number of the light guide elements 230 , so that each of the light guide elements 230 can be fixed in a corresponding positioning structure 226 .
- Each of the positioning structures 226 of the present embodiment is, for example, a groove; though the invention is not limited thereto, and in other embodiments, the positioning structures 226 can be protruded positioning structures.
- an included angle ⁇ between the reflective surface 221 and a surface 224 of the second substrate 220 connected to the first substrate 210 can be designed according to a position of the optical electrical elements 240 and a position of the positioning structures 226 of the bearing portion 222 .
- the optical electrical module 200 may have a good effect of transmitting the light signal 242 .
- the included angle ⁇ is 135 degrees or 125 degrees, the reflective surface 221 is easily fabricated.
- the optical electrical module 200 of the present embodiment may further include at least one control unit 250 .
- the control unit 250 is, for example, disposed on the first substrate 210 , and is electrically connected to the optical electrical element 240 .
- the control unit 250 is, for example, a control chip.
- the control unit 250 can be electrically connected to the corresponding optical electrical elements 240 through wires 260 disposed on the first substrate 210 and an internal circuit (not shown) of the first substrate 210 .
- the control unit 250 can be used to control one or a plurality of the optical electrical elements 240 , which is not limited by the invention.
- the control unit 250 controls the optical electrical element 240 to send the corresponding light signal 242 according to information to be transmitted.
- the second substrate 220 may have a containing slot 225 for containing the control unit 250 , though the invention is not limited thereto, and in other embodiments, the containing slot 225 used for containing the control unit 250 can also be disposed on the first substrate 210 .
- the first substrate 210 of the present embodiment can be configured with at least one through silicon via 214 .
- One end 214 a of each of the through silicon vias 214 is electrically connected to the corresponding control unit 250 .
- each of the control units 250 can be electrically connected to other elements through another end 214 b of the through silicon via 214 .
- FIG. 6 is a cross-sectional view of an optical electrical module according to another embodiment of the invention.
- the optical electrical module 200 ′ compared to the optical electrical module 200 , the optical electrical module 200 ′ further includes a circuit board 270 .
- the first substrate 210 is disposed on the circuit board 270 .
- the control units 250 can be electrically connected to the circuit board 270 through the through silicon vias 214 .
- the optical electrical element 240 is on the first substrate 210 , and the light guide element 230 is disposed on the second substrate 220 . Therefore, a bottom surface 243 of the optical electrical element 240 can be fully fixed on the surface 211 of the cavity 212 of the first substrate 220 , where the surface 211 faces the reflective surface 221 .
- a contact area between the optical electrical element 240 of the optical electrical module 200 and the surface 211 of the present embodiment is relatively large, so that the optical electrical element 240 can be tightly fixed on the first substrate 210 to improve reliability of the optical electrical module 200 .
- a semiconductor substrate can be used as the first substrate 210 . Since a fabrication technique of the semiconductor substrate is mature, a thickness of the first substrate 210 can be effectively reduced. Moreover, in the present embodiment, a semiconductor substrate or a glass substrate can be used as the second substrate 220 , and since the fabrication technique of the semiconductor substrate and a grinding technique of the glass substrate are mature, the thickness of the second substrate 220 can also be effectively reduced. Therefore, the optical electrical module 200 of the present embodiment has an advantage of thinness.
- FIG. 7 is a cross-sectional view of an optical electrical module according to still another embodiment of the invention.
- the optical electrical module 200 ′′ of the present embodiment is similar to the optical electrical module 200 of the first embodiment, and a difference there between is that in the optical electrical module 200 ′′, a light guide element 230 ′′ can cover the reflective surface 221 of the second substrate 220 . Namely, the light guide element 230 ′′ can contact the reflective surface 221 . There is no space between the light guide element 230 ′′ and the reflective surface 221 .
- a material of the light guide element 230 ′′ can be polymer or a dielectric material. Moreover, it should be noticed that the light guide element 230 ′′ may have a focusing portion 232 .
- the focusing portion 232 is located between the optical electrical element 240 and the reflective surface 221 , and a position of the focusing portion 232 corresponds to positions of the optical electrical element 240 and the reflective surface 221 , so as to converge the light signal 242 provided by the optical electrical element 240 .
- Use of the focusing portion 232 can further improve a light coupling efficiency of the optical electrical module 200 ′′.
- FIG. 8 is a cross-sectional view of an optical electrical module according to yet another embodiment of the invention.
- the optical electrical module 300 of the present embodiment is similar to the optical electrical module 200 of the first embodiment, and a difference there between is that the optical electrical module 300 is a light signal receiving module.
- a structure of the optical electrical module 300 is similar to that of the optical electrical module 200 , and a difference there between is that in the optical electrical module 300 , an optical electrical element 350 is used to replace the optical electrical element 240 of the optical electrical module 200 , and the optical electrical element 350 is a light receiving element.
- the optical electrical element 350 is, for example, a photo diode or other suitable photo sensors.
- the light guide element 230 is adapted to transmit the light signal 242 to the reflective surface 221 of the second substrate 220
- the reflective surface 221 is adapted to reflect the light signal 242 to the optical electrical element 350 for reception.
- a control unit (not shown) of the optical electrical module 300 can convert the light signal 242 received by the optical electrical element 350 into an electric signal.
- the optical electrical module 300 of the present embodiment has the same advantage with that of the optical electrical module 200 of the first embodiment, which is not repeated therein.
- FIG. 9A is a three-dimensional exploded view of an optical electrical module according to a second embodiment of the invention.
- FIG. 9B is a three-dimensional combination view of the optical electrical module of FIG. 9A .
- FIG. 9C is a cross-sectional view of the optical electrical module of FIG. 9B along a section line IIC.
- the optical electrical module 400 of the present embodiment is similar to the optical electrical module 200 of the first embodiment, and the same elements are denoted by the same referential number, and a main difference there between is that in the optical electrical module 400 of the present embodiment, the first substrate 210 A has at least one first positioning portion 215 .
- the second substrate 220 A has at least one second positioning portion 227 .
- the first positioning portion 215 and the second positioning portion 227 are combined to fix the light guide elements 230 between the first substrate 210 A and the second substrate 220 A. Based on a design of the first positioning portion 215 and the second positioning portion 227 , the first substrate 210 A can be easily aligned to the second substrate 220 A, and process robustness of the optical electrical module 400 can be improved and the fabrication cost thereof can be reduced. The differences of the optical electrical modules 400 and 200 are described in detail below, and the same parts are not repeated.
- the optical electrical module 400 of the present embodiment further has an effect of fixing the light guide elements 230 .
- the light guide element 230 can be an optical fiber or waveguide.
- a plurality of optical fibers is used to represent the light guide elements 230 .
- the optical electrical module 400 includes the first substrate 210 A and the second substrate 220 A.
- the optical electrical module 400 can be disposed on a substrate, where the substrate is, for example, a circuit board 270 .
- the first substrate 210 A is used to carry the optical electrical element 240
- the second substrate 220 A can be a cover used to fix the light guide elements 230 .
- the optical electrical element 240 includes a light receiving element 240 a and a light-emitting element 240 b.
- the first substrate 210 A of the present embodiment has a carrying surface S 1 and the first positioning portions 215 disposed on the carrying surface S 1 .
- the second substrate 220 A has an inner surface S 2 and the second positioning portions 227 disposed on the inner surface S 2 .
- the second substrate 220 A further has positioning structures 226 used for accommodating the light guide elements 230 and the reflective surface 221 (shown in FIG. 9C ).
- the reflective surface 221 of the present embodiment may have a diffractive optical element (DOE) or can be a planar reflective surface.
- DOE diffractive optical element
- the first positioning portion 215 is used to combine with the second positioning portion 227 , so that the first substrate 210 A and the second substrate 220 A are precisely combined, and the carrying surface S 1 of the first substrate 220 A fixes the light guide elements 230 in the positioning structures 226 of the second substrate 220 A.
- the first positioning portion 215 can be a bump, and the second positioning portion can be a groove, though the invention is not limited thereto.
- the numbers of the first positioning portion 215 and the second positioning portion 227 are not limited by the invention, which can be suitably adjusted according to an actual design requirement.
- a diameter of the light guide element 230 is, for example, 125 ⁇ m, and a depth of the positioning structure 226 is between 50 ⁇ m and 200 ⁇ m.
- the carrying surface S 1 of the first substrate 210 A can be a plane or a concave and convex surface designed in collaboration with the positioning structures 226 of the second substrate 220 A.
- the carrying surface S 1 can fix the light guide elements 230 in the positioning structures 226 of the second substrate 220 A through a pressing manner.
- the inner surface S 2 can be a concave and convex surface, and positions of the positioning structures 226 on the inner surface S 2 correspond to positions of the light guide elements 230 .
- the carrying surface S 1 and the positioning structures 226 work together to fix the light guide elements 230 in the optical electrical module 400 .
- a material of the first substrate 210 A can be a semiconductor. Further, the material of the first substrate 210 A is, for example, silicon.
- a material of the second substrate 220 A can be a semiconductor, plastic, glass and ceramics or a group formed by at least two of the above materials. If the material of the second substrate 220 A is plastic, the second positioning portions 227 can be formed through injection molding.
- the first substrate 210 A and the second substrate 220 A can be formed by polysilicon, where the first positioning portions 215 of the first substrate 210 A, the second positioning portions 227 of the second substrate 220 A and the reflective surface 221 can all be formed through an etching process (for example, wet etching).
- FIG. 9D is an enlarged cross-sectional view of the first positioning portion and the second positioning portion of FIG. 9B .
- the first positioning portion 215 has a bottom surface 215 a and at least one groove side surface 215 b.
- the second positioning portion 227 has a top surface 227 a and at least one bump side surface 227 b.
- the bottom surface 215 a faces the top surface 227 a.
- An included angle ⁇ 1 between the groove side surface 215 b and a vertical plane T 1 is not equal to an included angle ⁇ 2 between the bump side surface 227 b and the vertical plane T 1 .
- the vertical plane T 1 is substantially perpendicular to the bottom surface 215 a and the top surface 227 a.
- the included angle ⁇ 2 is substantially greater than or smaller than the included angle ⁇ 1 , so that the second positioning portion 227 is tightly engaged to the first positioning portion 215 .
- the included angle ⁇ 1 is, for example, 45 degrees
- the included angle ⁇ 2 is, for example, 54.7 degrees.
- the second positioning portion 227 fabricated through the etching process can be formed by intersecting a ⁇ 111> lattice plane and a ⁇ 100> lattice plane.
- the included angle ⁇ 2 between the ⁇ 111> lattice plane and the ⁇ 100> lattice plane is substantially 54.7 degrees.
- the first positioning portion 215 fabricated through the etching process can be formed by intersecting a ⁇ 110> lattice plane and the ⁇ 100> lattice plane.
- the included angle ⁇ 1 between the ⁇ 110> lattice plane and the ⁇ 100> lattice plane is substantially 45 degrees.
- FIG. 10 is an enlarged cross-sectional view of the first positioning portion and the second positioning portion of the optical electrical module according to another embodiment of the invention.
- an included angle ⁇ 2 ′ is substantially smaller than an included angle ⁇ 1 ′.
- a second positioning portion 227 B of a second substrate 220 B can be formed by intersecting the ⁇ 110> lattice plane and the ⁇ 100> lattice plane.
- the included angle ⁇ 2 ′ between the ⁇ 110> lattice plane and the ⁇ 100> lattice plane is substantially 45 degrees.
- a first positioning portion 215 B of a first substrate 210 B can be formed by intersecting a ⁇ 111> lattice plane and the ⁇ 100> lattice plane.
- the included angle ⁇ 1 ′ between the ⁇ 111> lattice plane and the ⁇ 100> lattice plane is substantially 54.7 degrees.
- a glue material 313 can be filled between the first substrate 210 B and the second substrate 220 B.
- the glue material 313 is, for example, a silicon based glue, an UV glue, an epoxy resin glue or other suitable materials.
- FIG. 11 is an enlarged cross-sectional view of the first positioning portion and the second positioning portion of an optical electrical module according to still another embodiment of the invention.
- the first positioning portion 215 is a groove
- the second positioning portion 227 is a bump.
- the invention is not limited thereto.
- the first positioning portion 215 is a bump and the second positioning portion 227 is a groove.
- the substrate e.g. the first substrate or the second substrate
- the substrate is made of silicon, such as a (100) silicon wafer.
- silicon such as a (100) silicon wafer.
- the following manufacturing method can well control the inclination angle of the reflecting surface fall within the predetermined angle range and will advance the alignment process to improve yield and reduce cost of the optical electrical module.
- FIG. 12 is a partial cross-sectional schematic diagram, illustrating an optical electrical module according to an embodiment of the invention.
- FIG. 13 is a top schematic diagram, similar to FIG. 5 , illustrating a first substrate of the optical electrical module according to the embodiment of the invention. In order to clearly show each surface of the first substrate, layers that are disposed on the first substrate (such as a protective layer and a reflective layer) are omitted in FIG. 13 .
- FIG. 14A to FIG. 14F are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the first substrate in FIG. 13 .
- FIG. 15 is a top schematic diagram, illustrating a first mask disposed over the first substrate to be processed.
- FIG. 16 is a top schematic diagram, similar to FIG.
- FIG. 17A to FIG. 17I are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the second substrate in FIG. 16 .
- FIG. 18 is a top schematic diagram, illustrating a second mask disposed over the second substrate to be processed.
- an optical electrical module 500 of the embodiment is, for example, adapted to provide light signals and includes a first substrate 510 , a second substrate 520 , a plurality of optical electrical elements 530 and a plurality of light guide elements 540 ( FIG. 12 schematically depicts one optical electrical element 530 and one light guide element 540 ).
- the end of light guide elements 540 may be inclined surface as showing in FIG. 7 and FIG. 11 , and in other embodiment, the end of light guide elements 540 may be vertical surface perpendicular to the first direction D 1 as showing in FIG. 3A and FIG. 8 .
- the first substrate 510 includes a plurality of accommodating grooves 512 and a reflective groove 514 connected with the accommodating grooves 512 .
- the accommodating grooves 512 respectively parallel to each other and extend along the first direction D 1 , and each of the accommodating grooves 512 is adapted to accommodate one of the light guide elements 540 .
- each of the light guide elements 540 is adapted to lean against side walls 512 a and 512 b of one of the accommodating grooves 512 .
- each of the accommodating grooves 512 is, for example, a v-groove. However, the invention is not limited thereto.
- the reflective groove 514 extends along a second direction D 2 perpendicular to the first direction D 1 .
- the second direction D 2 perpendicular to the first direction D 1 herein refers to an angle ⁇ between the first direction D 1 and the second direction D 2 is 90° ⁇ 2°.
- the reflective groove 514 is, for example, a trapezoidal groove. However, the invention is not limited thereto.
- the first substrate 510 may further include a plurality of alignment grooves 516 used for alignment with the second substrate 520 .
- the alignment grooves 516 are, for example, located at the periphery of the first substrate 510 .
- the number and the arrangement of the alignment grooves 516 may be adjusted according to design requirement and are not limited to those shown in FIG. 13 .
- a protective layer PT 1 and a pattern defining layer PD 1 are formed in sequence on the first substrate to be processed (hereinafter, “unpatterned first substrate 510 U”).
- the protective layer PT 1 may be an oxide layer or a nitride layer, and the pattern defining layer PD 1 may be a photoresist layer, for example.
- the invention is not limited thereto.
- the unpatterned first substrate 510 U may be a (100) silicon wafer and includes a primary flat PF 1 (shown in FIG. 15 ).
- a first mask M 1 is disposed over the unpatterned first substrate 510 U, wherein the protective layer PT 1 and the pattern defining layer PD 1 are located between the first mask M 1 and the unpatterned first substrate 510 U.
- the first mask M 1 is, for example, a photo mask and includes a plurality of first pattern units U 1 for defining a plurality of first patterns P 1 to be formed later (as shown in FIG. 14C ).
- One of the unpatterned first substrate 510 U and the first mask M 1 is rotated by an angle relative to the other, so that an angle ⁇ 3 between the primary flat PF 1 of the unpatterned first substrate 510 U and an arrangement direction AD 1 having a maximum number of the first pattern units U 1 of the first mask M 1 is ( ⁇ +90°*n), wherein ⁇ is between 22° to 39°, and n is an integer.
- the ⁇ may be 30°
- the angle ⁇ 3 between the primary flat PF 1 and the arrangement direction AD 1 may be 30°, 30°+90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e.) 300°.
- an exposure process E 1 is performed to transfer the pattern of the first pattern units U 1 of the first mask M 1 to the pattern defining layer PD 1 located on the unpatterned first substrate 510 U.
- a developing process is performed to remove portions of the pattern defining layer PD 1 which were not exposed in the exposure process E 1 shown in FIG. 14B , so that the first patterns P 1 are formed on the unpatterned first substrate 510 U.
- the unpatterned first substrate 510 U is subjected to a first patterning process using the first patterns P 1 as a mask to form the accommodating grooves 512 , the reflective groove 514 and the alignment grooves 516 .
- the first patterns P 1 are used as a mask to pattern the protective layer PT 1 , so that a patterned protective layer PT 1 ′ is formed.
- the patterned protective layer PT 1 ′ is then used as a mask to pattern the unpatterned first substrate 510 U, so that the accommodating grooves 512 , the reflective groove 514 and the alignment grooves 516 are formed simultaneously in a patterned first substrate 510 P.
- a method for patterning the unpatterned first substrate 510 U may include anisotropic wet etching. Specifically, an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the unpatterned first substrate 510 U.
- an etching solution for patterning the unpatterned first substrate 510 U may include potassium hydroxide, isopropyl alcohol, H 2 O, inhibitors, tetramethylammonium hydroxide and methyl alcohol.
- the process temperature for etching the unpatterned first substrate 510 U is preferably greater than 50° C.
- the invention is not limited to the above.
- the patterned first substrate 510 P including the accommodating grooves 512 , the reflective groove 514 and the alignment grooves 516 is formed, the patterned first substrate 510 P may be sliced to form a plurality of first substrates 510 as shown in FIG. 13 at the same time.
- a protective layer 550 may be further formed on the patterned first substrate 510 P, and a reflective layer 560 may be further formed on the protective layer 550 .
- the protective layer 550 may be an oxide layer or a nitride layer, for example. However, the invention is not limited thereto.
- the reflective layer 560 at least covers the side wall 514 a of the reflective grooves 514 , such that more light signals 532 may be transmitted to the light guide elements 540 through the side wall 514 a. In the embodiment, the reflective layer 560 covers the whole protective layer 550 located in the reflective grooves 514 . However, the invention is not limited thereto.
- a depth D 512 of each of the accommodating grooves 512 , a depth D 514 of the reflective groove 514 and a depth D 516 of each of the alignment grooves 516 are larger than 120 ⁇ m, respectively.
- the depth of D 512 , D 514 , and D 516 may be substantially the same, or at least any two of them are substantially the same.
- side walls 512 a and 512 b of the accommodating grooves 512 , side walls 514 a, 514 b, 514 c and 514 d of the reflective groove 514 and side walls 516 a, 516 b and 516 c of the alignment grooves 516 are respectively inclined surfaces of 42° to 49°.
- the inclined surfaces of 42° to 49° refers to an angle sandwiched between the bottom surface 510 a of the patterned first substrate 510 P and an extension surface of each of the inclined surfaces is between 42° to 49°.
- the side wall 514 a of the reflective groove 514 is used for reflecting the light signal 532 output from each of the optical electrical elements 530 and transmitting the light signal 532 to the corresponding light guide element 540 . Since the inclination angle of the side wall 514 a of the reflective groove 514 falls within the predetermined angle range (42° to 49°), the optical power loss due to incorrect tilt angle of the reflective surface in the conventional technique can be improved. Moreover, since the accommodating grooves 512 and the reflective groove 514 are formed simultaneously, the angle between the accommodating grooves 512 and the reflective groove 514 (i.e. the angle ⁇ between the first direction D 1 and the second direction D 2 ) can be controlled within 90° ⁇ 2°.
- the second substrate 520 includes an accommodating cavity 522 adapted to accommodate the optical electrical elements 530 .
- the second substrate 520 may further include a plurality of alignment bumps 524 to be engaged with the alignment grooves 516 when the first substrate 510 and the second substrate 520 are bonded with each other.
- the alignment bumps 524 are, for example, located at the periphery of the second substrate 520 .
- the number and the arrangement of the alignment bumps 524 may be adjusted according to design requirement and are not limited to those shown in FIG. 16 .
- a protective layer PT 2 and a pattern defining layer PD 2 are formed in sequence on the second substrate to be processed (hereinafter, “unpatterned second substrate 520 U”).
- the protective layer PT 2 may be an oxide layer or a nitride layer, and the pattern defining layer PD 2 may be a photoresist layer, for example.
- the invention is not limited thereto.
- the unpatterned second substrate 520 U may be a (100) silicon wafer and includes a primary flat PF 2 (shown in FIG. 18 ).
- a second mask M 2 is disposed over the unpatterned second substrate 520 U, wherein the protective layer PT 2 and the pattern defining layer PD 2 are located between the second mask M 2 and the unpatterned second substrate 520 U.
- the second mask M 2 is, for example, a photo mask and includes a plurality of second pattern units U 2 for defining a plurality of second patterns P 2 to be formed later ( FIG. 17C schematically depicts one second pattern P 2 ).
- One of the unpatterned second substrate 520 U and the second mask M 2 is rotated by an angle relative to the other, so that an angle ⁇ 4 between the primary flat PF 2 of the unpatterned second substrate 520 U and an arrangement direction AD 2 having a maximum number of the second pattern units U 2 of the second mask M 2 is ( ⁇ +90°*n), wherein ⁇ is between 22° to 39°, and n is an integer.
- the ⁇ may be 30°
- the angle ⁇ 4 between the primary flat PF 2 and the arrangement direction AD 2 may be 30°, 30°+90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e. 300°).
- an exposure process E 2 is performed to transfer the pattern of the second pattern units U 2 of the second mask M 2 to the pattern defining layer PD 2 located on the unpatterned second substrate 520 U.
- a developing process is performed to remove portions of the pattern defining layer PD 2 which were not exposed in the exposure process E 2 shown in FIG. 17B , so that the second patterns P 2 are formed on the unpatterned second substrate 520 U.
- the unpatterned second substrate 520 U is subjected to a second patterning process using the second patterns P 2 as a mask to form the alignment bumps 524 .
- the second patterns P 2 are used as a mask to pattern the protective layer PT 2 , so that a patterned protective layer PT 2 ′ is formed.
- the patterned protective layer PT 2 ′ is then used as a mask to pattern the unpatterned second substrate 520 U, so that a patterned second substrate 520 P including the alignment bumps 524 is formed ( FIG. 17E schematically depicts one alignment bump 524 ).
- a method for patterning the unpatterned second substrate 520 U may include anisotropic wet etching. Specifically, an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the unpatterned second substrate 520 U.
- an etching solution for patterning the unpatterned second substrate 520 U may include potassium hydroxide, isopropyl alcohol, H 2 O, inhibitors, tetramethylammonium hydroxide and methyl alcohol.
- the process temperature for etching the unpatterned second substrate 520 U is preferably greater than 50° C.
- the invention is not limited to the above.
- the accommodating cavities 522 can be formed in succession.
- a protective layer PT 3 and a pattern defining layer PD 3 are formed in sequence on the patterned second substrate 520 P.
- the protective layer PT 3 may be an oxide layer or a nitride layer, and the pattern defining layer PD 3 may be a photoresist layer, for example. However, the invention is not limited thereto.
- a third mask M 3 is disposed over the patterned second substrate 520 P, wherein the protective layer PT 3 and the pattern defining layer PD 3 are located between the third mask M 3 and the patterned second substrate 520 P.
- the third mask M 3 is, for example, a photo mask and includes a plurality of third pattern units (not shown, refer to FIG. 18 for the arrangement) for defining a plurality of third patterns P 3 to be formed later ( FIG. 17G schematically depicts one third pattern P 3 ).
- one of the patterned second substrate 520 P and the third mask M 3 may be rotated by an angle relative to the other, so that an angle (not shown, similar to the angle ⁇ 4 of FIG. 9 ) between the primary flat PF 2 (as shown in FIG. 18 ) of the patterned second substrate 520 P and an arrangement direction (not shown, similar to the arrangement direction AD 2 of FIG.
- ⁇ is between 22° to 39°
- n is an integer.
- the ⁇ may be 30°
- the angle between the primary flat PF 2 of the patterned second substrate 520 P and the arrangement direction having a maximum number of the third pattern units may be 30°, 30° +90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e. 300°).
- an exposure process E 3 is performed to transfer the pattern of the third pattern units of the third mask M 3 to the pattern defining layer PD 3 located on the patterned second substrate 520 P.
- a developing process is performed to remove portions of the pattern defining layer PD 3 which were not exposed in the exposure process E 3 shown in FIG. 17F , so that the third patterns P 3 are formed on the patterned second substrate 520 P.
- the patterned second substrate 520 P is subjected to a third patterning process using the third patterns P 3 as a mask to form accommodating cavities 522 .
- the third patterns P 3 are used as a mask to pattern the protective layer PT 3 , so that a patterned protective layer PT 3 ′ is formed.
- the patterned protective layer PT 3 ′ is then used as a mask to pattern the patterned second substrate 520 P, so that a patterned second substrate 520 PP including the alignment bumps 524 and the accommodating cavities 522 is formed ( FIG. 17I schematically depicts one alignment bump 524 and one accommodating cavity 522 ).
- the method for patterning the patterned second substrate 520 P may be referred to above, and will not be described again.
- the patterned second substrate 520 PP including the alignment bumps 524 and the accommodating cavities 522 is formed, the patterned second substrate 520 PP may be sliced to form a plurality of second substrates 520 as shown in FIG. 16 at the same time.
- a depth D 522 of the accommodating cavity 522 and a height D 524 of each of the alignment bumps 524 are larger than 120 ⁇ m, respectively.
- side walls 522 a and 522 b of the accommodating cavity 522 and side walls 524 a, 524 b and 524 c of the alignment bumps 524 are respectively inclined surfaces of 42° to 49°. Since the inclination angles of side walls 524 a, 24 b and 524 c of the alignment bumps 524 are consistent with the inclination angles of side walls 516 a, 516 b and 516 c of the alignment grooves 516 , the alignment bumps 524 and the alignment grooves 516 can be well engaged with each other when the first substrate 510 and the second substrate 520 are bonded together. It is noted that, since the accommodating cavities 522 and the alignment bumps 524 are separately formed, the depth D 522 of each of the accommodating cavities 522 and the height D 524 of each of the alignment bumps 524 may not have to be the same.
- the optical electrical elements 530 ( FIG. 12 schematically depicts one optical electrical element 530 ) are disposed in the accommodating cavity 522 after the patterning process of second substrate 520 is completed.
- the optical electrical elements 530 can be a laser or other suitable light-emitting elements, where the laser can be a vertical cavity surface emitting laser (VCSEL).
- VCSEL vertical cavity surface emitting laser
- the light guide elements 540 ( FIG. 12 schematically depicts one light guide element 540 ) are disposed in the accommodating grooves 512 after the patterning process of first substrate 510 is completed.
- the light guide elements 540 can respectively be an optical fiber or waveguide.
- a material of the light guide elements 540 can be polymer or a dielectric material.
- each of the light guide elements 540 may contact the reflective layer 560 . Namely, there is no space between the light guide elements 540 and the reflective layer 560 .
- each of the light guide elements 540 may contact the side wall 514 a of the reflective groove 514 .
- each of the light guide elements 540 may have a focusing portion 542 .
- the focusing portion 542 is located between the reflective layer 560 and a corresponding optical electrical element 530 .
- the focusing portion 542 is located on a transmission path of the light signal 532 output from the corresponding optical electrical element 530 , so as to converge the light signal 532 on the reflective layer 560 .
- Use of the focusing portion 542 can further improve a light coupling efficiency of the optical electrical module 500 .
- the optical electrical module 500 is used for receiving the light signals transmitted by the light guide elements 540
- the optical electrical elements 530 are replaced by light-receiving elements
- the focusing portion 542 is adapted to converge the light signal 532 from one of the light guide elements 540 to a corresponding light-receiving element.
- a surface contact area between the optical electrical element 530 and the second substrate 520 is large, so that the optical electrical element 530 can be stably fixed on the second substrate 520 , which improves reliability of the optical electrical module 500 .
- the first substrate 510 can be accurately and stably combined with the second substrate 520 by using the alignment grooves 516 and the alignment bumps 524 , so as to improve the process efficiency of the optical electrical module 500 and decrease the fabrication cost thereof.
- FIG. 19A is a partial cross-sectional schematic diagram, illustrating another first substrate of the optical electrical module according to the embodiment of the invention.
- FIG. 19B is a partial cross-sectional schematic diagram, illustrating another second substrate of the optical electrical module according to the embodiment of the invention.
- the alignment grooves 516 are formed in the second substrate 520 ′, and the alignment bumps 524 are formed in the first substrate 510 ′.
- a method for forming the accommodating cavities 522 and the alignment grooves 516 is similar to steps shown in FIG. 17A to FIG. 17I , the difference there between is that the formation of the alignment bumps 524 are omitted, and the accommodating cavities 522 and the alignment grooves 516 are form in the second substrate 520 ′ simultaneously in the embodiment.
- a protective layer and a pattern defining layer are formed in sequence on the second substrate to be processed (hereinafter, “unpatterned second substrate”)
- a forth mask is disposed over the unpatterned second substrate.
- One of the unpatterned second substrate and the forth mask is rotated by an angle relative to the other, so that an angle between the primary flat of the unpatterned second substrate and an arrangement direction having a maximum number of the forth pattern units of the forth mask is (0+90°*n), wherein ⁇ is between 22° to 39°, and n is an integer.
- the unpatterned second substrate is subjected to a forth patterning process using the forth patterns as a mask to form the accommodating cavities 522 and the alignment grooves 516 .
- the forth patterns are used as a mask to pattern the protective layer, so that a patterned protective layer is formed.
- the patterned protective layer is then used as a mask to pattern the unpatterned second substrate, so that the accommodating cavities 522 and the alignment grooves 516 are formed simultaneously in a patterned second substrate.
- the patterned second substrate may be sliced to form a plurality of second substrate 520 ′ as shown in FIG. 19B at the same time.
- the method for forming the accommodating grooves 512 and the reflective groove 514 may refer to steps shown in FIG. 14A to FIG. 14F , which is not repeated therein.
- the alignment bumps 524 may be formed before the accommodating grooves 512 and the reflective groove 514 are formed.
- the method for forming the alignment bumps 524 is similar to steps shown in FIG. 17A to FIG. 17E , except that the unpatterned second substrate is replaced by the first substrate.
- the substrate the first substrate or the second substrate
- the mask by rotating one of the substrate and the mask at an angle relative to the other, it is possible to form grooves that are sufficiently deep and inclination angles of side walls of the grooves fall within a predetermined angle range. Since the inclination angle of the side wall of the reflective groove falls within the predetermined angle range, the optical power loss due to incorrect tilt angle of the reflective surface in the conventional technique can be improved.
- the angle between the accommodating grooves and the reflective groove can be controlled within 90° ⁇ 2°, and the light guide elements can be positioned by the accommodating grooves without requiring a complicated alignment process to align the optical fiber, the reflective surface and the light-emitting/receiving element in the conventional technique.
- the optical electrical element can be stably fixed on the second substrate, which improves reliability of the optical electrical module.
- the first substrate can be accurately and stably combined with the second substrate by using the alignment bumps and alignment grooves, so as to improve the process efficiency of the optical electrical module and decrease the fabrication cost thereof.
Abstract
A substrate of an optical electrical module is provided. The substrate includes a plurality of accommodating grooves and a reflective groove. The accommodating grooves respectively extend along a first direction. The reflective groove is connected with the accommodating grooves and extends along a second direction perpendicular to the first direction.
Description
- This application is a divisional application of and claims the priority benefit of U.S. application Ser. No. 15/399,743, filed on Jan. 6, 2017, now allowed. The prior application Ser. No. 15/399,743 is a continuation-in-part application of and claims the priority benefit of a prior application Ser. No. 14/505,512, filed on Oct. 3, 2014, now patented. The prior application Ser. No. 14/505,512 is a continuation-in-part application of and claims the priority benefit of prior application Ser. No. 13/423,259, filed on Mar. 18, 2012, now abandoned, which claims the priority benefit of Taiwan application serial no. 100132684, filed on Sep. 9, 2011, Taiwan application serial no. 100132687, filed on Sep. 9, 2011 and Taiwan application serial no. 100138390, filed on Oct. 21, 2011. The entirety of each of the above-mentioned patent applications is hereby incorporated by reference herein and made a part of this specification.
- The invention relates to an optical electrical module. Particularly, the invention relates to an optical electrical module used for optical communication.
- In a field of optical communication, a signal transmitter uses an optical electrical module that serves as a signal transmitting element to convert an electric signal into an optical signal, and a signal receiver uses the optical electrical module that serves as a signal receiving element to convert the received optical signal into the electric signal. Therefore, the optical electrical module is an indispensable device in the field of optical communication.
-
FIG. 1 is a schematic diagram of a conventional optical electrical module. Referring toFIG. 1 , the conventional opticalelectrical module 100 is adapted to provide a light signal, and includes acircuit board 110, abase 120, a light-emitting element 130, anoptical fiber 140 and achip 150. Thebase 120 and thechip 150 are disposed on thecircuit board 110, and thechip 150 is electrically connected to thecircuit board 110 through abonding wire 162. Thebase 120 hassurfaces bottom surface 121 thereof. Areflective surface 124 of thebase 120 is connected to thesurfaces surfaces surface 123. The light-emittingelement 130 is disposed on apad 125 on thesurface 122, and is electrically connected to thechip 150 through thepad 125 and abonding wire 164. A part of the light-emittingelement 130 protrudes out of thepad 125 and faces thereflective surface 124. Theoptical fiber 140 is disposed on thesurface 123 of thebase 120. - The
chip 150 is adapted to control the light-emittingelement 130 to emit acorresponding light signal 132 according to information to be transmitted, and thereflective surface 124 reflects thelight signal 132 into theoptical fiber 140 for transmitting thelight signal 132 through theoptical fiber 140. Moreover, a signal receiver can use another optical electrical module to receive thelight signal 132 transmitted by theoptical fiber 140. The optical electrical module used for receiving thelight signal 132 is similar to the opticalelectrical module 100, and a difference there between is that the light-emittingelement 130 is replaced by a light-receiving element. - In the conventional optical
electrical module 100, since a part of the light-emittingelement 130 protrudes out of thepad 125 to facilitate providing thelight signal 132 to thereflective surface 124, a contact area between the light-emittingelement 130 and thepad 125 is relatively small. Therefore, the light-emittingelement 130 can easily fall off, which leads to poor reliability of the opticalelectrical module 100. Similarly, the conventional optical electrical module used for receiving the light signal also has the problem that the light-receiving element can easily fall off. - Packaging of the optical device is one of key techniques that influence a yield and a cost of the optical electrical element and the optical electrical module. Referring to
FIG. 2 ,FIG. 2 is a schematic diagram of a package structure of another optical electrical module according to the conventional technique. The opticalelectrical module 100A includes acircuit board 101, a light-emitting/receiving element 103, an optical fiber 104 (which is also referred to as waveguide), asubstrate 102 and acover plate 106. Thesubstrate 102 is disposed on thecircuit board 101. The light-emitting/receivingelement 103 is disposed on thesubstrate 102. Theoptical fiber 104 used for transmitting alight signal 105 is disposed on thesubstrate 102. Thelight signal 105 can be transmitted to the light-emitting/receivingelement 103 through areflective surface 102 a of thesubstrate 102. - Since the
optical fiber 104, thereflective surface 102 a and the light-emitting/receivingelement 103 have to be accurately aligned, a microscope is used with assistance of a special tool to adjust a position of thecover plate 106, so as to fix theoptical fiber 104 on thesubstrate 102, and then follow-up packaging steps are performed. Such practice requires a highly skilled worker, which not only has a high cost, but also has low process robustness. Therefore, an advanced fixing module is required to be provided to facilitate the packaging process of the optical device and ameliorate the process robustness and yield. - The invention is directed to an optical electrical module, which has favorable yield and cost.
- The invention provides a method for manufacturing an optical electrical module which includes steps as follow. Forming a plurality of first patterns on a first substrate by a first mask, wherein an angle between a primary flat of the first substrate and an arrangement direction having a maximum number of first pattern units of the first mask is (θ+90°*n), wherein θ is between 22° to 39°, and n is an integer. Subjecting the first substrate to a first patterning process using the first patterns as a mask to form a plurality of accommodating grooves and a reflective groove connected with the accommodating grooves in the first substrate, wherein an extension direction of each of the accommodating grooves is perpendicular to an extension direction of the reflective groove.
- In an embodiment of the invention, a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 μm, respectively.
- In an embodiment of the invention, side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°.
- In an embodiment of the invention, the method for manufacturing the optical electrical module includes steps as follow. Patterning a second substrate to form a plurality of accommodating cavities in the second substrate. Disposing a plurality of optical electrical elements in the accommodating cavities. Disposing a plurality of light guide elements in the accommodating grooves. Bonding the first substrate and the second substrate, wherein the optical electrical elements and the light guide elements are disposed there between.
- In an embodiment of the invention, a plurality of alignment grooves are further formed in one of the first substrate and the second substrate, and a plurality of alignment bumps are further formed in the other one of the first substrate and the second substrate. The alignment bumps are adapted to be engaged with the alignment grooves when the first substrate and the second substrate are bonded with each other.
- In an embodiment of the invention, a depth of each of the accommodating grooves, a depth of the reflective groove, a depth of each of the alignment grooves, a depth of each of the accommodating cavities and a height of each of the alignment bumps are larger than 120 μm, respectively.
- In an embodiment of the invention, side walls of the accommodating grooves, side walls of the reflective groove, side walls of the alignment grooves, side walls of the accommodating cavities and side walls of the alignment bumps are respectively inclined surfaces of 42° to 49°.
- In an embodiment of the invention, the alignment grooves are formed in the first substrate, and the alignment bumps are formed in the second substrate. The alignment grooves, the accommodating grooves and the reflective groove are formed simultaneously during the first patterning process. A method for forming the alignment bumps includes steps as follow. Forming a plurality of second patterns on the second substrate by a second mask, wherein a primary flat of the second substrate and an angle between an arrangement direction having a maximum number of second pattern units of the second mask is (θ+90°*n). Subjecting the second substrate to a second patterning process using the second patterns as a mask to form the alignment bumps in the second substrate.
- In an embodiment of the invention, the accommodating cavities are formed after the alignment bumps are formed. A method for forming the accommodating cavities includes steps as follow. Forming a plurality of third patterns on the second substrate by a third mask, wherein an angle between a primary flat of the second substrate and an arrangement direction having a maximum number of third pattern units of the third mask is (θ+90°*n). Subjecting the second substrate to a third patterning process using the third patterns as a mask to form the accommodating cavities.
- In an embodiment of the invention, the alignment grooves are formed in the second substrate, and the alignment bumps are formed in the first substrate. A method for forming the accommodating cavities and the alignment grooves includes steps as follow. Forming a plurality of second patterns on the second substrate by a second mask, wherein an angle between a primary flat of the second substrate and an arrangement direction having a maximum number of second pattern units of the second mask is (θ+90°*n). Subjecting the second substrate to a second patterning process using the second patterns as a mask to form the accommodating cavities and the alignment grooves simultaneously. A method for forming the alignment bumps includes steps as follow. Forming a plurality of third patterns on the first substrate by a third mask, wherein an angle between a primary flat of the first substrate and an arrangement direction having a maximum number of third pattern units of the third mask is (θ+90°*n). Subjecting the first substrate to a third patterning process using the third patterns as a mask to form the alignment bumps in the first substrate.
- In an embodiment of the invention, an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the first substrate.
- In an embodiment of the invention, an etching solution for patterning the first substrate comprises potassium hydroxide (KOH), isopropyl alcohol (IPA), H2O, inhibitors, tetramethylammonium hydroxide (TMAH) and methyl alcohol.
- The invention provides a substrate of an optical electrical module. The substrate includes a plurality of accommodating grooves and a reflective groove. The accommodating grooves respectively extend along a first direction. The reflective groove is connected with the accommodating grooves and extends along a second direction perpendicular to the first direction.
- In an embodiment of the invention, the substrate is a (100) silicon wafer.
- In an embodiment of the invention, a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 μm, respectively.
- In an embodiment of the invention, the depth of each of the accommodating grooves and the depth of the reflective groove are the same.
- In an embodiment of the invention, side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°.
- In an embodiment of the invention, the accommodating grooves are parallel to each other.
- In an embodiment of the invention, all the accommodating grooves are perpendicular to the reflective groove.
- In order to make the aforementioned and other features and advantages of the invention comprehensible, several exemplary embodiments accompanied with figures are described in detail below.
- The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
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FIG. 1 is a schematic diagram of a conventional optical electrical module. -
FIG. 2 is a schematic diagram of a package structure of another optical electrical module according to the conventional technique. -
FIG. 3A andFIG. 3B are cross-sectional views of an optical electrical module according to a first embodiment of the invention. -
FIG. 4 is a three-dimensional view of a first substrate and elements disposed thereon ofFIG. 3A andFIG. 3B . -
FIG. 5 is a three-dimensional view of a second substrate and elements disposed thereon ofFIG. 3A andFIG. 3B . -
FIG. 6 is a cross-sectional view of an optical electrical module according to another embodiment of the invention. -
FIG. 7 is a cross-sectional view of an optical electrical module according to still another embodiment of the invention. -
FIG. 8 is a cross-sectional view of an optical electrical module according to yet another embodiment of the invention. -
FIG. 9A is a three-dimensional exploded view of an optical electrical module according to a second embodiment of the invention. -
FIG. 9B is a three-dimensional combination view of the optical electrical module ofFIG. 9A . -
FIG. 9C is a cross-sectional view of the optical electrical module ofFIG. 9B along a section line IIC. -
FIG. 9D is an enlarged cross-sectional view of a first positioning portion and a second positioning portion ofFIG. 9B . -
FIG. 10 is an enlarged cross-sectional view of a first positioning portion and a second positioning portion of an optical electrical module according to another embodiment of the invention. -
FIG. 11 is an enlarged cross-sectional view of a first positioning portion and a second positioning portion of an optical electrical module according to still another embodiment of the invention. -
FIG. 12 is a partial cross-sectional schematic diagram, illustrating an optical electrical module according to an embodiment of the invention. -
FIG. 13 is a top schematic diagram, illustrating a first substrate of the optical electrical module according to the embodiment of the invention. -
FIG. 14A toFIG. 14F are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the first substrate inFIG. 13 . -
FIG. 15 is a top schematic diagram, illustrating a first mask disposed over the first substrate to be processed. -
FIG. 16 is a top schematic diagram, illustrating a second substrate of the optical electrical module according to the embodiment of the invention. -
FIG. 17A toFIG. 17I are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the second substrate inFIG. 16 . -
FIG. 18 is a top schematic diagram, illustrating a second mask disposed over the second substrate to be processed. -
FIG. 19A is a partial cross-sectional schematic diagram, illustrating another first substrate of the optical electrical module according to the embodiment of the invention. -
FIG. 19B is a partial cross-sectional schematic diagram, illustrating another second substrate of the optical electrical module according to the embodiment of the invention. -
FIG. 3A andFIG. 3B are cross-sectional views of an optical electrical module according to the first embodiment of the invention.FIG. 4 is a three-dimensional view of a first substrate and elements disposed thereon ofFIG. 3A andFIG. 3B .FIG. 5 is a three-dimensional view of a second substrate and elements disposed thereon ofFIG. 3A andFIG. 3B . Referring toFIG. 3A ,FIG. 4 andFIG. 5 , the opticalelectrical module 200 of the present embodiment is a light signal transmitting module. The opticalelectrical module 200 includes afirst substrate 210, asecond substrate 220, a bearingportion 222 and at least one opticalelectrical element 240. The bearingportion 222 is disposed between thefirst substrate 210 and thesecond substrate 220. - In the present embodiment, the bearing
portion 222 is, for example, formed on thesecond substrate 220. In other embodiments, the bearing portion can also be formed on the first substrate. The opticalelectrical module 200 further includes at least onelight guide element 230 or is externally connected to at least onelight guide element 230, and the bearingportion 222 is used to limit thelight guide element 230. InFIG. 4 andFIG. 5 , a plurality of thelight guide elements 230 and a plurality of the opticalelectrical elements 240 are illustrated. However, the numbers of thelight guide elements 230 and the opticalelectrical elements 240 are not limited by the invention. In the present embodiment, the opticalelectrical element 240 is, for example, a light-emitting element. Thefirst substrate 210 is, for example, a semiconductor substrate, and thesecond substrate 220 is, for example, a semiconductor substrate or a glass substrate. The semiconductor substrate is, for example, a silicon substrate, though the invention is not limited thereto. - The
second substrate 220 is combined with thefirst substrate 210. Thesecond substrate 220 has areflective surface 221 facing thefirst substrate 210. The opticalelectrical element 240 is disposed on asurface 211 of thefirst substrate 210 facing thereflective surface 221. Thesurface 211 is opposite to thereflective surface 221. The opticalelectrical element 240 is configured for providing alight signal 242 to thereflective surface 221. Thereflective surface 221 and thelight guide element 230 are disposed on an optical path of thelight signal 242. Thereflective surface 221 is adapted to reflect thelight signal 242 into thelight guide element 230, so that thelight signal 242 can be transmitted through thelight guide element 230. - The
first substrate 210 may have acavity 212, and the opticalelectrical elements 240 are disposed in thecavity 212. The opticalelectrical element 240 can be a laser or other suitable light-emitting elements, where the laser can be a vertical cavity surface emitting laser (VCSEL). A size of thecavity 212 is determined according to a size of the opticalelectrical elements 240 disposed therein. In principle, a minimum size of thecavity 212 is required to accommodate the opticalelectrical elements 240. In the present embodiment, each of the opticalelectrical elements 240 is, for example, electrically connected to an internal circuit (not shown) of thefirst substrate 210 through abonding wire 241. Moreover, in the present embodiment, thelight guide element 230 faces thereflective surface 221, and a space is maintained between thelight guide element 230 and thereflective surface 221. Thelight guide element 230 of the present embodiment is, for example, an optical fiber or a light guide strip made of polymer or a dielectric material. - The
second substrate 220 may have acavity 223, and thereflective surface 221 is a surface of thecavity 223. Thereflective surface 221 can be selectively coated with a reflection material to improve reflectivity thereof. As shown inFIG. 5 , the bearingportion 222 is configured with at least onepositioning structure 226 for fixing thelight guide element 230. The number of thepositioning structures 226 can correspond to the number of thelight guide elements 230, so that each of thelight guide elements 230 can be fixed in acorresponding positioning structure 226. Each of thepositioning structures 226 of the present embodiment is, for example, a groove; though the invention is not limited thereto, and in other embodiments, the positioningstructures 226 can be protruded positioning structures. Moreover, it should be noticed that inFIG. 3A , an included angle α between thereflective surface 221 and asurface 224 of thesecond substrate 220 connected to thefirst substrate 210 can be designed according to a position of the opticalelectrical elements 240 and a position of thepositioning structures 226 of the bearingportion 222. When the included angle α is between 120 degrees and 140 degrees, the opticalelectrical module 200 may have a good effect of transmitting thelight signal 242. Further, when the included angle α is 135 degrees or 125 degrees, thereflective surface 221 is easily fabricated. - Referring to
FIG. 3B ,FIG. 4 andFIG. 5 , the opticalelectrical module 200 of the present embodiment may further include at least onecontrol unit 250. Thecontrol unit 250 is, for example, disposed on thefirst substrate 210, and is electrically connected to the opticalelectrical element 240. In detail, thecontrol unit 250 is, for example, a control chip. As shown inFIG. 4 , thecontrol unit 250 can be electrically connected to the corresponding opticalelectrical elements 240 throughwires 260 disposed on thefirst substrate 210 and an internal circuit (not shown) of thefirst substrate 210. Thecontrol unit 250 can be used to control one or a plurality of the opticalelectrical elements 240, which is not limited by the invention. Thecontrol unit 250 controls the opticalelectrical element 240 to send the correspondinglight signal 242 according to information to be transmitted. In the present embodiment, as shown inFIG. 3B andFIG. 5 , thesecond substrate 220 may have a containingslot 225 for containing thecontrol unit 250, though the invention is not limited thereto, and in other embodiments, the containingslot 225 used for containing thecontrol unit 250 can also be disposed on thefirst substrate 210. - Moreover, as shown in
FIG. 3B , thefirst substrate 210 of the present embodiment can be configured with at least one through silicon via 214. Oneend 214 a of each of the throughsilicon vias 214 is electrically connected to thecorresponding control unit 250. In this way, each of thecontrol units 250 can be electrically connected to other elements through anotherend 214 b of the through silicon via 214. For example,FIG. 6 is a cross-sectional view of an optical electrical module according to another embodiment of the invention. Referring toFIG. 6 , in the present embodiment, compared to the opticalelectrical module 200, the opticalelectrical module 200′ further includes acircuit board 270. Thefirst substrate 210 is disposed on thecircuit board 270. Thecontrol units 250 can be electrically connected to thecircuit board 270 through the throughsilicon vias 214. - Referring to
FIG. 3A , in the opticalelectrical module 200 of the present embodiment, the opticalelectrical element 240 is on thefirst substrate 210, and thelight guide element 230 is disposed on thesecond substrate 220. Therefore, abottom surface 243 of the opticalelectrical element 240 can be fully fixed on thesurface 211 of thecavity 212 of thefirst substrate 220, where thesurface 211 faces thereflective surface 221. Compared to the conventional technique that the light-emitting element and the pad has a small contact area, a contact area between the opticalelectrical element 240 of the opticalelectrical module 200 and thesurface 211 of the present embodiment is relatively large, so that the opticalelectrical element 240 can be tightly fixed on thefirst substrate 210 to improve reliability of the opticalelectrical module 200. Moreover, in the present embodiment, a semiconductor substrate can be used as thefirst substrate 210. Since a fabrication technique of the semiconductor substrate is mature, a thickness of thefirst substrate 210 can be effectively reduced. Moreover, in the present embodiment, a semiconductor substrate or a glass substrate can be used as thesecond substrate 220, and since the fabrication technique of the semiconductor substrate and a grinding technique of the glass substrate are mature, the thickness of thesecond substrate 220 can also be effectively reduced. Therefore, the opticalelectrical module 200 of the present embodiment has an advantage of thinness. -
FIG. 7 is a cross-sectional view of an optical electrical module according to still another embodiment of the invention. Referring toFIG. 7 , the opticalelectrical module 200″ of the present embodiment is similar to the opticalelectrical module 200 of the first embodiment, and a difference there between is that in the opticalelectrical module 200″, alight guide element 230″ can cover thereflective surface 221 of thesecond substrate 220. Namely, thelight guide element 230″ can contact thereflective surface 221. There is no space between thelight guide element 230″ and thereflective surface 221. A material of thelight guide element 230″ can be polymer or a dielectric material. Moreover, it should be noticed that thelight guide element 230″ may have a focusingportion 232. The focusingportion 232 is located between the opticalelectrical element 240 and thereflective surface 221, and a position of the focusingportion 232 corresponds to positions of the opticalelectrical element 240 and thereflective surface 221, so as to converge thelight signal 242 provided by the opticalelectrical element 240. Use of the focusingportion 232 can further improve a light coupling efficiency of the opticalelectrical module 200″. -
FIG. 8 is a cross-sectional view of an optical electrical module according to yet another embodiment of the invention. Referring toFIG. 8 , the opticalelectrical module 300 of the present embodiment is similar to the opticalelectrical module 200 of the first embodiment, and a difference there between is that the opticalelectrical module 300 is a light signal receiving module. In detail, a structure of the opticalelectrical module 300 is similar to that of the opticalelectrical module 200, and a difference there between is that in the opticalelectrical module 300, an opticalelectrical element 350 is used to replace the opticalelectrical element 240 of the opticalelectrical module 200, and the opticalelectrical element 350 is a light receiving element. The opticalelectrical element 350 is, for example, a photo diode or other suitable photo sensors. In the opticalelectrical module 300, thelight guide element 230 is adapted to transmit thelight signal 242 to thereflective surface 221 of thesecond substrate 220, and thereflective surface 221 is adapted to reflect thelight signal 242 to the opticalelectrical element 350 for reception. Moreover, a control unit (not shown) of the opticalelectrical module 300 can convert thelight signal 242 received by the opticalelectrical element 350 into an electric signal. The opticalelectrical module 300 of the present embodiment has the same advantage with that of the opticalelectrical module 200 of the first embodiment, which is not repeated therein. -
FIG. 9A is a three-dimensional exploded view of an optical electrical module according to a second embodiment of the invention.FIG. 9B is a three-dimensional combination view of the optical electrical module ofFIG. 9A .FIG. 9C is a cross-sectional view of the optical electrical module ofFIG. 9B along a section line IIC. Referring toFIG. 9A toFIG. 9C , the opticalelectrical module 400 of the present embodiment is similar to the opticalelectrical module 200 of the first embodiment, and the same elements are denoted by the same referential number, and a main difference there between is that in the opticalelectrical module 400 of the present embodiment, thefirst substrate 210A has at least onefirst positioning portion 215. Thesecond substrate 220A has at least onesecond positioning portion 227. Thefirst positioning portion 215 and thesecond positioning portion 227 are combined to fix thelight guide elements 230 between thefirst substrate 210A and thesecond substrate 220A. Based on a design of thefirst positioning portion 215 and thesecond positioning portion 227, thefirst substrate 210A can be easily aligned to thesecond substrate 220A, and process robustness of the opticalelectrical module 400 can be improved and the fabrication cost thereof can be reduced. The differences of the opticalelectrical modules - Referring to
FIG. 9A toFIG. 9C , the opticalelectrical module 400 of the present embodiment further has an effect of fixing thelight guide elements 230. In the present embodiment, thelight guide element 230 can be an optical fiber or waveguide. To facilitate descriptions, in the present embodiment, a plurality of optical fibers is used to represent thelight guide elements 230. The opticalelectrical module 400 includes thefirst substrate 210A and thesecond substrate 220A. The opticalelectrical module 400 can be disposed on a substrate, where the substrate is, for example, acircuit board 270. In the present embodiment, thefirst substrate 210A is used to carry the opticalelectrical element 240, and thesecond substrate 220A can be a cover used to fix thelight guide elements 230. In the present embodiment, the opticalelectrical element 240 includes alight receiving element 240 a and a light-emittingelement 240 b. - The
first substrate 210A of the present embodiment has a carrying surface S1 and thefirst positioning portions 215 disposed on the carrying surface S1. Thesecond substrate 220A has an inner surface S2 and thesecond positioning portions 227 disposed on the inner surface S2. Thesecond substrate 220A further has positioningstructures 226 used for accommodating thelight guide elements 230 and the reflective surface 221 (shown inFIG. 9C ). Thereflective surface 221 of the present embodiment may have a diffractive optical element (DOE) or can be a planar reflective surface. Thefirst positioning portion 215 is used to combine with thesecond positioning portion 227, so that thefirst substrate 210A and thesecond substrate 220A are precisely combined, and the carrying surface S1 of thefirst substrate 220A fixes thelight guide elements 230 in thepositioning structures 226 of thesecond substrate 220A. - In the present embodiment, the
first positioning portion 215 can be a bump, and the second positioning portion can be a groove, though the invention is not limited thereto. Moreover, it should be noticed that fourfirst positioning portions 215 and foursecond positioning portions 227 ofFIG. 9A are taken as an example for descriptions. However, the numbers of thefirst positioning portion 215 and thesecond positioning portion 227 are not limited by the invention, which can be suitably adjusted according to an actual design requirement. A diameter of thelight guide element 230 is, for example, 125 μm, and a depth of thepositioning structure 226 is between 50 μm and 200 μm. The carrying surface S1 of thefirst substrate 210A can be a plane or a concave and convex surface designed in collaboration with thepositioning structures 226 of thesecond substrate 220A. The carrying surface S1 can fix thelight guide elements 230 in thepositioning structures 226 of thesecond substrate 220A through a pressing manner. For example, if thelight guide element 230 protrudes out from thepositioning structure 226, the inner surface S2 can be a concave and convex surface, and positions of thepositioning structures 226 on the inner surface S2 correspond to positions of thelight guide elements 230. The carrying surface S1 and thepositioning structures 226 work together to fix thelight guide elements 230 in the opticalelectrical module 400. - In the present embodiment, a material of the
first substrate 210A can be a semiconductor. Further, the material of thefirst substrate 210A is, for example, silicon. A material of thesecond substrate 220A can be a semiconductor, plastic, glass and ceramics or a group formed by at least two of the above materials. If the material of thesecond substrate 220A is plastic, thesecond positioning portions 227 can be formed through injection molding. In another embodiment of the invention, thefirst substrate 210A and thesecond substrate 220A can be formed by polysilicon, where thefirst positioning portions 215 of thefirst substrate 210A, thesecond positioning portions 227 of thesecond substrate 220A and thereflective surface 221 can all be formed through an etching process (for example, wet etching). -
FIG. 9D is an enlarged cross-sectional view of the first positioning portion and the second positioning portion ofFIG. 9B . Referring toFIG. 9D , thefirst positioning portion 215 has abottom surface 215 a and at least onegroove side surface 215 b. Thesecond positioning portion 227 has a top surface 227 a and at least onebump side surface 227 b. Thebottom surface 215 a faces the top surface 227 a. An included angle θ1 between thegroove side surface 215 b and a vertical plane T1 is not equal to an included angle θ2 between thebump side surface 227 b and the vertical plane T1. The vertical plane T1 is substantially perpendicular to thebottom surface 215 a and the top surface 227 a. In detail, the included angle θ2 is substantially greater than or smaller than the included angle θ1, so that thesecond positioning portion 227 is tightly engaged to thefirst positioning portion 215. In the present embodiment, the included angle θ1 is, for example, 45 degrees, and the included angle θ2 is, for example, 54.7 degrees. - When the
first substrate 210A and thesecond substrate 220A of the present embodiment are all formed by a polysilicon material, since the polysilicon has a face-centered cubic (FCC) lattice structure, thesecond positioning portion 227 fabricated through the etching process can be formed by intersecting a <111> lattice plane and a <100> lattice plane. Substantially, the included angle θ2 between the <111> lattice plane and the <100> lattice plane is substantially 54.7 degrees. Thefirst positioning portion 215 fabricated through the etching process can be formed by intersecting a <110> lattice plane and the <100> lattice plane. Substantially, the included angle θ1 between the <110> lattice plane and the <100> lattice plane is substantially 45 degrees. -
FIG. 10 is an enlarged cross-sectional view of the first positioning portion and the second positioning portion of the optical electrical module according to another embodiment of the invention. Referring toFIG. 10 , in another embodiment of the invention, an included angle θ2′ is substantially smaller than an included angle θ1′. Asecond positioning portion 227B of asecond substrate 220B can be formed by intersecting the <110> lattice plane and the <100> lattice plane. The included angle θ2′ between the <110> lattice plane and the <100> lattice plane is substantially 45 degrees. Afirst positioning portion 215B of afirst substrate 210B can be formed by intersecting a <111> lattice plane and the <100> lattice plane. The included angle θ1′ between the <111> lattice plane and the <100> lattice plane is substantially 54.7 degrees. Particularly, in order to closely combine thefirst substrate 210B and thesecond substrate 220B, aglue material 313 can be filled between thefirst substrate 210B and thesecond substrate 220B. Theglue material 313 is, for example, a silicon based glue, an UV glue, an epoxy resin glue or other suitable materials. -
FIG. 11 is an enlarged cross-sectional view of the first positioning portion and the second positioning portion of an optical electrical module according to still another embodiment of the invention. InFIG. 9A toFIG. 9D , thefirst positioning portion 215 is a groove, and thesecond positioning portion 227 is a bump. However, the invention is not limited thereto. In the embodiment ofFIG. 11 , thefirst positioning portion 215 is a bump and thesecond positioning portion 227 is a groove. - In the above embodiments, if the substrate (e.g. the first substrate or the second substrate) is made of silicon, such as a (100) silicon wafer. When patterning the silicon substrate to form the reflective surface used for transmitting light signal to the optical fiber or for transmitting light signal to the light-receiving element, it is difficult to control the etching rates of the side etching and the under etching of the silicon substrate due to different lattice planes, such as <100>, <110> and <111> lattice planes, of the silicon substrate have different etching rates. Therefore, it is difficult to control the inclination angle of the reflective surface within a predetermined angle range in the conventional technique, which results in loss of optical power, thereby reducing the yield of the optical electrical module. The following manufacturing method can well control the inclination angle of the reflecting surface fall within the predetermined angle range and will advance the alignment process to improve yield and reduce cost of the optical electrical module.
-
FIG. 12 is a partial cross-sectional schematic diagram, illustrating an optical electrical module according to an embodiment of the invention.FIG. 13 is a top schematic diagram, similar toFIG. 5 , illustrating a first substrate of the optical electrical module according to the embodiment of the invention. In order to clearly show each surface of the first substrate, layers that are disposed on the first substrate (such as a protective layer and a reflective layer) are omitted inFIG. 13 .FIG. 14A toFIG. 14F are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the first substrate inFIG. 13 .FIG. 15 is a top schematic diagram, illustrating a first mask disposed over the first substrate to be processed.FIG. 16 is a top schematic diagram, similar toFIG. 4 , illustrating a second substrate of the optical electrical module according to the embodiment of the invention.FIG. 17A toFIG. 17I are partial cross-sectional schematic diagrams, illustrating a manufacturing process of the second substrate inFIG. 16 .FIG. 18 is a top schematic diagram, illustrating a second mask disposed over the second substrate to be processed. - Referring to
FIGS. 12, 13 and 16 , an opticalelectrical module 500 of the embodiment is, for example, adapted to provide light signals and includes afirst substrate 510, asecond substrate 520, a plurality of opticalelectrical elements 530 and a plurality of light guide elements 540 (FIG. 12 schematically depicts one opticalelectrical element 530 and one light guide element 540). The end oflight guide elements 540 may be inclined surface as showing inFIG. 7 andFIG. 11 , and in other embodiment, the end oflight guide elements 540 may be vertical surface perpendicular to the first direction D1 as showing inFIG. 3A andFIG. 8 . - The
first substrate 510 includes a plurality ofaccommodating grooves 512 and areflective groove 514 connected with theaccommodating grooves 512. Theaccommodating grooves 512 respectively parallel to each other and extend along the first direction D1, and each of theaccommodating grooves 512 is adapted to accommodate one of thelight guide elements 540. Specifically, each of thelight guide elements 540 is adapted to lean againstside walls accommodating grooves 512. In the embodiment, each of theaccommodating grooves 512 is, for example, a v-groove. However, the invention is not limited thereto. - The
reflective groove 514 extends along a second direction D2 perpendicular to the first direction D1. Taking into account the process tolerances, “the second direction D2 perpendicular to the first direction D1” herein refers to an angle β between the first direction D1 and the second direction D2 is 90°±2°. In the embodiment, thereflective groove 514 is, for example, a trapezoidal groove. However, the invention is not limited thereto. - In the embodiment, the
first substrate 510 may further include a plurality ofalignment grooves 516 used for alignment with thesecond substrate 520. Thealignment grooves 516 are, for example, located at the periphery of thefirst substrate 510. However, the number and the arrangement of thealignment grooves 516 may be adjusted according to design requirement and are not limited to those shown inFIG. 13 . - A method for manufacturing the
first substrate 510 will be described below with reference toFIG. 14A toFIG. 15 . Referring toFIG. 14A , a protective layer PT1 and a pattern defining layer PD1 are formed in sequence on the first substrate to be processed (hereinafter, “unpatternedfirst substrate 510U”). The protective layer PT1 may be an oxide layer or a nitride layer, and the pattern defining layer PD1 may be a photoresist layer, for example. However, the invention is not limited thereto. The unpatternedfirst substrate 510U may be a (100) silicon wafer and includes a primary flat PF1 (shown inFIG. 15 ). - Referring to
FIG. 14B andFIG. 15 , a first mask M1 is disposed over the unpatternedfirst substrate 510U, wherein the protective layer PT1 and the pattern defining layer PD1 are located between the first mask M1 and the unpatternedfirst substrate 510U. The first mask M1 is, for example, a photo mask and includes a plurality of first pattern units U1 for defining a plurality of first patterns P1 to be formed later (as shown inFIG. 14C ). One of the unpatternedfirst substrate 510U and the first mask M1 is rotated by an angle relative to the other, so that an angle θ3 between the primary flat PF1 of the unpatternedfirst substrate 510U and an arrangement direction AD1 having a maximum number of the first pattern units U1 of the first mask M1 is (θ+90°*n), wherein θ is between 22° to 39°, and n is an integer. For example, the θ may be 30°, and the angle θ3 between the primary flat PF1 and the arrangement direction AD1 may be 30°, 30°+90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e.) 300°. However, the invention is not limited thereto. Then, an exposure process E1 is performed to transfer the pattern of the first pattern units U1 of the first mask M1 to the pattern defining layer PD1 located on the unpatternedfirst substrate 510U. - Referring to
FIG. 14C , a developing process is performed to remove portions of the pattern defining layer PD1 which were not exposed in the exposure process E1 shown inFIG. 14B , so that the first patterns P1 are formed on the unpatternedfirst substrate 510U. - Then, the unpatterned
first substrate 510U is subjected to a first patterning process using the first patterns P1 as a mask to form theaccommodating grooves 512, thereflective groove 514 and thealignment grooves 516. Specifically, referring toFIGS. 14C and 14D , the first patterns P1 are used as a mask to pattern the protective layer PT1, so that a patterned protective layer PT1′ is formed. Referring toFIGS. 14D and 14E , the patterned protective layer PT1′ is then used as a mask to pattern the unpatternedfirst substrate 510U, so that theaccommodating grooves 512, thereflective groove 514 and thealignment grooves 516 are formed simultaneously in a patternedfirst substrate 510P. In the embodiment, a method for patterning the unpatternedfirst substrate 510U may include anisotropic wet etching. Specifically, an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the unpatternedfirst substrate 510U. In addition, an etching solution for patterning the unpatternedfirst substrate 510U may include potassium hydroxide, isopropyl alcohol, H2O, inhibitors, tetramethylammonium hydroxide and methyl alcohol. Moreover, the process temperature for etching the unpatternedfirst substrate 510U is preferably greater than 50° C. However, the invention is not limited to the above. - After the patterned
first substrate 510P including theaccommodating grooves 512, thereflective groove 514 and thealignment grooves 516 is formed, the patternedfirst substrate 510P may be sliced to form a plurality offirst substrates 510 as shown inFIG. 13 at the same time. - In the embodiment, before the slice process, referring to
FIG. 14F , aprotective layer 550 may be further formed on the patternedfirst substrate 510P, and areflective layer 560 may be further formed on theprotective layer 550. Theprotective layer 550 may be an oxide layer or a nitride layer, for example. However, the invention is not limited thereto. Thereflective layer 560 at least covers theside wall 514 a of thereflective grooves 514, such that morelight signals 532 may be transmitted to thelight guide elements 540 through theside wall 514 a. In the embodiment, thereflective layer 560 covers the wholeprotective layer 550 located in thereflective grooves 514. However, the invention is not limited thereto. - In the manufacturing process of the
first substrate 510, by rotating one of the unpatternedfirst substrate 510U and the first mask M1 at an angle relative to the other, it is possible to form grooves that are sufficiently deep and inclination angles of side walls of the grooves fall within a predetermined angle range. Specifically, referring toFIG. 14E andFIG. 13 , a depth D512 of each of theaccommodating grooves 512, a depth D514 of thereflective groove 514 and a depth D516 of each of thealignment grooves 516 are larger than 120 μm, respectively. The depth of D512, D514, and D516 may be substantially the same, or at least any two of them are substantially the same. In addition,side walls accommodating grooves 512,side walls reflective groove 514 andside walls alignment grooves 516 are respectively inclined surfaces of 42° to 49°. Herein, “the inclined surfaces of 42° to 49°” refers to an angle sandwiched between thebottom surface 510 a of the patternedfirst substrate 510P and an extension surface of each of the inclined surfaces is between 42° to 49°. Referring toFIG. 12 andFIG. 13 , theside wall 514 a of thereflective groove 514 is used for reflecting thelight signal 532 output from each of the opticalelectrical elements 530 and transmitting thelight signal 532 to the correspondinglight guide element 540. Since the inclination angle of theside wall 514 a of thereflective groove 514 falls within the predetermined angle range (42° to 49°), the optical power loss due to incorrect tilt angle of the reflective surface in the conventional technique can be improved. Moreover, since theaccommodating grooves 512 and thereflective groove 514 are formed simultaneously, the angle between theaccommodating grooves 512 and the reflective groove 514 (i.e. the angle β between the first direction D1 and the second direction D2) can be controlled within 90°±2°. - Referring to
FIG. 16 , thesecond substrate 520 includes anaccommodating cavity 522 adapted to accommodate the opticalelectrical elements 530. In the embodiment, thesecond substrate 520 may further include a plurality of alignment bumps 524 to be engaged with thealignment grooves 516 when thefirst substrate 510 and thesecond substrate 520 are bonded with each other. The alignment bumps 524 are, for example, located at the periphery of thesecond substrate 520. However, the number and the arrangement of the alignment bumps 524 may be adjusted according to design requirement and are not limited to those shown inFIG. 16 . - A method for manufacturing the
second substrate 520 will be described below with reference toFIG. 17A toFIG. 18 . Referring toFIG. 17A , a protective layer PT2 and a pattern defining layer PD2 are formed in sequence on the second substrate to be processed (hereinafter, “unpatternedsecond substrate 520U”). The protective layer PT2 may be an oxide layer or a nitride layer, and the pattern defining layer PD2 may be a photoresist layer, for example. However, the invention is not limited thereto. The unpatternedsecond substrate 520U may be a (100) silicon wafer and includes a primary flat PF2 (shown inFIG. 18 ). - Referring to
FIG. 17B andFIG. 18 , a second mask M2 is disposed over the unpatternedsecond substrate 520U, wherein the protective layer PT2 and the pattern defining layer PD2 are located between the second mask M2 and the unpatternedsecond substrate 520U. The second mask M2 is, for example, a photo mask and includes a plurality of second pattern units U2 for defining a plurality of second patterns P2 to be formed later (FIG. 17C schematically depicts one second pattern P2). One of the unpatternedsecond substrate 520U and the second mask M2 is rotated by an angle relative to the other, so that an angle θ4 between the primary flat PF2 of the unpatternedsecond substrate 520U and an arrangement direction AD2 having a maximum number of the second pattern units U2 of the second mask M2 is (θ+90°*n), wherein θ is between 22° to 39°, and n is an integer. For example, the θ may be 30°, and the angle θ4 between the primary flat PF2 and the arrangement direction AD2 may be 30°, 30°+90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e. 300°). However, the invention is not limited thereto. Then, an exposure process E2 is performed to transfer the pattern of the second pattern units U2 of the second mask M2 to the pattern defining layer PD2 located on the unpatternedsecond substrate 520U. - Referring to
FIG. 17C , a developing process is performed to remove portions of the pattern defining layer PD2 which were not exposed in the exposure process E2 shown inFIG. 17B , so that the second patterns P2 are formed on the unpatternedsecond substrate 520U. - Then, the unpatterned
second substrate 520U is subjected to a second patterning process using the second patterns P2 as a mask to form the alignment bumps 524. Specifically, referring toFIGS. 17C and 17D , the second patterns P2 are used as a mask to pattern the protective layer PT2, so that a patterned protective layer PT2′ is formed. Referring toFIGS. 17D and 17E , the patterned protective layer PT2′ is then used as a mask to pattern the unpatternedsecond substrate 520U, so that a patternedsecond substrate 520P including the alignment bumps 524 is formed (FIG. 17E schematically depicts one alignment bump 524). In the embodiment, a method for patterning the unpatternedsecond substrate 520U may include anisotropic wet etching. Specifically, an etching rate between a side etching and an under etching is between 1:2 and 1:20 when patterning the unpatternedsecond substrate 520U. In addition, an etching solution for patterning the unpatternedsecond substrate 520U may include potassium hydroxide, isopropyl alcohol, H2O, inhibitors, tetramethylammonium hydroxide and methyl alcohol. Moreover, the process temperature for etching the unpatternedsecond substrate 520U is preferably greater than 50° C. However, the invention is not limited to the above. - After the alignment bumps 524 are formed, the
accommodating cavities 522 can be formed in succession. Specifically, referring toFIG. 17F , a protective layer PT3 and a pattern defining layer PD3 are formed in sequence on the patternedsecond substrate 520P. The protective layer PT3 may be an oxide layer or a nitride layer, and the pattern defining layer PD3 may be a photoresist layer, for example. However, the invention is not limited thereto. Then, a third mask M3 is disposed over the patternedsecond substrate 520P, wherein the protective layer PT3 and the pattern defining layer PD3 are located between the third mask M3 and the patternedsecond substrate 520P. The third mask M3 is, for example, a photo mask and includes a plurality of third pattern units (not shown, refer toFIG. 18 for the arrangement) for defining a plurality of third patterns P3 to be formed later (FIG. 17G schematically depicts one third pattern P3). In the embodiment, one of the patternedsecond substrate 520P and the third mask M3 may be rotated by an angle relative to the other, so that an angle (not shown, similar to the angle θ4 ofFIG. 9 ) between the primary flat PF2 (as shown inFIG. 18 ) of the patternedsecond substrate 520P and an arrangement direction (not shown, similar to the arrangement direction AD2 ofFIG. 18 ) having a maximum number of the third pattern units of the third mask M3 is (0+90°*n), wherein θ is between 22° to 39°, and n is an integer. For example, the θ may be 30°, and the angle between the primary flat PF2 of the patternedsecond substrate 520P and the arrangement direction having a maximum number of the third pattern units may be 30°, 30° +90° (i.e. 120°), 30°+180° (i.e. 210°) or 30°+270° (i.e. 300°). However, the invention is not limited thereto. Then, an exposure process E3 is performed to transfer the pattern of the third pattern units of the third mask M3 to the pattern defining layer PD3 located on the patternedsecond substrate 520P. - Referring to
FIG. 17G , a developing process is performed to remove portions of the pattern defining layer PD3 which were not exposed in the exposure process E3 shown inFIG. 17F , so that the third patterns P3 are formed on the patternedsecond substrate 520P. - Then, the patterned
second substrate 520P is subjected to a third patterning process using the third patterns P3 as a mask to formaccommodating cavities 522. Specifically, referring toFIGS. 17G and 17H , the third patterns P3 are used as a mask to pattern the protective layer PT3, so that a patterned protective layer PT3′ is formed. Referring toFIGS. 17H and 17I , the patterned protective layer PT3′ is then used as a mask to pattern the patternedsecond substrate 520P, so that a patterned second substrate 520PP including the alignment bumps 524 and theaccommodating cavities 522 is formed (FIG. 17I schematically depicts onealignment bump 524 and one accommodating cavity 522). The method for patterning the patternedsecond substrate 520P may be referred to above, and will not be described again. After the patterned second substrate 520PP including the alignment bumps 524 and theaccommodating cavities 522 is formed, the patterned second substrate 520PP may be sliced to form a plurality ofsecond substrates 520 as shown inFIG. 16 at the same time. - In the manufacturing process of the
second substrate 520, by rotating one of the unpatternedsecond substrate 510U (or the patternedsecond substrate 510P) and the second mask M2 (or the third mask M3) at an angle relative to the other, it is possible to form grooves (or bumps) that are sufficiently deep (high) and inclination angles of side walls of the grooves (or bumps) fall within a predetermined angle range. Specifically, referring toFIG. 17I andFIG. 16 , a depth D522 of theaccommodating cavity 522 and a height D524 of each of the alignment bumps 524 are larger than 120 μm, respectively. In addition,side walls accommodating cavity 522 andside walls side walls side walls alignment grooves 516, the alignment bumps 524 and thealignment grooves 516 can be well engaged with each other when thefirst substrate 510 and thesecond substrate 520 are bonded together. It is noted that, since theaccommodating cavities 522 and the alignment bumps 524 are separately formed, the depth D522 of each of theaccommodating cavities 522 and the height D524 of each of the alignment bumps 524 may not have to be the same. - Referring to
FIG. 12 , the optical electrical elements 530 (FIG. 12 schematically depicts one optical electrical element 530) are disposed in theaccommodating cavity 522 after the patterning process ofsecond substrate 520 is completed. The opticalelectrical elements 530 can be a laser or other suitable light-emitting elements, where the laser can be a vertical cavity surface emitting laser (VCSEL). - The light guide elements 540 (
FIG. 12 schematically depicts one light guide element 540) are disposed in theaccommodating grooves 512 after the patterning process offirst substrate 510 is completed. Thelight guide elements 540 can respectively be an optical fiber or waveguide. In addition, a material of thelight guide elements 540 can be polymer or a dielectric material. In the embodiment, each of thelight guide elements 540 may contact thereflective layer 560. Namely, there is no space between thelight guide elements 540 and thereflective layer 560. In another embodiment where theprotective layer 550 and thereflective layer 560 are omitted, each of thelight guide elements 540 may contact theside wall 514 a of thereflective groove 514. Alternatively, a distance may be kept between the reflective layer 560 (or theside wall 514 a of the reflective groove 514) and each of thelight guide elements 540. Moreover, each of thelight guide elements 540 may have a focusingportion 542. The focusingportion 542 is located between thereflective layer 560 and a corresponding opticalelectrical element 530. Besides, the focusingportion 542 is located on a transmission path of thelight signal 532 output from the corresponding opticalelectrical element 530, so as to converge thelight signal 532 on thereflective layer 560. Use of the focusingportion 542 can further improve a light coupling efficiency of the opticalelectrical module 500. - In an embodiment where the optical
electrical module 500 is used for receiving the light signals transmitted by thelight guide elements 540, the opticalelectrical elements 530 are replaced by light-receiving elements, and the focusingportion 542 is adapted to converge thelight signal 532 from one of thelight guide elements 540 to a corresponding light-receiving element. - In the embodiment, a surface contact area between the optical
electrical element 530 and thesecond substrate 520 is large, so that the opticalelectrical element 530 can be stably fixed on thesecond substrate 520, which improves reliability of the opticalelectrical module 500. In addition, thefirst substrate 510 can be accurately and stably combined with thesecond substrate 520 by using thealignment grooves 516 and the alignment bumps 524, so as to improve the process efficiency of the opticalelectrical module 500 and decrease the fabrication cost thereof. - In the above embodiment, the
alignment grooves 516 are formed in thefirst substrate 510 and the alignment bumps 524 are formed in thesecond substrate 520. However, the invention is not limited thereto.FIG. 19A is a partial cross-sectional schematic diagram, illustrating another first substrate of the optical electrical module according to the embodiment of the invention.FIG. 19B is a partial cross-sectional schematic diagram, illustrating another second substrate of the optical electrical module according to the embodiment of the invention. - Referring to
FIG. 19A andFIG. 190B , thealignment grooves 516 are formed in thesecond substrate 520′, and the alignment bumps 524 are formed in thefirst substrate 510′. A method for forming theaccommodating cavities 522 and thealignment grooves 516 is similar to steps shown inFIG. 17A toFIG. 17I , the difference there between is that the formation of the alignment bumps 524 are omitted, and theaccommodating cavities 522 and thealignment grooves 516 are form in thesecond substrate 520′ simultaneously in the embodiment. - The following is a brief description of how to form the
second substrate 520′, and the same contents are described with reference toFIG. 17A toFIG. 17I , and will not be described again. In the embodiment, after a protective layer and a pattern defining layer are formed in sequence on the second substrate to be processed (hereinafter, “unpatterned second substrate”), a forth mask is disposed over the unpatterned second substrate. One of the unpatterned second substrate and the forth mask is rotated by an angle relative to the other, so that an angle between the primary flat of the unpatterned second substrate and an arrangement direction having a maximum number of the forth pattern units of the forth mask is (0+90°*n), wherein θ is between 22° to 39°, and n is an integer. Then, a developing process is performed to remove portions of the pattern defining layer which were not exposed, so that the forth patterns are formed on the unpatterned second substrate. Afterwards, the unpatterned second substrate is subjected to a forth patterning process using the forth patterns as a mask to form theaccommodating cavities 522 and thealignment grooves 516. Specifically, the forth patterns are used as a mask to pattern the protective layer, so that a patterned protective layer is formed. The patterned protective layer is then used as a mask to pattern the unpatterned second substrate, so that theaccommodating cavities 522 and thealignment grooves 516 are formed simultaneously in a patterned second substrate. Then, the patterned second substrate may be sliced to form a plurality ofsecond substrate 520′ as shown inFIG. 19B at the same time. - With respect to the
first substrate 510′, the method for forming theaccommodating grooves 512 and thereflective groove 514 may refer to steps shown inFIG. 14A toFIG. 14F , which is not repeated therein. In the embodiment, the alignment bumps 524 may be formed before theaccommodating grooves 512 and thereflective groove 514 are formed. And the method for forming the alignment bumps 524 is similar to steps shown inFIG. 17A toFIG. 17E , except that the unpatterned second substrate is replaced by the first substrate. - In summary, in the manufacturing process of the substrate (the first substrate or the second substrate) of the optical electrical module of the invention, by rotating one of the substrate and the mask at an angle relative to the other, it is possible to form grooves that are sufficiently deep and inclination angles of side walls of the grooves fall within a predetermined angle range. Since the inclination angle of the side wall of the reflective groove falls within the predetermined angle range, the optical power loss due to incorrect tilt angle of the reflective surface in the conventional technique can be improved. In addition, since the accommodating grooves and the reflective groove are formed simultaneously, the angle between the accommodating grooves and the reflective groove can be controlled within 90°±2°, and the light guide elements can be positioned by the accommodating grooves without requiring a complicated alignment process to align the optical fiber, the reflective surface and the light-emitting/receiving element in the conventional technique. Moreover, since a surface contact area between the optical electrical element and the second substrate is large, the optical electrical element can be stably fixed on the second substrate, which improves reliability of the optical electrical module. In an embodiment of the invention, the first substrate can be accurately and stably combined with the second substrate by using the alignment bumps and alignment grooves, so as to improve the process efficiency of the optical electrical module and decrease the fabrication cost thereof.
- It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the invention cover modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.
Claims (7)
1. A substrate of an optical electrical module, comprising:
a plurality of accommodating grooves respectively extending along a first direction; and
a reflective groove connected with the accommodating grooves and extending along a second direction perpendicular to the first direction.
2. The substrate of the optical electrical module as claimed in claim 1 , wherein the substrate is a (100) silicon wafer.
3. The substrate of the optical electrical module as claimed in claim 1 , wherein a depth of each of the accommodating grooves and a depth of the reflective groove are larger than 120 μm, respectively.
4. The substrate of the optical electrical module as claimed in claim 3 , wherein the depth of each of the accommodating grooves and the depth of the reflective groove are the same.
5. The substrate of the optical electrical module as claimed in claim 1 , wherein side walls of the accommodating grooves and side walls of the reflective groove are respectively inclined surfaces of 42° to 49°.
6. The substrate of the optical electrical module as claimed in claim 1 , wherein the accommodating grooves are parallel to each other.
7. The substrate of the optical electrical module as claimed in claim 1 , wherein all the accommodating grooves are perpendicular to the reflective groove.
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US17/225,105 US20210223691A1 (en) | 2011-09-09 | 2021-04-08 | Substrate of an optical electrical module |
Applications Claiming Priority (10)
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TW100132684A TWI433323B (en) | 2011-09-09 | 2011-09-09 | Optical electrical module |
TW100132684 | 2011-09-09 | ||
TW100132687A TWI518394B (en) | 2011-09-09 | 2011-09-09 | Optical electrical device |
TW100132687 | 2011-09-09 | ||
TW100138390 | 2011-10-21 | ||
TW100138390A TWI434094B (en) | 2011-10-21 | 2011-10-21 | Fixing module and applications thereof |
US13/423,259 US20120241600A1 (en) | 2011-03-24 | 2012-03-18 | Optical electrical module |
US14/505,512 US9581772B2 (en) | 2011-09-09 | 2014-10-03 | Optical electrical module used for optical communication |
US15/399,743 US11009788B2 (en) | 2011-09-09 | 2017-01-06 | Method for manufacturing optical electrical module and substrate of an optical electrical module |
US17/225,105 US20210223691A1 (en) | 2011-09-09 | 2021-04-08 | Substrate of an optical electrical module |
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US10168495B1 (en) * | 2017-06-28 | 2019-01-01 | Kyocera Corporation | Optical waveguide and optical circuit board |
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US20170123156A1 (en) | 2017-05-04 |
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