US20200036081A1 - Package structure and antenna device using the same - Google Patents
Package structure and antenna device using the same Download PDFInfo
- Publication number
- US20200036081A1 US20200036081A1 US16/246,663 US201916246663A US2020036081A1 US 20200036081 A1 US20200036081 A1 US 20200036081A1 US 201916246663 A US201916246663 A US 201916246663A US 2020036081 A1 US2020036081 A1 US 2020036081A1
- Authority
- US
- United States
- Prior art keywords
- substrate
- package structure
- disposed
- die
- sealant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2283—Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/20—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device gaseous at the normal operating temperature of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/50—Structural association of antennas with earthing switches, lead-in devices or lightning protectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6605—High-frequency electrical connections
- H01L2223/6616—Vertical connections, e.g. vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
Definitions
- Embodiments of the present disclosure relate to a package structure and an antenna device using the same, and in particular they relate to a package structure for communication applications and an antenna device using the same.
- Antennas are typically used for enabling wireless communication.
- a high frequency application such as 5th generation wireless systems (5G), satellites and automotive radars, these antennas need to have good, adjustable directivity. Therefore, phase array antennas are commonly used in high frequency applications.
- 5G 5th generation wireless systems
- satellites and automotive radars these antennas need to have good, adjustable directivity. Therefore, phase array antennas are commonly used in high frequency applications.
- an antenna device in accordance with some embodiments of the present disclosure, includes a first substrate and a second substrate facing the first substrate.
- the first substrate includes an inner surface and an outer surface opposite the inner surface of the first substrate.
- the second substrate includes an inner surface and an outer surface opposite the inner surface of the second substrate.
- the antenna device also includes a die disposed between the first substrate and the second substrate, a redistribution layer disposed between the die and the inner surface of the second substrate, and an antenna unit electrically connected to the die via the redistribution layer.
- the antenna unit is arranged on at least one of the inner surface of the first substrate, the outer surface of the first substrate, the inner surface of the second substrate and the outer surface of the second substrate.
- a package structure in accordance with some other embodiments of the present disclosure, includes a first substrate and a second substrate facing the first substrate, a redistribution layer disposed between the first substrate and the second substrate, a die disposed between the redistribution layer and the first substrate, a metal layer electrically connected to the redistribution layer, and a sealant disposed between the first substrate and the second substrate and surrounding the die.
- FIG. 1 is a partial top view illustrating a package structure according to one embodiment of the present disclosure.
- FIG. 3 is a partial cross-sectional view illustrating a package structure according to another embodiment of the present disclosure.
- FIG. 4 is a partial cross-sectional view illustrating a package structure according to still another embodiment of the present disclosure.
- first and second features are formed in direct contact
- additional features may be formed between the first and second features, such that the first and second features may not be in direct contact
- spatially relative terms such as “beneath,” “below,” “lower,” “on,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures.
- the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
- the apparatus may be otherwise oriented (rotated 45 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- FIG. 1 is a partial top view illustrating a package structure 100 according to one embodiment of the present disclosure
- FIG. 2 is a partial cross-sectional view illustrating along line A-A in FIG. 1 . It should be noted that not all components of the package structure 100 are shown in FIGS. 1-2 , for the sake of brevity.
- the package structure 100 includes a first substrate 11 which is not shown in FIG. 1 , a second substrate 12 facing the first substrate 11 , a redistribution layer (RDL) 20 disposed between the first substrate 11 and the second substrate 12 , a die 30 disposed on the redistribution layer 20 , a metal layer 41 electrically connected to the redistribution layer 20 , and a sealant 51 disposed between the first substrate 11 and the second substrate 12 and surrounding the die 30 .
- RDL redistribution layer
- the first substrate 11 has an inner surface 11 - 1 and an outer surface 11 - 2 opposite the inner surface 11 - 1 .
- the second substrate 12 faces the first substrate 11 , and similarly has an inner surface 12 - 1 and an outer surface 12 - 2 opposite the inner surface 12 - 1 .
- the first substrate 11 and the second substrate 12 may be exclusive of elemental semiconductor substrates (e.g., silicon, germanium), compound semiconductor substrates (e.g., tantalum carbide, gallium arsenide, indium arsenide or indium phosphide), alloy semiconductor substrates (e.g., silicon germanium, silicon germanium carbide, gallium arsenic phosphide or gallium indium phosphide), and so on.
- elemental semiconductor substrates e.g., silicon, germanium
- compound semiconductor substrates e.g., tantalum carbide, gallium arsenide, indium arsenide or indium phosphide
- alloy semiconductor substrates e.g.,
- a material of one of the first substrate 11 and the second substrate 12 comprises at least one of glass, polyimide (PI), liquid-crystal polymer (LCP), polycarbonate (PC), polypropylene (PP), polyethylene terephthalate (PET) and other plastic or polymer materials. But the present disclosure is not limited thereto.
- the redistribution layer 20 and the die 30 are both disposed between the first substrate 11 and the second substrate 12 .
- the redistribution layer 20 is disposed between the die 30 and the inner surface 12 - 1 of the second substrate 12 .
- the die 30 is disposed between the redistribution layer 20 and the first substrate 11 .
- the die 30 may be a bare die, and the redistribution layer 20 may include a plurality of wire 21 and a plurality of insulating layers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations.
- some components of the redistribution layer 20 in FIGS. 1 and 2 have been omitted here, for the sake of brevity. That is, the structure of the redistribution layer 20 should not be limited to the structure as shown in FIGS. 1 and 2 .
- the metal layer 41 may be an antenna unit, so that the package structure 100 may be an antenna device.
- the metal layer (or the antenna unit) 41 may be electrically connected to the die 30 via the redistribution layer 20 .
- the die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41 .
- the metal layer (or the antenna unit) 41 is arranged on the outer surface 12 - 2 of the second substrate 12 , but the present disclosure is not limited thereto.
- the metal layer (or the antenna unit) 41 may be arranged on the outer surface 11 - 2 of the first substrate 11 , the inner surface 11 - 1 of the first substrate 11 , or the inner surface 12 - 1 of the second substrate 12 .
- the sealant 51 is disposed between the first substrate 11 and the second substrate 12 , and the sealant 51 surrounds the die 30 .
- the sealant 51 is used to keep the package structure 100 sealed.
- the sealant 51 may be a conductive sealant.
- the remaining space 15 between the first substrate 11 and the second substrate 12 inside the sealant 51 is vacant.
- the remaining space 15 between the first substrate 11 and the second substrate 12 inside the sealant 51 may be filled with air, inert gases or low loss-tangent materials (such as fluoropolymer).
- the effects due to the different coefficients of thermal expansion (CTE) between different components may be low. Therefore, the reliability of the package structure (or the antenna device) 100 may be effectively enhanced.
- the package structure 100 further includes a wire 43 disposed between the first substrate 11 and the second substrate 12 .
- the wire 43 may be a transmission line which is electrically connected to the die 30 through the redistribution layer 20 and electrically connected to the metal layer 41 .
- at least one via hole 60 penetrates the second substrate 12 , and the wire (transmission line) 43 passes through the via hole 60 to connect to the metal layer 41 .
- the present disclosure is not limited thereto.
- the via hole 60 may penetrate the first substrate 11 , and the wire (transmission line) 43 passes through the via hole 60 to connect to the metal layer 41 .
- the second substrate 12 (or the first substrate 11 ) may include at least one via hole 60 , and the wire 43 may pass through the via hole 60 and electrically connect the metal layer (or the antenna unit) 41 to the redistribution layer 20 and the die 30 .
- dielectric loss may be lower than in traditional structures (e.g., the antenna, antennas or phase array antenna made through printed circuit board (PCB)).
- the die 30 is sealed between the first substrate 11 and the second substrate 12 inside the sealant 51 , so that the package structure 100 may have better corrosion resistance than traditional packages.
- the manufacturing cost of the antenna device using the package structure 100 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package).
- the number and the location of the sealant 51 and the number and the location of the spacers 70 may be different from FIGS. 1 and 2 , depending on demand.
- the package structure 100 may further include at least one shielding layer 45 disposed on at least one of the inner surface 11 - 1 of the first substrate 11 and the inner surface 12 - 1 of the second substrate 12 .
- the shielding layers 45 are disposed on both the inner surface 11 - 1 of the first substrate 11 and the inner surface 12 - 1 of the second substrate 12 as shown in FIG. 2 .
- the shielding layer 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation.
- the package structure 100 may further include at least one bonding element 80 disposed between first substrate 11 and the second substrate 12 .
- the package structure 100 includes solder balls disposed on the redistribution layer 20 . These solder balls are used as bonding elements 80 to electrically connect the conductive component (e.g., the shielding layer 45 ) on the inner surface 11 - 1 of the first substrate 11 to the conductive component (e.g., the shielding layer 45 ) on the inner surface 12 - 1 of the second substrate 12 .
- the bonding element 80 is not limited to the form of solder balls as shown in FIGS. 1 and 2 . Other suitable forms may be applied in the package structure 100 . Similarly, the number and the location of the bonding element 80 may be different from FIGS. 1 and 2 , depending on demand.
- the package structure 100 may further include a potting compound layer 52 disposed outside the sealant 51 .
- the potting compound layer 52 may be a second sealant, and the sealant 51 is disposed between the potting compound layer 52 and the die 30 .
- the potting compound layer 52 may provide better protection for the die 30 between the first substrate 11 and the second substrate 12 .
- FIG. 3 is a partial cross-sectional view illustrating a package structure 101 according to another embodiment of the present disclosure.
- the package structure 101 is used as an antenna device.
- the package structure (or the antenna device) 101 includes a first substrate 11 and a second substrate 12 facing the first substrate 11 .
- the package structure (or the antenna device) 101 also includes a die 30 disposed between the first substrate 11 and the second substrate 12 , a redistribution layer (RDL) 20 disposed between the die 30 and the second substrate 12 , and a metal layer (or the antenna unit) 41 electrically connected to the die via the redistribution layer 20 .
- RDL redistribution layer
- the first substrate 11 has an inner surface 11 - 1 and an outer surface 11 - 2 opposite the inner surface 11 - 1
- the second substrate 12 has an inner surface 12 - 1 and an outer surface 12 - 2 opposite the inner surface 12 - 1
- the metal layer (or the antenna unit) 41 is arranged on the outer surface 12 - 2 of the second substrate 12 .
- the first substrate 11 and the second substrate 12 may be glass substrates.
- the present disclosure is not limited thereto.
- the first substrate 11 and the second substrate 12 may be polyimide (PI) substrates, liquid-crystal polymer (LCP) substrates, polycarbonate (PC) substrates, polypropylene (PP) substrates, polyethylene terephthalate (PET) substrates or other plastic or polymer substrates.
- PI polyimide
- LCP liquid-crystal polymer
- PC polycarbonate
- PP polypropylene
- PET polyethylene terephthalate
- the redistribution layer 20 and the die 30 are both disposed between the first substrate 11 and the second substrate 12 , and some portions of the redistribution layer 20 is disposed between the die 30 and the inner surface 12 - 1 of the second substrate 12 .
- the die 30 is disposed between the redistribution layer 20 and the first substrate 11 .
- the die 30 may be a bare die, and the redistribution layer 20 may include a plurality of wire 21 and a plurality of insulating layers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations.
- some components of the redistribution layer 20 in FIG. 3 have been omitted here, for the sake of brevity. That is, the structure of the redistribution layer 20 should not be limited to the structure as shown in FIG. 3 .
- the metal layer (or the antenna unit) 41 may be electrically connected to the die 30 via the redistribution layer 20 .
- the die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41 .
- the metal layer (or the antenna unit) 41 is arranged on the outer surface 12 - 2 of the second substrate 12 , but the present disclosure is not limited thereto.
- the package structure (or the antenna device) 101 may include a sealant 51 ′ disposed between the first substrate 11 and the second substrate 12 , and the sealant 51 ′ surrounds the die 30 .
- the difference between the package structure 101 and the package structure 100 is that a portion of the sealant 51 ′ (the sealant 51 ′ on the left side in FIG. 3 ) in the package structure (or the antenna device) 101 is disposed on the redistribution layer 20 as shown in FIG. 3 , while the sealant 51 in the package structure (or the antenna device) 100 is disposed outside the redistribution layer 20 as shown in FIG. 2 .
- the remaining space 15 between the first substrate 11 and the second substrate 12 inside the sealant 51 ′ is vacant.
- the remaining space 15 between the first substrate 11 and the second substrate 12 inside the sealant 51 ′ may be filled with air, inert gases or low loss-tangent materials (such as fluoropolymer).
- the effects due to the different coefficients of thermal expansion (CTE) between different components may be low. Therefore, the reliability of the package structure (or the antenna device) 101 may be effectively enhanced.
- the package structure 101 further includes a wire 43 disposed between the first substrate 11 and the second substrate 12 .
- the wire 43 may be a transmission line which is electrically connected to the die 30 through the redistribution layer 20 and electrically connected to the metal layer 41 .
- at least one via hole 60 penetrates the second substrate 12 , and the wire (transmission line) 43 passes through the via hole 60 to connect to the metal layer 41 .
- the present disclosure is not limited thereto.
- the second substrate 12 may include at least one via hole 60 , and the wire 43 may pass through the via hole 60 and electrically connect the metal layer (or the antenna unit) 41 to the redistribution layer 20 and the die 30 .
- dielectric loss may be lower than in traditional structures (e.g., the antenna made through printed circuit board (PCB)).
- the die 30 is sealed between the first substrate 11 and the second substrate 12 inside the sealant 51 ′, so that the package structure 101 may have better corrosion resistance than traditional packages.
- the manufacturing cost of the antenna device using the package structure 101 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package).
- the package structure 101 may further include a plurality of spacers 70 ′ disposed between the first substrate 11 and the second substrate 12 as shown in FIG. 3 .
- the spacers 70 ′ may be used to maintain the gap between the first substrate 11 and the second substrate 12 .
- the spacers 70 ′ may be cell gap spacers, such as a ball spacer, a photo spacer, glass fiber, or another suitable spacer.
- the package structure 101 may further include shielding layers 45 disposed on both the inner surface 11 - 1 of the first substrate 11 and the inner surface 12 - 1 of the second substrate 12 as shown in FIG. 3 .
- Each of the shielding layers 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation.
- the package structure 101 may further include at least one bonding element 80 ′ disposed between first substrate 11 and the second substrate 12 .
- the package structure 101 includes solder balls disposed on the redistribution layer 20 . These solder balls are used as bonding elements 80 ′ to electrically connect the conductive component (e.g., the shielding layer 45 ) on the inner surface 11 - 1 of the first substrate 11 to the conductive component (e.g., the shielding layer 45 ) on the inner surface 12 - 1 of the second substrate 12 .
- the number and the location of the spacers 70 ′ and the number and the location of the bonding element 80 ′ in the package structure 101 as shown in FIG. 3 are different from the number and the location of the spacers 70 and the number and the location of the bonding element 80 in the package structure 100 as shown in FIG. 2 .
- the package structure 101 may further include a potting compound layer 52 disposed outside the sealant 51 ′.
- the potting compound layer 52 may be a second sealant, and the sealant 51 ′ is disposed between the potting compound layer 52 and the die 30 .
- the potting compound layer 52 may provide better protection for the die 30 between the first substrate 11 and the second substrate 12 .
- FIG. 4 is a partial cross-sectional view illustrating a package structure 102 according to still another embodiment of the present disclosure.
- the package structure 102 includes a first substrate 11 and a second substrate 12 opposite each other, a redistribution layer (RDL) 20 disposed between the first substrate 11 and the second substrate 12 , a die 30 disposed on the redistribution layer 20 , a metal layer 41 ′ electrically connected to the redistribution layer 20 , and a sealant 51 disposed between the first substrate 11 and the second substrate 12 and surrounding the die 30 .
- RDL redistribution layer
- the first substrate 11 has an inner surface 11 - 1 and an outer surface 11 - 2 opposite the inner surface 11 - 1 .
- the second substrate 12 faces the first substrate 11 , and similarly has an inner surface 12 - 1 and an outer surface 12 - 2 opposite the inner surface 12 - 1 .
- the first substrate 11 and the second substrate 12 may be glass substrates.
- the present disclosure is not limited thereto.
- the first substrate 11 and the second substrate 12 may be polyimide (PI) substrates, liquid-crystal polymer (LCP) substrates, polycarbonate (PC) substrates, polypropylene (PP) substrates, polyethylene terephthalate (PET) substrates or other plastic or polymer substrates.
- PI polyimide
- LCP liquid-crystal polymer
- PC polycarbonate
- PP polypropylene
- PET polyethylene terephthalate
- the redistribution layer 20 and the die 30 are both disposed between the first substrate 11 and the second substrate 12 .
- the redistribution layer 20 is disposed between the die 30 and the inner surface 12 - 1 of the second substrate 12 .
- the die 30 is disposed between the redistribution layer 20 and the first substrate 11 .
- the die 30 may be a bare die, and the redistribution layer 20 may include a plurality of wire 21 and a plurality of insulating layers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations.
- some components of the redistribution layer 20 in FIG. 4 have been omitted here, for the sake of brevity. That is, the structure of the redistribution layer 20 should not be limited to the structure as shown in FIG. 4 .
- the metal layer 41 ′ may be an antenna unit, so that the package structure 102 may be an antenna device.
- the metal layer (or the antenna unit) 41 ′ may be electrically connected to the die 30 via the redistribution layer 20 .
- the die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41 ′.
- the difference between the package structure 102 and the package structure 100 is that the metal layer 41 ′ in the package structure 102 is disposed on the outer surface 11 - 2 of the first substrate 11 as shown in FIG. 4 , while the metal layer 41 in the package structure 100 is disposed on the outer surface 12 - 2 of the second substrate 12 as shown in FIG. 2 .
- the sealant 51 is disposed between the first substrate 11 and the second substrate 12 , and the sealant 51 surrounds the die 30 .
- the sealant 51 is used to keep the package structure 100 sealed.
- the sealant 51 may be a conductive sealant.
- the remaining space 15 ′ between the first substrate 11 and the second substrate 12 inside the sealant 51 is filled with low loss-tangent materials (such as fluoropolymer).
- the package structure 102 further includes a wire 43 ′ disposed between the first substrate 11 and the second substrate 12 .
- the wire 43 ′ may be a transmission line which is electrically connected to the die 30 through the redistribution layer 20 and electrically connected to the metal layer 41 ′.
- at least one via hole 60 ′ penetrates the first substrate 11 , and the wire (transmission line) 43 ′ passes through the via hole 60 ′ to connect to the metal layer 41 ′.
- the first substrate 11 may include at least one via hole 60 ′, and the wire 43 ′ may pass through the via hole 60 ′ and electrically connect the metal layer (or the antenna unit) 41 ′ to the redistribution layer 20 and the die 30 .
- dielectric loss may be lower than in traditional structures (e.g., the antenna made through printed circuit board (PCB)).
- the die 30 is sealed between the first substrate 11 and the second substrate 12 inside the sealant 51 , so that the package structure 102 may have better corrosion resistance than traditional packages.
- the manufacturing cost of the antenna device using the package structure 102 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package).
- the package structure 102 may further include a plurality of spacers 70 disposed between the first substrate 11 and the second substrate 12 .
- the spacers 70 may be used to maintain the gap between the first substrate 11 and the second substrate 12 .
- the spacers 70 may be cell gap spacers, such as a ball spacer, a photo spacer, glass fiber, or another suitable spacer.
- the package structure 102 may further include shielding layers 45 disposed on both the inner surface 11 - 1 of the first substrate 11 and the inner surface 12 - 1 of the second substrate 12 as shown in FIG. 4 .
- Each of the shielding layers 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation.
- the package structure 102 may further include at least one bonding element 80 disposed between first substrate 11 and the second substrate 12 .
- the package structure 102 includes solder balls disposed on the redistribution layer 20 . These solder balls are used as bonding elements 80 to electrically connect the conductive component (e.g., the shielding layer 45 ) on the inner surface 11 - 1 of the first substrate 11 to the conductive component (e.g., the shielding layer 45 ) on the inner surface 12 - 1 of the second substrate 12 .
- the package structure 102 may further include a potting compound layer 52 disposed outside the sealant 51 .
- the potting compound layer 52 may be a second sealant, and the sealant 51 is disposed between the potting compound layer 52 and the die 30 .
- the potting compound layer 52 may provide better protection for the die 30 between the first substrate 11 and the second substrate 12 .
- the antenna device is used as an example in the embodiments described above, but the present disclosure is not limited thereto.
- the package structure 100 (or 101 , 102 ) may be used in other devices for communication application.
- the package structure (or the antenna device) of the embodiments of the present disclosure includes the first substrate and the second substrate, and the remaining space between the first substrate and the second substrate inside the sealant is vacant or filled with air or inert gases, and thus the effects due to the different coefficients of thermal expansion (CTE) between different components may be low.
- the wire (transmission line) passes through one of the first substrate and the second substrate, the remaining space (which is vacant or filled with air, inert gases or low loss-tangent materials), and the redistribution layer to electrically connect the metal layer (or the antenna unit) and the die, and thus the dielectric loss may be effectively reduced.
- the die in the package structure (or the antenna device) of the embodiments of the present disclosure is sealed between the first substrate and the second substrate inside the sealant (and the sealant may be inside the potting compound layer in some embodiments), and thus the package structure (or the antenna device) may have better corrosion resistance and the reliability of the package structure (or the antenna device) may be effectively enhanced.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Geometry (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
- This application claims the benefit of U.S. Provisional Application No. 62/711,671, filed Jul. 30, 2018, and the entirety of which is incorporated by reference herein.
- Embodiments of the present disclosure relate to a package structure and an antenna device using the same, and in particular they relate to a package structure for communication applications and an antenna device using the same.
- Antennas are typically used for enabling wireless communication. In a high frequency application, such as 5th generation wireless systems (5G), satellites and automotive radars, these antennas need to have good, adjustable directivity. Therefore, phase array antennas are commonly used in high frequency applications.
- However, traditional package structures for phase array antennas may not meet demands for antenna devices in high frequency applications nowadays because of their high manufacturing cost, high dielectric loss, and larger areas.
- In accordance with some embodiments of the present disclosure, an antenna device is provided. The antenna device includes a first substrate and a second substrate facing the first substrate. The first substrate includes an inner surface and an outer surface opposite the inner surface of the first substrate. The second substrate includes an inner surface and an outer surface opposite the inner surface of the second substrate. The antenna device also includes a die disposed between the first substrate and the second substrate, a redistribution layer disposed between the die and the inner surface of the second substrate, and an antenna unit electrically connected to the die via the redistribution layer. The antenna unit is arranged on at least one of the inner surface of the first substrate, the outer surface of the first substrate, the inner surface of the second substrate and the outer surface of the second substrate.
- In accordance with some other embodiments of the present disclosure, a package structure is provided. The package structure includes a first substrate and a second substrate facing the first substrate, a redistribution layer disposed between the first substrate and the second substrate, a die disposed between the redistribution layer and the first substrate, a metal layer electrically connected to the redistribution layer, and a sealant disposed between the first substrate and the second substrate and surrounding the die.
- Aspects of the embodiments of the present disclosure are understood from the following detailed description when read with the accompanying figures. It should be noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
-
FIG. 1 is a partial top view illustrating a package structure according to one embodiment of the present disclosure. -
FIG. 2 is a partial cross-sectional view illustrating along line A-A inFIG. 1 . -
FIG. 3 is a partial cross-sectional view illustrating a package structure according to another embodiment of the present disclosure. -
FIG. 4 is a partial cross-sectional view illustrating a package structure according to still another embodiment of the present disclosure. - The following disclosure provides many different embodiments, or examples, for implementing different features of the subject matter provided. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact.
- It should be understood that additional steps may be implemented before, during, or after the illustrated methods, and some steps might be replaced or omitted in other embodiments of the illustrated methods.
- Furthermore, spatially relative terms, such as “beneath,” “below,” “lower,” “on,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 45 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It should be understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined in the embodiments of the present disclosure.
-
FIG. 1 is a partial top view illustrating apackage structure 100 according to one embodiment of the present disclosure, andFIG. 2 is a partial cross-sectional view illustrating along line A-A inFIG. 1 . It should be noted that not all components of thepackage structure 100 are shown inFIGS. 1-2 , for the sake of brevity. - Referring to
FIGS. 1 and 2 , thepackage structure 100 includes afirst substrate 11 which is not shown inFIG. 1 , asecond substrate 12 facing thefirst substrate 11, a redistribution layer (RDL) 20 disposed between thefirst substrate 11 and thesecond substrate 12, a die 30 disposed on theredistribution layer 20, ametal layer 41 electrically connected to theredistribution layer 20, and asealant 51 disposed between thefirst substrate 11 and thesecond substrate 12 and surrounding thedie 30. - As shown in
FIG. 2 , thefirst substrate 11 has an inner surface 11-1 and an outer surface 11-2 opposite the inner surface 11-1. Thesecond substrate 12 faces thefirst substrate 11, and similarly has an inner surface 12-1 and an outer surface 12-2 opposite the inner surface 12-1. Here, thefirst substrate 11 and thesecond substrate 12 may be exclusive of elemental semiconductor substrates (e.g., silicon, germanium), compound semiconductor substrates (e.g., tantalum carbide, gallium arsenide, indium arsenide or indium phosphide), alloy semiconductor substrates (e.g., silicon germanium, silicon germanium carbide, gallium arsenic phosphide or gallium indium phosphide), and so on. - In this embodiment, a material of one of the
first substrate 11 and thesecond substrate 12 comprises at least one of glass, polyimide (PI), liquid-crystal polymer (LCP), polycarbonate (PC), polypropylene (PP), polyethylene terephthalate (PET) and other plastic or polymer materials. But the present disclosure is not limited thereto. - The
