US20200011322A1 - Liquid supply system - Google Patents

Liquid supply system Download PDF

Info

Publication number
US20200011322A1
US20200011322A1 US16/482,642 US201816482642A US2020011322A1 US 20200011322 A1 US20200011322 A1 US 20200011322A1 US 201816482642 A US201816482642 A US 201816482642A US 2020011322 A1 US2020011322 A1 US 2020011322A1
Authority
US
United States
Prior art keywords
check valve
valve
container
shaft member
supply system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US16/482,642
Other languages
English (en)
Inventor
Koichi Mori
Kiyotaka Furuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eagle Industry Co Ltd
Original Assignee
Eagle Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eagle Industry Co Ltd filed Critical Eagle Industry Co Ltd
Assigned to EAGLE INDUSTRY CO., LTD. reassignment EAGLE INDUSTRY CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FURUTA, KIYOTAKA, MORI, KOICHI
Publication of US20200011322A1 publication Critical patent/US20200011322A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B3/00—Machines or pumps with pistons coacting within one cylinder, e.g. multi-stage
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/082—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/0824—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible

Definitions

  • the present disclosure relates to a liquid supply system used to supply liquid.
  • the cavitation thus occurring causes noise and vibration and decreases the discharge efficiency of the pump.
  • it is effective to make the valve opening area large.
  • the extent of enlargement of the valve opening area of the check valve provided in a pipe connected to the container is limited, or it is necessary to use a thick pipe, which leads to an increase in the size of the overall apparatus including the pipe.
  • the first check valve and the second check valve are both provided in the container and disposed on the side opposite to the actuator with respect to the shaft member. Therefore, the check valves can be installed in the container relatively easily as compared to the case where check valves are provided in pipe connected to the container, and it is not necessary to increase the size of the overall apparatus including the pipes. Furthermore, the first check valve and the second check valve can be assembled easily without interference with the actuator. Still further, it is easy to provide a large installation space for the first check valve and the second check valve, facilitating enlargement of the valve opening area.
  • the first check valve may include an annular first valve body that moves upward while receiving the pressure of fluid flowing in horizontal and radially outward directions away from the center axis of the shaft member to open the valve
  • the second check valve may include an annular second valve body that moves upward while receiving the pressure of fluid flowing in horizontal and radially outward directions away from the center axis of the shaft member to open the valve.
  • the check valves configured as above can have a large valve opening area. Moreover, the check valves configured as above receive lower resistance of fluid flow and have higher responsivity in opening and closing the valve as compared to check valves that are configured to open and close the valve by fluid flowing in the vertical direction (e.g. poppet valves). Therefore, cavitation is prevented from occurring due to insufficiency of fluid flow into the pump chamber.
  • the first check valve and the second check valve may both be disposed in the container coaxially with the shaft member.
  • the diameter of a closing portion of the first valve body and the diameter of a closing portion of the second valve body may be equal.
  • the occurrence of cavitation can be prevented without need to increase the size of the apparatus.
  • FIG. 1 is a schematic diagram illustrating the configuration of a liquid supply system in an embodiment.
  • FIG. 2 is a partly cross sectional view of a check valve in the embodiment.
  • FIG. 3 is an enlarged schematic cross sectional view illustrating a portion around first and second check valves in the embodiment.
  • FIG. 4 is a schematic cross sectional view of a valve structure in the embodiment in a state in which the check valve is closed.
  • FIG. 5 is a schematic cross sectional view of the valve structure in the embodiment in a state in which the check valve is open.
  • FIG. 6 is a schematic cross sectional view of the valve structure in the embodiment in a state in the middle of the process of closing the check valve.
  • a liquid supply system will be described with reference to FIGS. 1 to 6 .
  • the liquid supply system is suitably used for the purpose of, for example, maintaining a superconducting device in an ultra-low temperature state.
  • Superconducting devices require perpetual cooling of components such as superconducting coils.
  • a cooled device including a superconducting coil and other components is perpetually cooled by continuous supply of a cryogenic liquid (such as liquid nitrogen or liquid helium) to the cooled device.
  • a circulating fluid passage passing through the cooled device is provided, and the liquid supply system is connected to the circulating fluid passage to cause the cryogenic liquid to circulate, thereby enabling perpetual cooling of the cooled device.
  • FIG. 1 is a schematic diagram illustrating the overall configuration of the liquid supply system in the embodiment, where the overall configuration of the liquid supply system is illustrated in a cross section.
  • the liquid supply system 10 includes a main unit 100 of the liquid supply system 10 (which will be referred to as the “main system unit 100 ” hereinafter), a vacuum container 200 in which the main system unit 100 is housed, and pipes (including an inlet pipe 310 and an outlet pipe 320 ).
  • the inlet pipe 310 and the outlet pipe 320 both extend into the interior of the vacuum container 200 from outside the vacuum container 200 and are connected to the main system unit 100 .
  • the interior of the vacuum container 200 is a hermetically sealed space.
  • the main system unit 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that is moved in vertically upward and downward directions by the linear actuator 110 , and a container 130 .
  • the linear actuator 110 is fixed on something suitable, which may be the container 130 or something that is not shown in the drawings.
  • the shaft member 120 extends from outside the container 130 into the inside through an opening 130 a provided in the ceiling portion of the container 130 .
  • the container 130 has an inlet 130 b and an outlet 130 c for liquid in its bottom portion.
  • the aforementioned inlet pipe 310 is connected to the inlet 130 b
  • the outlet pipe 320 is connected to the outlet 130 c.
  • a plurality of structural components that compart the interior space into a plurality of spaces, which constitute a plurality of pump chambers, passages for liquid, and vacuum chambers providing heat insulation.
  • the structure inside the container 130 will be described in further detail.
  • the shaft member 120 has a main shaft portion 121 having a cavity in it, a cylindrical portion 122 surrounding the outer circumference of the main shaft portion 121 , and a connecting portion 123 that connects the main shaft portion 121 and the cylindrical portion 122 .
  • the cylindrical portion 122 is provided with an upper outward flange 122 a at its upper end and a lower outward flange 122 b at its lower end.
  • the container 130 has a substantially cylindrical body portion 130 X and a bottom plate 130 Y.
  • the body portion 130 X has a first inward flange 130 Xa provided near its vertical center and a second inward flange 130 Xb provided on its upper portion.
  • first bellows 141 and a second bellows 142 which expand and contract with the up and down motion of the shaft member 120 .
  • the first bellows 141 and the second bellows 142 are arranged one above the other along the vertical direction.
  • the upper end of the first bellows 141 is fixedly attached to the upper outward flange 122 a of the cylindrical portion 122 of the shaft member 120
  • the lower end of the first bellows 141 is fixedly attached to the first inward flange 130 Xa of the container 130 .
  • check valves 160 including a first check valve 160 A, a second check valve 160 B, a third check valve 160 C, and a fourth check valve 160 D, which are provided at different locations inside the container 130 . All of these four check valves 160 are arranged coaxially with the shaft member 120 in the container 130 . In other words, the center axis of the shaft member 120 and the respective center axes of the check valves 160 are in alignment with each other.
  • the first check valve 160 A and the second check valve 160 B are provided in the container 130 .
  • the first check valve 160 A and the second check valve 1606 are disposed on the opposite side (lower side) of the linear actuator 110 with respect to the shaft member 120 .
  • the third check valve 160 C and the fourth check valve 160 D are arranged above the first check valve 160 A and the second check valve 160 B.
  • the first check valve 160 A and the third check valve 160 C are provided in the fluid passage passing through the first pump chamber P 1 .
  • the first check valve 160 A and the third check valve 160 C block backflow of fluid pumped by the pumping effect of the first pump chamber P 1 .
  • the first check valve 160 A is provided on the upstream side of the first pump chamber P 1
  • the third check valve 160 C is provided on the downstream side of the first pump chamber P 1 .
  • the first check valve 160 A is provided in the fluid passage 130 d provided in the bottom portion of the container 130 .
  • the third check valve 160 C is provided in the fluid passage formed in the vicinity of the second inward flange 130 Xb provided on the container 130 .
  • the second check valve 160 B and the fourth check valve 160 D are provided in the fluid passage passing through the second pump chamber P 2 .
  • the second check valve 160 B and the fourth check valve 160 D block backflow of fluid pumped by the pumping effect of the second pump chamber P 2 .
  • the second check valve 160 B is provided on the upstream side of the second pump chamber P 2
  • the fourth check valve 160 D is provided on the downstream side of the second pump chamber P 2 .
  • the second check valve 160 B is provided in the fluid passage 130 e provided in the bottom plate 130 Y of the container 130 .
  • the fourth check valve 160 D is provided in the fluid passage formed in the vicinity of the first inward flange 130 Xa of the container 130 .
  • the first bellows 141 expands, and the second bellows 142 contracts. Consequently, the fluid pressure in the first pump chamber P 1 increases. Then, the first check valve 160 A is closed, and the third check valve 160 C is opened. In consequence, the liquid in the first pump chamber P 1 is pumped into the second fluid passage 130 Xd provided in the body portion 130 X through the third check valve 160 C (indicated by arrow T 11 ). Then, the liquid passes through the outlet 130 c and is brought to the outside of the liquid supply system 10 through the outlet pipe 320 . On the other hand, the fluid pressure in the second pump chamber P 2 decreases.
  • the second check valve 160 B is opened, and the fourth check valve 160 D is closed.
  • liquid supplied from outside the liquid supply system 10 through the inlet pipe 310 (indicated by arrow S 10 ) is taken into the interior of the container 130 through the inlet 130 b and passes through the second check valve 160 B (indicated by arrow S 12 ).
  • the liquid having passed through the second check valve 160 B is pumped into the second pump chamber P 2 .
  • the liquid supply system 10 can cause liquid to flow from the inlet pipe 310 to the outlet pipe 320 both when the shaft member 120 moves downward and when the shaft member 120 moves upward. Hence, the phenomenon called pulsation can be reduced.
  • the check valve 160 includes an annular valve body 161 and a subsidiary valve body 162 provided above the valve body 161 .
  • the valve body 161 is configured to move upward while receiving the pressure of liquid flowing in horizontal and radially outward directions away from the center axis of the shaft member 120 to open the valve.
  • the valve body 161 has a cylindrical portion 161 a , a downwardly-flaring flare portion 161 b provided on the lower end of the cylindrical portion 161 a , and an outward flange 161 c provided on the upper end of the cylindrical portion 161 a .
  • the subsidiary valve body 162 is a disk-like member having a through hole at its center.
  • the subsidiary valve body 162 has an outer diameter larger than the inner diameter of the cylindrical portion 161 a of the valve body 161 and an inner diameter smaller than the inner diameter of the cylindrical portion 161 a.
  • FIG. 3 is a schematic cross sectional view illustrating a portion of the valve structure including the first check valve 160 A and the second check valve 160 B in an enlarged manner.
  • the first check valve 160 A includes an annular valve body (a first valve body 161 A) and a first subsidiary valve body 162 A provided above the first valve body 161 A.
  • the first valve body 161 A has a cylindrical portion 161 Aa, a flare portion 161 Ab, and an outward flange 161 Ac.
  • the second check valve 160 B includes an annular valve body (a second valve body 161 B), and a second subsidiary valve body 162 B provided above the second valve body 161 B.
  • the second valve body 161 B has a cylindrical portion 161 Ba, a flare portion 161 Bb, and an outward flange 161 Bc.
  • first check valve 160 A and the second check valve 160 B have the same dimensions. Accordingly, the diameter of the closing portion of the first valve body 161 A and the diameter of the closing portion of the second valve body 161 B are equal to each other.
  • the diameter of the closing portion is the diameter D of the outer end of the flare portion 161 b of the valve body 161 illustrated in FIG. 2 .
  • valve structures including the check valves have basically the same structure. Therefore, the opening and closing operation of the check valve will be described with reference to FIGS. 4 to 6 , which illustrate the basic structure.
  • the check valve 160 is mounted on a mount base 170 .
  • the mount base 170 is not necessarily a single member.
  • the first check valve 160 A what serves as the mount base 170 is the bottom of the container 130 .
  • the second check valve 160 B what serves as the mount base 170 is the bottom plate 130 Y of the container 130 .
  • the third check valve 160 C what serves as the mount base 170 is a portion of the container 130 near the second inward flange 130 Xb provided on the body portion 130 X.
  • the fourth check valve 160 D what serves as the mount base 170 is a portion of the container 130 near the first inward flange 130 Xa provided on the body portion 130 X.
  • the mount base 170 is provided with a fluid passage 171 that extends horizontally and radially outwardly away from the center axis of the shaft member 120 and the check valve 160 .
  • This fluid passage 171 extends uniformly along the circumferential direction to allow liquid to flow radially outwardly in all directions, namely 360 degrees about the center axis.
  • the mount base 170 has an annular groove 173 provided on the upper portion of the guide surface 172 , in which the subsidiary valve body 162 is set.
  • the subsidiary valve body 162 is set in the annular groove 173 in such a way that its inner circumferential surface is slidable on the bottom surface 173 a of the annular groove 173 .
  • the subsidiary valve body 162 is movable vertically upward and downward within the range of the width of the annular groove 173 .
  • the subsidiary valve body 162 is in contact with both the side surface 173 b of the annular groove 173 and the top surface 161 c 1 of the valve body 161 to close the annular gap G.
  • the mount base 170 is provided with a valve seat 174 .
  • the valve seat 174 is a horizontal surface. When the valve body 161 moves downward due to its weight and fluid pressure acting thereon, the edge of the flare portion 161 b of the valve body 161 comes in close contact with the valve seat 174 to close the valve.
  • valve structure structured as above will now be described.
  • the valve body 161 moves upward.
  • the subsidiary valve body 162 is pressed by the valve body 161 and receives fluid pressure through the annular gap G to move upward.
  • the valve is opened.
  • the valve body 161 moves upward while receiving the pressure of the liquid flowing in horizontal and radially outward directions away from the center axis of the shaft member 120 to thereby open the valve.
  • FIG. 6 shows a state of the check valve 160 in the middle of the process of closing the valve in which the valve body 161 is seated on the valve seat 174 , and the subsidiary valve body 162 is in the middle of its downward movement.
  • the first check valve 160 A and the second check valve 160 B are both disposed on the side (lower side) opposite to the linear actuator 110 with respect to the shaft member 120 . This allows the first check valve 160 A and the second check valve 160 B to be assembled easily without interference with the linear actuator 110 . Moreover, it is easy to provide a large installation space for the first check valve 160 A and the second check valve 160 B, facilitating enlargement of the valve opening area.
  • the diameter of the closing portion of the first valve body 161 A and the diameter of the closing portion of the second valve body 161 B are equal. Therefore, the periods of opening and closing the first valve body 161 A and the periods of opening and closing the second valve body 161 B can easily be equalized. Thus, the discharging capability with the first pump chamber P 1 and the discharging capability with the second pump chamber P 2 can easily be equalized. This improves the reduction of pulsation.
  • the interior space of the vacuum chamber 200 outside the main system unit 100 , the inlet pipe 310 , and the outlet pipe 320 is kept in a vacuum state to provide heat insulation.
  • the hermetically sealed space constituted by the first space K 1 , the second space K 2 , and the third space K 3 is also kept in a vacuum state to provide heat insulation.
  • cryogenic liquid may be caused to flow also in these spaces to keep the temperature of the liquid flowing in the circulating fluid passage low.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
US16/482,642 2017-02-03 2018-02-02 Liquid supply system Abandoned US20200011322A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017019050 2017-02-03
JP2017019050 2017-02-03
PCT/JP2018/003648 WO2018143426A1 (ja) 2017-02-03 2018-02-02 液体供給システム

Publications (1)

Publication Number Publication Date
US20200011322A1 true US20200011322A1 (en) 2020-01-09

Family

ID=63041204

Family Applications (1)

Application Number Title Priority Date Filing Date
US16/482,642 Abandoned US20200011322A1 (en) 2017-02-03 2018-02-02 Liquid supply system

Country Status (7)

Country Link
US (1) US20200011322A1 (de)
EP (1) EP3578819A1 (de)
JP (1) JPWO2018143426A1 (de)
KR (1) KR20190098226A (de)
CN (1) CN110177943A (de)
RU (1) RU2019122418A (de)
WO (1) WO2018143426A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10890172B2 (en) * 2018-06-18 2021-01-12 White Knight Fluid Handling Inc. Fluid pumps and related systems and methods

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6097385U (ja) * 1983-12-08 1985-07-03 イーグル工業株式会社 ベロ−ズポンプ
JPH04128578A (ja) 1990-09-19 1992-04-30 Toyo Eng Corp 真空ポンプ
WO1995023924A1 (en) * 1994-03-03 1995-09-08 Simmons John M Pneumatically shifted reciprocating pump
JP4547451B2 (ja) * 2007-11-22 2010-09-22 シグマテクノロジー有限会社 ベローズポンプおよびベローズポンプの運転方法
JP4982515B2 (ja) * 2009-02-24 2012-07-25 日本ピラー工業株式会社 ベローズポンプ
JP5720888B2 (ja) * 2011-03-30 2015-05-20 株式会社イワキ ベローズポンプ
CN105358885B (zh) * 2013-10-02 2017-06-06 伊格尔工业股份有限公司 单向阀
CN106662372B (zh) * 2014-07-10 2019-07-12 伊格尔工业股份有限公司 液体供给系统
JP6371207B2 (ja) * 2014-12-05 2018-08-08 日本ピラー工業株式会社 ベローズポンプ装置
JP6367645B2 (ja) 2014-08-08 2018-08-01 日本ピラー工業株式会社 ベローズポンプ装置
EP3056779B1 (de) * 2015-02-11 2019-04-17 HUSCO Automotive Holdings LLC Steuerventil mit ringförmigem pilzförmigem rückschlagventil

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10890172B2 (en) * 2018-06-18 2021-01-12 White Knight Fluid Handling Inc. Fluid pumps and related systems and methods

Also Published As

Publication number Publication date
JPWO2018143426A1 (ja) 2019-11-21
KR20190098226A (ko) 2019-08-21
WO2018143426A1 (ja) 2018-08-09
CN110177943A (zh) 2019-08-27
EP3578819A1 (de) 2019-12-11
RU2019122418A3 (de) 2021-03-03
RU2019122418A (ru) 2021-03-03

Similar Documents

Publication Publication Date Title
KR20200093527A (ko) 청정 소형 구역을 포함한 장치
US10309546B2 (en) Electrically operated valve
KR101750189B1 (ko) 체크 밸브
US7859143B2 (en) Electric motor with self-cooling
US20200011322A1 (en) Liquid supply system
US20190353148A1 (en) Liquid supply system
US11293555B2 (en) Solenoid valve
US20200011323A1 (en) Liquid supply system
US20200032785A1 (en) Liquid supply system
US20200232448A1 (en) Liquid supply system
WO2020179564A1 (ja) 液体供給システム
US20200003195A1 (en) Liquid supply system
US20200003196A1 (en) Heat insulation structure and liquid supply system
CN118067352B (zh) 一种适用于低温风洞变温运行的高效换热结构

Legal Events

Date Code Title Description
AS Assignment

Owner name: EAGLE INDUSTRY CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MORI, KOICHI;FURUTA, KIYOTAKA;REEL/FRAME:049922/0427

Effective date: 20190423

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION