US20180350431A1 - Memory device and fabrication method thereof - Google Patents
Memory device and fabrication method thereof Download PDFInfo
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- US20180350431A1 US20180350431A1 US15/609,167 US201715609167A US2018350431A1 US 20180350431 A1 US20180350431 A1 US 20180350431A1 US 201715609167 A US201715609167 A US 201715609167A US 2018350431 A1 US2018350431 A1 US 2018350431A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
- G11C11/419—Read-write [R-W] circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
- G11C11/418—Address circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
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- H01L27/1104—
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- H01L27/1116—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2207/00—Indexing scheme relating to arrangements for writing information into, or reading information out from, a digital store
- G11C2207/22—Control and timing of internal memory operations
- G11C2207/2227—Standby or low power modes
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/14—Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
- G11C5/148—Details of power up or power down circuits, standby circuits or recovery circuits
Definitions
- a static random-access memory (SRAM) device includes an array of memory cells.
- the memory calls are arranged in columns and rows and controlled by the operations of word lines and bit lines coupled thereto.
- FIG. 1 is a schematic diagram illustrating a memory array, in accordance with some embodiments of the present disclosure
- FIG. 2 is a circuit diagram illustrating a memory device in the memory array in FIG. 1 , in accordance with some embodiments of the present disclosure
- FIG. 3A is a layout diagram of the memory device in FIG. 2 without any interconnection, in accordance with some embodiments of the present disclosure
- FIG. 3B is a layout diagram of the memory device in FIG. 3A with interconnections coupled to a reference voltage and bit lines, in accordance with some embodiments of the present disclosure
- FIG. 3C is a layout diagram of the memory device in FIG. 3B with additional interconnections coupled to a reference voltage, in accordance with various embodiments of the present disclosure
- FIG. 3D is a layout diagram of the memory device in FIG. 3C with additional interconnections coupled to a word line, in accordance with various embodiments of the present disclosure.
- FIG. 4 is a flow chart of a method illustrating the fabrication process of the memory device in FIG. 2 , in accordance with some embodiments of the present disclosure.
- first and second features are formed in direct contact
- additional features may be formed between the first and second features, such that the first and second features may not be in direct contact
- present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the some embodiments and/or configurations discussed.
- first may be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the embodiments.
- the term “and/or” includes any and all combinations of one or more of the associated listed items.
- Coupled may also be termed as “coupled,” and the term “connected” may be termed as “electrically connected”. “Coupled” and “connected” may also be used to indicate that two or more elements cooperate or interact with each other.
- FIG. 1 is a schematic diagram illustrating a memory array 100 , in accordance with some embodiments of the present disclosure.
- the memory array 100 is a static random-access memory (SRAM) array.
- the memory array 100 includes memory bit cells 110 , retention circuits 120 , bit lines BL_ 0 , . . . , and BL_n, and BL_ 0 , . . . and BL_n , and word lines WL_ 0 , . . . , and WL_m.
- the memory bit cells 110 are arranged in rows and columns. As illustratively shown in FIG. 1 , each of the memory bit cells 110 is disposed at an intersection of one corresponding row and one corresponding column.
- each of the retention circuits 120 is coupled to one corresponding memory bit cell 110 .
- the memory bit cell 110 is supplied with a higher voltage (for example, a reference voltage VDD in FIG. 2 ) in a normal mode.
- the reference voltage VDD is transmitted to the memory bit cell 110 through an electrical connection (not shown).
- the memory bit cell 110 is supplied with a lower voltage (for example, a retention voltage CVDD in FIG. 2 ) in a retention mode by the retention circuit 120 , in order to keep data stored in the memory bit cell 110 and to reduce power consumption.
- each pair of the bit lines BL_ 0 , . . . , and BL_n, and BL_ 0 , . . . and BL_n are coupled to one of columns of the memory bit cells 110 .
- the bit lines BL_ 0 and BL_ 0 are coupled to the first column of the memory bit cells 110
- the bit lines BL_ 1 and BL_ 1 are coupled to the second column of the memory bit cells 110 , and so on.
- each of the word lines WL_ 0 , . . . , and WL_m is coupled to one of rows of the memory bit cells 110 .
- the word line WL_ 0 is coupled to the first row of the memory bit cells 110
- the word line WL_ 1 is coupled to the second row of the memory bit cells 110 , and so on.
- one of the word lines WL_ 0 , . . . , and WL_m is used to select one of the rows of the memory bit cells 110 .
- one pair of the bit lines, which correspond to one of the columns of the memory bit cells 110 are used to perform read operation and/or write operation on one of the memory bit cells 110 disposed at the intersection of the corresponding row and the corresponding column.
- the numbers of the memory bit cells 110 , the retention circuits 120 , the bit lines BL_ 0 , . . . , and BL_n, and BL_ 0 , . . . and BL_n , and the word lines WL_ 0 , . . . , and WL_m in FIG. 1 are given for illustrative purposes only.
- Various numbers of the memory bit cells 110 , the retention circuits 120 , the bit lines BL_ 0 , . . . , and BL_n, and BL_ 0 , . . . and BL_n , and the word lines WL_ 0 , . . . , and WL_m are within the contemplated scope of the present disclosure.
- FIG. 2 is a circuit diagram illustrating a memory device 200 in the memory array 100 in FIG. 1 , in accordance with some embodiments of the present disclosure.
- FIG. 2 is a circuit diagram illustrating a memory device 200 in the memory array 100 in FIG. 1 , in accordance with some embodiments of the present disclosure.
- like elements in FIG. 2 are designated with the same reference numbers.
- the memory device 200 includes a memory bit cell 110 and a corresponding retention circuit 120 in FIG. 1 , a corresponding pair of bit lines BL and BL , and a corresponding word line WL.
- the bit lines BL and BL in FIG. 2 correspond to one pair of the bit lines BL_ 0 , . . . , and BL_n, and BL_ 0 , . . . and BL_n in FIG. 1
- the word line WL in FIG. 2 corresponds to one of the word lines WL_ 0 , . . . , and WL_m in FIG. 1 .
- one memory bit cell 110 , two bit lines BL and BL , and one word line WL are illustrated in the memory device 200 in FIG. 2 , but the present disclosure is not limited thereto.
- the memory bit cell 110 is a six-transistor (6T) cell that includes transistors T 1 -T 6 .
- the memory bit cell 110 operates based on the reference voltage VDD and a reference voltage VSS.
- the reference voltage VDD indicates a power voltage.
- the reference voltage VSS indicates a ground voltage.
- the reference voltage VDD is higher than the reference voltage VSS.
- the transistors T 1 , T 3 , T 5 , and T 6 are implemented with N-type transistors, and the transistors T 2 and T 4 are implemented with P-type transistors.
- the transistors T 1 and T 2 are coupled between a node P 1 and a node P 3
- the transistors T 3 and T 4 are coupled between a node P 2 and a node P 4
- the transistors T 1 -T 4 are coupled to operate as two cross-coupled inverters.
- first source/drains of the transistors T 2 and T 4 are coupled to the retention circuit 120 through the nodes P 1 and P 2 respectively. In some embodiments, first source/drains of the transistors T 1 and T 3 are coupled to the reference voltage VSS through the nodes P 3 and P 4 respectively. In some embodiments, gates of the transistors T 1 and T 2 are coupled to second source/drains of the transistors T 3 and T 4 through a node P 5 and further to a first source/drain of the transistor T 6 . In some embodiments, gates of the transistors T 3 and T 4 are coupled to second source/drains of the transistors T 1 and T 2 through a node P 6 and further to a first source/drain of the transistor T 5 .
- a second source/drain of the transistor T 5 is coupled to the bit line BL through a node P 7 .
- a second source/drain of the transistor T 6 is coupled to the bit line BL through a node P 8 .
- gates of the transistor T 5 and T 6 are coupled to the word line WL through a node P 9 and a node P 10 respectively.
- the word line WL is configured to control the transistors T 5 and T 6 .
- the memory bit cell 110 is coupled to the bit lines BL and BL through the transistors T 5 and T 6 respectively.
- the bit lines BL and BL are used to transfer data from the transistors T 1 -T 4 for the read operation, and/or to transfer data to the transistors T 1 -T 4 for the write operation.
- the configurations of the memory bit cell 110 are given for illustrative purposes only. Various configurations of the memory bit cell 110 are within the contemplated scope of the present disclosure.
- the retention circuit 120 includes transistors T 7 and T 8 .
- the transistor T 7 is implemented with a P-type transistor and the transistor T 8 is implemented with an N-type transistor.
- a first source/drain of the transistor T 7 is coupled to the reference voltage VDD through a node P 11 .
- a gate of the transistor T 7 is configured to receive a control signal PM. Accordingly, the transistor T 7 is controlled, by the control signal PM, to be turned on or turned off.
- a second source/drain of the transistor T 7 is coupled to a first source/drain of the transistor T 8 through a node P 12 .
- a gate of the transistor T 8 is coupled to the first source/drain of the transistor T 8 through the node P 12 , in order to operate as a diode-connected transistor.
- a second source/drain of the transistor T 8 is coupled to the first source/drains of the transistors T 2 and T 4 through the nodes P 1 and P 2 respectively.
- the control signal PM has a logic value “0.” Accordingly, the transistor T 7 is turned on, and the reference voltage VDD is transmitted to the node P 12 .
- the retention voltage CVDD at the node P 1 or P 2 is approximately equal to the reference voltage VDD minus a threshold voltage of the transistor T 8 . Effectively, the reference voltage VDD is generated based on the control signal PM and the reference voltage VDD.
- the retention voltage CVDD is lower than the reference voltage VDD, and the retention voltage CVDD is higher than the reference voltage VSS.
- the retention voltage CVDD is configured to be supplied to the memory cell 110 in the retention mode, in order to keep the data stored in the memory bit cell 110 . In some embodiments, since the retention voltage CVDD is lower than the reference voltage VDD, providing the retention voltage CVDD instead of the reference voltage VDD into the memory bit cell 110 to keep data can reduce power consumption.
- the configurations of the retention circuit 120 are given for illustrative purposes only. Various configurations of the retention circuit 120 are within the contemplated scope of the present disclosure.
- FIG. 3A is a layout diagram of the memory device 200 in FIG. 2 without any interconnection, in accordance with some embodiments of the present disclosure.
- FIG. 3A is a layout diagram of the memory device 200 in FIG. 2 without any interconnection, in accordance with some embodiments of the present disclosure.
- like elements in FIG. 3A are designated with the same reference numbers.
- components illustrated in FIG. 3A are disposed on a semiconductor substrate.
- the semiconductor substrate includes, for example, a silicon substrate or other suitable semiconductor substrate.
- each of the transistors T 1 -T 8 of the memory device 200 in FIG. 2 is illustrated within a dashed line frame.
- the memory bit cell 110 includes gate electrodes 211 - 214 arranged to form the gates of the transistors T 1 -T 6 .
- the retention circuit 120 includes gate electrodes 215 - 216 arranged to form the gates of the transistors T 7 -T 8 .
- the gate electrodes 211 - 216 are formed of a conductive material.
- the conductive material includes, for example, metals, metal alloys, or metal silicides.
- Various conductive materials of the gate electrodes 211 - 216 are within the contemplated scope of the present disclosure.
- the memory bit cell 110 further includes fin structures 221 - 224
- the retention circuit 120 further includes fin structures 225 - 227 .
- the fin structures 221 - 227 are arranged as active regions of the semiconductor substrate, and are arranged to form sources/drains of the transistors T 1 -T 8 after epitaxy.
- source/drain is referred to as a region that is either a source region or a drain region, in the present disclosure.
- the numbers of the fin structures in each of the transistors T 1 -T 8 in FIG. 3A are given for illustrative purposes. Various numbers of the fin structures in each of the transistors T 1 -T 8 are within the contemplated scope of the present disclosure.
- the transistor T 7 includes four fin structures and the transistor T 8 includes two fin structures.
- the fin structure 221 includes fin sections 221 A- 221 C.
- the fin section 221 A corresponds to the second source/drain of the transistor T 5
- the fin section 221 B corresponds to the first source/drain of the transistor T 5 .
- the fin section 221 A, the gate electrode 213 , and the fin section 221 B together correspond to the transistor T 5 .
- the fin section 221 B also corresponds to the second source/drain of the transistor T 1
- the fin section 221 C corresponds to the first source/drain of the transistor T 1
- the fin section 221 B, the gate electrode 211 , and the fin section 221 C together correspond to the transistor T 1 .
- the fin structure 222 includes fin sections 222 A- 222 B.
- the fin section 222 A corresponds to the second source/drain of the transistor T 2
- the fin section 222 B corresponds to the first source/drain of the transistor T 2 .
- the fin section 222 A, the gate electrode 211 , and the fin section 222 B together correspond to the transistor T 2 .
- the fin structure 223 includes fin sections 223 A- 223 B.
- the fin section 223 A corresponds to the first source/drain of the transistor T 4
- the fin section 223 B corresponds to the second source/drain of the transistor T 4 .
- the fin section 223 A, the gate electrode 212 , and the fin section 223 B together correspond to the transistor T 4 .
- the fin structure 224 includes fin sections 224 A- 224 C.
- the fin section 224 A corresponds to the first source/drain of the transistor T 3
- the fin section 224 B corresponds to the second source/drain of the transistor T 3 .
- the fin section 224 A, the gate electrode 212 , and the fin section 224 B together correspond to the transistor T 3 .
- the fin section 224 B also corresponds to the first source/drain of the transistor T 6
- the fin section 224 C corresponds to the second source/drain of the transistor T 6
- the fin section 224 B, the gate electrode 214 , and the fin section 224 C together correspond to the transistor T 6 .
- the fin structure 225 includes fin sections 225 A- 225 B.
- the fin section 225 A corresponds to the first source/drain of the transistor T 8
- the fin section 225 B corresponds to the second source/drain of the transistor T 8 .
- the fin section 225 A, the gate electrode 215 , and the fin section 225 B together correspond to the transistor T 8 .
- the fin structure 226 includes fin sections 226 A- 226 B, and the fin structure 227 includes fin sections 227 A- 227 B.
- the fin sections 226 A and 227 A correspond to the first source/drain of the transistor T 7
- the fin sections 226 B and 227 B correspond to the second source/drain of the transistor T 7 .
- the fin sections 226 A and 227 A, the gate electrode 216 , and the fin sections 226 B and 227 B together correspond to the transistor T 7 .
- FIG. 3B is a layout diagram of the memory device in FIG. 3A with interconnections coupled to the reference voltage VDD and bit lines BL and BL , in accordance with some embodiments of the present disclosure.
- VDD reference voltage
- bit lines BL and BL bit lines
- FIG. 3B like elements in FIG. 3B are designated with the same reference numbers.
- the transistors T 1 -T 8 are only labeled as T 1 -T 8 without the dashed line frame.
- the interconnections includes interconnection lines 230 - 238 and contacts 250 - 259 .
- the interconnection lines 230 - 238 and the contacts 250 - 259 are formed of conductive materials.
- the conductive materials are, for example, metals.
- Various conductive materials of the interconnection lines 230 - 238 and the contacts 250 - 259 are within the contemplated scope of the present disclosure.
- the interconnection line 230 couples the fin section 223 A, which corresponds to the first source/drain of the transistor T 4 .
- the contact 250 (indicating the node P 2 ) further couples the interconnection line 230 to a metal line PL 1 .
- the interconnection line 231 couples the fin section 222 B, which corresponds to the first source/drain of the transistor T 2 .
- the contact 251 (indicating the node P 1 ) couples the interconnection line 231 to the metal line PL 1 .
- the retention voltage CVDD from the retention circuit 120 is received by the metal line PL 1 in the retention mode.
- the retention voltage CVDD is supplied to the transistors T 2 and T 4 through the contacts 250 - 251 and interconnection lines 230 - 231 on condition that the memory device 200 operates in the retention mode.
- the interconnection line 232 couples the fin section 224 C, which corresponds to the second source/drain of the transistor T 6 .
- the contact 252 (indicating the node P 8 ) further couples the interconnection line 232 to a metal line PL 6 arranged to operate as the bit line BL .
- the interconnection line 233 couples the fin section 221 A, which corresponds to the second source/drain of the transistor T 5 .
- the contact 253 (indicating the node P 7 ) couples the interconnection line 233 to a metal line PL 5 arranged to operate as the bit line BL.
- the interconnection line 234 couples the fin sections 223 B and 224 B.
- the fin section 223 B corresponds to the second source/drain of the transistor T 4 .
- the fin section 224 B corresponds to the second source/drain of the transistor T 3 and the first source/drain of the transistor T 6 .
- the contact 254 (indicating the node P 5 ) couples the interconnection line 234 to the gate electrode 211 corresponding to the gates of the transistors T 1 and T 2 .
- the interconnection line 235 couples the fin sections 221 B and 222 A.
- the fin section 221 B corresponds to the first source/drain of the transistor T 5 and the second source/drain of the transistor T 1 .
- the fin section 222 A corresponds to the second source/drain of the transistor T 2 .
- the contact 255 (indicating the node P 6 ) couples the interconnection line 235 to the gate electrode 212 corresponding to the gates of the transistors T 4 and T 3 .
- the interconnection line 236 couples the fin sections 226 A and 227 A.
- the fin sections 226 A and 227 A correspond to the first source/drain of the transistor T 7 .
- the contact 256 (indicating the node P 11 ) couples the interconnection line 236 to a metal line PL 8 .
- the metal line PL 8 is configured to receive the reference voltage VDD and provide the reference voltage VDD to the transistor T 7 .
- the interconnection line 237 couples the fin sections 225 A, 226 B, and 227 B.
- the fin sections 226 B and 227 B correspond to the second source/drain of the transistor T 7 .
- the fin section 225 A corresponds to the first source/drain of the transistor T 8 .
- the contact 257 (indicating the node P 12 ) couples the interconnection line 237 to the gate electrode 215 corresponding to the gate of the transistors T 8 , in order to form the diode-connection transistor illustrated in FIG. 2 .
- the interconnection line 238 couples the fin section 225 B.
- the fin section 225 B corresponds to the second source/drain of the transistor T 8 .
- the contact 258 (indicating the node P 1 ) couples the interconnection line 238 to a metal line PL 3 .
- the retention voltage CVDD is generated at the metal line PL 3 by the transistor T 8 according to the reference voltage VDD on condition that the memory device 200 operates in the retention mode.
- the contact 259 couples a metal line PL 7 .
- a metal segment (not shown) are coupled to the metal line PL 7 and configured to receive the control signal PM illustrated in FIG. 2 .
- FIG. 3C is a layout diagram of the memory device in FIG. 3B with additional interconnections coupled to the reference voltage VSS, in accordance with various embodiments of the present disclosure.
- VSS reference voltage
- the additional interconnections include interconnection lines 271 - 272 and contacts 260 - 261 .
- the interconnection lines 271 - 272 and the contacts 260 - 261 are formed of conductive materials.
- the conductive materials are, for example, metals.
- Various conductive materials of the additional interconnections are within the contemplated scope of the present disclosure.
- the interconnection line 271 couples the fin section 224 A.
- the fin section 224 A corresponds to the first source/drain of the transistor T 3 .
- the contact 260 (indicating the node P 4 ) couples the interconnection line 271 to a metal line PL 4 , and the metal line PL 4 is configured to receive the reference voltage VSS.
- the interconnection line 272 couples the fin section 221 C.
- the fin section 221 C corresponds to the first source/drain of the transistor T 1 .
- the contact 261 (indicating the node P 3 ) couples the interconnection line 272 to a metal line PL 2 , and the metal line PL 2 is configured to receive the reference voltage VSS.
- FIG. 3D is a layout diagram of the memory device in FIG. 3C with additional interconnections coupled to a word line WL, in accordance with various embodiments of the present disclosure.
- FIG. 3D is a layout diagram of the memory device in FIG. 3C with additional interconnections coupled to a word line WL, in accordance with various embodiments of the present disclosure.
- FIG. 3D is a layout diagram of the memory device in FIG. 3C with additional interconnections coupled to a word line WL, in accordance with various embodiments of the present disclosure.
- like elements in FIG. 3D are designated with the same reference numbers.
- the additional interconnections include interconnection lines 239 and contacts 262 - 265 .
- the interconnection lines 239 and the contacts 262 - 265 are formed of conductive materials.
- the conductive materials are, for example, metals.
- Various conductive materials of the additional interconnections are within the contemplated scope of the present disclosure.
- the metal lines PL 1 -PL 8 are formed within a metal one (M 1 ) layer.
- the word line WL and the interconnection line 239 are formed within a metal two (M 2 ) layer different from the metal one (M 1 ) layer.
- the metal two (M 2 ) layer is formed on the metal one (M 1 ) layer.
- the contact 262 (indicating the node P 10 ) couples the gate electrode 214 corresponding to the gate of the transistor T 6 to the word line WL.
- the contact 263 (indicating the node P 9 ) couples the gate electrode 213 corresponding to the gate of the transistor T 5 to the word line WL.
- a metal segment (not shown) is coupled to the word line WL and configured to receive driving signals (not shown), in order to drive the word line WL.
- the contact 264 (indicating the node P 1 or P 2 ) couples the interconnection line 239 to the metal line PL 3
- the contact 265 (indicating the node P 1 or P 2 ) couples the interconnection line 239 to the metal line PL 1
- the metal lines PL 1 and PL 3 are coupled to each other through the contacts 264 - 265 and the interconnection line 239 .
- the retention voltage CVDD is generated at the metal line PL 3 on condition that the memory device 200 operates in the retention mode. Since the metal lines PL 1 and PL 3 are coupled to each other, the retention voltage CVDD is thus transmitted from the metal line PL 3 to the metal line PL 1 on condition that the memory device 200 operates in the retention mode.
- the retention voltage CVDD is generated at the metal lines PL 1 and PL 3 on condition that the memory device 200 operates in the retention mode.
- the layout diagram in FIG. 3D is formed through one or more processors.
- the memory device 200 is formed through one or more semiconductor manufacturing equipments according to the layout diagram in FIG. 3D , but this disclosure is not limited thereto.
- FIG. 4 is a flow chart of a method 400 illustrating the fabrication process of the memory device 200 in FIG. 2 , in accordance with some embodiments of the present disclosure.
- the method 400 is discussed in relation to the memory device 200 in FIG. 2 and FIGS. 3A-3D , but the present disclosure is not limited thereto.
- the transistors T 1 -T 6 are formed.
- the memory bit cell 110 includes the transistors T 1 -T 6 .
- the transistors T 7 -T 8 are formed.
- the retention circuit 120 includes the transistors T 7 -T 8 .
- the retention circuit 120 is disposed at a side of the memory bit cell 110 .
- the fin structures 221 - 227 , the gate electrode 211 - 216 , the interconnection line 230 - 238 and the contacts 254 , 255 , and 257 are formed, in order to form the transistors T 1 -T 8 .
- the fin structures 221 - 227 extend along a direction S 1
- the gate electrode 211 - 216 extend along a direction S 2 .
- the direction S 2 is different from the direction S 1 .
- the direction S 2 is perpendicular to the direction S 1 .
- the retention circuit 120 and the memory bit cell 110 are formed by the same layout design rule.
- the gate electrodes 212 and 213 of the memory bit cell 110 are aligned with the gate electrode 216 of the retention circuit 120 in the direction S 2 .
- the gate electrodes 211 and 214 of the memory bit cell 110 are aligned with the gate electrode 215 of the retention circuit 120 in the direction S 2 .
- the contacts 250 - 253 and 256 , 258 - 259 are formed to couple the memory bit cell 110 or the retention circuit 120 to the metal line PL 1 -PL 8 .
- the metal lines PL 1 -PL 8 are formed.
- the metal lines PL 1 -PL 8 extends along the direction S 1 , and the metal lines PL 1 -PL 8 are coupled to at least one of the contacts 250 - 253 , 256 , and 258 - 259 .
- the metal line PL 7 is formed to receive the control signal PM, and the metal line PL 8 is formed to receive the reference voltage VDD.
- the metal line PL 3 is formed to transmit the retention voltage CVDD to the metal line PL 1 through the interconnection line 239 (illustrated in FIG. 3D ).
- the metal lines PL 5 and PL 6 are formed to operate as the pair of bit lines BL and BL .
- the metal lines PL 2 and PL 4 are formed to receive the reference voltage VSS.
- a length L 2 of the retention circuit 120 is greater than a length L 1 of the memory bit cell 110 .
- the length L 2 of the retention circuit 120 is approximately 1.2-1.6 times greater than the length L 1 .
- the length L 1 of the memory bit cell 110 corresponds to a longer side of the memory bit cell 110
- a width of the memory bit cell 110 corresponds to a shorter side of the memory bit cell 110 .
- the length L 2 of the retention circuit 120 corresponds to a longer side of the retention circuit 120
- a width of the retention circuit 120 corresponds to a shorter side of the retention circuit 120 .
- the length L 1 of the memory bit cell 110 is approximately equal to a distance between the metal line PL 4 and the metal line PL 2 .
- the length L 1 is equal to a distance between a central axis of the metal line PL 4 and a central axis of the metal line PL 2 .
- the length L 2 of the retention circuit 120 is approximately equal to a distance between the metal line PL 3 and the metal line PL 7 .
- the length L 2 is equal to a distance between a central axis of the metal line PL 3 and a central axis of the metal line PL 7 .
- the retention circuit 120 and the memory bit cell 110 are formed by the same layout design rule. Effectively, the formations of the memory bit cell 110 and the retention circuit 120 follow the same design rule manual (DRM), for example, a SRAM DRM. Thus, the memory bit cell 110 and the retention circuit 120 can be tracked well. For example, the retention circuit 120 and the memory bit cell 110 are disposed within a SRAM area. Thus, there is no a huge design margin between the retention circuit 120 and the memory bit cell 110 , and the retention circuit 120 is adjacent to the memory bit cell 110 . On condition that the retention circuit 120 is adjacent to the memory bit cell 110 , the chip size of the memory array 100 can be reduced. In addition, on condition that the retention circuit 120 is adjacent to the memory bit cell 110 , an electrical connection between the retention circuit 120 and the memory bit cell 110 can be shortened. Thus, the power consumption of the memory array 100 can be reduced.
- DRM design rule manual
- the metal line PL 2 is disposed as a side B 1 of the memory bit cell 110
- the metal line PL 3 is disposed as a side B 2 of the retention circuit 120
- the metal line PL 3 is disposed at a side of the metal line PL 2
- the metal line PL 3 is adjacent to the metal line PL 2 .
- a distance D 1 between the metal line PL 3 and the metal line PL 2 is less than the length L 1 of the memory bit cell 110 .
- the distance D 1 is a distance between a central axis of the metal line PL 3 and a central axis of the metal line PL 2 .
- the retention circuit 120 is disposed with the distance D 1 from the memory bit cell 110 , and the distance D 1 is less than the length L 1 of the memory bit cell 110 .
- the length L 2 of the retention circuit 120 is greater than the length L 1 of the memory bit cell 110
- the distance D 1 is less than the length L 2 of the retention circuit 120 .
- the distance D 1 is also less than a distance D 3 .
- the distance D 3 is a distance between a central axis of the metal line PL 5 and a central axis of the metal line PL 6 .
- a distance D 2 between the metal line PL 1 and the metal line PL 3 is approximately equal to the length L 1 of the memory bit cell 110 .
- the distance D 2 is a distance between a central axis of the metal line PL 1 and a central axis of the metal line PL 3 .
- the distance D 2 is less than the length L 1 of the memory bit cell 110 .
- the metal line PL 1 and the metal line PL 3 are formed at two sides of the metal line PL 2 respectively. Thus, the distance D 2 is greater than the distance D 1 .
- the word line WL and the interconnection line 239 are formed. With respect to FIG. 3D , in some embodiments, the word line WL and the interconnection line 239 extend along the direction S 2 . In some embodiments, the word line WL covers the interconnection lines 234 , 235 , and 237 . In some embodiments, the interconnection line 239 is coupled to the metal line PL 1 and the metal line PL 3 through the contacts 264 - 265 .
- the above description of the method 400 includes exemplary operations, but the operations of the method 400 are not necessarily performed in the order described.
- the order of the operations of the method 400 disclosed in the present disclosure are able to be changed, or the operations are able to be executed simultaneously or partially simultaneously as appropriate, in accordance with the spirit and scope of some embodiments of the present disclosure.
- the operations may be added, replaced, changed order, and/or eliminated as appropriate, in accordance with the spirit and scope of some embodiments of the present disclosure.
- the memory bit cell 110 and the retention circuit 120 can be designed with the same design rule and can be tracked well.
- the chip size of the memory array 100 can be reduced and the power consumption of the memory array 100 can be reduced.
- a device in some embodiments, includes a memory bit cell and a retention circuit.
- the memory bit cell includes a first metal line and a second metal line.
- the first metal line is disposed in a first metal layer and configured to receive a retention voltage.
- the second metal line is disposed in the first metal layer and configured to receive a first reference voltage lower than the retention voltage.
- the retention circuit includes a third metal line.
- the third metal line is disposed in the first metal layer and configured to transmit the retention voltage to the first metal line. A distance between the second metal line and the third metal line is less than a length of the memory bit cell.
- a device that includes a memory bit cell and a retention circuit.
- the memory bit cell includes a first metal line and a second metal line.
- the first metal line extends along a first direction and is configured to receive a retention voltage.
- the second metal line extends along the first direction and configured to receive a first reference voltage lower than the retention voltage.
- the retention circuit includes a third metal line.
- the third metal line disposed at a side of the second metal line and configured to transmit the retention voltage to the first metal line. A distance, along a second direction, between a side of the memory bit cell and a side of the retention circuit is less than a length of the retention circuit.
- a memory bit cell is formed.
- a retention circuit is formed with a distance from the memory bit cell.
- An interconnection line is formed to couple the retention circuit to the memory bit cell. The distance is between a side of the retention circuit and a side of the memory bit cell, and the distance is less than a length of the memory bit cell.
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Abstract
A device includes a memory bit cell and a retention circuit. The memory bit cell includes a first metal line and a second metal line. The first metal line is disposed in a first metal layer and configured to receive a retention voltage. The second metal line is disposed in the first metal layer and configured to receive a first reference voltage lower than the retention voltage. The retention circuit includes a third metal line. The third metal line is disposed in the first metal layer and configured to transmit the retention voltage to the first metal line. A distance between the second metal line and the third metal line is less than a length of the memory bit cell.
Description
- A static random-access memory (SRAM) device includes an array of memory cells. The memory calls are arranged in columns and rows and controlled by the operations of word lines and bit lines coupled thereto.
- Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
-
FIG. 1 is a schematic diagram illustrating a memory array, in accordance with some embodiments of the present disclosure; -
FIG. 2 is a circuit diagram illustrating a memory device in the memory array inFIG. 1 , in accordance with some embodiments of the present disclosure; -
FIG. 3A is a layout diagram of the memory device inFIG. 2 without any interconnection, in accordance with some embodiments of the present disclosure; -
FIG. 3B is a layout diagram of the memory device inFIG. 3A with interconnections coupled to a reference voltage and bit lines, in accordance with some embodiments of the present disclosure; -
FIG. 3C is a layout diagram of the memory device inFIG. 3B with additional interconnections coupled to a reference voltage, in accordance with various embodiments of the present disclosure; -
FIG. 3D is a layout diagram of the memory device inFIG. 3C with additional interconnections coupled to a word line, in accordance with various embodiments of the present disclosure; and -
FIG. 4 is a flow chart of a method illustrating the fabrication process of the memory device inFIG. 2 , in accordance with some embodiments of the present disclosure. - The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the some embodiments and/or configurations discussed.
- The terms used in this specification generally have their ordinary meanings in the art and in the specific context where each term is used. The use of examples in this specification, including examples of any terms discussed herein, is illustrative only, and in no way limits the scope and meaning of the disclosure or of any exemplified term. Likewise, the present disclosure is not limited to some embodiments given in this specification.
- Although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the embodiments. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- The terms “comprise,” “comprising,” “include,” “including,” “has,” “having,” etc. used in this specification are open-ended and mean “comprises but not limited.”
- In this document, the term “coupled” may also be termed as “coupled,” and the term “connected” may be termed as “electrically connected”. “Coupled” and “connected” may also be used to indicate that two or more elements cooperate or interact with each other.
- Moreover, the drawings are for the purpose of illustration only, and are not in accordance with the size of the original drawing.
- Reference is now made to
FIG. 1 .FIG. 1 is a schematic diagram illustrating amemory array 100, in accordance with some embodiments of the present disclosure. - In some embodiments, the
memory array 100 is a static random-access memory (SRAM) array. In some embodiments, thememory array 100 includesmemory bit cells 110,retention circuits 120, bit lines BL_0, . . . , and BL_n, andBL_0 , . . . andBL_n , and word lines WL_0, . . . , and WL_m. In some embodiments, thememory bit cells 110 are arranged in rows and columns. As illustratively shown inFIG. 1 , each of thememory bit cells 110 is disposed at an intersection of one corresponding row and one corresponding column. - In some embodiments, each of the
retention circuits 120 is coupled to one correspondingmemory bit cell 110. In some embodiments, thememory bit cell 110 is supplied with a higher voltage (for example, a reference voltage VDD inFIG. 2 ) in a normal mode. For example, the reference voltage VDD is transmitted to thememory bit cell 110 through an electrical connection (not shown). In some embodiments, thememory bit cell 110 is supplied with a lower voltage (for example, a retention voltage CVDD inFIG. 2 ) in a retention mode by theretention circuit 120, in order to keep data stored in thememory bit cell 110 and to reduce power consumption. - In some embodiments, each pair of the bit lines BL_0, . . . , and BL_n, and
BL_0 , . . . andBL_n are coupled to one of columns of thememory bit cells 110. For example, the bit lines BL_0 andBL_0 are coupled to the first column of thememory bit cells 110, the bit lines BL_1 andBL_1 are coupled to the second column of thememory bit cells 110, and so on. In some embodiments, each of the word lines WL_0, . . . , and WL_m is coupled to one of rows of thememory bit cells 110. For example, the word line WL_0 is coupled to the first row of thememory bit cells 110, the word line WL_1 is coupled to the second row of thememory bit cells 110, and so on. - In some embodiments, based on operations of an address decoder (not shown), one of the word lines WL_0, . . . , and WL_m is used to select one of the rows of the
memory bit cells 110. In some embodiments, one pair of the bit lines, which correspond to one of the columns of thememory bit cells 110, are used to perform read operation and/or write operation on one of thememory bit cells 110 disposed at the intersection of the corresponding row and the corresponding column. - The numbers of the
memory bit cells 110, theretention circuits 120, the bit lines BL_0, . . . , and BL_n, andBL_0 , . . . andBL_n , and the word lines WL_0, . . . , and WL_m inFIG. 1 are given for illustrative purposes only. Various numbers of thememory bit cells 110, theretention circuits 120, the bit lines BL_0, . . . , and BL_n, andBL_0 , . . . andBL_n , and the word lines WL_0, . . . , and WL_m are within the contemplated scope of the present disclosure. - Reference is now made to
FIG. 2 .FIG. 2 is a circuit diagram illustrating amemory device 200 in thememory array 100 inFIG. 1 , in accordance with some embodiments of the present disclosure. For ease of understanding, with respect to the embodiments ofFIG. 1 , like elements inFIG. 2 are designated with the same reference numbers. - In some embodiments, the
memory device 200 includes amemory bit cell 110 and acorresponding retention circuit 120 inFIG. 1 , a corresponding pair of bit lines BL andBL , and a corresponding word line WL. In some embodiments, the bit lines BL andBL inFIG. 2 correspond to one pair of the bit lines BL_0, . . . , and BL_n, andBL_0 , . . . andBL_n inFIG. 1 , and the word line WL inFIG. 2 corresponds to one of the word lines WL_0, . . . , and WL_m inFIG. 1 . For ease of understanding, onememory bit cell 110, two bit lines BL andBL , and one word line WL are illustrated in thememory device 200 inFIG. 2 , but the present disclosure is not limited thereto. - In some embodiments, the
memory bit cell 110 is a six-transistor (6T) cell that includes transistors T1-T6. Thememory bit cell 110 operates based on the reference voltage VDD and a reference voltage VSS. In some embodiments, the reference voltage VDD indicates a power voltage. In some embodiments, the reference voltage VSS indicates a ground voltage. In some embodiments, the reference voltage VDD is higher than the reference voltage VSS. In some embodiments, the transistors T1, T3, T5, and T6 are implemented with N-type transistors, and the transistors T2 and T4 are implemented with P-type transistors. In some embodiments, the transistors T1 and T2 are coupled between a node P1 and a node P3, and the transistors T3 and T4 are coupled between a node P2 and a node P4. In some embodiments, the transistors T1-T4 are coupled to operate as two cross-coupled inverters. - In some embodiments, first source/drains of the transistors T2 and T4 are coupled to the
retention circuit 120 through the nodes P1 and P2 respectively. In some embodiments, first source/drains of the transistors T1 and T3 are coupled to the reference voltage VSS through the nodes P3 and P4 respectively. In some embodiments, gates of the transistors T1 and T2 are coupled to second source/drains of the transistors T3 and T4 through a node P5 and further to a first source/drain of the transistor T6. In some embodiments, gates of the transistors T3 and T4 are coupled to second source/drains of the transistors T1 and T2 through a node P6 and further to a first source/drain of the transistor T5. In some embodiments, a second source/drain of the transistor T5 is coupled to the bit line BL through a node P7. In some embodiments, a second source/drain of the transistor T6 is coupled to the bit lineBL through a node P8. In some embodiments, gates of the transistor T5 and T6 are coupled to the word line WL through a node P9 and a node P10 respectively. - In some embodiments, the word line WL is configured to control the transistors T5 and T6. With the turned-on transistors T5 and T6, the
memory bit cell 110 is coupled to the bit lines BL andBL through the transistors T5 and T6 respectively. In some embodiments, the bit lines BL andBL are used to transfer data from the transistors T1-T4 for the read operation, and/or to transfer data to the transistors T1-T4 for the write operation. - The configurations of the
memory bit cell 110 are given for illustrative purposes only. Various configurations of thememory bit cell 110 are within the contemplated scope of the present disclosure. - In some embodiments, the
retention circuit 120 includes transistors T7 and T8. In some embodiments, the transistor T7 is implemented with a P-type transistor and the transistor T8 is implemented with an N-type transistor. In some embodiments, a first source/drain of the transistor T7 is coupled to the reference voltage VDD through a node P11. In some embodiments, a gate of the transistor T7 is configured to receive a control signal PM. Accordingly, the transistor T7 is controlled, by the control signal PM, to be turned on or turned off. In some embodiments, a second source/drain of the transistor T7 is coupled to a first source/drain of the transistor T8 through a node P12. In some embodiments, a gate of the transistor T8 is coupled to the first source/drain of the transistor T8 through the node P12, in order to operate as a diode-connected transistor. In some embodiments, a second source/drain of the transistor T8 is coupled to the first source/drains of the transistors T2 and T4 through the nodes P1 and P2 respectively. - In some embodiments, on condition that the
memory bit cell 110 operates in the retention mode, the control signal PM has a logic value “0.” Accordingly, the transistor T7 is turned on, and the reference voltage VDD is transmitted to the node P12. The retention voltage CVDD at the node P1 or P2 is approximately equal to the reference voltage VDD minus a threshold voltage of the transistor T8. Effectively, the reference voltage VDD is generated based on the control signal PM and the reference voltage VDD. In some embodiments, the retention voltage CVDD is lower than the reference voltage VDD, and the retention voltage CVDD is higher than the reference voltage VSS. In some embodiments, the retention voltage CVDD is configured to be supplied to thememory cell 110 in the retention mode, in order to keep the data stored in thememory bit cell 110. In some embodiments, since the retention voltage CVDD is lower than the reference voltage VDD, providing the retention voltage CVDD instead of the reference voltage VDD into thememory bit cell 110 to keep data can reduce power consumption. - The configurations of the
retention circuit 120 are given for illustrative purposes only. Various configurations of theretention circuit 120 are within the contemplated scope of the present disclosure. - Reference is now made to
FIG. 3A .FIG. 3A is a layout diagram of thememory device 200 inFIG. 2 without any interconnection, in accordance with some embodiments of the present disclosure. For ease of understanding, with respect to the embodiments ofFIG. 2 , like elements inFIG. 3A are designated with the same reference numbers. - In some embodiments, components illustrated in
FIG. 3A are disposed on a semiconductor substrate. The semiconductor substrate includes, for example, a silicon substrate or other suitable semiconductor substrate. - As illustratively shown in
FIG. 3A , each of the transistors T1-T8 of thememory device 200 inFIG. 2 is illustrated within a dashed line frame. In some embodiments, thememory bit cell 110 includes gate electrodes 211-214 arranged to form the gates of the transistors T1-T6. In some embodiments, theretention circuit 120 includes gate electrodes 215-216 arranged to form the gates of the transistors T7-T8. In some embodiments, the gate electrodes 211-216 are formed of a conductive material. The conductive material includes, for example, metals, metal alloys, or metal silicides. Various conductive materials of the gate electrodes 211-216 are within the contemplated scope of the present disclosure. - In some embodiments, the
memory bit cell 110 further includes fin structures 221-224, and theretention circuit 120 further includes fin structures 225-227. The fin structures 221-227 are arranged as active regions of the semiconductor substrate, and are arranged to form sources/drains of the transistors T1-T8 after epitaxy. The term “source/drain” is referred to as a region that is either a source region or a drain region, in the present disclosure. - The numbers of the fin structures in each of the transistors T1-T8 in
FIG. 3A are given for illustrative purposes. Various numbers of the fin structures in each of the transistors T1-T8 are within the contemplated scope of the present disclosure. For example, in some embodiments, the transistor T7 includes four fin structures and the transistor T8 includes two fin structures. - In some embodiments, the
fin structure 221 includesfin sections 221A-221C. Thefin section 221A corresponds to the second source/drain of the transistor T5, and thefin section 221B corresponds to the first source/drain of the transistor T5. Alternatively stated, thefin section 221A, thegate electrode 213, and thefin section 221B together correspond to the transistor T5. - In some embodiments, the
fin section 221B also corresponds to the second source/drain of the transistor T1, and thefin section 221C corresponds to the first source/drain of the transistor T1. Alternatively stated, thefin section 221B, thegate electrode 211, and thefin section 221C together correspond to the transistor T1. - In some embodiments, the
fin structure 222 includesfin sections 222A-222B. Thefin section 222A corresponds to the second source/drain of the transistor T2, and thefin section 222B corresponds to the first source/drain of the transistor T2. Alternatively stated, thefin section 222A, thegate electrode 211, and thefin section 222B together correspond to the transistor T2. - In some embodiments, the
fin structure 223 includesfin sections 223A-223B. Thefin section 223A corresponds to the first source/drain of the transistor T4, and thefin section 223B corresponds to the second source/drain of the transistor T4. Alternatively stated, thefin section 223A, thegate electrode 212, and thefin section 223B together correspond to the transistor T4. - In some embodiments, the
fin structure 224 includesfin sections 224A-224C. Thefin section 224A corresponds to the first source/drain of the transistor T3, and thefin section 224B corresponds to the second source/drain of the transistor T3. Alternatively stated, thefin section 224A, thegate electrode 212, and thefin section 224B together correspond to the transistor T3. - In some embodiments, the
fin section 224B also corresponds to the first source/drain of the transistor T6, and thefin section 224C corresponds to the second source/drain of the transistor T6. Alternatively stated, thefin section 224B, thegate electrode 214, and thefin section 224C together correspond to the transistor T6. - In some embodiments, the
fin structure 225 includesfin sections 225A-225B. Thefin section 225A corresponds to the first source/drain of the transistor T8, and thefin section 225B corresponds to the second source/drain of the transistor T8. Alternatively stated, thefin section 225A, thegate electrode 215, and thefin section 225B together correspond to the transistor T8. - In some embodiments, the
fin structure 226 includesfin sections 226A-226B, and thefin structure 227 includesfin sections 227A-227B. Thefin sections fin sections fin sections gate electrode 216, and thefin sections - Reference is now made to
FIG. 3B .FIG. 3B is a layout diagram of the memory device inFIG. 3A with interconnections coupled to the reference voltage VDD and bit lines BL andBL , in accordance with some embodiments of the present disclosure. For ease of understanding, with respect to the embodiments ofFIG. 2 , like elements inFIG. 3B are designated with the same reference numbers. As illustratively shown inFIG. 3B , for simplicity, the transistors T1-T8 are only labeled as T1-T8 without the dashed line frame. - In some embodiments, the interconnections includes interconnection lines 230-238 and contacts 250-259. In some embodiments, the interconnection lines 230-238 and the contacts 250-259 are formed of conductive materials. The conductive materials are, for example, metals. Various conductive materials of the interconnection lines 230-238 and the contacts 250-259 are within the contemplated scope of the present disclosure.
- In some embodiments, the
interconnection line 230 couples thefin section 223A, which corresponds to the first source/drain of the transistor T4. The contact 250 (indicating the node P2) further couples theinterconnection line 230 to a metal line PL1. - In some embodiments, the
interconnection line 231 couples thefin section 222B, which corresponds to the first source/drain of the transistor T2. The contact 251 (indicating the node P1) couples theinterconnection line 231 to the metal line PL1. In some embodiments, the retention voltage CVDD from theretention circuit 120 is received by the metal line PL1 in the retention mode. The retention voltage CVDD is supplied to the transistors T2 and T4 through the contacts 250-251 and interconnection lines 230-231 on condition that thememory device 200 operates in the retention mode. - In some embodiments, the
interconnection line 232 couples thefin section 224C, which corresponds to the second source/drain of the transistor T6. The contact 252 (indicating the node P8) further couples theinterconnection line 232 to a metal line PL6 arranged to operate as the bit lineBL . - In some embodiments, the
interconnection line 233 couples thefin section 221A, which corresponds to the second source/drain of the transistor T5. The contact 253 (indicating the node P7) couples theinterconnection line 233 to a metal line PL5 arranged to operate as the bit line BL. - In some embodiments, the
interconnection line 234 couples thefin sections fin section 223B corresponds to the second source/drain of the transistor T4. Thefin section 224B corresponds to the second source/drain of the transistor T3 and the first source/drain of the transistor T6. The contact 254 (indicating the node P5) couples theinterconnection line 234 to thegate electrode 211 corresponding to the gates of the transistors T1 and T2. - In some embodiments, the
interconnection line 235 couples thefin sections fin section 221B corresponds to the first source/drain of the transistor T5 and the second source/drain of the transistor T1. Thefin section 222A corresponds to the second source/drain of the transistor T2. The contact 255 (indicating the node P6) couples theinterconnection line 235 to thegate electrode 212 corresponding to the gates of the transistors T4 and T3. - In some embodiments, the
interconnection line 236 couples thefin sections fin sections interconnection line 236 to a metal line PL8. In some embodiments, the metal line PL8 is configured to receive the reference voltage VDD and provide the reference voltage VDD to the transistor T7. - In some embodiments, the
interconnection line 237 couples thefin sections fin sections fin section 225A corresponds to the first source/drain of the transistor T8. The contact 257 (indicating the node P12) couples theinterconnection line 237 to thegate electrode 215 corresponding to the gate of the transistors T8, in order to form the diode-connection transistor illustrated inFIG. 2 . - In some embodiments, the
interconnection line 238 couples thefin section 225B. Thefin section 225B corresponds to the second source/drain of the transistor T8. The contact 258 (indicating the node P1) couples theinterconnection line 238 to a metal line PL3. The retention voltage CVDD is generated at the metal line PL3 by the transistor T8 according to the reference voltage VDD on condition that thememory device 200 operates in the retention mode. - In some embodiments, the
contact 259 couples a metal line PL7. In some embodiments, a metal segment (not shown) are coupled to the metal line PL7 and configured to receive the control signal PM illustrated inFIG. 2 . -
FIG. 3C is a layout diagram of the memory device inFIG. 3B with additional interconnections coupled to the reference voltage VSS, in accordance with various embodiments of the present disclosure. For ease of understanding, with respect to the embodiments ofFIG. 2 , like elements inFIG. 3C are designated with the same reference numbers. - For ease of understanding, the numeral labels unrelated to the additional interconnections are not illustrated in
FIG. 3C . As illustratively shown inFIG. 3C , the additional interconnections include interconnection lines 271-272 and contacts 260-261. In some embodiments, the interconnection lines 271-272 and the contacts 260-261 are formed of conductive materials. The conductive materials are, for example, metals. Various conductive materials of the additional interconnections are within the contemplated scope of the present disclosure. - In some embodiments, the
interconnection line 271 couples thefin section 224A. Thefin section 224A corresponds to the first source/drain of the transistor T3. The contact 260 (indicating the node P4) couples theinterconnection line 271 to a metal line PL4, and the metal line PL4 is configured to receive the reference voltage VSS. - In some embodiments, the
interconnection line 272 couples thefin section 221C. Thefin section 221C corresponds to the first source/drain of the transistor T1. The contact 261 (indicating the node P3) couples theinterconnection line 272 to a metal line PL2, and the metal line PL2 is configured to receive the reference voltage VSS. - Reference is now made to
FIG. 3D .FIG. 3D is a layout diagram of the memory device inFIG. 3C with additional interconnections coupled to a word line WL, in accordance with various embodiments of the present disclosure. For ease of understanding, with respect to the embodiments ofFIG. 2 , like elements inFIG. 3D are designated with the same reference numbers. - For ease of understanding, the numeral labels unrelated to the additional interconnections are not illustrated in
FIG. 3D . As illustratively shown inFIG. 3D , the additional interconnections includeinterconnection lines 239 and contacts 262-265. In some embodiments, theinterconnection lines 239 and the contacts 262-265 are formed of conductive materials. The conductive materials are, for example, metals. Various conductive materials of the additional interconnections are within the contemplated scope of the present disclosure. - In some embodiments, the metal lines PL1-PL8 are formed within a metal one (M1) layer. In some embodiments, the word line WL and the
interconnection line 239 are formed within a metal two (M2) layer different from the metal one (M1) layer. In some embodiments, in a top-down sequence, the metal two (M2) layer is formed on the metal one (M1) layer. - In some embodiments, the contact 262 (indicating the node P10) couples the
gate electrode 214 corresponding to the gate of the transistor T6 to the word line WL. The contact 263 (indicating the node P9) couples thegate electrode 213 corresponding to the gate of the transistor T5 to the word line WL. In some embodiments, a metal segment (not shown) is coupled to the word line WL and configured to receive driving signals (not shown), in order to drive the word line WL. - In some embodiments, the contact 264 (indicating the node P1 or P2) couples the
interconnection line 239 to the metal line PL3, and the contact 265 (indicating the node P1 or P2) couples theinterconnection line 239 to the metal line PL1. Effectively, the metal lines PL1 and PL3 are coupled to each other through the contacts 264-265 and theinterconnection line 239. As described above, the retention voltage CVDD is generated at the metal line PL3 on condition that thememory device 200 operates in the retention mode. Since the metal lines PL1 and PL3 are coupled to each other, the retention voltage CVDD is thus transmitted from the metal line PL3 to the metal line PL1 on condition that thememory device 200 operates in the retention mode. Thus, the retention voltage CVDD is generated at the metal lines PL1 and PL3 on condition that thememory device 200 operates in the retention mode. - In some embodiments, the layout diagram in
FIG. 3D is formed through one or more processors. In some embodiments, thememory device 200 is formed through one or more semiconductor manufacturing equipments according to the layout diagram inFIG. 3D , but this disclosure is not limited thereto. - Reference is now made to
FIG. 4 .FIG. 4 is a flow chart of amethod 400 illustrating the fabrication process of thememory device 200 inFIG. 2 , in accordance with some embodiments of the present disclosure. For ease of understanding, themethod 400 is discussed in relation to thememory device 200 inFIG. 2 andFIGS. 3A-3D , but the present disclosure is not limited thereto. - In operation S402, the transistors T1-T6 are formed. In some embodiments, the
memory bit cell 110 includes the transistors T1-T6. - In operation S404, the transistors T7-T8 are formed. In some embodiments, the
retention circuit 120 includes the transistors T7-T8. In some embodiments, theretention circuit 120 is disposed at a side of thememory bit cell 110. - With reference to
FIG. 3A andFIG. 3B , the fin structures 221-227, the gate electrode 211-216, the interconnection line 230-238 and thecontacts - In some embodiments, the
retention circuit 120 and thememory bit cell 110 are formed by the same layout design rule. For example, thegate electrodes memory bit cell 110 are aligned with thegate electrode 216 of theretention circuit 120 in the direction S2. Correspondingly, thegate electrodes memory bit cell 110 are aligned with thegate electrode 215 of theretention circuit 120 in the direction S2. As a result, theretention circuit 120 and thememory bit cell 110 can be tracked well. In addition, the contacts 250-253 and 256, 258-259 are formed to couple thememory bit cell 110 or theretention circuit 120 to the metal line PL1-PL8. - In operation S406, the metal lines PL1-PL8 are formed. With reference to
FIG. 3B andFIG. 3C , in some embodiments, the metal lines PL1-PL8 extends along the direction S1, and the metal lines PL1-PL8 are coupled to at least one of the contacts 250-253, 256, and 258-259. In some embodiments, the metal line PL7 is formed to receive the control signal PM, and the metal line PL8 is formed to receive the reference voltage VDD. In some embodiments, the metal line PL3 is formed to transmit the retention voltage CVDD to the metal line PL1 through the interconnection line 239 (illustrated inFIG. 3D ). In some embodiments, the metal lines PL5 and PL6 are formed to operate as the pair of bit lines BL andBL . In some embodiments, the metal lines PL2 and PL4 are formed to receive the reference voltage VSS. - With reference to
FIG. 3D , in some embodiments, a length L2 of theretention circuit 120 is greater than a length L1 of thememory bit cell 110. For example, the length L2 of theretention circuit 120 is approximately 1.2-1.6 times greater than the length L1. In some embodiments, the length L1 of thememory bit cell 110 corresponds to a longer side of thememory bit cell 110, and a width of thememory bit cell 110 corresponds to a shorter side of thememory bit cell 110. Correspondingly, the length L2 of theretention circuit 120 corresponds to a longer side of theretention circuit 120, and a width of theretention circuit 120 corresponds to a shorter side of theretention circuit 120. In some embodiments, with reference toFIG. 3D , the length L1 of thememory bit cell 110 is approximately equal to a distance between the metal line PL4 and the metal line PL2. For example, the length L1 is equal to a distance between a central axis of the metal line PL4 and a central axis of the metal line PL2. In some embodiments, the length L2 of theretention circuit 120 is approximately equal to a distance between the metal line PL3 and the metal line PL7. For example, the length L2 is equal to a distance between a central axis of the metal line PL3 and a central axis of the metal line PL7. - As described above, in some embodiments, the
retention circuit 120 and thememory bit cell 110 are formed by the same layout design rule. Effectively, the formations of thememory bit cell 110 and theretention circuit 120 follow the same design rule manual (DRM), for example, a SRAM DRM. Thus, thememory bit cell 110 and theretention circuit 120 can be tracked well. For example, theretention circuit 120 and thememory bit cell 110 are disposed within a SRAM area. Thus, there is no a huge design margin between theretention circuit 120 and thememory bit cell 110, and theretention circuit 120 is adjacent to thememory bit cell 110. On condition that theretention circuit 120 is adjacent to thememory bit cell 110, the chip size of thememory array 100 can be reduced. In addition, on condition that theretention circuit 120 is adjacent to thememory bit cell 110, an electrical connection between theretention circuit 120 and thememory bit cell 110 can be shortened. Thus, the power consumption of thememory array 100 can be reduced. - In some embodiments, the metal line PL2 is disposed as a side B1 of the
memory bit cell 110, and the metal line PL3 is disposed as a side B2 of theretention circuit 120. In some embodiments, the metal line PL3 is disposed at a side of the metal line PL2, and the metal line PL3 is adjacent to the metal line PL2. In some embodiments, a distance D1 between the metal line PL3 and the metal line PL2 is less than the length L1 of thememory bit cell 110. In some embodiments, the distance D1 is a distance between a central axis of the metal line PL3 and a central axis of the metal line PL2. Effectively, theretention circuit 120 is disposed with the distance D1 from thememory bit cell 110, and the distance D1 is less than the length L1 of thememory bit cell 110. As described above, in some embodiments, the length L2 of theretention circuit 120 is greater than the length L1 of thememory bit cell 110, the distance D1 is less than the length L2 of theretention circuit 120. In some embodiments, the distance D1 is also less than a distance D3. In some embodiments, the distance D3 is a distance between a central axis of the metal line PL5 and a central axis of the metal line PL6. - In some embodiments, a distance D2 between the metal line PL1 and the metal line PL3 is approximately equal to the length L1 of the
memory bit cell 110. In some embodiments, the distance D2 is a distance between a central axis of the metal line PL1 and a central axis of the metal line PL3. In some embodiments, the distance D2 is less than the length L1 of thememory bit cell 110. In some embodiments, the metal line PL1 and the metal line PL3 are formed at two sides of the metal line PL2 respectively. Thus, the distance D2 is greater than the distance D1. - In operation S408, the word line WL and the
interconnection line 239 are formed. With respect toFIG. 3D , in some embodiments, the word line WL and theinterconnection line 239 extend along the direction S2. In some embodiments, the word line WL covers theinterconnection lines interconnection line 239 is coupled to the metal line PL1 and the metal line PL3 through the contacts 264-265. - The above description of the
method 400 includes exemplary operations, but the operations of themethod 400 are not necessarily performed in the order described. The order of the operations of themethod 400 disclosed in the present disclosure are able to be changed, or the operations are able to be executed simultaneously or partially simultaneously as appropriate, in accordance with the spirit and scope of some embodiments of the present disclosure. In addition, the operations may be added, replaced, changed order, and/or eliminated as appropriate, in accordance with the spirit and scope of some embodiments of the present disclosure. - In some embodiments, the
memory bit cell 110 and theretention circuit 120 can be designed with the same design rule and can be tracked well. Thus, the chip size of thememory array 100 can be reduced and the power consumption of thememory array 100 can be reduced. - In some embodiments, a device is disclosed that includes a memory bit cell and a retention circuit. The memory bit cell includes a first metal line and a second metal line. The first metal line is disposed in a first metal layer and configured to receive a retention voltage. The second metal line is disposed in the first metal layer and configured to receive a first reference voltage lower than the retention voltage. The retention circuit includes a third metal line. The third metal line is disposed in the first metal layer and configured to transmit the retention voltage to the first metal line. A distance between the second metal line and the third metal line is less than a length of the memory bit cell.
- Also disclosed is a device that includes a memory bit cell and a retention circuit. The memory bit cell includes a first metal line and a second metal line. The first metal line extends along a first direction and is configured to receive a retention voltage. The second metal line extends along the first direction and configured to receive a first reference voltage lower than the retention voltage. The retention circuit includes a third metal line. The third metal line disposed at a side of the second metal line and configured to transmit the retention voltage to the first metal line. A distance, along a second direction, between a side of the memory bit cell and a side of the retention circuit is less than a length of the retention circuit.
- Also disclosed is a method that includes the operations below. A memory bit cell is formed. A retention circuit is formed with a distance from the memory bit cell. An interconnection line is formed to couple the retention circuit to the memory bit cell. The distance is between a side of the retention circuit and a side of the memory bit cell, and the distance is less than a length of the memory bit cell.
- The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
Claims (23)
1. A device, comprising:
a memory bit cell, comprising:
a first metal line disposed in a first metal layer and configured to receive a retention voltage; and
a second metal line disposed in the first metal layer and configured to receive a first reference voltage lower than the retention voltage; and
a retention circuit, comprising:
a third metal line disposed in the first metal layer and configured to transmit the retention voltage to the first metal line,
wherein a distance between the second metal line and the third metal line is less than a length of the memory bit cell;
wherein the memory bit cell further comprises:
a fourth metal line disposed in the first metal layer and configured to receive the first reference voltage,
wherein the length of the memory bit cell is approximately equal to a distance between the second metal line and the fourth metal line.
2. The device of claim 1 , wherein a distance between the first metal line and the third metal line is approximately equal to or less than the length of the memory bit cell.
3. The device of claim 1 , wherein the distance between the second metal line and the third metal line is less than the distance between the first metal line and the third metal line.
4. The device of claim 1 , wherein a length of the retention circuit is greater than the length of the memory bit cell.
5. (canceled)
6. The device of claim 1 , further comprising:
a fifth metal line disposed in the first metal layer and corresponding to a first bit line; and
a sixth metal line disposed in the first metal layer and corresponding to a second bit line,
wherein the distance between the second metal line and the third metal line is less than a distance between the fifth metal line and the sixth metal line.
7. The device of claim 1 , wherein the retention circuit further comprises:
a seventh metal line disposed in the first metal layer and configured to receive a control signal; and
an eighth metal line disposed in the first metal layer and configured to receive a second reference voltage higher than the retention voltage,
wherein the retention voltage is generated based on the control signal and the second reference voltage.
8. The device of claim 7 , wherein the length of the retention circuit is approximately equal to a distance between the seventh metal line and the third metal line.
9. The device of claim 1 , further comprising:
an interconnection line disposed in a second metal layer, in order to couple the third metal line to the first metal line.
10. The device of claim 9 , wherein the first metal line, the second metal line and the third metal line extend along a first direction, the interconnection line extends along a second direction, the first direction is different from the second direction, and the second direction is perpendicular to the first direction.
11. The device of claim 10 , further comprising:
a word line disposed in the second metal layer and coupled to the memory bit cell, wherein the word line extends along the second direction.
12. A device, comprising:
a memory bit cell, comprising:
a first metal line extending along a first direction and configured to receive a retention voltage; and
a second metal line extending along the first direction and configured to receive a first reference voltage lower than the retention voltage; and
a retention circuit, comprising:
a third metal line disposed at a side of the second metal line and configured to transmit the retention voltage to the first metal line,
wherein a distance, along a second direction, between a side of the memory bit cell and a side of the retention circuit is less than a length of the retention circuit;
wherein the memory bit cell further comprises:
a fourth metal line extending along the first direction and configured to receive the first reference voltage,
wherein the length of the memory bit cell is approximately equal to a distance between the second metal line and the fourth metal line.
13. The device of claim 12 , wherein the memory bit cell further comprises a first gate electrode and a second gate electrode, the retention circuit comprises a third gate electrode and a fourth gate electrode, the first gate electrode and the third gate electrode are aligned in the second direction, and the second gate electrode and the fourth gate electrode are aligned in the second direction.
14. (canceled)
15. The device of claim 12 , further comprising:
a fifth metal line extending along the first direction and corresponding to a first bit line; and
a sixth metal line extending along the first direction and corresponding to a second bit line,
wherein a distance between the second metal line and the third metal line is less than a distance between the fifth metal line and the sixth metal line.
16. The device of claim 12 , wherein the retention circuit further comprises:
a seventh metal line extending along the first direction and configured to receive a control signal; and
an eighth metal line extending along the first direction and configured to receive a second reference voltage higher than the retention voltage,
wherein the retention voltage is generated based on the control signal and the second reference voltage.
17. The device of claim 12 , wherein a distance, along the second direction, between the second metal line and the third metal line is less than a length of the memory bit cell.
18. A method, comprising:
forming a memory bit cell;
forming a retention circuit with a distance from the memory bit cell; and
forming an interconnection line to couple the retention circuit to the memory bit cell,
wherein the distance is between a side of the retention circuit and a side of the memory bit cell, and the distance is less than a length of the memory bit cell;
wherein forming the retention circuit comprises:
forming a first metal line in a metal layer, in order to transmit a retention voltage to the memory bit cell,
wherein the memory bit cell operates based on a first reference voltage and a second reference voltage, the retention voltage is higher than the first reference voltage and is lower than the second reference voltage, and a distance between the first metal line and the side of the memory bit cell is less than the length of the memory bit cell.
19. The method of claim 18 , further comprising:
forming a pair of metal lines corresponding to a pair of bit lines,
wherein the distance between the side of the retention circuit and the side of the memory bit cell is less than a distance between the pair of metal lines.
20. (canceled)
21. The device of claim 1 , wherein the retention circuit further comprises:
a seventh metal line disposed in the first metal layer;
wherein the length of the retention circuit is approximately equal to a distance between the seventh metal line and the third metal line.
22. The device of claim 1 , further comprising:
a word line disposed in a second metal layer and coupled to the memory bit cell.
23. The device of claim 12 , further comprising:
an interconnection line coupling the third metal line to the first metal line.
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