redistribution layer 20 and the die 30 are both disposed between thefirst substrate 11 and thesecond substrate 12. As shown inFIGS. 1 and 2 , theredistribution layer 20 is disposed between the die 30 and the inner surface 12-1 of thesecond substrate 12. In other words, the die 30 is disposed between theredistribution layer 20 and thefirst substrate 11. The die 30 may be a bare die, and theredistribution layer 20 may include a plurality ofwire 21 and a plurality ofinsulating layers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations. It should be noted that some components of theredistribution layer 20 inFIGS. 1 and 2 have been omitted here, for the sake of brevity. That is, the structure of theredistribution layer 20 should not be limited to the structure as shown inFIGS. 1 and 2 . - In this embodiment, the
metal layer 41 may be an antenna unit, so that thepackage structure 100 may be an antenna device. The metal layer (or the antenna unit) 41 may be electrically connected to the die 30 via theredistribution layer 20. The die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41. As shown inFIG. 2 , the metal layer (or the antenna unit) 41 is arranged on the outer surface 12-2 of thesecond substrate 12, but the present disclosure is not limited thereto. In some embodiments, the metal layer (or the antenna unit) 41 may be arranged on the outer surface 11-2 of thefirst substrate 11, the inner surface 11-1 of thefirst substrate 11, or the inner surface 12-1 of thesecond substrate 12. - In this embodiment, the
sealant 51 is disposed between thefirst substrate 11 and thesecond substrate 12, and thesealant 51 surrounds thedie 30. Thesealant 51 is used to keep thepackage structure 100 sealed. In some embodiments, thesealant 51 may be a conductive sealant. - In this embodiment, the
remaining space 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51 is vacant. In some embodiments, theremaining space 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51 may be filled with air, inert gases or low loss-tangent materials (such as fluoropolymer). Compared to traditional package structures using molding compounds, since theremaining space 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51 is vacant or filled with air or inert gases, the effects due to the different coefficients of thermal expansion (CTE) between different components may be low. Therefore, the reliability of the package structure (or the antenna device) 100 may be effectively enhanced. - Referring to
FIGS. 1 and 2 , in this embodiment, thepackage structure 100 further includes awire 43 disposed between thefirst substrate 11 and thesecond substrate 12. In more detail, thewire 43 may be a transmission line which is electrically connected to thedie 30 through theredistribution layer 20 and electrically connected to themetal layer 41. In the embodiment as shown inFIG. 2 , at least one viahole 60 penetrates thesecond substrate 12, and the wire (transmission line) 43 passes through the viahole 60 to connect to themetal layer 41. However, the present disclosure is not limited thereto. In other embodiments, if themetal layer 41 is disposed on the outer surface 11-2 of the first substrate 11 (as shown in followingFIG. 4 ), then the viahole 60 may penetrate thefirst substrate 11, and the wire (transmission line) 43 passes through the viahole 60 to connect to themetal layer 41. - In other words, the second substrate 12 (or the first substrate 11) may include at least one via
hole 60, and thewire 43 may pass through the viahole 60 and electrically connect the metal layer (or the antenna unit) 41 to theredistribution layer 20 and thedie 30. - Since the
wire 43 passes through the second substrate 12 (or the first substrate 11), the remaining space 15 (which is vacant or filled with air, inert gases or low loss-tangent materials), and theredistribution layer 20 to electrically connect the metal layer (or the antenna unit) 41 and thedie 30, dielectric loss may be lower than in traditional structures (e.g., the antenna, antennas or phase array antenna made through printed circuit board (PCB)). - Moreover, the
die 30 is sealed between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51, so that thepackage structure 100 may have better corrosion resistance than traditional packages. - Furthermore, the manufacturing cost of the antenna device using the
package structure 100 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package). - It should be noted that the number and the location of the
sealant 51 and the number and the location of thespacers 70 may be different fromFIGS. 1 and 2 , depending on demand. - In some embodiments, the
package structure 100 may further include at least oneshielding layer 45 disposed on at least one of the inner surface 11-1 of thefirst substrate 11 and the inner surface 12-1 of thesecond substrate 12. For example, the shielding layers 45 are disposed on both the inner surface 11-1 of thefirst substrate 11 and the inner surface 12-1 of thesecond substrate 12 as shown inFIG. 2 . Theshielding layer 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation. - In some embodiments, the
package structure 100 may further include at least onebonding element 80 disposed betweenfirst substrate 11 and thesecond substrate 12. For example, thepackage structure 100 includes solder balls disposed on theredistribution layer 20. These solder balls are used asbonding elements 80 to electrically connect the conductive component (e.g., the shielding layer 45) on the inner surface 11-1 of thefirst substrate 11 to the conductive component (e.g., the shielding layer 45) on the inner surface 12-1 of thesecond substrate 12. - It should be noted that the
bonding element 80 is not limited to the form of solder balls as shown inFIGS. 1 and 2 . Other suitable forms may be applied in thepackage structure 100. Similarly, the number and the location of thebonding element 80 may be different fromFIGS. 1 and 2 , depending on demand. - In some embodiments, the
package structure 100 may further include apotting compound layer 52 disposed outside thesealant 51. In more detail, thepotting compound layer 52 may be a second sealant, and thesealant 51 is disposed between the pottingcompound layer 52 and thedie 30. Thepotting compound layer 52 may provide better protection for the die 30 between thefirst substrate 11 and thesecond substrate 12. -
FIG. 3 is a partial cross-sectional view illustrating apackage structure 101 according to another embodiment of the present disclosure. In this embodiment, thepackage structure 101 is used as an antenna device. The package structure (or the antenna device) 101 includes afirst substrate 11 and asecond substrate 12 facing thefirst substrate 11. The package structure (or the antenna device) 101 also includes a die 30 disposed between thefirst substrate 11 and thesecond substrate 12, a redistribution layer (RDL) 20 disposed between the die 30 and thesecond substrate 12, and a metal layer (or the antenna unit) 41 electrically connected to the die via theredistribution layer 20. - As shown in
FIG. 3 , thefirst substrate 11 has an inner surface 11-1 and an outer surface 11-2 opposite the inner surface 11-1, and thesecond substrate 12 has an inner surface 12-1 and an outer surface 12-2 opposite the inner surface 12-1. In this embodiment, the metal layer (or the antenna unit) 41 is arranged on the outer surface 12-2 of thesecond substrate 12. - In this embodiment, the
first substrate 11 and thesecond substrate 12 may be glass substrates. However, the present disclosure is not limited thereto. In other embodiments, thefirst substrate 11 and thesecond substrate 12 may be polyimide (PI) substrates, liquid-crystal polymer (LCP) substrates, polycarbonate (PC) substrates, polypropylene (PP) substrates, polyethylene terephthalate (PET) substrates or other plastic or polymer substrates. - As shown in
FIG. 3 , theredistribution layer 20 and the die 30 are both disposed between thefirst substrate 11 and thesecond substrate 12, and some portions of theredistribution layer 20 is disposed between the die 30 and the inner surface 12-1 of thesecond substrate 12. In other words, thedie 30 is disposed between theredistribution layer 20 and thefirst substrate 11. The die 30 may be a bare die, and theredistribution layer 20 may include a plurality ofwire 21 and a plurality of insulatinglayers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations. Similarly, some components of theredistribution layer 20 inFIG. 3 have been omitted here, for the sake of brevity. That is, the structure of theredistribution layer 20 should not be limited to the structure as shown inFIG. 3 . - The metal layer (or the antenna unit) 41 may be electrically connected to the die 30 via the
redistribution layer 20. The die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41. As shown inFIG. 3 , the metal layer (or the antenna unit) 41 is arranged on the outer surface 12-2 of thesecond substrate 12, but the present disclosure is not limited thereto. - Moreover, the package structure (or the antenna device) 101 may include a
sealant 51′ disposed between thefirst substrate 11 and thesecond substrate 12, and thesealant 51′ surrounds thedie 30. The difference between thepackage structure 101 and thepackage structure 100 is that a portion of thesealant 51′ (thesealant 51′ on the left side inFIG. 3 ) in the package structure (or the antenna device) 101 is disposed on theredistribution layer 20 as shown inFIG. 3 , while thesealant 51 in the package structure (or the antenna device) 100 is disposed outside theredistribution layer 20 as shown inFIG. 2 . - In this embodiment, the remaining
space 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51′ is vacant. In some embodiments, the remainingspace 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51′ may be filled with air, inert gases or low loss-tangent materials (such as fluoropolymer). Compared to traditional package structures using molding compounds, since the remainingspace 15 between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51′ is vacant or filled with air or inert gases, the effects due to the different coefficients of thermal expansion (CTE) between different components may be low. Therefore, the reliability of the package structure (or the antenna device) 101 may be effectively enhanced. - Referring to
FIG. 3 , in this embodiment, thepackage structure 101 further includes awire 43 disposed between thefirst substrate 11 and thesecond substrate 12. In more detail, thewire 43 may be a transmission line which is electrically connected to the die 30 through theredistribution layer 20 and electrically connected to themetal layer 41. In the embodiment as shown inFIG. 3 , at least one viahole 60 penetrates thesecond substrate 12, and the wire (transmission line) 43 passes through the viahole 60 to connect to themetal layer 41. However, the present disclosure is not limited thereto. - In other words, the
second substrate 12 may include at least one viahole 60, and thewire 43 may pass through the viahole 60 and electrically connect the metal layer (or the antenna unit) 41 to theredistribution layer 20 and thedie 30. - Since the
wire 43 passes through thesecond substrate 12, the remaining space 15 (which is vacant or filled with air, inert gases or low loss-tangent materials), and theredistribution layer 20 to electrically connect the metal layer (or the antenna unit) 41 and thedie 30, dielectric loss may be lower than in traditional structures (e.g., the antenna made through printed circuit board (PCB)). - Moreover, the
die 30 is sealed between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51′, so that thepackage structure 101 may have better corrosion resistance than traditional packages. - Furthermore, the manufacturing cost of the antenna device using the
package structure 101 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package). - In this embodiment, the
package structure 101 may further include a plurality ofspacers 70′ disposed between thefirst substrate 11 and thesecond substrate 12 as shown inFIG. 3 . Thespacers 70′ may be used to maintain the gap between thefirst substrate 11 and thesecond substrate 12. For example, thespacers 70′ may be cell gap spacers, such as a ball spacer, a photo spacer, glass fiber, or another suitable spacer. - In this embodiment, the
package structure 101 may further include shieldinglayers 45 disposed on both the inner surface 11-1 of thefirst substrate 11 and the inner surface 12-1 of thesecond substrate 12 as shown inFIG. 3 . Each of the shielding layers 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation. - In this embodiment, the
package structure 101 may further include at least onebonding element 80′ disposed betweenfirst substrate 11 and thesecond substrate 12. For example, thepackage structure 101 includes solder balls disposed on theredistribution layer 20. These solder balls are used asbonding elements 80′ to electrically connect the conductive component (e.g., the shielding layer 45) on the inner surface 11-1 of thefirst substrate 11 to the conductive component (e.g., the shielding layer 45) on the inner surface 12-1 of thesecond substrate 12. - Moreover, the number and the location of the
spacers 70′ and the number and the location of thebonding element 80′ in thepackage structure 101 as shown inFIG. 3 are different from the number and the location of thespacers 70 and the number and the location of thebonding element 80 in thepackage structure 100 as shown inFIG. 2 . - Similarly, the
package structure 101 may further include apotting compound layer 52 disposed outside thesealant 51′. In more detail, thepotting compound layer 52 may be a second sealant, and thesealant 51′ is disposed between the pottingcompound layer 52 and thedie 30. Thepotting compound layer 52 may provide better protection for the die 30 between thefirst substrate 11 and thesecond substrate 12. -
FIG. 4 is a partial cross-sectional view illustrating apackage structure 102 according to still another embodiment of the present disclosure. Referring toFIG. 4 , thepackage structure 102 includes afirst substrate 11 and asecond substrate 12 opposite each other, a redistribution layer (RDL) 20 disposed between thefirst substrate 11 and thesecond substrate 12, a die 30 disposed on theredistribution layer 20, ametal layer 41′ electrically connected to theredistribution layer 20, and asealant 51 disposed between thefirst substrate 11 and thesecond substrate 12 and surrounding thedie 30. - As shown in
FIG. 4 , thefirst substrate 11 has an inner surface 11-1 and an outer surface 11-2 opposite the inner surface 11-1. Thesecond substrate 12 faces thefirst substrate 11, and similarly has an inner surface 12-1 and an outer surface 12-2 opposite the inner surface 12-1. - In this embodiment, the
first substrate 11 and thesecond substrate 12 may be glass substrates. However, the present disclosure is not limited thereto. In other embodiments, thefirst substrate 11 and thesecond substrate 12 may be polyimide (PI) substrates, liquid-crystal polymer (LCP) substrates, polycarbonate (PC) substrates, polypropylene (PP) substrates, polyethylene terephthalate (PET) substrates or other plastic or polymer substrates. - The
redistribution layer 20 and the die 30 are both disposed between thefirst substrate 11 and thesecond substrate 12. As shown inFIG. 4 , theredistribution layer 20 is disposed between the die 30 and the inner surface 12-1 of thesecond substrate 12. In other words, thedie 30 is disposed between theredistribution layer 20 and thefirst substrate 11. The die 30 may be a bare die, and theredistribution layer 20 may include a plurality ofwire 21 and a plurality of insulatinglayers 22 that make the I/O pads 31 of integrated circuit of the die 30 available in other locations. It should be noted that some components of theredistribution layer 20 inFIG. 4 have been omitted here, for the sake of brevity. That is, the structure of theredistribution layer 20 should not be limited to the structure as shown inFIG. 4 . - In this embodiment, the
metal layer 41′ may be an antenna unit, so that thepackage structure 102 may be an antenna device. The metal layer (or the antenna unit) 41′ may be electrically connected to the die 30 via theredistribution layer 20. The die 30 may receive and/or transmit an electronic-magnetic wave through the metal layer (or the antenna unit) 41′. The difference between thepackage structure 102 and thepackage structure 100 is that themetal layer 41′ in thepackage structure 102 is disposed on the outer surface 11-2 of thefirst substrate 11 as shown inFIG. 4 , while themetal layer 41 in thepackage structure 100 is disposed on the outer surface 12-2 of thesecond substrate 12 as shown inFIG. 2 . - In this embodiment, the
sealant 51 is disposed between thefirst substrate 11 and thesecond substrate 12, and thesealant 51 surrounds thedie 30. Thesealant 51 is used to keep thepackage structure 100 sealed. In some embodiments, thesealant 51 may be a conductive sealant. - In this embodiment, the remaining
space 15′ between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51 is filled with low loss-tangent materials (such as fluoropolymer). - Referring to
FIG. 4 , in this embodiment, thepackage structure 102 further includes awire 43′ disposed between thefirst substrate 11 and thesecond substrate 12. In more detail, thewire 43′ may be a transmission line which is electrically connected to the die 30 through theredistribution layer 20 and electrically connected to themetal layer 41′. In the embodiment as shown inFIG. 4 , at least one viahole 60′ penetrates thefirst substrate 11, and the wire (transmission line) 43′ passes through the viahole 60′ to connect to themetal layer 41′. - In other words, the
first substrate 11 may include at least one viahole 60′, and thewire 43′ may pass through the viahole 60′ and electrically connect the metal layer (or the antenna unit) 41′ to theredistribution layer 20 and thedie 30. - Since the
wire 43′ passes through thefirst substrate 11, the remainingspace 15′ (which is filled with low loss-tangent materials), and theredistribution layer 20 to electrically connect the metal layer (or the antenna unit) 41′ and thedie 30, dielectric loss may be lower than in traditional structures (e.g., the antenna made through printed circuit board (PCB)). - Moreover, the
die 30 is sealed between thefirst substrate 11 and thesecond substrate 12 inside thesealant 51, so that thepackage structure 102 may have better corrosion resistance than traditional packages. - Furthermore, the manufacturing cost of the antenna device using the
package structure 102 according to the embodiments of the present disclosure may be lower than the manufacturing cost of the traditional AiP (Antenna in Package). - In some embodiments, the
package structure 102 may further include a plurality ofspacers 70 disposed between thefirst substrate 11 and thesecond substrate 12. Thespacers 70 may be used to maintain the gap between thefirst substrate 11 and thesecond substrate 12. For example, thespacers 70 may be cell gap spacers, such as a ball spacer, a photo spacer, glass fiber, or another suitable spacer. - In some embodiments, the
package structure 102 may further include shieldinglayers 45 disposed on both the inner surface 11-1 of thefirst substrate 11 and the inner surface 12-1 of thesecond substrate 12 as shown inFIG. 4 . Each of the shielding layers 45 may be another metal layer (e.g., a ground layer) for electromagnetic shielding that blocks radio frequency electromagnetic radiation. - In some embodiments, the
package structure 102 may further include at least onebonding element 80 disposed betweenfirst substrate 11 and thesecond substrate 12. For example, thepackage structure 102 includes solder balls disposed on theredistribution layer 20. These solder balls are used asbonding elements 80 to electrically connect the conductive component (e.g., the shielding layer 45) on the inner surface 11-1 of thefirst substrate 11 to the conductive component (e.g., the shielding layer 45) on the inner surface 12-1 of thesecond substrate 12. - In some embodiments, the
package structure 102 may further include apotting compound layer 52 disposed outside thesealant 51. In more detail, thepotting compound layer 52 may be a second sealant, and thesealant 51 is disposed between the pottingcompound layer 52 and thedie 30. Thepotting compound layer 52 may provide better protection for the die 30 between thefirst substrate 11 and thesecond substrate 12. - It should be noted that the antenna device is used as an example in the embodiments described above, but the present disclosure is not limited thereto. In some embodiments, the package structure 100 (or 101, 102) may be used in other devices for communication application.
- In summary, the package structure (or the antenna device) of the embodiments of the present disclosure includes the first substrate and the second substrate, and the remaining space between the first substrate and the second substrate inside the sealant is vacant or filled with air or inert gases, and thus the effects due to the different coefficients of thermal expansion (CTE) between different components may be low. Furthermore, in the package structure (or the antenna device) of the embodiments of the present disclosure, the wire (transmission line) passes through one of the first substrate and the second substrate, the remaining space (which is vacant or filled with air, inert gases or low loss-tangent materials), and the redistribution layer to electrically connect the metal layer (or the antenna unit) and the die, and thus the dielectric loss may be effectively reduced. Furthermore, the die in the package structure (or the antenna device) of the embodiments of the present disclosure is sealed between the first substrate and the second substrate inside the sealant (and the sealant may be inside the potting compound layer in some embodiments), and thus the package structure (or the antenna device) may have better corrosion resistance and the reliability of the package structure (or the antenna device) may be effectively enhanced.
- The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection should be determined by the claims. In addition, although some embodiments of the present disclosure are disclosed above, they are not intended to limit the scope of the present disclosure.
- Reference throughout this specification to features, advantages, or similar language does not imply that all of the features and advantages that may be realized with the present disclosure should be or are in any single embodiment of the disclosure. Rather, language referring to the features and advantages is understood to mean that a specific feature, advantage, or characteristic described in connection with an embodiment is included in at least one embodiment of the present disclosure. Thus, discussions of the features and advantages, and similar language, throughout this specification may, but do not necessarily, refer to the same embodiment.
- Furthermore, the described features, advantages, and characteristics of the disclosure may be combined in any suitable manner in one or more embodiments. One skilled in the relevant art will recognize, in light of the description herein, that the disclosure can be practiced without one or more of the specific features or advantages of a particular embodiment. In other instances, additional features and advantages may be recognized in certain embodiments that may not be present in all embodiments of the disclosure.
Claims (20)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/246,663 US20200036081A1 (en) | 2018-07-30 | 2019-01-14 | Package structure and antenna device using the same |
CN201910589756.7A CN110783687B (en) | 2018-07-30 | 2019-07-02 | Packaging structure and antenna device using same |
CN202110788089.2A CN113410609A (en) | 2018-07-30 | 2019-07-02 | Antenna device |
US17/848,508 US20220320713A1 (en) | 2018-07-30 | 2022-06-24 | Package structure and antenna device using the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862711671P | 2018-07-30 | 2018-07-30 | |
US16/246,663 US20200036081A1 (en) | 2018-07-30 | 2019-01-14 | Package structure and antenna device using the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/848,508 Continuation US20220320713A1 (en) | 2018-07-30 | 2022-06-24 | Package structure and antenna device using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20200036081A1 true US20200036081A1 (en) | 2020-01-30 |
Family
ID=69178735
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/246,663 Abandoned US20200036081A1 (en) | 2018-07-30 | 2019-01-14 | Package structure and antenna device using the same |
US17/848,508 Pending US20220320713A1 (en) | 2018-07-30 | 2022-06-24 | Package structure and antenna device using the same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/848,508 Pending US20220320713A1 (en) | 2018-07-30 | 2022-06-24 | Package structure and antenna device using the same |
Country Status (2)
Country | Link |
---|---|
US (2) | US20200036081A1 (en) |
CN (2) | CN113410609A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11239175B2 (en) * | 2019-06-21 | 2022-02-01 | Samsung Electronics Co., Ltd. | Semiconductor package |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115623678A (en) * | 2021-07-13 | 2023-01-17 | 群创光电股份有限公司 | Electronic device |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050176233A1 (en) * | 2002-11-15 | 2005-08-11 | Rajeev Joshi | Wafer-level chip scale package and method for fabricating and using the same |
US20050167797A1 (en) * | 2004-01-29 | 2005-08-04 | Advanpack Solutions Pte Ltd | Structure package |
US20060285480A1 (en) * | 2005-06-21 | 2006-12-21 | Janofsky Eric B | Wireless local area network communications module and integrated chip package |
KR20080085380A (en) * | 2007-03-19 | 2008-09-24 | 삼성전자주식회사 | Semiconductor package having wire redistribution layer and method of fabricating the same |
US8278749B2 (en) * | 2009-01-30 | 2012-10-02 | Infineon Technologies Ag | Integrated antennas in wafer level package |
US8884431B2 (en) * | 2011-09-09 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging methods and structures for semiconductor devices |
CN202838393U (en) * | 2012-09-18 | 2013-03-27 | 广州市嘉诚国际物流股份有限公司 | RFID electronic tag package structure |
US9196951B2 (en) * | 2012-11-26 | 2015-11-24 | International Business Machines Corporation | Millimeter-wave radio frequency integrated circuit packages with integrated antennas |
US9721922B2 (en) * | 2013-12-23 | 2017-08-01 | STATS ChipPAC, Pte. Ltd. | Semiconductor device and method of forming fine pitch RDL over semiconductor die in fan-out package |
CN103943610B (en) * | 2014-04-16 | 2016-12-07 | 华为技术有限公司 | A kind of electronic element packaging structure and electronic equipment |
TWI655719B (en) * | 2015-08-12 | 2019-04-01 | 矽品精密工業股份有限公司 | Electronic module |
US20170062240A1 (en) * | 2015-08-25 | 2017-03-02 | Inotera Memories, Inc. | Method for manufacturing a wafer level package |
US10541464B2 (en) * | 2017-01-17 | 2020-01-21 | Sony Corporation | Microwave antenna coupling apparatus, microwave antenna apparatus and microwave antenna package |
CN107068659B (en) * | 2017-04-19 | 2023-11-17 | 华进半导体封装先导技术研发中心有限公司 | Fan-out chip integrated antenna packaging structure and method |
US10390434B2 (en) * | 2017-10-13 | 2019-08-20 | Qorvo Us, Inc. | Laminate-based package with internal overmold |
CN207503965U (en) * | 2017-12-04 | 2018-06-15 | 中芯长电半导体(江阴)有限公司 | A kind of fan-out-type antenna packages structure |
US20190172861A1 (en) * | 2017-12-05 | 2019-06-06 | Semiconductor Components Industries, Llc | Semiconductor package and related methods |
DE102018205670A1 (en) * | 2018-04-13 | 2019-10-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hermetically sealed module unit with integrated antennas |
-
2019
- 2019-01-14 US US16/246,663 patent/US20200036081A1/en not_active Abandoned
- 2019-07-02 CN CN202110788089.2A patent/CN113410609A/en active Pending
- 2019-07-02 CN CN201910589756.7A patent/CN110783687B/en active Active
-
2022
- 2022-06-24 US US17/848,508 patent/US20220320713A1/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11239175B2 (en) * | 2019-06-21 | 2022-02-01 | Samsung Electronics Co., Ltd. | Semiconductor package |
Also Published As
Publication number | Publication date |
---|---|
CN113410609A (en) | 2021-09-17 |
CN110783687A (en) | 2020-02-11 |
US20220320713A1 (en) | 2022-10-06 |
CN110783687B (en) | 2021-08-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11848481B2 (en) | Antenna-in-package with frequency-selective surface structure | |
US20210327835A1 (en) | Semiconductor package structure with antenna | |
US11728292B2 (en) | Semiconductor package assembly having a conductive electromagnetic shield layer | |
US11509037B2 (en) | Integrated circuit packages, antenna modules, and communication devices | |
US20190252351A1 (en) | Semiconductor package structure having an antenna pattern electrically coupled to a first redistribution layer (rdl) | |
US10756033B2 (en) | Wireless module with antenna package and cap package | |
US20220320713A1 (en) | Package structure and antenna device using the same | |
US10115712B2 (en) | Electronic module | |
US8952521B2 (en) | Semiconductor packages with integrated antenna and method of forming thereof | |
US11004810B2 (en) | Semiconductor package structure | |
US20190348748A1 (en) | Fan-out package structure with integrated antenna | |
CN103779336A (en) | Embedded chip packages and methods for manufacturing an embedded chip package | |
EP3772100B1 (en) | Semiconductor package structure including antenna | |
US9041180B2 (en) | Semiconductor package and method of manufacturing the semiconductor package | |
US20230216201A1 (en) | Semiconductor package including antenna and method of manufacturing the semiconductor package | |
US10847481B2 (en) | Semiconductor package device | |
US20220247089A1 (en) | Radio-frequency devices and methods for producing radio-frequency devices | |
US20180316083A1 (en) | Electronic package and method for fabricating the same | |
US11416730B2 (en) | Radio-frequency device with radio-frequency signal carrying element and associated production method | |
CN111128909A (en) | Radio frequency system micro packaging structure and preparation method thereof | |
US20230114892A1 (en) | Semiconductor package including electromagnetic shield structure | |
TWI789768B (en) | Antenna module and manufacturing method thereof and electronic device | |
US11316247B2 (en) | Semiconductor packaging structure having antenna module | |
US9105462B2 (en) | Semiconductor apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: INNOLUX CORPORATION, TAIWAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LI, I-YIN;HUNG, TANG-CHIN;REEL/FRAME:047984/0959 Effective date: 20190107 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |